JP5466203B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP5466203B2 JP5466203B2 JP2011130903A JP2011130903A JP5466203B2 JP 5466203 B2 JP5466203 B2 JP 5466203B2 JP 2011130903 A JP2011130903 A JP 2011130903A JP 2011130903 A JP2011130903 A JP 2011130903A JP 5466203 B2 JP5466203 B2 JP 5466203B2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3114—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed the device being a chip scale package, e.g. CSP
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/12105—Bump connectors formed on an encapsulation of the semiconductor or solid-state body, e.g. bumps on chip-scale packages
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16135—Disposition the bump connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/16145—Disposition the bump connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
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- H—ELECTRICITY
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- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73201—Location after the connecting process on the same surface
- H01L2224/73207—Bump and wire connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73201—Location after the connecting process on the same surface
- H01L2224/73209—Bump and HDI connectors
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- H—ELECTRICITY
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/93—Batch processes
- H01L2224/94—Batch processes at wafer-level, i.e. with connecting carried out on a wafer comprising a plurality of undiced individual devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/93—Batch processes
- H01L2224/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L2224/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/73—Means for bonding being of different types provided for in two or more of groups H01L24/10, H01L24/18, H01L24/26, H01L24/34, H01L24/42, H01L24/50, H01L24/63, H01L24/71
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
Description
図1は、本発明による半導体装置の第1実施形態を示す断面図である。半導体装置1は、半導体チップ10(第1の半導体チップ)、半導体チップ20(第2の半導体チップ)、およびシールリング30を備えている。
図6は、本発明による半導体装置の第2実施形態を示す断面図である。半導体装置2においては、配線40の一部が、絶縁膜70を介して半導体チップ10の面S1上に設けられている。すなわち、半導体チップ10上に絶縁膜70が形成されており、その上に配線40の一部が形成されている。具体的には、配線40のうち導電部材34に接続された部分が半導体チップ10上に直接形成される一方で、導体ポスト42に接続された部分が絶縁膜70上に形成されている。この絶縁膜70は、有機絶縁膜であることが好ましい。半導体装置2のその他の構成は、半導体装置1と同様である。
2 半導体装置
10,20 半導体チップ
30 シールリング
32,34 導電部材
40 配線
42 導体ポスト
50 絶縁性樹脂層
60 配線層
62 配線
64 外部電極端子
70 絶縁膜
80 パッケージ基板
82 外部電極端子
84 ワイヤ
86 モールド樹脂
Claims (7)
- 第1主面と、前記第1主面とは反対側の第2主面を有する配線層と、
第1表面と、前記第1表面とは反対側の第1裏面を有し、前記配線層の前記第1主面と前記第1裏面が向き合って配置された第1半導体チップと、
第2表面と、前記第2表面とは反対側の第2裏面を有し、前記第1半導体チップの前記第1表面と前記第2裏面が向き合って配置された第2半導体チップと、
前記第1半導体チップの前記第1表面と前記第2半導体チップの前記第2裏面との間に配置されたシールリングとを備え、
平面視において、前記第1半導体チップの前記第1表面、前記第2半導体チップの前記第2裏面および前記シールリングで囲まれた内部領域と、
前記配線層の前記第1主面と前記第2半導体チップの前記第2裏面の間に在って、前記内部領域を除く外部領域を有し、
平面視において、前記第2半導体チップの面積は前記第1半導体チップの面積より大きく、
平面視において、前記配線層の面積は前記第1半導体チップの面積より大きく、
前記外部領域には絶縁性樹脂が充填されている半導体装置。 - 請求項1に記載の半導体装置において、
前記内部領域に設けられ、前記第1および第2の半導体チップを電気的に接続する複数の第1導電部材をさらに備えることを特徴とする半導体装置。 - 請求項2に記載の半導体装置において、
前記シールリングは、前記複数の第1導電部材と同一の導電材料により構成されていることを特徴とする半導体装置。 - 請求項2または3に記載の半導体装置において、
前記第1半導体チップは、矩形形状を有し、前記第1半導体チップの一辺と前記シールリングとの間に在って、前記一辺に沿って配置された複数の第2導電部材とを備え、
前記複数の第1導電部材のピッチは前記複数の第2導電部材のピッチより小さいことを特徴とする半導体装置。 - 請求項4に記載の半導体装置において、
前記配線層は配線を有し、前記配線は前記配線層の前記第2主面上に配置された外部電極端子へ接続され、前記外部電極端子は前記配線を介して前記複数の第2導電部材と電気的に接続されていることを特徴とする半導体装置。 - 請求項5に記載の半導体装置において、
平面視において、前記内部領域と前記外部電極端子とは重ならないことを特徴とする半導体装置。 - 請求項1乃至6のいずれか一項に記載の半導体装置において、
前記内部領域が不活性ガスで満たされた状態または真空状態であることを特徴とする半導体装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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JP2011130903A JP5466203B2 (ja) | 2011-06-13 | 2011-06-13 | 半導体装置 |
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JP2011130903A JP5466203B2 (ja) | 2011-06-13 | 2011-06-13 | 半導体装置 |
Related Parent Applications (1)
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JP2005294710A Division JP4834369B2 (ja) | 2005-10-07 | 2005-10-07 | 半導体装置 |
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JP2011205129A JP2011205129A (ja) | 2011-10-13 |
JP5466203B2 true JP5466203B2 (ja) | 2014-04-09 |
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JP2011130903A Expired - Fee Related JP5466203B2 (ja) | 2011-06-13 | 2011-06-13 | 半導体装置 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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US10475767B2 (en) | 2018-01-04 | 2019-11-12 | Kabushiki Kaisha Toshiba | Electronic device |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS59231839A (ja) * | 1983-06-15 | 1984-12-26 | Hitachi Ltd | 半導体装置 |
JP2000223655A (ja) * | 1999-01-29 | 2000-08-11 | Rohm Co Ltd | 半導体装置 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10475767B2 (en) | 2018-01-04 | 2019-11-12 | Kabushiki Kaisha Toshiba | Electronic device |
US10991673B2 (en) | 2018-01-04 | 2021-04-27 | Kabushiki Kaisha Toshiba | Electronic device |
US11791311B2 (en) | 2018-01-04 | 2023-10-17 | Nagase & Co., Ltd. | Electronic device |
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