JP5393150B2 - レーザビームのフォーカス位置の決定方法 - Google Patents

レーザビームのフォーカス位置の決定方法 Download PDF

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Publication number
JP5393150B2
JP5393150B2 JP2008517330A JP2008517330A JP5393150B2 JP 5393150 B2 JP5393150 B2 JP 5393150B2 JP 2008517330 A JP2008517330 A JP 2008517330A JP 2008517330 A JP2008517330 A JP 2008517330A JP 5393150 B2 JP5393150 B2 JP 5393150B2
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Prior art keywords
laser beam
focus position
workpiece
thin plate
laser
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JP2008517330A
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Japanese (ja)
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JP2008543572A (ja
JP2008543572A5 (https=
Inventor
ショリッヒ−テスマン ヴォルフガング
ミリッヒ アンドレアス
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Trumpf Werkzeugmaschinen SE and Co KG
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Trumpf Werkzeugmaschinen SE and Co KG
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
JP2008517330A 2005-06-23 2005-06-23 レーザビームのフォーカス位置の決定方法 Expired - Fee Related JP5393150B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2005/006805 WO2006136192A1 (de) 2005-06-23 2005-06-23 Verfahren zur bestimmung der fokuslage eines laserstrahls

Publications (3)

Publication Number Publication Date
JP2008543572A JP2008543572A (ja) 2008-12-04
JP2008543572A5 JP2008543572A5 (https=) 2013-08-29
JP5393150B2 true JP5393150B2 (ja) 2014-01-22

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ID=35717534

Family Applications (1)

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JP2008517330A Expired - Fee Related JP5393150B2 (ja) 2005-06-23 2005-06-23 レーザビームのフォーカス位置の決定方法

Country Status (7)

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US (1) US8304691B2 (https=)
EP (1) EP1750891B1 (https=)
JP (1) JP5393150B2 (https=)
CN (1) CN101208171B (https=)
AT (1) ATE376473T1 (https=)
DE (1) DE502005001790D1 (https=)
WO (1) WO2006136192A1 (https=)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007047298B3 (de) * 2007-10-02 2009-04-09 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Verfahren zur Fokuslagenbestimmung und Laserbearbeitungsdüse
DE102007063627B4 (de) 2007-10-02 2010-08-12 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Verfahren zur Bestimmung der Lage eines Laserstrahls relativ zu einer Öffnung, sowie Laserbearbeitungsmaschine
US8938317B2 (en) * 2012-01-10 2015-01-20 Mitsubishi Electronic Research Laboratories, Inc. System and method for calibrating laser cutting machines
DE102012100721B3 (de) * 2012-01-30 2013-04-11 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Verfahren zum Regeln eines Laserschneidprozesses und Laserschneidmaschine
DE102013217126B4 (de) * 2013-08-28 2015-09-03 Trumpf Laser- Und Systemtechnik Gmbh Verfahren zum Feststellen von Abweichungen einer Ist-Lage eines Laserbearbeitungskopfes von einer Soll-Lage, Laserbearbeitungsmaschine und Computerprogrammprodukt
DE102015224963B3 (de) * 2015-12-11 2017-04-13 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Verfahren zur Bestimmung der Referenz-Fokuslage eines Laserstrahls
DE102016111455B4 (de) 2016-06-22 2019-07-25 Trumpf Laser- Und Systemtechnik Gmbh Verfahren zur Bestimmung einer Referenz-Fokuslage sowie Werkzeugmaschine
DE102016219928A1 (de) 2016-10-13 2018-04-19 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Verfahren und Vorrichtung zur Bestimmung und zur Regelung einer Fokusposition eines Bearbeitungsstrahls
DE102018105364B4 (de) * 2018-03-08 2020-06-25 Precitec Gmbh & Co. Kg Vorrichtung zur Bestimmung einer Fokuslage eines Laserstrahls in einem Laserbearbeitungssystem, Laserbearbeitungssystem mit derselben und Verfahren zur Bestimmung einer Fokuslage eines Laserstrahls in einem Laserbearbeitungssystem
CN110711937B (zh) * 2019-11-14 2022-01-04 安徽同兴科技发展有限责任公司 一种切割机激光对焦的参数确定方法
CN112935530B (zh) * 2021-04-25 2022-12-13 山东大学深圳研究院 一种确定脉冲激光焦点位置的方法及装置
EP4094879A1 (en) * 2021-05-28 2022-11-30 Volvo Car Corporation Method of laser welding
CN117644306B (zh) * 2024-01-30 2024-05-03 武汉新耐视智能科技有限责任公司 一种用于机器人激光远程焊接设备的焦点检测装置及方法

Family Cites Families (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2083216B (en) 1980-09-02 1984-01-11 Amada Co Ltd Determining the focus position of focused beams
JPS5978792A (ja) * 1982-10-29 1984-05-07 Mitsubishi Electric Corp レ−ザ−加工機用焦点追従装置
JPS60227995A (ja) * 1984-04-27 1985-11-13 Mitsubishi Electric Corp レ−ザ加工装置
JPS63180392A (ja) * 1987-01-22 1988-07-25 Toyota Motor Corp 加工レンズの焦点距離調整装置
DE3926859A1 (de) * 1988-12-30 1990-07-05 Fraunhofer Ges Forschung Verfahren und vorrichtung zum bearbeiten von werkstuecken mit laserstrahlung
JP2677856B2 (ja) * 1989-02-23 1997-11-17 株式会社アマダ レーザ加工方法
DE8914687U1 (de) 1989-12-14 1990-03-22 Arnold, Peter, Dr., 8000 München Vorrichtung zur Messung des Fokusortes von fokussierten Laserstrahlen aus Leistungslasern
DE4025577C2 (de) * 1990-08-11 1999-09-09 Fraunhofer Ges Forschung Vorrichtung zum berührungslosen Messen des Abstands von einem Objekt
DE4106007A1 (de) * 1991-02-26 1992-09-03 Fraunhofer Ges Forschung Verfahren und vorrichtung zum bearbeiten von werkstuecken mit laserstrahlung
DE69219101T2 (de) 1992-02-03 1997-07-24 Matsushita Electric Ind Co Ltd Laserbearbeitungsvorrichtung und Verfahren zum Einstellen der Höhe des Kondensor
JPH06254691A (ja) 1993-03-08 1994-09-13 Mitsubishi Electric Corp レーザ加工機およびレーザ加工機の焦点設定方法
JPH0716779A (ja) * 1993-06-30 1995-01-20 Matsushita Electric Ind Co Ltd レーザ加工機用焦点調整装置
JP3259462B2 (ja) * 1993-08-30 2002-02-25 松下電器産業株式会社 レーザ加工機の焦点位置検出方法およびその装置
JPH07112288A (ja) * 1993-10-14 1995-05-02 Nikon Corp レーザ加工装置
JPH07232290A (ja) * 1994-02-23 1995-09-05 Matsushita Electric Ind Co Ltd レーザ加工機用焦点調整装置
JP3209641B2 (ja) 1994-06-02 2001-09-17 三菱電機株式会社 光加工装置及び方法
FR2726496B1 (fr) * 1994-11-09 1997-01-17 Aerospatiale Procede de localisation spatiale du point focal d'un faisceau laser d'une machine d'usinage et outillage pour la mise en oeuvre de ce procede
SE508228C2 (sv) * 1997-05-07 1998-09-14 Inst Verkstadstek Forsk Ivf Anordning för detektering och beräkning av en laserstråles fokusläge, form och effektfördelning
DE19852302A1 (de) * 1998-11-12 2000-05-25 Fraunhofer Ges Forschung Verfahren und Vorrichtung zum Bearbeiten von Werkstücken mit Hochenergiestrahlung
DE19857694C2 (de) * 1998-12-14 2001-07-19 Precitec Gmbh Verfahren und Vorrichtung zum Einstellen der Fokuslage eines auf ein Werkstück gerichteten Laserstrahls
JP3222430B2 (ja) * 1999-01-20 2001-10-29 ファナック株式会社 レーザ加工装置及び調整方法
US6355908B1 (en) * 1999-03-31 2002-03-12 Matsushita Electric Industrial Co., Ltd. Method and apparatus for focusing a laser
AU4280700A (en) * 1999-04-27 2000-11-10 Gsi Lumonics Inc. Laser calibration apparatus and method
US6303903B1 (en) 1999-08-11 2001-10-16 Matsushita Electric Industrial Co., Ltd Method and apparatus for determining focus position of a laser
JP2001150171A (ja) * 1999-11-26 2001-06-05 Nippon Sharyo Seizo Kaisha Ltd レーザ加工機のフォーカス調整方法およびその装置
JP2001340979A (ja) * 2000-03-30 2001-12-11 Toyota Auto Body Co Ltd レーザ加工装置
JP2002239768A (ja) * 2001-02-15 2002-08-28 Komatsu Ltd レーザ加工装置
JP4519352B2 (ja) 2001-04-12 2010-08-04 財団法人神奈川科学技術アカデミー 微細加工装置
DE10131610C1 (de) 2001-06-29 2003-02-20 Siemens Dematic Ag Verfahren zur Kalibrierung des optischen Systems einer Lasermaschine zur Bearbeitung von elektrischen Schaltungssubstraten
US6646728B1 (en) * 2001-07-09 2003-11-11 3D Systems, Inc. Calibrating a focused beam of energy in a solid freeform fabrication apparatus by measuring the propagation characteristics of the beam
DE10160623B4 (de) * 2001-12-11 2011-06-09 Precitec Kg Vorrichtung und Verfahren zum Überwachen eines Laserbearbeitungsvorgangs, insbesondere eines Laserschweißvorgangs
US6621060B1 (en) * 2002-03-29 2003-09-16 Photonics Research Ontario Autofocus feedback positioning system for laser processing
US20030227614A1 (en) * 2002-06-05 2003-12-11 Taminiau August A. Laser machining apparatus with automatic focusing
DE10229498A1 (de) 2002-07-01 2004-01-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zur Durchführung der Plasmaemissionsspektrometrie
DE10244548B4 (de) * 2002-09-25 2010-12-02 Robert Bosch Gmbh Verfahren zur Bestimmung der Fokuslage bei der Lasermaterialbearbeitung
US6992765B2 (en) * 2002-10-11 2006-01-31 Intralase Corp. Method and system for determining the alignment of a surface of a material in relation to a laser beam
DE10248458B4 (de) * 2002-10-17 2006-10-19 Precitec Kg Verfahren und Vorrichtung zum Einstellen der Fokuslage eines auf ein Werkstück gerichteten Laserstrahls
DE10255628A1 (de) 2002-11-28 2004-07-08 Siemens Ag Verfahren zur Bestimmung der Fokuslage eines Laserstrahls
DE10329744A1 (de) 2003-07-02 2004-09-30 Robert Bosch Gmbh Verfahren zur Bestimmung der Fokuslage eines Laserstrahls bezüglich einer Festkörperoberfläche

Also Published As

Publication number Publication date
CN101208171A (zh) 2008-06-25
ATE376473T1 (de) 2007-11-15
WO2006136192A1 (de) 2006-12-28
US20080180657A1 (en) 2008-07-31
EP1750891A1 (de) 2007-02-14
JP2008543572A (ja) 2008-12-04
EP1750891B1 (de) 2007-10-24
US8304691B2 (en) 2012-11-06
CN101208171B (zh) 2011-01-12
DE502005001790D1 (de) 2007-12-06

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