JP5372600B2 - 真空チャック装置及び加工装置 - Google Patents

真空チャック装置及び加工装置 Download PDF

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Publication number
JP5372600B2
JP5372600B2 JP2009124093A JP2009124093A JP5372600B2 JP 5372600 B2 JP5372600 B2 JP 5372600B2 JP 2009124093 A JP2009124093 A JP 2009124093A JP 2009124093 A JP2009124093 A JP 2009124093A JP 5372600 B2 JP5372600 B2 JP 5372600B2
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Japan
Prior art keywords
vacuum
suction
hole
workpiece
positioning
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Expired - Fee Related
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JP2009124093A
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Japanese (ja)
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JP2010269415A (ja
JP2010269415A5 (cg-RX-API-DMAC7.html
Inventor
弘明 宮澤
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Shinko Electric Industries Co Ltd
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Shinko Electric Industries Co Ltd
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Priority to JP2009124093A priority Critical patent/JP5372600B2/ja
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Publication of JP2010269415A5 publication Critical patent/JP2010269415A5/ja
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JP2009124093A 2009-05-22 2009-05-22 真空チャック装置及び加工装置 Expired - Fee Related JP5372600B2 (ja)

Priority Applications (1)

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JP2009124093A JP5372600B2 (ja) 2009-05-22 2009-05-22 真空チャック装置及び加工装置

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Application Number Priority Date Filing Date Title
JP2009124093A JP5372600B2 (ja) 2009-05-22 2009-05-22 真空チャック装置及び加工装置

Publications (3)

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JP2010269415A JP2010269415A (ja) 2010-12-02
JP2010269415A5 JP2010269415A5 (cg-RX-API-DMAC7.html) 2012-04-05
JP5372600B2 true JP5372600B2 (ja) 2013-12-18

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JP2009124093A Expired - Fee Related JP5372600B2 (ja) 2009-05-22 2009-05-22 真空チャック装置及び加工装置

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JP (1) JP5372600B2 (cg-RX-API-DMAC7.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102837211A (zh) * 2012-09-04 2012-12-26 大连职业技术学院 薄板类零件加工的真空夹具
CN106584165B (zh) * 2016-10-19 2019-07-12 广州市昊志机电股份有限公司 一种具有真空吸功能的转台装置
CN117697491A (zh) * 2023-12-29 2024-03-15 东方电气集团东方锅炉股份有限公司 一种工件定位组件

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3109335B2 (ja) * 1993-07-27 2000-11-13 富士ゼロックス株式会社 位置決め装置
JPH0794535A (ja) * 1993-09-20 1995-04-07 Nec Corp 半導体ペレット位置決め装置
JP2007098526A (ja) * 2005-10-05 2007-04-19 Hitachi Computer Peripherals Co Ltd 微小部品の吸着固定装置

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JP2010269415A (ja) 2010-12-02

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