200931008 九、發明說明： 【發明所屬之技術領域】 本發明是關於一種用來檢查設置於電子元件封裝用軟 片承載帶之電路圖形的裝置。 【先前技術】 關於電子元件封裝用軟片封裝膠帶，一般所知道的有 ❹ TAB(Tape Automated Bonding)膠帶、T-BGA(Tape Ball Grid Array)膠帶、ASIC(applicati〇n Specific Integration Circuit)膠帶、c〇F(Chip 〇n Film)膠帶等。電子元件封裝 用軟片封襞膠帶由透明軟片、貼附於此軟.片之電子元件、 為了相互連接這些電子元件而印刷至此軟片上之導體圖形 等所組成。軟片材料需具有耐熱性，一般使用耐熱性優良 之聚乙醯胺。藉由電子元件及軟片上之導體圖开多，構成電 路圖形。關於用來檢查電子元件封裝用軟片封裝膠帶上之 電路圖形的圖形檢查裝1，—般知道的有記載於專利文獻 1(特開2004-28597)中之發明。 、此種圖形檢查裝置將照明光照射在欲檢查之膠帶上， 、攝I裝置拍攝電路圖％，取得電路圖形的影像，比較該 =路圖形影像和基準㈣，檢查電路圖料是否有缺陷， 藉此’判斷電路圖料否良好。關於電路圖形中之缺陷， 包含電路圖形線路之上面那側其中—部分所具有的缺陷 陷二斷：式凹陷V、該線路部分比規範值小之缺 月乍化」）、该線路中和軟片之密合面之寬度因規 2l31-=l〇〇94-pF;Ahdciub 200931008 範值而變寬之缺陷（所謂「底部擴大化」）等。 第4圖為概念圖，表示根據膠帶之反射光取得入射照明 影像的圖形檢查裝置（A)及根據穿透膠帶之光線（穿透光） 取得穿透照明影像的圖形檢查裝置（B )的重要部位。第4 ( a ) 圊之圖形檢查裝置一方面藉由照明裝置4照明印刷有導體 圖形Dl，D2的膠帶1〇’ 一方面藉由相機5a接收膠帶丨〇所產 生之反射光，再根據反射光拍攝膠帶1〇，藉此，取得膠帶 ❹ 1 〇之入射照明影像’並輸出用來表示入射照明影像之入射 照明影像sfl號5 01。第4 ( B )圖之圖形檢查裝置在藉由，時明裝 置4照明印刷有導體圖形Dl, D2之膠帶10後，藉由相機5b 接收透過膠帶10之光線（穿透光）’根據穿透光拍攝膠帶 10，藉此，取得膠帶1 〇之穿透照明影像’並輸出用來表示 穿透照明影像之穿透照明影像訊號502。導體圖形D2上有所 謂底部擴大化R及斷層式凹陷S的缺陷。 第5圖說明藉由第4(A)圖或第4(B)圖之圖形檢查裝置 Q 檢查被檢查圖形的方法。第5(A)圖為表示印刷有導體圖形 D1及D2之膠帶1〇之部分的平面圖，第5(B)圖為第5(A)圖之 AA線箭頭方向剖面圖，第5(c)圖為表示入射照明影像訊號 501的圖’第5(D)圖為表示穿透照明影像訊號502的圖。導 體囷形D1之寬度之規格值為W1，導體圖形D2之寬度之規格 值為W3，導體圖形D1和D2之間隔之規格值為W2。導體圖形 D2具有底部擴大化r之缺陷’所以，aa線中之導體圖形D1 和D2之間隔縮小為w4。又，從導體圖形D2之左側至斷層式 凹陷S之缺陷的深入端之寬度為w5。箭頭200表示膠帶10之 2131-10094-PF；Ahddub 6 200931008 搬送方向。第5(C)圖中之3~及s分別表示與底部擴大化r及斷 層式凹陷s對應的入射照明影像訊號501的波形的變動。 若藉由第4(A)圖之構造之圖形檢查裝置檢查第圖 及第5(B)圖所示之膠帶10，可從相機。得到第5(c)圖之入 射照明影像訊號50卜在入射照明影像中，可藉由在表現明 暗之影像訊號範圍之稍微明亮之區域設定臨限值（例如第 5(C)圖所示之Thl )，較為輕易地檢測出们和叽的差。於是， ❹針對斷層式凹陷S等之導體圖形上面那側之缺陷，可藉由取 得入射照明影像，較為輕易地檢測出缺陷的位置。另一方 面’如㈤導體圖形之底部擴大化{^，帛來表^見明暗之影像訊 號之較暗部分所存在之缺陷，即使將臨限值設定在較暗之 區域（例如第5(C)圖所示之Th2)，變化點會混入作為基 材之軟片10a之反射率之離中趨勢，結果難以檢測出以和 W4’的差。於是，底部那側所存在之缺陷有難以僅根據入 射照明影像來辨識的傾向。 G 若藉由第4(B)圖之圖形檢查裝置檢查第5(A)圖及第 5(B)圖所示之膠帶10，可從相機㉛得到第5(d)圖之穿透照 明影像訊號502。導體圖形為金屬且為不透明，所以，穿過 照明影像上明白地顯現導體圖形D1，D2密合於軟片i〇a之 那面的輪廓。因此，如第5⑻圖所示，藉由將穿透照明影 像訊號5G2拿來和臨限值Th3比較，可測定導體圖形 的間隔W2，藉由比較们和料，可知W2>W4，所以，導體圖形 D1和D2的間隔縮小，可輕易在導體圖形D2上判斷底部擴大 化R的存在。 ^ 2131-10094-PF;Ahdaub 7 200931008 如上所述，在使用入射照明影像的檢查中，有難以檢 測導體圖形中$ @ 之底。卩擴大化的缺點，不過，藉由在使用入 :、’、月t/像的檢查之外加入使用穿透照明影像的檢查，可 提门導體圖形中之底部擴大化之檢測機率。和底部擴大化 相同’導體圖形之寬度小於規格的「窄化」缺陷可藉由取 2導體圖形之穿透照明影像並檢查導體圖形和軟片之間的 密口面的輪廝，輕鬆確實地檢查出來。如此，藉由取得入 ©射照明影像和穿透照明影像這兩種影像並活用兩者的特 徵，可提高斷層式凹陷、窄化、底部擴大化等被檢查圖形 之缺陷的檢測機率。 專利文獻1揭示-種圖形檢查裝置，其為了進行一個膠 帶的檢查包括從上方照明勝帶之入射光照明裝置以及從下 方照明膠帶之穿透光照明裝置，並利用入射照明影像和穿 透照明影像這兩種影像。 第6圖為概念圖，其表示第5圖所示且專利文獻丨所記载 ❹之％知圖形檢查裝置的構造。此圖形檢查裝置包括控制裝 置（21)、由線感測器相機所組成之攝影裝置（8)、入射照明 裝置(6)、膠帶拉開機構(22)、穿透照明裝置⑺、膠帶搬 送機構（23)及不良品打孔機構（24)。控制裝置（21)針對攝 影裝置（8)、入射照明裝置（6)、膠帶拉開機構（22)、穿透 照明裝置（7.)、膠帶搬送機構（23)及不良品打孔機構（24) 等，以檢查動作之既定時序傳送控制訊號，對它們進行控 制：作為圖形檢查之基準的母帶（25)事先輸入至控制裝置 (21)。母帶（25)包含藉由入射照明所得到之影像（入射照明 2131-10094-PF;Ahddub 8 200931008 影像）之基準圖形和藉由穿透照明所得到之影像（穿透照明 影像）之基準圖形這兩種基準圖形。 使用第6圖之圖形檢查裝置所進行之檢查以下面的步 驟來進行。首先，由控制部（21)驅動膠帶搬送機構（23)， 膠帶（1)被搬送’膠帶（1)中之被檢查圖形停止在攝影位 置。接著’由膠帶拉開機構（22)之夾持用上部元件（16)、BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for inspecting a circuit pattern provided on a tape carrier for an electronic component package. [Prior Art] As for the film packaging tape for electronic component packaging, TAB (Tape Automated Bonding) tape, T-BGA (Tape Ball Grid Array) tape, ASIC (applicati〇n Specific Integration Circuit) tape, and c are generally known. 〇F (Chip 〇n Film) tape, etc. The electronic component packaging tape is composed of a transparent film, an electronic component attached to the flexible film, a conductor pattern printed on the film for connecting the electronic components, and the like. The film material is required to have heat resistance, and polyacetamide having excellent heat resistance is generally used. The circuit pattern is formed by the conductor pattern on the electronic component and the film. Regarding the pattern inspection apparatus 1 for inspecting the circuit pattern on the tape packaging tape for electronic component packaging, the invention described in Patent Document 1 (Japanese Patent Laid-Open No. 2004-28597) is generally known. The graphic inspection device irradiates the illumination light on the tape to be inspected, captures the circuit diagram % by the I device, obtains the image of the circuit pattern, compares the image image and the reference (4), and checks whether the circuit pattern is defective, thereby 'Judge whether the circuit diagram is good. Regarding the defect in the circuit pattern, the defect on the upper side including the circuit pattern line is partially broken: the recess V, the portion of the line is smaller than the specification value, and the line is neutralized. The width of the adhesion surface is widened by the specification of 2131-=l〇〇94-pF; Ahdciub 200931008 (the so-called "bottom enlargement"). Fig. 4 is a conceptual diagram showing the importance of the pattern inspection device (A) for obtaining an incident illumination image based on the reflected light of the tape and the pattern inspection device (B) for obtaining an illumination image according to the light transmitted through the tape (penetrating light). Part. The pattern inspection device of the fourth (a) 一方面 illuminates the tape 1 〇 ' printed with the conductor patterns D1, D2 by the illumination device 4 on the one hand, and receives the reflected light generated by the tape 藉 by the camera 5a, and then according to the reflected light. The tape 1 is photographed, whereby the incident illumination image of the tape ❹ 1 取得 is obtained and the incident illumination image sfl number 5 01 indicating the incident illumination image is output. The pattern inspection device of Fig. 4(B) is configured to illuminate the tape 10 having the conductor patterns D1, D2 printed thereon, and then receive the light transmitted through the tape 10 (penetrating light) by the camera 5b. The tape 10 is photographed by light, whereby the penetrating illumination image of the tape 1 is obtained and a penetrating illumination image signal 502 for reflecting the illumination image is output. The conductor pattern D2 has the defects of the bottom enlarged R and the faulted recess S. Fig. 5 is a view showing a method of inspecting a pattern to be inspected by the pattern inspection device Q of Fig. 4(A) or Fig. 4(B). Fig. 5(A) is a plan view showing a portion of the tape 1A on which the conductor patterns D1 and D2 are printed, and Fig. 5(B) is a cross-sectional view taken along the line AA of the fifth line (A), and Fig. 5(c) The figure is a diagram showing the incident illumination image signal 501. FIG. 5(D) is a diagram showing the penetration of the illumination image signal 502. The specification value of the width of the conductor dome D1 is W1, the specification value of the width of the conductor pattern D2 is W3, and the specification value of the interval between the conductor patterns D1 and D2 is W2. The conductor pattern D2 has a defect of the bottom enlargement r. Therefore, the interval between the conductor patterns D1 and D2 in the aa line is reduced to w4. Further, the width of the deep end of the defect from the left side of the conductor pattern D2 to the faulty recess S is w5. Arrow 200 indicates 2131-10094-PF of tape 10; Ahddub 6 200931008 conveyance direction. 3 to 5 in Fig. 5(C) show fluctuations in the waveform of the incident illumination image signal 501 corresponding to the bottom enlargement r and the tomographic recess s, respectively. If the tape 10 shown in Fig. 5 and Fig. 5(B) is inspected by the pattern inspection device constructed as shown in Fig. 4(A), it can be taken from the camera. Obtaining the incident illumination image signal 50 of Figure 5(c), in the incident illumination image, the threshold can be set by a slightly brighter range of the image signal representing the brightness (for example, as shown in Figure 5(C) Thl), it is easier to detect the difference between them and 叽. Therefore, for the defect on the side of the conductor pattern of the fault-type recess S or the like, the position of the defect can be easily detected by taking the incident illumination image. On the other hand, if the bottom of the conductor pattern is enlarged (^), the defects in the darker part of the image signal are displayed, even if the threshold is set in a darker area (for example, 5th (C) In the case of Th2) shown in the figure, the change point is mixed with the intrinsic tendency of the reflectance of the film 10a as the substrate, and as a result, it is difficult to detect the difference from W4'. Thus, the defect existing on the bottom side has a tendency to be difficult to recognize only based on the incident illumination image. G If the tape 10 shown in Figures 5(A) and 5(B) is inspected by the pattern inspection device of Figure 4(B), the penetrating illumination image of Figure 5(d) can be obtained from the camera 31. Signal 502. Since the conductor pattern is metallic and opaque, the conductor pattern D1 is clearly seen through the illumination image, and D2 is adhered to the contour of the side of the film i〇a. Therefore, as shown in Fig. 5(8), by comparing the transmitted illumination image signal 5G2 with the threshold value Th3, the interval W2 of the conductor pattern can be measured, and by comparing the materials, it is known that W2 > W4, therefore, the conductor The interval between the patterns D1 and D2 is reduced, and the presence of the bottom enlargement R can be easily judged on the conductor pattern D2. ^ 2131-10094-PF; Ahdaub 7 200931008 As mentioned above, in the inspection using incident illumination images, it is difficult to detect the bottom of $ @ in the conductor pattern. The disadvantage of the enlargement is that the detection probability of the bottom enlargement in the door conductor pattern can be increased by adding a check using the penetrating illumination image in addition to the inspection of the in:, ', and month t/images. The same as the bottom enlargement. The "narrowing" defect in which the width of the conductor pattern is smaller than the specification can be easily and reliably checked by taking the 2 conductor pattern through the illumination image and checking the rim of the dense surface between the conductor pattern and the film. come out. By taking in both the image of the illuminating image and the image of the illuminating image, the detection probability of the defect of the pattern to be inspected such as the sag, the narrowing, and the bottoming can be improved. Patent Document 1 discloses a pattern inspection device that performs inspection of an adhesive tape including an incident light illumination device that illuminates a win band from above and a penetrating light illumination device that illuminates a tape from below, and uses an incident illumination image and a penetrating illumination image. These two images. Fig. 6 is a conceptual diagram showing the structure of a % known pattern inspection apparatus shown in Fig. 5 and described in the patent document. The graphic inspection device comprises a control device (21), a photographic device (8) composed of a line sensor camera, an incident illuminating device (6), a tape pulling mechanism (22), a penetrating illuminating device (7), and a tape conveying mechanism. (23) and defective product punching mechanism (24). The control device (21) is directed to the photographing device (8), the incident lighting device (6), the tape pulling mechanism (22), the penetrating lighting device (7.), the tape conveying mechanism (23), and the defective product punching mechanism (24). And so on, the control signals are transmitted at the predetermined timing of the inspection operation, and they are controlled: the master tape (25) as a reference for the pattern inspection is previously input to the control device (21). The master tape (25) includes a reference pattern of an image obtained by incident illumination (incident illumination 2131-10094-PF; Ahddub 8 200931008 image) and a reference pattern of an image obtained by penetrating illumination (through illumination image) These two benchmark graphics. The inspection performed using the pattern inspection apparatus of Fig. 6 is carried out in the following steps. First, the tape transport mechanism (23) is driven by the control unit (21), and the tape (1) is conveyed. The inspected pattern in the tape (1) is stopped at the photographing position. Next, the upper member (16) for clamping by the tape pulling mechanism (22),
夾持用下部元件（17)使膠帶（1)之周圍在受到夾持的狀態 下於膠帶（1)之寬度方向產生張力。 接著，由入射照明裝置（6)對膠帶（1)之被檢查圖形照 射照明光。從被檢查圖形反射回來之反射光使攝影裝置（8) 之CCD線感測器81受光。接著，在進行入射照明裝置（6)之 照明的狀態下，固定入射照明裝置（6)及攝影裝置（8)之框 架沿著膠帶⑴之寬度方向移動。最後，人射照明裝置⑻ 和攝影裝置⑻-起沿著膠帶⑴之寬度方向移動，從膠帶 (1)之其中—邊八掃描至另—邊B，錢影裝置⑻上，拍攝 從膠帶⑴之-邊A到3 -邊_間的被檢查圖形。所拍攝之 被檢查圖形之資訊對應膠帶之寬度方向之位置’儲存於控 制部（21)。 當使用攝影裝置（8)所進行之攝影到達膠帶⑴之其中 -邊B時，停止入射照明裝置6之照明，由穿透照明裝置⑺ :膠帶⑴上之被檢查圖形照射照明光，穿透被檢查圖形之 穿透光使攝影裝置⑻之⑽線感測器(81)受光。接著，在 :仃穿透照明裝置之照明的狀態下，框架沿著膠帶⑴之寬 向移動。最後’穿透照明装置⑺和攝影裝置⑻:起 2131-l〇〇94-pF;Ahddub . 9 200931008 沿著膠帶（1)之寬度方向移動，從膠帶（1)之其中一邊B掃描 至另一邊A，在攝影裝置（8)上，拍攝從膠帶（1)之一邊B到 另一邊A期間的被檢查圖形。所拍攝之被檢查圖形之資訊和 先前相同’對應膠帶之寬度方向之位置，儲存於控制部 (21)。當使用攝影裝置（8)所進行之攝影到達膠帶（1)之其 中-邊A時，停止穿透照明裝置⑺之照明，再次驅動膠帶 搬送機構（23)，#帶⑴被搬送，新的被檢查圖形停止在既 定之攝影位置’以此方式受到控制。 如上所述’藉由攝影裝置（8)之往返移動，得到膠帶（1) 上之被檢查圖形藉由反射光所產生之資訊（人射照明影像） 和藉由穿透光所產生之資訊(穿透照明影像），這兩種資訊 在控制裝置（21)内’拿來和所儲存之各個母帶比較， 判斷是否良好。 【發明内容】 ❹ 【發明所欲解決的課題】 參照第6圖來說明之專利文獻1中所記载之習知圖形檢 查裝置採用藉由使用入射照明裝置⑻照明膠帶⑴來得到 入射照明影像的人射光攝影步驟和藉由使用穿透昭明裝置 ⑺㈣㈣⑴㈣到穿透照”像的穿透光攝影步驟這 兩個步驟，藉此，檢查—個^ ^ ^ ^ ^ ^ ^ ^ 稅置圖形在專利文獻1中所 習知圖形檢查裝置中，當開啟人射照明裝置⑻及穿 透舨明裝置（7 )這兩個照明裝置 ， 装置時入射先及穿透光相互干 ^入射^㈣像及穿透照明影像皆變得不鮮明，無法找 10 2131-l〇〇94-PF；Ahddub 200931008 出被檢查圖形之缺陷，所以’只好交互開啟入射照明裝置 (6)及穿透照明裝置（7)，採用入射光攝影步驟及穿透光影 步驟這兩個步驟來進行一個被檢查圖形的檢查。如此，在 專利文獻1中所記載之習知圖形檢查裝置中，就有難以提高 圖形檢查之速度這個有待解決的課題。 若要改善第6圖之習知方式來提高圖形檢查裝置之速 度，可使用第7圖之構造圖所示之圖形檢查裝置。第7圖之 e 圖形檢查裝置由控制部11(相當於第6圖之控制裝置 (21))、入射光檢查部31、穿透光檢查部32、打孔部8〇(相 當於第6圖之不良品打孔機構（24))、退捲部21、捲起部23 及氣球221，222所組成。入射光檢查部31相當於第6圖中之 入射照明裝置（6)及攝影裝置（8) ^穿透光檢查部32相當於 第6圖中之穿透照明裝置（7)及攝影.裝置（8)。第6圖之圖形 檢查裝置包括由入射照明裝置（6)、穿透照明裝置（7)及攝 影裝置（8)所組成的一個檢查部，相對於此，第7圖之圖形 φ 檢查裝置包括入射光檢查部31及穿透光檢查部32這兩個檢 查部。退捲部21、捲起部23及氣球221，222相當於第6圖中 之膠帶搬送機構（23)。 控制部11包括作為伺服器之控制部本體丨丨&、顯示器 1113及鍵盤11(：。顯示器111；)受到控制部本體11&控制。鍵盤 1 lc為對控制部本體1 la輸入指令、資料等的終端裝置，例 如，顯示器lib上所顯示之資料的選擇藉由鍵盤uc的操 作’對控制部本體11 a傳達指令。 退捲部21包括安褽於軸21a上之退捲捲軸l〇a及張力滾 2131-10094-PF;Ahddub 11 = 200931008 輪25a。入射光檢查部31包括相機5a、入射照明裝置6、平 台31a、自由鏈輪25b，25c。穿透光檢查部32包括相機5b、 穿透照明裝置7、平台32a、自由鏈輪25g。打孔部80包括3 個打孔器80a及自由鏈輪25e。捲起部23包括安裝於軸2 3a 上之捲起捲軸l〇b及張力滾輪25f。氣球221包括8個感測器 22a，藉由感測器22a檢測出膠帶1 〇下端的位置，在膠帶1 〇 平常保持適當長度之多餘部分的狀態下，控制入射光檢查 φ 部31之膠帶搬送機構。氣球222包括8個感測器22a，藉由感 測器2 2 a檢測出膠帶1 〇下端的位置，在膠帶丨〇平常保持適當 長度之多餘部分的狀態下，控制穿透光檢查部32之膠帶搬 送機構。在圖中，膠帶10代表從退捲捲軸1〇3退捲並被捲起 捲軸10b捲起的膠帶。 第7圖之圖形檢查裝置以串接方式將入射光檢查部31 及穿透光檢查部32配置於膠帶1〇之搬送方向，所以，可在 以入射光照射一個被檢查圖形來取得入射照明影像的期 〇 間，同時以穿透照明裝置7照明另一個被檢查圖形，取得穿 透照明影像。於是，相較於第6圖所示之專利文獻丨之圖形 檢查裝置’可以兩倍的速度檢查被檢查圖形。不過，第7 圖之圖形檢查裝置包括入射光檢查部31和穿透光檢查部 32，所以，如第7圖所例示之寬度尺寸，相較於第6圖之圖 形檢查裝置，僅在膠帶10之搬送方向加長了 —個檢查部及 一個氣球的長度（在第7圖之範例中為1 690mm)。為同時藉由 入射光及穿透光進行檢芦而以串接方式配置兩個檢查部的 第7圖之圖形檢查裝置需要較長之設置場所以及較為寬廣 2131-10094-PF;Ahddub 12 200931008 之設置面積。又’入射光檢查部31及穿透光檢查部32分別 需要用來以高精度控制膠帶搬送的機構，所以，第7圖之圖 形檢查裝置的製造費用變得昂貴。因此，在第7圖之裝置有 δ又置面積及製造費用這種有待解決的問題。 因此，本發明之目的在提供一種圖形檢查裝置，其可 利用被檢查圖形之入射照明影像及穿透照明影像這兩種影 像’高速進行該被檢查圖形之檢查，χ，可僅根據入射照 0曰月影像或穿透照明影像中任一者的影像使用與進行被檢查 圖形之檢查的圖形檢查裝置相同的面積來設置，而且製造 費用低廉。 [專利文獻1]特開2004-28597 [專利文獻2]特開平1 1-296657 【用以解決課題的手段】 為了解決上述之課題，本發明提供下面的方法。The lower member for holding (17) causes tension in the width direction of the tape (1) in a state where the tape (1) is sandwiched. Next, the illumination light is illuminated by the incident illumination device (6) on the inspected pattern of the tape (1). The reflected light reflected from the inspected pattern causes the CCD line sensor 81 of the photographing device (8) to receive light. Next, in a state where the illumination of the incident illumination device (6) is performed, the frame of the fixed incident illumination device (6) and the imaging device (8) moves in the width direction of the tape (1). Finally, the human illuminating device (8) and the photographic device (8) move along the width direction of the tape (1), from the side of the tape (1) to the other side B, the money shadow device (8), and the film is taken from the tape (1). - Checked graphics from side A to 3 - edge _. The information of the image to be inspected corresponding to the width direction of the tape is stored in the control unit (21). When the photographing by the photographing device (8) reaches the side B of the tape (1), the illumination of the incident lighting device 6 is stopped, and the illumination light is illuminated by the inspected pattern on the penetrating illumination device (7): the tape (1), and the penetration is Checking the transmitted light of the pattern causes the (10) line sensor (81) of the photographing device (8) to receive light. Next, the frame is moved along the width of the tape (1) while the 仃 is penetrating the illumination of the illuminating device. Finally 'through the lighting device (7) and the photographic device (8): from 2131-l〇〇94-pF; Ahddub. 9 200931008 Move along the width of the tape (1), from one side of the tape (1) B to the other side A. On the photographing device (8), the inspected pattern from one side B of the tape (1) to the other side A is taken. The information of the photographed image to be inspected is stored in the control unit (21) in the same direction as the previous direction of the corresponding tape. When the photographing by the photographing device (8) reaches the side A of the tape (1), the illumination of the illumination device (7) is stopped, the tape transport mechanism (23) is driven again, and the #带(1) is transported, and the new one is transported. Check that the graphic stops at the given shooting position' is controlled in this way. As described above, 'by the reciprocating movement of the photographing device (8), the information generated by the reflected light on the mask (1) (the human shot illumination image) and the information generated by the transmitted light are obtained ( Through the illumination image), the two kinds of information are compared in the control device (21) and compared with the stored master tapes to determine whether it is good. [Problem to be Solved by the Invention] The conventional pattern inspection device described in Patent Document 1 described with reference to Fig. 6 employs an illumination illuminating tape (1) using an incident illuminating device (8) to obtain an incident illuminating image. The human-lighting photography step and the two steps of the penetrating light photography step by penetrating the Zhaoming device (7) (4) (4) (1) (4) to the penetrating image, thereby checking the - ^ ^ ^ ^ ^ ^ ^ ^ tax pattern in the patent literature In the conventional graphic inspection device of the first embodiment, when the two illumination devices, the human illumination device (8) and the penetrating device (7), are turned on, the device is incident on the first and the transmitted light, and the image is incident on the image. The lighting images have become unclear, unable to find 10 2131-l〇〇94-PF; Ahddub 200931008 out of the defects of the inspected graphics, so 'only have to interactively turn on the incident lighting device (6) and penetrate the lighting device (7), using incidence In the conventional steps of the conventional image inspection apparatus described in Patent Document 1, it is difficult to improve the pattern inspection in the two steps of the light-imaging step and the light-shadowing step. The problem of speed is to be solved. To improve the conventional method of Fig. 6 to improve the speed of the graphic inspection device, the graphic inspection device shown in the structural diagram of Fig. 7 can be used. The image inspection device of Fig. 7 is controlled by Part 11 (corresponding to the control device (21) of Fig. 6), the incident light inspection unit 31, the penetrating light inspection unit 32, and the punching portion 8 (corresponding to the defective product punching mechanism (24) of Fig. 6) The unwinding unit 21, the winding unit 23, and the balloons 221 and 222. The incident light inspection unit 31 corresponds to the incident illumination device (6) and the imaging device (8) in the sixth diagram. The illuminating device (7) and the photographic device (8) in Fig. 6. The graphic inspection device of Fig. 6 includes an incident illuminating device (6), a penetrating illuminating device (7), and a photographic device (8) In contrast, the pattern φ inspection device of Fig. 7 includes two inspection portions, the incident light inspection portion 31 and the penetration light inspection portion 32. The unwinding portion 21, the winding portion 23, and the balloon 221 222 corresponds to the tape transport mechanism (23) in Fig. 6. The control unit 11 includes a control unit as a server.丨丨&, display 1113, and keyboard 11 (: display 111;) are controlled by the control unit body 11& keyboard 1 lc is a terminal device that inputs commands, materials, and the like to the control unit body 1 la, for example, on the display lib The selection of the displayed information is transmitted to the control unit body 11a by the operation of the keyboard uc. The unwinding portion 21 includes an unwinding reel l〇a and a tension roller 2131-10094-PF mounted on the shaft 21a; Ahddub 11 = 200931008 Wheel 25a. The incident light inspection unit 31 includes a camera 5a, an incident illumination device 6, a stage 31a, and free sprocket wheels 25b, 25c. The penetrating light inspection unit 32 includes a camera 5b, a penetrating illumination device 7, a stage 32a, and a free sprocket 25g. The punching portion 80 includes three punchers 80a and a free sprocket 25e. The winding portion 23 includes a winding reel l〇b and a tension roller 25f attached to the shaft 2 3a. The balloon 221 includes eight sensors 22a, and the position of the lower end of the tape 1 is detected by the sensor 22a, and the tape transport of the incident light inspection φ portion 31 is controlled in a state where the tape 1 is normally kept at an appropriate portion of an appropriate length. mechanism. The balloon 222 includes eight sensors 22a, and the position of the lower end of the tape 1 is detected by the sensor 2 2 a, and the light penetrating portion 32 is controlled in a state where the tape is normally kept at an appropriate portion of an appropriate length. Tape transport mechanism. In the figure, the tape 10 represents an adhesive tape which is unwound from the unwinding reel 1〇3 and rolled up by the take-up reel 10b. Since the pattern inspection device of Fig. 7 arranges the incident light inspection unit 31 and the penetrating light inspection unit 32 in the transport direction of the tape 1 in a tandem manner, it is possible to obtain an incident illumination image by irradiating one inspection pattern with incident light. During the period of time, the other illuminated pattern is illuminated by the penetrating illumination device 7 to obtain a penetrating illumination image. Thus, the inspected pattern can be inspected twice as fast as the graphic inspection apparatus of the patent document shown in Fig. 6. However, the pattern inspection device of Fig. 7 includes the incident light inspection portion 31 and the transmitted light inspection portion 32. Therefore, the width dimension as illustrated in Fig. 7 is compared to the pattern inspection device of Fig. 6 only in the tape 10 The direction of transport is lengthened—the length of an inspection unit and a balloon (1 690 mm in the example in Figure 7). The pattern inspection device of Fig. 7 in which the two inspection portions are arranged in series by the incident light and the transmitted light at the same time requires a long installation place and a relatively wide 2131-10094-PF; Ahddub 12 200931008 Set the area. Further, since the incident light inspection unit 31 and the penetration light inspection unit 32 each require a mechanism for controlling the conveyance of the tape with high precision, the manufacturing cost of the pattern inspection apparatus of Fig. 7 becomes expensive. Therefore, the apparatus of Fig. 7 has a problem of δ re-arrangement and manufacturing cost. SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a pattern inspection apparatus that can perform inspection of a pattern to be inspected at a high speed by using two types of images of an incident illumination image and an illumination illumination image of the inspection pattern, χ, which can be based only on incident illumination. The image of either the moonlight image or the penetrating illumination image is set using the same area as the pattern inspection device that performs the inspection of the inspected pattern, and the manufacturing cost is low. [Patent Document 1] JP-A-2004-28597 [Patent Document 2] JP-A No. 1-296657 [Means for Solving the Problems] In order to solve the above problems, the present invention provides the following method.
⑴-種圖形檢查裝置，其拍攝成形為軟片狀之帶狀工 件的圖形並檢查該圖形之外觀，其特徵在於包括： 第一攝影裝置，配置於上述帶狀工件之其中 攝上述帶狀工件； 拍 第二攝影裝置，配置於上述帶狀工件 上述帶狀工件；及 面且拍攝 "、、明裝置，從上述帶狀工件其 士 * * /、〒面進行照射。 ⑴如申請專利範圍第⑴項之圖形檢查裝置 述照明裝置包括一觀測窗，其配置於上述第—攝影 之光入射開口與上述帶狀工件 办、置 1且通過受到該帶狀工件 2131-l〇〇94-PF;Ahddub 13 200931008 述觀測窗來拍攝上述 反射的光，上述第一攝影裝置通過上 帶狀工件。 ⑻如中請專利範圍第⑴或⑺項之圖形檢 中’上述照明裝置同時進行用於上述第—攝影裝—置之照明 和用於第二攝影裝置之照明。 、 ‘、、、 【發明效果】 根據上述構造之本發明，— 』促货種圖形檢查裝置， ❹ ❹ 其使用一個肖明裝置照日月冑狀工件巾其中 形，藉此，可同時得到被檢杳 八 —圖 , j被檢查圖形之入射照明影像及穿透 照明影像，所以，可利用姑 矛J用被檢查圖形之入射照明影像及 透照明影像這兩種影像，高速進行該被檢查圖形之檢查， 可使用個檢查部取得入射照明影像或穿透照明影 像、，所以，可僅根據這兩種影像中任—者的影像使用與進 行被檢查圖形之檢杳人+ & —的圖开>檢查裝置相同的面積來設置， 而且製造費用低廉。 【實施方式】 接著’參照圖面說明本發明之實施型態。第！圖為表示 本發明之圖形檢查裝置之其中一實施型態之構造的概念 圖。此圖形檢查裝i包括控制裝置1、冑CCD線感測器作為 光感知裝置的相機5a，5b、照明裝置4、膠帶拉開機構3、 膠帶搬送機構2及不良品打孔機構8。膠帶丨〇為c〇F膠帶等電 子元件封裝用軟片封裝膠帶，為辟述之帶狀工件中的其.中 種。相機5a及5b分別相當於前述之第一及第二攝影裝置。 2131-10094-PF;Ahddub 14 200931008 制裝置1針對相機53及5b、 Q ^ ^ , …月眾置4、膠帶拉開機 構3、膠▼搬送機構2及 个民-打孔機構8等，以檢查動作 既定時序料㈣職，對其進行㈣。作為圖形檢杳之 基準的母帶9事先輸人控制裝置i。母帶9包含藉由入射^明 所得到之影像（入射昭明寻q金、 '·、、月衫像）之基準圖形a和藉由穿透昭 明所得到之影像（穿透昭明 ’’、、 界v牙逐，，、、明影像）之基準圖形b這兩種 圖形。 φ 冑帶拉開機構3藉由夹持用上部元件31及夾持用下部 元件32夾持膠帶10之周邊部位，對㈣1〇施以水平方向之 張力’提高膠帶10之平滑程度。照明裝置4對膠帶1〇上之被 檢查圖形照射照明光。照明裝置4包括觀測窗，其配置於相 機5a之光入射開口和膠帶1〇之間，通過膠帶ι〇所反射之光 線，相機5a通過觀測窗拍攝膠帶1〇。包括觀測窗且可以均 勻照度照明欲照明之區域的照明裝置的其中一例為專利文 獻2(特開平1 1-296657)所揭示之「影像處理裝置之攝影光 © 學系統」。相機5a藉由CCD線感測器51接收來自被檢查圖形 之反射光。又，相機5b藉由CCD線感測器52接收來自被檢查 圖形之穿透光。 CCD線感測器51及52以直線狀配列多個CCD。CCD線感測 器51及52中之CCD配列方向為與搬送膠帶10之方向（亦即膠 ▼ 10之長度方向）垂直的方向。膠帶搬送機構2以一定的時 間間隔沿著長度方向搬送間歇性地搬送以CCD構成之晝素 寬度單位這樣微小的距離。相機53及5b以與此間歇性搬送 同步的時序拍攝膠帶1〇。 2131-10094-PF;Ahddub 15 200931008 使用第1圖之圖形檢查裝置所作的檢查以下面的步驟 來進行。首先，由控制裝置1之控制驅動膠帶搬送機構2, 膠帶10被搬送，當膠帶10中之被檢查圖形之先端到達攝影 位置時，相機5a及5b開始攝影。 接著，在進行照明裝置4之照明的狀態下，膠帶搬送機 構2從被檢查圖形之先端記號的位置沿著長度方向每次搬 送膠帶1 0上述既定的微小距離。在此搬送期間，相機5&及 0 5b以上述時序拍攝該被檢查圖形。當相機5a及5b結束被檢 查圖形之尾端記號的攝影時，膠帶搬送機構2在下一個被檢 查圖形之先端記號的位置被相機53及51)拍攝之前，迅速搬 送膠帶10，該先端記號的位置從拍攝時以上述時序每次搬 送膠帶1 0既定微小距離。之後也是相同，膠帶丨〇上之被檢 查圖形依次被相機5a及5b拍攝。 如上所述，隨著膠帶1〇之搬送，得到使用膠帶1〇上之 被檢查圖形之反射光所產生之影像資料及該被檢查圖形之 © 穿透光所產生之影像資料，這些影像資料之訊號分別從相 機5a及相機5b作為入射照明影像訊號5〇1及穿透照明影像 訊號502來輸出。入射照明影像及穿透照明影像分別和儲存 於控制裝置1中之基準圖形a及基準圖形b比較。控制裝置1 藉由此比較來判斷被檢查圖形是否良好。 第2圖表不藉由第i圖中之控制裝置j判斷被檢查之圖 形是否良好的判斷方法。第丨圖之圖形檢查裝置中之膠帶搬 送機構2之主要部位為退捲部21及捲起部23，所以，在第2 圖中，概念性地表示出藉由退捲部21及捲起部23搬送膠帶 2131-10〇94-PF;Ahddub 16 200931008 10的狀匕、°又’控制裴置1除了具有將入射照明影像和穿透 '、、、月办像刀別拿來和基準圖形a及基準圖形b比較以判斷被 圖形疋否良好的判斷功能外，如前所述，也有控制整 個圖形檢杳I#署+ —褒置之動作的功能，不過，在第2圖中，僅把其 判斷功能表示出來。 該判斷功能由判斷部lc，Id、合成部le及最後判斷部 1 f所、’且成。基準圖形&及b為分別儲存於判斷部1 c及1 d的資 〇 料。在僅利用入射照明影像判斷被檢查圖形是否良好之圖 形檢查裝置中’如前所述’底部擴大化等的檢測有其缺點。 因此’本實施型態之圖形檢查裝置包括用來產生入射照明 影像之相機5a及用來產生穿透照明影像之相機讣，使用這 些相機彳于到入射照明影像訊號501及穿透照明影像訊號 502 〇 在此參照第1圖及第2圖，說明判斷第1圖之實施型態中 之被檢查圖形是否良好的判斷功能。現在，第1圖之圖形檢 © 查裝置用來檢查包含第5(A)圖及第5(B)圖所示之導體圖形 D1及D2的區域。判斷部lc及Id從基準圖形a及b得到代表導 體圖形D1及D2分別存在於既定區域的資料。判斷部lc比較 入射照明影像訊號5 〇 1和第一臨限值，檢測出導體圖形ρ 1, D2之寬度、兩導體圖形之間隔’將此寬度及間隔分別拿來 和基準圖形a中之寬度及間隔比較，檢測出斷層式凹陷S之 類的缺陷’輸出用來表示判斷結果（有無缺陷）的判斷訊號 103 ·。判斷部id比較穿透照明影像訊號5〇2和第二臨限值， 檢測出導體圖形！Π，D2之寬度、兩導體圖形之間隔，將此 17 2131-10094-PF；Ahddub 200931008 寬度及間隔分別拿來和基準圖形b中之寬度及間隔比較，檢 測出底部擴大化Ri類的缺陷，輸出用來表示判斷結果的判 斷訊號104。 合成部le接收分別從判斷部1(；及1(1輸出的判斷訊號 1 0 3及1 0 4，將判斷訊號1 〇 3及1 〇 4所表示之判斷結果合成至 被檢查圖形中之既定範圍内，進行此既定範圍之缺陷程度 的判斷，產生用來表示該判斷之合成判斷訊號丨〇 5。最後判 〇 斷部1丨根據合成判斷部105所表示之被檢查圖形之既定範 圍之缺陷程度，綜合評價被檢查圖形，決定是否判斷該被 檢查圖形為不良品，甚至決定是否使用不良品打孔機構8 在該被檢查圖形上打孔。 第3圖為了說明第i圖之圖形檢查裝置之外形尺寸而作 概念性描述的構造圖。第3圖之圖形檢查裝置由控制部 11(相當於第1圖之控制裝置1)、檢查部3〇、打孔部8〇(相當 於第1圖之不良品打孔機構8)、退捲部21、捲起部23及氣球 G 22所組成。檢查部30相當於由第】圖中之照明裝置4及相機. 5a’ 5b所構成的部分。退捲部21、捲起部23及氣球22相當 於第1圖之膠帶搬送機構2。第1圖中之膠帶拉開機構3在第3 圖中省略圖示。 前面說明過之第7圖之圖形檢查裝置為了得到膠帶1〇 之入射照明影像及穿透照明影像，包括入射光檢查部31及 穿透光檢查部32這兩個檢查部。相對於此，第3圖之圖形檢 查裝置和習知裝置相同，同時取得兩種影像，不過，今對 同一個被檢查圖形取得兩種影像的構造，所以，僅有一個 2131-10094-PF;Ahddub 18 200931008 檢查部。如此，第3圖中之圖形檢查裝置和第7圖之圖形檢 查裝置相同，同時產生入射照明影像及穿透照明影像，進 行利用兩種影像的檢查’所以’使用第3圖之圖形檢查裝置 的檢查速度不遜於使用第7圖之圖形檢查裝置的檢查速 度，相當1¾速。 再者’第7圖之圖形檢查裝置為了達成使膠帶鬆弛以使 膠帶10之搬送順暢的功能，分別對應入射光檢查部31及穿 ©透光檢查部32包括氣球221及222，相對於此，在第3圖之圖 形檢查裝置中’僅有一個檢查部，所以，氣球也只要一個 就夠了。如此’第3圖之圖形檢查裝置藉由檢查部3〇及氣球 22提供第7圖之圖形檢查裝置中之入射光檢查部η、穿透光 檢查部32、氣球221及222之功能，所以，整個寬度變小為 169 0mm。於是’第5圖之裝置的設置面積相較於第7圖之裝 置的設置面積，大幅縮小。再者’關於檢查部為一個的第3 圖之圖形檢查裝置，包括間歇性地搬送膠帶丨〇既定微小距 Ο 離（相當於相機5a，51)之解析度的距離）的高精度搬送機構 一個就夠了，所以，相較於需要兩個相同之搬送機構的第7 圖之習知圖形檢查裝置，可以較便宜的價格來製造。 在專利文獻1之圖形檢查裝置中，設置入射照明襄置和 穿透照明裝置，這些照明裝置分別根據專門用途分成入射 照明影像取得用及穿透照明影像取得用，t料開啟兩種 照明裝置時，兩種照明會互相干涉，導致兩種影像皆不鮮 明，所以，宜，交互啟動各個照明，交互取得兩種影像，提 高檢查速度。相對於此，以上說明過之本發明之實施型態 2131-10094-PF;Ahddub 19 200931008 僅精由個照明裝置照明耀帶㈣之一個被檢查圖形，藉 3夺取得該被檢查圖形之人射照明影像和穿透照明影 像，所以，可以高速 订利用破心查圖形之入射照明影像 和牙透照明影像這兩種影傻 京/像的私查，又，可僅根據入射照 明影像或穿透照明影像令 / 豕r任者的影像，以與進行被檢查 圖形之檢查的圖形檢杳步 —瑕置相冋的面積來設置，而且製造 費用低廉。(1) A pattern inspection device that captures a pattern of a strip-shaped workpiece formed into a sheet shape and inspects the appearance of the pattern, and includes: a first photographing device disposed in the strip-shaped workpiece to take the strip-shaped workpiece; The second imaging device is photographed and placed on the strip-shaped workpiece of the strip-shaped workpiece; and the surface is photographed and the device is irradiated from the strip-shaped workpiece. (1) The graphic inspection device according to the scope of the patent application (1), wherein the illumination device includes an observation window disposed in the first light-injecting opening of the photographing light and the strip-shaped workpiece, and is received by the strip-shaped workpiece 2131-l 〇〇94-PF; Ahddub 13 200931008 The observation window is used to capture the reflected light, and the first photographing device passes through the upper strip-shaped workpiece. (8) In the graphic inspection of item (1) or (7) of the patent application, the illumination device described above simultaneously performs illumination for the above-mentioned first-photographing device and illumination for the second imaging device. , ',,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, Checking the eight-picture, j is inspecting the incident illumination image and penetrating the illumination image. Therefore, the inspection image can be scanned at high speed by using the two images of the incident illumination image and the illumination image of the inspection pattern. In the inspection, the inspection unit can be used to obtain the incident illumination image or the illumination illumination image. Therefore, it is possible to use only the image of the image to be inspected and the image of the inspection image to be inspected based on any of the two images. The opening > inspection device is provided in the same area, and the manufacturing cost is low. [Embodiment] Next, an embodiment of the present invention will be described with reference to the drawings. The first! BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a conceptual diagram showing the construction of one embodiment of the pattern inspection apparatus of the present invention. This pattern inspection device i includes a control device 1, a CCD line sensor as a camera 5a, 5b of the light sensing device, a lighting device 4, a tape pulling mechanism 3, a tape conveying mechanism 2, and a defective product punching mechanism 8. The tape 丨〇 is a film packaging tape for electronic component packaging such as c〇F tape, which is the middle of the strip-shaped workpiece. The cameras 5a and 5b correspond to the first and second imaging devices described above, respectively. 2131-10094-PF; Ahddub 14 200931008 The device 1 is directed to the cameras 53 and 5b, Q ^ ^ , ... the moon is placed 4, the tape pulling mechanism 3, the glue ▼ conveying mechanism 2, and the individual-punching mechanism 8 etc. Check the action of the scheduled timing material (four), and carry out (4). The master tape 9 as a reference for the pattern inspection is previously input to the control device i. The master tape 9 includes a reference pattern a obtained by incident imaging (incident illuminating, gold, '·, and moontie image) and an image obtained by penetrating Zhaoming (through the Zhaoming '', The two figures of the reference figure b of the boundary v, the, and the image. The φ tape pulling mechanism 3 sandwiches the peripheral portion of the tape 10 by the holding upper member 31 and the lower holding member 32, and applies a tension in the horizontal direction to the fourth to improve the smoothness of the tape 10. The illuminating device 4 illuminates the illuminated pattern on the inspected pattern on the tape 1〇. The illuminating device 4 includes an observation window which is disposed between the light incident opening of the camera 5a and the tape 1 ,, and the camera 5a photographs the tape 1 通过 through the observation window by the light reflected by the tape 〇. An example of an illuminating device that includes an observation window and can illuminate an area to be illuminate with uniform illuminance is the "Photographic Light of Image Processing Apparatus" system disclosed in Japanese Laid-Open Patent Publication No. Hei No. Hei. The camera 5a receives the reflected light from the pattern to be inspected by the CCD line sensor 51. Further, the camera 5b receives the transmitted light from the pattern to be inspected by the CCD line sensor 52. The CCD line sensors 51 and 52 arrange a plurality of CCDs in a straight line. The CCD alignment direction in the CCD line sensors 51 and 52 is a direction perpendicular to the direction in which the tape 10 is transported (i.e., the length direction of the glue ▼ 10). The tape conveyance mechanism 2 conveys a minute distance such that the unit width of the CCD is intermittently conveyed in the longitudinal direction at a constant time interval. The cameras 53 and 5b take the tape 1〇 at a timing synchronized with this intermittent conveyance. 2131-10094-PF; Ahddub 15 200931008 The inspection using the pattern inspection device of Fig. 1 is carried out in the following procedure. First, the tape transport mechanism 2 is driven by the control device 1, and the tape 10 is transported. When the leading end of the inspected pattern in the tape 10 reaches the photographing position, the cameras 5a and 5b start photographing. Next, in a state where the illumination device 4 is illuminated, the tape transport mechanism 2 transports the tape 10 by a predetermined small distance each time from the position of the leading end of the inspected pattern along the longitudinal direction. During this transfer, the cameras 5& and 0 5b take the checked pattern at the above timing. When the cameras 5a and 5b end the photographing of the trailing end mark of the inspected pattern, the tape transport mechanism 2 quickly transports the tape 10 before the position of the leading mark of the next inspected pattern is photographed by the cameras 53 and 51), the position of the leading mark The tape 10 is transported a predetermined small distance each time at the above timing from the time of shooting. The same is true thereafter, and the inspected pattern on the tape cassette is sequentially photographed by the cameras 5a and 5b. As described above, as the tape 1 is conveyed, the image data generated by the reflected light of the inspected pattern on the tape 1 and the image data generated by the transmitted light of the inspected pattern are obtained, and the image data is The signals are output from the camera 5a and the camera 5b as the incident illumination image signal 5〇1 and the penetration illumination image signal 502, respectively. The incident illumination image and the transmitted illumination image are compared with the reference pattern a and the reference pattern b stored in the control device 1, respectively. The control device 1 judges whether the checked pattern is good by comparison. The second graph does not judge whether or not the checked pattern is good by the control device j in Fig. i. The main part of the tape conveying mechanism 2 in the pattern inspection device of the first drawing is the unwinding portion 21 and the winding portion 23, and therefore, in the second drawing, the unwinding portion 21 and the winding portion are conceptually shown. 23 transport tape 2131-10 〇 94-PF; Ahddub 16 200931008 10 匕, ° 'control device 1 in addition to the incident illumination image and penetration ',,,,,,,,,,,,,,,, In addition to the judgment function of the reference pattern b to determine whether the image is good or not, as described above, there is also a function of controlling the operation of the entire graphics check, and in the second figure, only Its judgment function is indicated. This determination function is performed by the determination unit 1c, the Id, the synthesis unit, and the final determination unit 1f. The reference patterns & and b are the materials stored in the determination units 1 c and 1 d, respectively. In the pattern inspection apparatus which judges whether or not the pattern to be inspected is good by using only the incident illumination image, the detection of the bottom enlargement or the like as described above has its disadvantages. Therefore, the graphic inspection apparatus of the present embodiment includes a camera 5a for generating an incident illumination image and a camera 用来 for generating a transmission illumination image, and the camera is used to illuminate the incident illumination image signal 501 and penetrate the illumination image signal 502. Here, referring to Fig. 1 and Fig. 2, a judgment function for judging whether or not the pattern to be inspected in the embodiment of Fig. 1 is good is described. Now, the pattern inspection device of Fig. 1 is used to check the areas including the conductor patterns D1 and D2 shown in Figs. 5(A) and 5(B). The determination units lc and Id obtain data representing the respective conductor patterns D1 and D2 in the predetermined regions from the reference patterns a and b. The determining unit lc compares the incident illumination image signal 5 〇1 with the first threshold value, and detects the width of the conductor pattern ρ 1, D2 and the interval between the two conductor patterns. The width and the interval are respectively taken and the width in the reference pattern a is taken. And the interval comparison, detecting a defect such as the fault depression S is outputting a judgment signal 103 for indicating the judgment result (with or without a defect). The judgment unit id compares the transmitted illumination image signal 5〇2 with the second threshold value, and detects the conductor pattern! Π, the width of D2, the interval between the two conductor patterns, the width and interval of the 17 2131-10094-PF; Ahddub 200931008 are compared with the width and interval in the reference pattern b, respectively, to detect the defect of the bottom enlarged Ri type. A judgment signal 104 for indicating the judgment result is output. The synthesizing unit le receives the determination result of the determination unit 1 (; and 1 (the output judgment signals 1 0 3 and 1 0 4, and the judgment signals 1 〇 3 and 1 〇 4 are synthesized into the checked pattern). Within the range, the degree of defect in the predetermined range is judged, and a synthetic judgment signal 丨〇5 for indicating the judgment is generated. Finally, the defective portion 1 is determined based on the defect of the predetermined range of the inspected pattern indicated by the synthesis determining unit 105. Degree, comprehensive evaluation of the checked pattern, determination of whether or not to judge the inspected graphic as a defective product, and even determination of whether or not to use the defective product punching mechanism 8 to punch holes in the inspected graphic. Fig. 3 is a view for explaining the graphic inspection device of Fig. A structural view conceptually described in terms of external dimensions. The graphic inspection device of Fig. 3 is composed of a control unit 11 (corresponding to the control device 1 of Fig. 1), an inspection unit 3A, and a punching unit 8 (equivalent to the first The defective product punching mechanism 8), the unwinding portion 21, the winding portion 23, and the balloon G 22. The inspection portion 30 corresponds to the portion of the illumination device 4 and the camera 5a' 5b in the first drawing. The unwinding portion 21, the winding portion 23, and the balloon 22 corresponds to the tape transport mechanism 2 of Fig. 1. The tape pulling mechanism 3 in Fig. 1 is not shown in Fig. 3. The pattern inspection device of Fig. 7 described above is used to obtain the incident illumination of the tape 1 The image and the transmitted illumination image include two inspection units, the incident light inspection unit 31 and the transmitted light inspection unit 32. In contrast, the pattern inspection device of Fig. 3 is the same as the conventional device, and two types of images are simultaneously acquired. Now, the same image is constructed for the same image to be inspected, so there is only one 2131-10094-PF; Ahddub 18 200931008 inspection unit. Thus, the graphic inspection device in Fig. 3 and the graphic inspection device in Fig. 7 In the same way, the incident illumination image is transmitted and the illumination image is transmitted at the same time, and the inspection using the two images is performed. Therefore, the inspection speed of the graphic inspection apparatus using the third drawing is not inferior to the inspection speed of the graphic inspection apparatus using the seventh drawing, which is equivalent to 13⁄4. Further, the pattern inspection device of the seventh drawing corresponds to the incident light inspection unit 31 and the translucent inspection unit 32 in order to achieve a function of relaxing the tape to smooth the conveyance of the tape 10. In contrast, in the pattern inspection device of Fig. 3, there is only one inspection unit, so that only one balloon is sufficient. Thus, the pattern inspection device of Fig. 3 is provided by the inspection unit 3. The balloon and the balloon 22 provide the functions of the incident light inspection portion η, the light penetrating portion 32, and the balloons 221 and 222 in the pattern inspection device of Fig. 7, so that the entire width is reduced to 169 mm. Thus, Fig. 5 The installation area of the device is greatly reduced compared to the installation area of the device of Fig. 7. Furthermore, the pattern inspection device of Fig. 3, which is one of the inspection units, includes intermittently transporting the tape 丨〇 a predetermined minute distance ( It is sufficient to have one high-precision conveying mechanism corresponding to the resolution of the cameras 5a and 51). Therefore, it is relatively inexpensive compared to the conventional pattern inspection device of the seventh drawing which requires two identical conveying mechanisms. Price to manufacture. In the pattern inspection device of Patent Document 1, an incident illumination device and a penetrating illumination device are provided, and these illumination devices are respectively divided into an incident illumination image acquisition and a penetration illumination image acquisition according to a specific use, and when the two illumination devices are turned on. The two kinds of illumination will interfere with each other, resulting in the two images being unclear. Therefore, it is advisable to interactively activate the various illuminations and obtain two images interactively to improve the inspection speed. In contrast, the embodiment of the present invention described above is 2131-10094-PF; Ahddub 19 200931008 is only one of the illumination patterns of the illumination device (4), and the person who has obtained the image to be inspected by 3 Illuminating the image and penetrating the illumination image, so you can use the two-dimensional shadow/image of the incident illumination image and the tooth-to-hole illumination image with the heart-breaking check pattern, and can only be based on the incident illumination image or penetration. The image of the illumination image command / 豕r is set to an area corresponding to the pattern inspection step of the inspection of the inspected pattern, and the manufacturing cost is low.
此外’以上舉出實施型態以詳細說明本發明之具體範 例’不過，本發明不受這些型態限定的這一點自不待言。 例如’在第1 ®之實施型態中’人射照明影像取得用相機僅 為-台記號la之相機，不過，在本發明之圖形檢查裝置中， 當想要對膝帶進行大於一台相機之視野寬度的檢查時，採 用的構&可為’將複數個入射照明影像取得用相機沿著膠 帶的寬度方向錯開配置，針對整個寬度的膠帶，使用這些 相機取得人射照明影像。穿透照明影像取得用相機的情: 也是一樣。 在第1圖至第3圖所示之實施型態中，照明裝置（相 田於’、’、明裝置4)僅為―自’不過’本發明不必限^為只有 一台照明裝置。例如，可採用一種構造，其將入射照明用 之第-照明裝置及穿透照明用之第二照明裝置設置於入射 照明影像得用之第一攝影裝置（相當於相機5a)那侧，第一 攝影裝置藉由第—照明裝置之照明（入射照明）拍攝帶狀工 件，第二攝影裝置（相當於相機5b)藉由第二照明裝置之照 明（穿透照明）拍攝帶狀工件，如此，使第一及第二攝影裝 2131-l〇〇94-pF;Ahddub 20 200931008 置之光軸不同，亦即，使第一洛曾 _y ^ 及第二攝影裝置之光軸之間 具有偏移量，以此方式來實施本發明。 在以此方式設置第一及第二照明裝置並使第一及第二 攝影裝置之光軸之間具有偏移量的構造中，第一及第二攝 影裝置分別僅根據一個照明裝置之照明拍攝帶狀工件，所 以’即使同時進行入射照明及穿透照明，入射光及穿透光 也不會互相干涉，所以，鮮明之入射照明影像及穿透照明 ❹影像可分別從第-及第二攝影裝置得到，並且，第一及第 二攝影裝置可同時拍攝帶狀工件’所以，和照明裝置為一 個的構造相同，可以高速進行被檢查圖形之檢查。又，在 具有此種設置第-及第二照明裝置並使第_及第二攝影裝 置之光軸之間具有偏移量之構造的圖形檢查裝置中，帶狀 工件之被檢查圖形在ρ及第二攝影裝置中m㈣ 工件之搬送方向偏移一點點，不過，可將第-及第二照明 裝置以及第-及第二攝影裝置設置為—個檢查裝置，所 〇以，帶狀工件之搬送機構一個就夠了，相較於需要兩個相 同之搬送機構的第7圖之習知圖形檢查裝置， 权馬低 廉的價格進行製造。 【圖式簡單說明】 第1圖為表示本發明之圖形檢查裝置之其中一實施 態之構造的概念圖。 第2圖表示藉由第中之控制裝置！判斷被檢查之圖 形是否良好的判斷方法。 2131-10094-PF;Ahddub 21 200931008 第3圖為用來說明第1圖之圖形檢查裝置之外形尺寸的 構造圖。 第4圖為表示僅取得表系入射照明影像之圖形檢查裝 置之重要部位（A)及僅取得穿透照明影像之圖形檢查裝置 之重要部位（B)的概念圖。 第5(A)圖至第5(D)圖說明第4(A)圖及第4(B)圖之圖形 檢查裝置所產生之入射照明影像訊號及穿透照明影像訊 號。 ❹ 第6圖為習知的圖形檢查裝置之構成的概念圖。 第7圖為習知的檢查裝置的概念圖。 ❹ 主要元件符號說明】 控制裝置； 1 e〜合成部； 2~膠·帶搬送機構； 4〜照明裝置； 9~母帶； 1 Oa〜退捲捲軸； 11〜控制部； lib〜顯示器； 21〜退捲部； 22，221，222~ 氣球； 2 3 ~捲起部； 25d，25h〜鏈輪； 1 c，1 d〜判斷部；Further, the specific embodiments of the present invention are described in detail above. However, it is needless to say that the present invention is not limited by these types. For example, in the "1st implementation", the camera for human-light illumination image acquisition is only a camera of the -tag, but in the graphic inspection device of the present invention, when it is desired to perform more than one camera on the knee band In the inspection of the width of the field of view, the configuration used may be such that 'a plurality of incident illumination image acquisition cameras are arranged offset along the width direction of the tape, and the camera is used to obtain a human-illuminated image for the entire width of the tape. The effect of penetrating the illumination image to obtain the camera: the same is true. In the embodiment shown in Figs. 1 to 3, the illumination device (phase, ', ', and 4) is only "self" but the present invention is not necessarily limited to only one illumination device. For example, a configuration may be employed in which the first illumination device for incident illumination and the second illumination device for penetrating illumination are disposed on the side of the first imaging device (corresponding to the camera 5a) for the incident illumination image, first The photographing device photographs the strip-shaped workpiece by illumination (incident illumination) of the first illumination device, and the second photographing device (corresponding to the camera 5b) photographs the strip-shaped workpiece by illumination (through illumination) of the second illumination device, thus The first and second photographic devices 2131-l〇〇94-pF; Ahddub 20 200931008 have different optical axes, that is, an offset between the first optical _y^ and the optical axis of the second photographic device The invention is implemented in this manner. In the configuration in which the first and second illumination devices are disposed in such a manner as to have an offset between the optical axes of the first and second imaging devices, the first and second imaging devices are respectively photographed according to the illumination of one illumination device. Tape-shaped workpieces, so 'even when incident illumination and penetrating illumination are simultaneously performed, the incident light and the transmitted light do not interfere with each other. Therefore, the sharp incident illumination image and the penetrating illumination image can be taken from the first and second photography respectively. The device is obtained, and the first and second photographing devices can simultaneously photograph the strip-shaped workpiece. Therefore, the structure of the illumination device is the same, and the inspection of the inspected pattern can be performed at high speed. Further, in the pattern inspection apparatus having such a configuration in which the first and second illumination devices are provided with an offset between the optical axes of the first and second imaging devices, the inspected pattern of the strip-shaped workpiece is at ρ and In the second photographing device, the transport direction of the m(4) workpiece is shifted a little, but the first and second illumination devices and the first and second photographing devices can be set as one inspection device, and the strip workpiece can be transported. One of the institutions is sufficient, and it is manufactured at a low price compared to the conventional graphic inspection device of Fig. 7 which requires two identical transport mechanisms. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a conceptual diagram showing the configuration of one embodiment of a pattern inspecting apparatus of the present invention. Figure 2 shows the control device by the middle! A method of judging whether the pattern being inspected is good or not. 2131-10094-PF; Ahddub 21 200931008 Fig. 3 is a structural view for explaining the outer dimensions of the pattern inspection apparatus of Fig. 1. Fig. 4 is a conceptual diagram showing an important portion (A) of the pattern inspection device that acquires only the illumination image of the surface and an important portion (B) of the pattern inspection device that only obtains the illumination image. Figures 5(A) to 5(D) illustrate the incident illumination image signal and the transmitted illumination image signal generated by the graphic inspection device of Figures 4(A) and 4(B). ❹ Fig. 6 is a conceptual diagram showing the configuration of a conventional pattern inspection device. Figure 7 is a conceptual diagram of a conventional inspection device. ❹ Main component symbol description] Control device; 1 e~Compositing section; 2~Glue/belt conveying mechanism; 4~Lighting device; 9~Master tape; 1 Oa~Unwinding reel; 11~Control section; lib~Display; 21 ~Rewinding section; 22,221,222~ balloon; 2 3 ~ rolled up; 25d, 25h~ sprocket; 1 c, 1 d~ judgment part;
If〜最後判斷部； 3〜膠帶拉開機構； 8〜不良品打孔機構； 9a, 9b〜基準圖形； 10b~捲起捲轴； 1 la〜控制部本體； 1 lc~鍵盤； 21a, 23a〜轴； 2 2 a〜感測器； 25a，25卜張力滾輪； 3 0 ~檢查部； 2131-10094-PF；Ahddub 22 200931008 31〜入射光檢查部； 32〜穿透光檢查部； 51，52〜CCD線感測器； 80~打孔部； 80a〜打孔器； 103，104〜判斷訊號； 105〜合成判斷訊號； 200~膠帶之搬送方向； 5〇1~入射照明影像訊號；5〇2~穿透照明影像訊號； 25b，25c，25e，25g 〜自由鏈輪； 10~COF膠帶等電子元件封裝用軟片封装膠帶； 5a，5b〜將CCD線感測器作為光感知裝置之相機。 ❹ 2131- Γ0094-PF;Ahddub 23If ~ final judgment part; 3 ~ tape pull-up mechanism; 8 ~ defective product punching mechanism; 9a, 9b ~ reference pattern; 10b ~ roll-up reel; 1 la ~ control part body; 1 lc ~ keyboard; 21a, 23a ~ axis; 2 2 a~sensor; 25a, 25 pad tension roller; 3 0 ~ inspection section; 2131-10094-PF; Ahddub 22 200931008 31~ incident light inspection section; 32~ penetration inspection section; 52 ~ CCD line sensor; 80 ~ punching; 80a ~ puncher; 103, 104 ~ judgment signal; 105 ~ synthetic judgment signal; 200 ~ tape transfer direction; 5 〇 1 ~ incident illumination image signal; 〇2~ penetrating illumination image signal; 25b, 25c, 25e, 25g~free sprocket; 10~COF tape and other electronic component packaging film packaging tape; 5a, 5b~ CCD line sensor as light perception device camera . ❹ 2131- Γ0094-PF; Ahddub 23