JP5458472B2 - Ｘ線管 - Google Patents

Ｘ線管 Download PDF

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Publication number
JP5458472B2
JP5458472B2 JP2007072355A JP2007072355A JP5458472B2 JP 5458472 B2 JP5458472 B2 JP 5458472B2 JP 2007072355 A JP2007072355 A JP 2007072355A JP 2007072355 A JP2007072355 A JP 2007072355A JP 5458472 B2 JP5458472 B2 JP 5458472B2
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Japan
Prior art keywords
anode
electron
electron source
ray
magnetic lens
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Expired - Fee Related
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JP2007072355A
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Japanese (ja)
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JP2008234981A5 (enExample
JP2008234981A (ja
Inventor
定 冨田
昌昭 浮田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
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Shimadzu Corp
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Priority to JP2007072355A priority Critical patent/JP5458472B2/ja
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Publication of JP2008234981A5 publication Critical patent/JP2008234981A5/ja
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JP2007072355A 2007-03-20 2007-03-20 Ｘ線管 Expired - Fee Related JP5458472B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007072355A JP5458472B2 (ja) 2007-03-20 2007-03-20 Ｘ線管

Applications Claiming Priority (1)

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JP2007072355A JP5458472B2 (ja) 2007-03-20 2007-03-20 Ｘ線管

Publications (3)

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JP2008234981A JP2008234981A (ja) 2008-10-02
JP2008234981A5 JP2008234981A5 (enExample) 2010-04-30
JP5458472B2 true JP5458472B2 (ja) 2014-04-02

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ID=39907554

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JP2007072355A Expired - Fee Related JP5458472B2 (ja) 2007-03-20 2007-03-20 Ｘ線管

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JP (1) JP5458472B2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9437390B2 (en) 2012-10-22 2016-09-06 Shimadzu Corporation X-ray tube device
US9984847B2 (en) 2013-03-15 2018-05-29 Mars Tohken Solution Co., Ltd. Open-type X-ray tube comprising field emission type electron gun and X-ray inspection apparatus using the same
JP6218403B2 (ja) * 2013-03-15 2017-10-25 株式会社マーストーケンソリューション 電界放射型電子銃を備えたｘ線管及びそれを用いたｘ線検査装置
CN105140088B (zh) * 2015-07-24 2017-10-17 北京航空航天大学 大束流电子束打靶微束斑x射线源的聚焦装置及其使用方法
WO2018066135A1 (ja) * 2016-10-07 2018-04-12 株式会社ニコン 荷電粒子線装置、電子線発生装置、ｘ線源、ｘ線装置および構造物の製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3141993A (en) * 1959-12-24 1964-07-21 Zeiss Jena Veb Carl Very fine beam electron gun
US5044001A (en) * 1987-12-07 1991-08-27 Nanod Ynamics, Inc. Method and apparatus for investigating materials with X-rays
JP4306110B2 (ja) * 2000-10-04 2009-07-29 株式会社島津製作所 開放型ｘ線管
JP4029209B2 (ja) * 2002-10-17 2008-01-09 株式会社東研 高分解能ｘ線顕微検査装置
US7428298B2 (en) * 2005-03-31 2008-09-23 Moxtek, Inc. Magnetic head for X-ray source

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Publication number Publication date
JP2008234981A (ja) 2008-10-02

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