JP5444245B2 - 薄膜フラックスゲートセンサー - Google Patents

薄膜フラックスゲートセンサー Download PDF

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Publication number
JP5444245B2
JP5444245B2 JP2010537592A JP2010537592A JP5444245B2 JP 5444245 B2 JP5444245 B2 JP 5444245B2 JP 2010537592 A JP2010537592 A JP 2010537592A JP 2010537592 A JP2010537592 A JP 2010537592A JP 5444245 B2 JP5444245 B2 JP 5444245B2
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JP
Japan
Prior art keywords
layer
magnetic field
field sensor
current conductor
depositing
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JP2010537592A
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English (en)
Japanese (ja)
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JP2011506958A5 (enExample
JP2011506958A (ja
Inventor
テパン、ウォルフラム
Original Assignee
レム アンテレクチュアル プロペルティ エスアー
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Publication of JP2011506958A5 publication Critical patent/JP2011506958A5/ja
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/04—Measuring direction or magnitude of magnetic fields or magnetic flux using the flux-gate principle
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R15/00—Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
    • G01R15/14—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks
    • G01R15/18—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using inductive devices, e.g. transformers
    • G01R15/183—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using inductive devices, e.g. transformers using transformers with a magnetic core
    • G01R15/185—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using inductive devices, e.g. transformers using transformers with a magnetic core with compensation or feedback windings or interacting coils, e.g. 0-flux sensors

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Magnetic Variables (AREA)
JP2010537592A 2007-12-14 2008-12-12 薄膜フラックスゲートセンサー Active JP5444245B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP07024346A EP2071346A1 (en) 2007-12-14 2007-12-14 Thin film fluxgate sensor
EP07024346.4 2007-12-14
PCT/IB2008/055270 WO2009077959A1 (en) 2007-12-14 2008-12-12 Thin film fluxgate sensor

Publications (3)

Publication Number Publication Date
JP2011506958A JP2011506958A (ja) 2011-03-03
JP2011506958A5 JP2011506958A5 (enExample) 2012-01-19
JP5444245B2 true JP5444245B2 (ja) 2014-03-19

Family

ID=39402663

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010537592A Active JP5444245B2 (ja) 2007-12-14 2008-12-12 薄膜フラックスゲートセンサー

Country Status (5)

Country Link
US (1) US8339133B2 (enExample)
EP (2) EP2071346A1 (enExample)
JP (1) JP5444245B2 (enExample)
CN (1) CN101896828B (enExample)
WO (1) WO2009077959A1 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10165276B2 (en) 2010-09-30 2018-12-25 Texas Instruments Incorporated Method and apparatus for frame coding in vertical raster scan order for HEVC
US9176203B2 (en) 2013-02-05 2015-11-03 Texas Instruments Incorporated Apparatus and method for in situ current measurement in a conductor
US9704637B2 (en) 2013-07-15 2017-07-11 Texas Instruments Incorporated Method and apparatus for demagnetizing transformer cores in closed loop magnetic current sensors
US9291648B2 (en) 2013-08-07 2016-03-22 Texas Instruments Incorporated Hybrid closed-loop/open-loop magnetic current sensor
US9229066B2 (en) 2013-08-15 2016-01-05 Texas Instruments Incorporated Integrated fluxgate magnetic sensor and excitation circuitry
US9261571B2 (en) 2013-08-15 2016-02-16 Texas Instruments Incorporated Fluxgate magnetic sensor readout apparatus
US11448711B2 (en) 2015-03-25 2022-09-20 Texas Instruments Incorporated Simulation models for integrated fluxgate magnetic sensors and other magnetic circuit components
US11092656B2 (en) 2015-05-12 2021-08-17 Texas Instruments Incorporated Fluxgate magnetic field detection method and circuit
CN109358301A (zh) * 2018-09-29 2019-02-19 河南理工大学 一种基于缝纫式线芯结构的微型磁通门传感器

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3545074B2 (ja) * 1994-12-27 2004-07-21 独立行政法人 科学技術振興機構 半導体基板に集積される磁気検出素子及び磁気検出モジュール
KR100464093B1 (ko) * 2002-03-13 2005-01-03 삼성전기주식회사 인쇄회로기판에 집적된 자계검출소자 및 그 제조방법
KR100465335B1 (ko) * 2002-09-18 2005-01-13 삼성전자주식회사 플럭스게이트를 구비한 감지장치
US6885074B2 (en) * 2002-11-27 2005-04-26 Freescale Semiconductor, Inc. Cladded conductor for use in a magnetoelectronics device and method for fabricating the same
JP2004184232A (ja) * 2002-12-03 2004-07-02 Matsushita Electric Ind Co Ltd 磁気検出素子及びその製造方法、並びにその磁気検出素子を用いた磁気検出装置及び方位センサ
EP1746430A1 (en) 2005-07-22 2007-01-24 Liaisons Electroniques-Mecaniques Lem S.A. Orthogonal fluxgate magnetic field sensor
ITMO20050293A1 (it) * 2005-11-09 2007-05-10 M D Micro Detectors S P A Sensore magnetico, particolarmente per la misura di posizione e di spostamento di un oggetto, e relativo procedimento di realizzazione

Also Published As

Publication number Publication date
WO2009077959A1 (en) 2009-06-25
US8339133B2 (en) 2012-12-25
CN101896828B (zh) 2014-12-31
EP2232286A1 (en) 2010-09-29
EP2071346A1 (en) 2009-06-17
EP2232286B1 (en) 2013-02-13
CN101896828A (zh) 2010-11-24
US20100271017A1 (en) 2010-10-28
JP2011506958A (ja) 2011-03-03

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