JP5412027B2 - 脈理が低減された低膨張率ガラスおよび素子ならびにその製造方法 - Google Patents

脈理が低減された低膨張率ガラスおよび素子ならびにその製造方法 Download PDF

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Publication number
JP5412027B2
JP5412027B2 JP2006344018A JP2006344018A JP5412027B2 JP 5412027 B2 JP5412027 B2 JP 5412027B2 JP 2006344018 A JP2006344018 A JP 2006344018A JP 2006344018 A JP2006344018 A JP 2006344018A JP 5412027 B2 JP5412027 B2 JP 5412027B2
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Japan
Prior art keywords
glass
silica
titania
boule
striae
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Expired - Fee Related
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JP2006344018A
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English (en)
Japanese (ja)
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JP2007186412A5 (enExample
JP2007186412A (ja
Inventor
エフ ビール ローリー
イー マクソン ジョン
アール ロッシュ ウィリアム
サビア ロバート
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Corning Inc
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Corning Inc
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Publication date
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Publication of JP2007186412A5 publication Critical patent/JP2007186412A5/ja
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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1453—Thermal after-treatment of the shaped article, e.g. dehydrating, consolidating, sintering
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/06—Glass compositions containing silica with more than 90% silica by weight, e.g. quartz
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
    • C03B2201/40—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with transition metals other than rare earth metals, e.g. Zr, Nb, Ta or Zn
    • C03B2201/42—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with transition metals other than rare earth metals, e.g. Zr, Nb, Ta or Zn doped with titanium

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Thermal Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Glass Compositions (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Glass Melting And Manufacturing (AREA)
JP2006344018A 2005-12-21 2006-12-21 脈理が低減された低膨張率ガラスおよび素子ならびにその製造方法 Expired - Fee Related JP5412027B2 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US75305805P 2005-12-21 2005-12-21
US60/753,058 2005-12-21
US11/445,071 US20070137253A1 (en) 2005-12-21 2006-05-31 Reduced striae low expansion glass and elements, and a method for making same
US11/445,071 2006-05-31

Publications (3)

Publication Number Publication Date
JP2007186412A JP2007186412A (ja) 2007-07-26
JP2007186412A5 JP2007186412A5 (enExample) 2012-10-11
JP5412027B2 true JP5412027B2 (ja) 2014-02-12

Family

ID=38171829

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006344018A Expired - Fee Related JP5412027B2 (ja) 2005-12-21 2006-12-21 脈理が低減された低膨張率ガラスおよび素子ならびにその製造方法

Country Status (3)

Country Link
US (1) US20070137253A1 (enExample)
JP (1) JP5412027B2 (enExample)
DE (1) DE102006060362B4 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070263281A1 (en) * 2005-12-21 2007-11-15 Maxon John E Reduced striae low expansion glass and elements, and a method for making same
JP2011505318A (ja) * 2007-11-30 2011-02-24 コーニング インコーポレイテッド 低い膨張係数勾配を有する低膨張性ガラス材料
US20100101387A1 (en) * 2008-10-24 2010-04-29 Kedar Prasad Gupta Crystal growing system and method thereof
DE102009047460A1 (de) 2009-02-11 2010-08-12 Carl Zeiss Smt Ag Verfahren zum Ausschneiden eines Rohlings aus einer Boule
US8713969B2 (en) * 2009-08-31 2014-05-06 Corning Incorporated Tuning Tzc by the annealing of ultra low expansion glass
US10483101B2 (en) * 2016-06-30 2019-11-19 Corning Incorporated Glass-based article with engineered stress distribution and method of making same

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69635662T2 (de) * 1995-09-12 2006-08-10 Corning Inc. Verfahren und Ofen zur Herstellung von Quarzglas mit reduziertem Gehalt an Schlieren
WO1997010184A1 (en) * 1995-09-12 1997-03-20 Corning Incorporated Boule oscillation patterns for producing fused silica glass
WO1997010183A1 (en) * 1995-09-12 1997-03-20 Corning Incorporated Containment vessel for producing fused silica glass
US5970751A (en) * 1998-09-22 1999-10-26 Corning Incorporated Fused SiO2 -TiO2 glass method
KR100662319B1 (ko) * 1999-07-05 2006-12-28 가부시키가이샤 니콘 석영글래스 부재의 제조방법 및 그 방법에 의해 얻어지는석영글래스 부재
US6997015B2 (en) * 2001-11-27 2006-02-14 Corning Incorporated EUV lithography glass structures formed by extrusion consolidation process
US7053017B2 (en) * 2002-03-05 2006-05-30 Corning Incorporated Reduced striae extreme ultraviolet elements
JP2004131373A (ja) * 2002-09-09 2004-04-30 Corning Inc シリカ・チタニア極端紫外線光学素子の製造方法

Also Published As

Publication number Publication date
DE102006060362B4 (de) 2015-12-17
US20070137253A1 (en) 2007-06-21
DE102006060362A1 (de) 2007-08-09
JP2007186412A (ja) 2007-07-26

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