JP5452446B2 - 磁界重畳型電子銃および当該磁界重畳型電子銃を備えた荷電粒子線装置 - Google Patents

磁界重畳型電子銃および当該磁界重畳型電子銃を備えた荷電粒子線装置 Download PDF

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Publication number
JP5452446B2
JP5452446B2 JP2010242952A JP2010242952A JP5452446B2 JP 5452446 B2 JP5452446 B2 JP 5452446B2 JP 2010242952 A JP2010242952 A JP 2010242952A JP 2010242952 A JP2010242952 A JP 2010242952A JP 5452446 B2 JP5452446 B2 JP 5452446B2
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charged particle
particle beam
coil
electron gun
bobbin
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JP2012094462A5 (enrdf_load_stackoverflow
JP2012094462A (ja
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賢治 青木
大祐 小林
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Hitachi High Tech Corp
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Hitachi High Technologies Corp
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JP2010242952A 2010-10-29 2010-10-29 磁界重畳型電子銃および当該磁界重畳型電子銃を備えた荷電粒子線装置 Expired - Fee Related JP5452446B2 (ja)

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JP2010242952A JP5452446B2 (ja) 2010-10-29 2010-10-29 磁界重畳型電子銃および当該磁界重畳型電子銃を備えた荷電粒子線装置

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JP2010242952A JP5452446B2 (ja) 2010-10-29 2010-10-29 磁界重畳型電子銃および当該磁界重畳型電子銃を備えた荷電粒子線装置

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JP2012094462A JP2012094462A (ja) 2012-05-17
JP2012094462A5 JP2012094462A5 (enrdf_load_stackoverflow) 2013-03-14
JP5452446B2 true JP5452446B2 (ja) 2014-03-26

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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101813467B1 (ko) * 2016-11-29 2017-12-29 주식회사 다원시스 진공내 설치 및 운용이 가능한 솔레노이드 자기장 렌즈의 구성 방법과 그 장치
CN110360919B (zh) * 2019-08-06 2021-04-02 中国电子科技集团公司第四十九研究所 一种超高温位移传感器
US10923307B1 (en) * 2020-04-13 2021-02-16 Hamamatsu Photonics K.K. Electron beam generator

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5360556A (en) * 1976-11-12 1978-05-31 Hitachi Ltd Electric apparatus

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JP2012094462A (ja) 2012-05-17

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