JP5395708B2 - 基板の配線方法及び半導体製造装置 - Google Patents
基板の配線方法及び半導体製造装置 Download PDFInfo
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Description
まず、本発明の一実施形態に係るクラスタ装置の概略構成について、図1を参照しながら説明する。クラスタ装置10は、ウエハWを収容し内部を密閉することができる真空の処理容器100を有している。処理容器100は、遮断器120により仕切られ、ガス供給室100a、処理室100bの2つに分かれている。ガス供給室100a、処理室100bの底部には、各室内を排気する排気口105a、105bがそれぞれ形成され、各室内の雰囲気を真空引きする排気ポンプ(図示せず)が接続されている。
次に、クラスタ化された金属ガスの衝突状態について、図1を参照しながら説明する。前述したように、図1に示した金属ガスは、ガスノズル110から処理容器100の内部に放出され、クラスタ化される。クラスタ化された金属ガス(金属ガスクラスタCg)は、数百万〜数千万個の分子の集合体である。このように、クラスタ化された金属ガス分子は、寄り固まって形成された塊のため、分子がそれぞれ一つずつ持っている運動エネルギーよりも高い運動エネルギーを持っている。
次に、本実施形態に係る配線方法について、図3(a)〜図3(c)を参照しながら説明する。図3(a)は、配線用パターンの洗浄工程を示す。
図3(a)では、CUの埋め込みの前工程として、ビアホール24a及びトレンチ24bを所望のクリーニングガスにより洗浄する。クリーニングガスとしては、NH4OH,H2O2,HCL,H2SO4、HF,NH4Fの少なくともいずれか、又はこれらの組み合わせ又はこれらの組合せを使用することができる。このように反応性の高いNH4OH等の洗浄薬液(NH4OH・・・)等を気相状にして配線用パターンを洗浄する。
前工程後、クラスタ化された金属ガス(金属ガスクラスタCg)を用いて配線用パターン内に金属ナノ粒子を埋め込む埋め込み工程が実行される。
次に、図3(c)に示したように、バリア材32が形成された配線用パターンの内部にCuを埋め込む工程が実行される。埋め込まれたCuは、配線層35となる。配線用パターン内にCuを埋め込む方法としては、例えば、電解めっき法により配線用パターンにCuを埋め込み、溝内に埋め込まれた部分以外のCu膜を化学機械研磨により除去して配線層35を形成してもよい。また、バリア材32を形成する金属ナノ粒子からナノ構造体を成長させることにより配線層35を形成してもよい。以下、金属ナノ粒子からナノ構造体を成長させるナノチューブ製造装置について簡単に説明する。
金属ナノ粒子のバリア材32が形成されたウエハWは、真空状態を維持したまま、図1に示したクラスタ装置10から、ナノチューブ製造装置内に搬送される。ナノチューブ製造装置は、搬入されたウエハW上の金属ナノ粒子を成長させてナノチューブを製造する。
本実施形態に係る基板の配線方法は、以上のように半導体チップ内の配線工程に用いることができるだけでなく、半導体チップ間の配線工程にも用いることができる。近年、半導体チップの内部を貫通するスルーホール(TSV:Through−Silicon Via)の電極を用いて、上下の半導体チップ間を電気的に接続する立体配線技術が提案されている。図6では、上部半導体チップ400の内部にスルーホール(TSV)405が形成されている。このスルーホール405に配線を通し、スルーホール405及びバンプ505を介して上部半導体チップ400のパッド電極410と下部半導体チップ500のパッド電極510とを導通する。
20、24 Low−k膜
21 バリアメタル
22 Cu配線層
24a ビアホール
24b トレンチ
32 バリア材
35 配線層
100 処理容器
100a ガス供給室
100b 処理室
110 ガスノズル
110a ガスノズルの出口
120 遮断器
155 保持部材
300 ナノチューブ製造装置
400 上部半導体チップ
405 スルーホール
500 下部半導体チップ
505 バンプ
B ビア底
Cg 金属ガスクラスタ
Claims (7)
- 真空状態に保持された処理容器内にて、配線用パターンが形成された基板を配線する方法であって、
基板上の配線用パターンを所望のクリーニングガスにより洗浄する前工程と、
前工程後、クラスタ化された金属ガスを用いて前記配線用パターン内に金属ナノ粒子を埋め込む埋め込み工程と、を含み、
前記埋め込み工程は、前記配線用パターンの表面に前記金属ナノ粒子を埋め込むことにより、金属のバリア材を形成する工程と、
前記バリア材が形成された前記配線用パターンの内部に配線となる金属を埋め込む工程とを含むことを特徴とする基板の配線方法。 - 前記埋め込み工程は、金属ソースを、内部圧力PSが前記処理容器の内部圧力P0より高圧に保持されたガスノズルから前記処理容器内に放出することによりクラスタ化することを特徴とする請求項1に記載の基板の配線方法。
- 前記ガスノズルの内部圧力PSは、0.4MPa以上であり、
前記処理容器の内部圧力P0は、1.5Pa以下であることを特徴とする請求項2又は3に記載の基板の配線方法。 - 前記ガスノズルの内部圧力PSは、0.9MPa以下であることを特徴とする請求項2〜4のいずれか一項に記載の基板の配線方法。
- 前記基板の配線方法は、半導体チップ内の配線工程、又は半導体チップ間の配線工程に用いられることを特徴とする請求項1〜5のいずれか一項に記載の基板の配線方法。
- 真空状態に保持された処理容器内にて、配線用パターンが形成された基板を配線する半導体製造装置であって、
前記半導体製造装置は、内部圧力PSが前記処理容器の内部圧力P0より高圧に保持されたガスノズルを備え、
基板上の配線用パターンを所望のクリーニングガスにより洗浄する前工程と、前記前工程後、前記ガスノズルから金属ソースを前記処理容器内に放出することによりクラスタ化された金属ガスを生成し、該クラスタ化された金属ガスを用いて前記配線用パターン内に金属ナノ粒子を埋め込む埋め込み工程と、を含み、
前記埋め込み工程においては、前記配線用パターンの表面に前記金属ナノ粒子を埋め込むことにより、金属のバリア材を形成する工程と、
前記バリア材が形成された前記配線用パターンの内部に配線となる金属を埋め込む工程とを含む工程を実行することを特徴とする半導体製造装置。
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PCT/JP2011/053893 WO2011111524A1 (ja) | 2010-03-09 | 2011-02-23 | 基板の配線方法及び半導体製造装置 |
CN201180008696.7A CN102754194B (zh) | 2010-03-09 | 2011-02-23 | 基板的配线方法和半导体制造装置 |
US13/583,438 US8940638B2 (en) | 2010-03-09 | 2011-02-23 | Substrate wiring method and semiconductor manufacturing device |
KR1020127026433A KR101393747B1 (ko) | 2010-03-09 | 2011-02-23 | 기판의 배선 방법 및 반도체 제조 장치 |
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