JP5466156B2 - 電流誘導構造を備えた縦型led - Google Patents
電流誘導構造を備えた縦型led Download PDFInfo
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- JP5466156B2 JP5466156B2 JP2010512318A JP2010512318A JP5466156B2 JP 5466156 B2 JP5466156 B2 JP 5466156B2 JP 2010512318 A JP2010512318 A JP 2010512318A JP 2010512318 A JP2010512318 A JP 2010512318A JP 5466156 B2 JP5466156 B2 JP 5466156B2
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- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
- H01L33/38—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape
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- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/14—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a carrier transport control structure, e.g. highly-doped semiconductor layer or current-blocking structure
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
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- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/48463—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
- H01L2224/48465—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond the other connecting portion not on the bonding area being a wedge bond, i.e. ball-to-wedge, regular stitch
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- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
- H01L2224/4901—Structure
- H01L2224/4903—Connectors having different sizes, e.g. different diameters
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- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/15—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components with at least one potential-jump barrier or surface barrier specially adapted for light emission
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
- H01L33/38—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape
- H01L33/385—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape the electrode extending at least partially onto a side surface of the semiconductor body
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
- H01L33/40—Materials therefor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/44—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the coatings, e.g. passivation layer or anti-reflective coating
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Description
Claims (31)
- 発光ダイオード(LED)であって、
金属基材と、
前記金属基材上に配置されたp型半導体層と、当該p型半導体層上に配置されたn型半導体層とを備える、前記金属基材上に堆積された発光のためのLEDスタックと、
前記n型半導体層上に堆積されたn型電極と、
前記金属基材と前記n型半導体層との間で結合され、前記n型半導体層との非オーミックコンタクトを形成する導電材料と、を備えることを特徴とするLED。 - 前記金属基材は多重金属層を含むことを特徴とする請求項1に記載のLED。
- 前記金属基材は、Cu、Ni、Ag、Au、Al、Cu−Co、Ni−Co、Cu−W、Cu−Mo、Ge、Ni/Cu、Ni/Cu−Mo、または、それらの合金の少なくとも1種を含むことを特徴とする請求項1記載のLED。
- 前記金属基材の厚みは10μmから400μmであることを特徴とする請求項1に記載のLED。
- 前記金属基材と前記LEDスタックの前記p型半導体層との間に割り込んだp型電極をさらに備え、前記p型電極は第1コンタクトと第2コンタクトとを有し、前記第1コンタクトは前記第2コンタクトよりも高い電気抵抗を有していることを特徴とする請求項1に記載のLED。
- 前記第2コンタクトは、銀(Ag)、金(Au)、アルミニウム(Al)、Ag−Al、Mg/Ag、Mg/Ag/Ni、Mg/Ag/Ni/Au、AgNi、Ni/Ag/Ni/Au、Ag/Ni/Au、Ag/Ti/Ni/Au、Ti/Al、Ni/Al、AuBe、AuGe、AuPd、AuPt、AuZn、酸化インジウムスズ(ITO)、酸化インジウム亜鉛(IZO)、または、Ag、Au、Al、ニッケル(Ni)、マグネシウム(Mg)、クロム(Cr)、プラチナ(Pt)、パラジウム(Pd)、ロジウム(Rh)もしくは銅(Cu)の少なくとも1種を含んだ合金、の少なくとも1種を含むことを特徴とする請求項5に記載のLED。
- 前記第2コンタクトは反射層を含むことを特徴とする請求項5に記載のLED。
- 前記第1コンタクトはバリア金属層を含むことを特徴とする請求項5に記載のLED。
- 前記第1コンタクトは多重金属層を含むことを特徴とする請求項5に記載のLED。
- 前記第1コンタクトは、Pt、タンタル(Ta)、タングステン(W)、W−Si、Ni、Cr/Ni/Au、W/Au、Ta/Au、Ni/Au、Ti/Ni/Au、W−Si/Au、Cr/W/Au、Cr/W−Si/Au、Pt/Au、Cr/Pt/Au、または、Ta/Pt/Auの少なくとも1種を含むことを特徴とする請求項5に記載のLED。
- 前記p型電極は全方向性反射(ODR)システムを含むことを特徴とする請求項5に記載のLED。
- 前記導電材料は多重金属層を含むことを特徴とする請求項1に記載のLED。
- 前記導電材料は、Ni、Ag、Au、Al、Mo、Pt、W、W−Si、Ta、Ti、Hf、Ge、Mg、Zn、W/Au、Ta/Au、Pt/Au、Ti/Au、Ti/Al、Ti/Pt/Au、Ti/Ni/Au、Ta/Pt/Au、W−Si/Au、Cr/Au、Cr/Al、Ni/Au、Ni/Al、Ni/Cu、Cr/Ni/Au、Cr/W/Au、Cr/W−Si/Au、Cr/Pt/Au、AuGe、AuZn、酸化インジウムスズ(ITO)、または、酸化インジウム亜鉛の少なくとも1種を含むことを特徴とする請求項1に記載のLED。
- 前記n型半導体層の上面は、LEDからの光抽出量を増加させるためにパターン加工または粗面化されていることを特徴とする請求項1に記載のLED。
- 前記LEDスタックと前記導電材料との間に電気絶縁材料をさらに含んでいることを特徴とする請求項1に記載のLED。
- 前記電気絶縁材料は、SiO2、Si3N4、TiO2、Al2O3、HfO2、Ta2O5、スピンオンガラス(SOG)、MgO、ポリマー、ポリイミド、フォトレジスト、パリレン、SU−8、または、熱可塑物質の少なくとも1種を含むことを特徴とする請求項15に記載のLED。
- 発光ダイオード(LED)であって、
金属基材と、
前記金属基材上に配置されたp型半導体層と、当該p型半導体層上に配置されたn型半導体層とを備え、前記金属基材上に堆積された発光のためのLEDスタックと、
前記n型半導体層上に堆積されたn型電極と、
前記n型半導体層上に堆積された保護装置と、
前記金属基材と前記保護装置との間で結合された導電材料と、を備えることを特徴とするLED。 - 前記保護装置は、ZnO、ZnS、TiO2、NiO、SrTiO3、SiO2、Cr2O3、または、ポリメチル−メチルアクリレート(PMMA)の少なくとも1種を含むことを特徴とする請求項17に記載のLED。
- 前記保護装置の厚みは1nmから10μmであることを特徴とする請求項17に記載のLED。
- 前記金属基材と前記LEDスタックの前記p型半導体層との間に割り込んだp型電極をさらに備え、前記p型電極は第1コンタクトと第2コンタクトとを有し、前記第1コンタクトは前記第2コンタクトよりも高い抵抗を有していることを特徴とする請求項17に記載のLED。
- 前記p型電極は全方向性反射(ODR)システムを含むことを特徴とする請求項20に記載のLED。
- 前記導電材料は多重金属層を含むことを特徴とする請求項17に記載のLED。
- 前記導電材料は、Ni、Ag、Au、Al、Mo、Pt、W、W−Si、Ta、Ti、Hf、Ge、Mg、Zn、W/Au、Ta/Au、Pt/Au、Ti/Au、Ti/Al、Ti/Pt/Au、Ti/Ni/Au、Ta/Pt/Au、W−Si/Au、Cr/Au、Cr/Al、Ni/Au、Ni/Al、Cr/Ni/Au、Cr/W/Au、Cr/W−Si/Au、Cr/Pt/Au、AuGe、AuZn、酸化インジウムスズ(ITO)、酸化インジウム亜鉛、または、Ni/Cuの少なくとも1種を含むことを特徴とする請求項17に記載のLED。
- 前記LEDスタックと前記導電材料との間に電気絶縁材料をさらに含んでいることを特徴とする請求項17に記載のLED。
- 前記電気絶縁材料は、SiO2、Si3N4、TiO2、Al2O3、HfO2、Ta2O5、スピンオンガラス(SOG)、MgO、ポリマー、ポリイミド、フォトレジスト、パリレン、SU−8、または、熱可塑物質の少なくとも1種を含むことを特徴とする請求項24に記載のLED。
- 前記導電材料と前記保護装置との間に割り込んだ接合層をさらに含んでいることを特徴とする請求項17に記載のLED。
- 前記導電材料は、前記金属基材と前記接合層との間で結合されたワイヤであることを特徴とする請求項26に記載のLED。
- 前記接合層は多重金属層を含むことを特徴とする請求項26に記載のLED。
- 前記接合層は、Ti/Au、Ti/Al、Ti/Pt/Au、Cr/Au、Cr/Al、Al、Au、Ni/Au、Ni/Al、または、Cr/Ni/Auの少なくとも1種を含むことを特徴とする請求項26に記載のLED。
- 前記接合層の厚みは0.5μmから10μmであることを特徴とする請求項26に記載のLED。
- 前記n型半導体層の上面は、LEDからの光抽出量を増加させるためにパターン加工または粗面化されていることを特徴とする請求項17に記載のLED。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US94353307P | 2007-06-12 | 2007-06-12 | |
US60/943,533 | 2007-06-12 | ||
US12/136,547 US7759670B2 (en) | 2007-06-12 | 2008-06-10 | Vertical LED with current guiding structure |
US12/136,547 | 2008-06-10 | ||
PCT/US2008/066539 WO2008154573A1 (en) | 2007-06-12 | 2008-06-11 | Vertical led with current guiding structure |
Publications (2)
Publication Number | Publication Date |
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JP2010529697A JP2010529697A (ja) | 2010-08-26 |
JP5466156B2 true JP5466156B2 (ja) | 2014-04-09 |
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Application Number | Title | Priority Date | Filing Date |
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JP2010512318A Expired - Fee Related JP5466156B2 (ja) | 2007-06-12 | 2008-06-11 | 電流誘導構造を備えた縦型led |
Country Status (6)
Country | Link |
---|---|
US (2) | US7759670B2 (ja) |
JP (1) | JP5466156B2 (ja) |
KR (1) | KR20100029765A (ja) |
CN (2) | CN101711432B (ja) |
TW (1) | TWI358140B (ja) |
WO (1) | WO2008154573A1 (ja) |
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US7759670B2 (en) | 2010-07-20 |
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WO2008154573A1 (en) | 2008-12-18 |
US20100258834A1 (en) | 2010-10-14 |
KR20100029765A (ko) | 2010-03-17 |
US8003994B2 (en) | 2011-08-23 |
TW200919783A (en) | 2009-05-01 |
JP2010529697A (ja) | 2010-08-26 |
CN101711432B (zh) | 2011-11-16 |
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US20080308829A1 (en) | 2008-12-18 |
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