JP5372600B2 - Vacuum chuck device and processing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a vacuum chuck device capable of obtaining sufficient positional precision when fixing a workpiece. <P>SOLUTION: This vacuum chuck device includes: a support part 22; a suction part 24 provided on the support part 22 and loading a workpiece 40 on it, a vacuum hole 26 provided integrally between the support part 22 and the suction part 24; a suction hole 24a for suction formed in the suction part 24 and communicating with the vacuum hole 26; an exhaust port 22a formed in the support part 22, communicating with the vacuum hole 26, and connected with an exhaust means 28; a suction hole 24b for positioning provided in the suction part 24 along internal wall lines W1, W2 on two sides constituting a bent part B of the vacuum hole 22 and communicating with the vacuum hole 26; and guide members 30, 32 provided on outer side of the internal wall lines W1, W2 on two sides on the suction part 24 to position the workpiece 40. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  The present invention relates to a vacuum chuck device and a processing device, and more particularly to a vacuum chuck device for fixing a workpiece by vacuum suction and a processing device including the same.

  2. Description of the Related Art Conventionally, a processing apparatus for processing a workpiece such as a plate material is provided with a chuck device for fixing the workpiece. As a fixing method of the chuck device, there are a side clamp method in which the side surface of the workpiece is fixed with a vice or the like, a vacuum suction method in which the workpiece is fixed by vacuum suction, or a method using both of them.

  Patent Document 1 discloses a punching device for a plate-shaped workpiece, and a charging device that holds the plate-shaped workpiece and transfers it to a drilling device in order to easily and quickly replace a jig plate. Describes that a jig plate is detachably provided.

  Patent Document 2 discloses a semiconductor pellet positioning device, which moves a semiconductor pellet to a predetermined position without applying a vertical force other than its own weight to the positioning table for sucking and holding the semiconductor pellet and the semiconductor pellet transferred thereto. And positioning means for positioning.

JP 2004-261924 A JP-A-7-94535

  As will be described later in the related art section, in the side clamp method, the work clamp side is likely to be slightly lifted, making it difficult to perform drilling perpendicular to the work substrate direction.

  In the vacuum suction method, a guide is provided on the outer peripheral side of the workpiece placement area in order to reduce the displacement of the workpiece when vacuum suctioning the workpiece. However, since it is necessary to provide a clearance (gap) between the guide and the workpiece, there is a limit to the suppression of misalignment, and it is difficult to obtain sufficient positional accuracy.

  The present invention has been created in view of the above problems, and an object of the present invention is to provide a vacuum chuck device capable of obtaining sufficient positional accuracy when a workpiece is fixed, and a processing device including the same.

In order to solve the above-described problems, the present invention relates to a vacuum chuck device. and the vacuum holes provided integrally, and a plurality of suction suction holes formed in said suction unit in a state in which the communicating with the vacuum holes, formed in the support portion, the exhaust means to communicate with the vacuum holes an exhaust port connected, wherein formed in the suction portion while passing through the vacuum holes and the communication among the sides of the outer shape of the vacuum holes, arranged along the inner wall line of two sides forming the bent portion A plurality of positioning suction holes and a guide member provided on the outer side of the inner wall line of the two sides on the suction portion for positioning the workpiece.

  In the vacuum chuck device of the present invention, the suction part is provided on the support part, and a vacuum hole is integrally formed between them. A suction hole for suction communicating with the vacuum hole is formed in the suction portion. Further, an exhaust port communicating with the vacuum hole is formed in the support portion, and the exhaust port is connected to the exhaust means.

  Further, the suction portion is formed with a positioning suction hole communicating with the vacuum hole along two inner wall lines constituting the bent portion of the vacuum hole. When the vacuum hole has a square shape, positioning suction holes are arranged along two inner wall lines constituting the corner. A guide member for positioning the workpiece is provided outside the inner wall lines on the two sides of the vacuum hole in which the positioning suction holes are arranged.

  In the present invention, two sides of the workpiece are brought into contact with the guide member, the workpiece is placed on the suction portion, and the air in the vacuum hole is decompressed by the exhaust means, so that the workpiece is sucked to the suction portion.

  At this time, when air is exhausted from the positioning suction hole, a propulsive force is applied to move the workpiece to the bent portion side of the vacuum hole. As a result, the workpiece is fixed to the suction portion with high positional accuracy by completely contacting the guide member disposed at the reference position.

  In the vacuum chuck device of the present invention, since the workpiece is sucked horizontally without tilting on the suction portion, when the reference hole for alignment is formed in the workpiece, the workpiece can be processed perpendicularly to the substrate direction of the workpiece. it can.

  Further, when a large number of workpieces are treated, the workpieces are positioned in contact with the guide member arranged at the reference position, so that the reference hole can be formed with high positional accuracy.

  For this reason, when a plurality of workpieces in which reference holes and the like are formed are stacked and used as a jig, the plurality of workpieces are positioned with high accuracy, so that the workpiece can sufficiently function.

  Further, by disposing the guide member only on the outer side of the inner wall line on the two sides of the vacuum hole in which the positioning suction holes are disposed, the region on the opposite side of the inner wall line on the two sides can be freed. As a result, workpieces of different sizes can be arranged on one vacuum chuck jig, and the cost can be reduced.

  As described above, in the present invention, sufficient positional accuracy can be obtained when the workpiece is fixed.

FIGS. 1A and 1B are a side view and a plan view showing a first chuck device (side clamp method) according to the related art. FIGS. 2A and 2B are a side view and a plan view showing a second chuck device (vacuum suction method) of the related art. FIG. 3 is a plan view showing an example in which the workpiece of FIG. 2B is attracted by being displaced in the upper right direction. 4A and 4B are a sectional view and a plan view showing the vacuum chuck device according to the first embodiment of the present invention, and FIG. 4A is a sectional view taken along line II in FIG. 4B. It corresponds to the figure. FIG. 5 is a cross-sectional view and a plan view showing a state in which a workpiece is adsorbed to the vacuum chuck device of FIGS. 4A and 4B, and FIG. 5A is along II-II of FIG. 5B. It corresponds to a cross-sectional view. FIG. 6 is a plan view showing variations in the size of the workpiece that can be arranged in the vacuum chuck device of the first embodiment of the present invention. 7A and 7B are a cross-sectional view and a plan view showing a vacuum chuck device according to a second embodiment of the present invention, and FIG. 7A is a cross-section taken along line III-III in FIG. 7B. It corresponds to the figure. 8A and 8B are a cross-sectional view and a plan view showing a vacuum chuck device according to a third embodiment of the present invention, and FIG. 8A is a cross-section taken along IV-IV in FIG. 8B. It corresponds to the figure.

  Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

(Related technology)
Prior to describing embodiments of the present invention, problems of related technologies related to the present invention will be described. FIGS. 1A and 1B show a first chuck device (side clamp method) of related art. FIG. 1A corresponds to a side view of FIG. 1B viewed from the front.

  As shown in FIGS. 1 (a) and 1 (b), the first chuck device (side clamp method) of the related art includes a fixing jig 200 provided on a mounting base 100 of a processing device (not shown). I have. A square workpiece placement area A on which the workpiece 300 is placed is defined on the surface of the fixing jig 200.

  Fixing guides 400a and 400b fixed to the fixing jig 200 are respectively provided on the upper and right sides outside the outer periphery of the work placement area A of the fixing jig 200. Further, on the lower side and the left side, movement guides 400c and 400d arranged so as to be movable in the horizontal direction are provided.

  In the vicinity of the two movement guides 400c and 400d, air cylinders 500 are arranged to push and move them toward the workpiece 300, respectively.

  When the workpiece 300 is fixed to the workpiece placement area A of the fixing jig 200, first, the movement guides 400c and 400d are moved to the outside of the workpiece placement area A, and the workpiece 300 is arranged in the workpiece placement area A. . Then, by moving the air cylinder 500 in the horizontal direction and pushing the movement guides 400c and 400d toward the workpiece 300, the workpiece 300 is sandwiched and fixed between the movement guides 400c and 400d and the fixed guides 400a and 400b. .

  Here, when the air cylinder 500 is moved in the horizontal direction, since the air cylinder 500 has an operation clearance (backlash) in the vertical direction (vertical direction), the movement guides 400c and 400d side of the workpiece 300 slightly floats upward. Often fixed in a state.

  For this reason, when the reference hole penetrating through the workpiece 300 is formed, the workpiece 300 is processed in an inclined state, so that it is impossible to form a reference hole having an inner surface perpendicular to the substrate direction of the workpiece 300. .

  When a plurality of workpieces 300 formed with reference holes are stacked and used as a jig, guide pins are inserted into the reference holes of the stacked workpieces 200 and positioned. At this time, if the reference hole is formed in a non-perpendicular direction with respect to the substrate direction of the workpiece 300, there is a problem in that the positional deviation occurs between the plurality of workpieces 300 and the jig 300 does not function sufficiently.

  FIGS. 2A and 2B show a second chuck device (vacuum suction method) of the related art. FIG. 2A corresponds to a side view of FIG. 2B viewed from the front.

  As shown in FIGS. 2A and 2B, the second chuck device (vacuum suction method) of the related art is a vacuum chuck jig 220 provided on a mounting base 100 of a processing device (not shown). It has. On the surface of the vacuum chuck jig 220, a square work placement area A for placing the work 300 (displayed in perspective) is defined. A vacuum hole 240 is integrally formed inside the vacuum chuck jig 220.

  The vacuum chuck jig 220 on the upper side of the vacuum hole 240 is provided with a plurality of suction holes 220 a communicating with the vacuum hole 240. Further, the vacuum chuck jig 220 below the vacuum hole 240 is provided with an exhaust port 220b communicating with the vacuum hole 240, and the air in the vacuum hole 240 is exhausted to the outside from the exhaust port 220b by a vacuum pump. .

  Eight guide pins 260 for positioning the workpiece 300 are provided on the outer periphery of the workpiece placement area A of the vacuum chuck jig 220. Then, the workpiece 300 is arranged in the workpiece placement area A of the vacuum chuck jig 220.

  Here, as shown in FIG. 2B, since the external dimensions of the workpiece 300 vary to some extent, the guide pin 260 is provided so that a clearance C (gap) is provided between the workpiece 300 and the guide pin 260. Need to be placed.

  After that, the work 300 is adsorbed to the vacuum chuck jig 220 by exhausting the air in the vacuum hole 240 from the exhaust port 220b to the outside and reducing the pressure by the vacuum pump.

  At this time, since a clearance C is generated between the workpiece 300 and the guide pin 260, the workpiece 300 moves to an arbitrary guide pin 260 side, and the guide pin 260 serves as a stopper to fix the workpiece 300. .

  FIG. 3 shows an example in which the workpiece 300 of FIG. 2B is moved and attracted in the upper right direction, and is positioned by contacting the upper and right guide pins 260.

  When a large number of workpieces 300 are processed, the workpieces 300 move in an arbitrary direction by the maximum amount of the clearance C when being sucked. For this reason, the reference holes are formed so as to be shifted from each other among the large number of workpieces 300, and it is difficult to form the reference holes with sufficient positional accuracy. Needless to say, when the guide pin 260 is not provided, the positional deviation further increases.

  In addition, when the first chuck device (side clamp method) and the second chuck device (vacuum suction method) are used in combination, the disadvantages of both are reduced, but the pressing force and vacuum suction force of the air cylinder 500 are reduced. Adjustment is difficult, and it is extremely difficult to suppress positional deviation within the required specifications.

  In particular, in the above-described second chuck device (vacuum suction method), it is necessary to dispose the guide pins 260 on the four sides of the workpiece placement area A. Therefore, each workpiece 300 having a different external shape has a size corresponding to it. It is necessary to prepare the vacuum chuck jig 220, which causes a problem of increasing the manufacturing cost.

  The chuck device according to this embodiment of the present invention described below can solve the above-described problems.

(First embodiment)
4A and 4B are a sectional view and a plan view showing the vacuum chuck device according to the first embodiment of the present invention, and FIG. 4A is a sectional view taken along line II in FIG. 4B. FIG.

  As shown in FIGS. 4A and 4B, the vacuum chuck device 1 of the first embodiment includes a vacuum chuck jig 20 provided on a mounting base 10 of a processing device (not shown). . The vacuum chuck jig 20 includes a support portion 22 and a suction portion 24 provided thereon.

  A concave portion 21 is formed on the upper surface side of the support portion 22, and a plate-like suction portion 24 is provided on the support portion 22. As a result, a square vacuum hole 26 which is hollowed out by hollowing out is integrally formed in the vacuum chuck jig 20. Or you may comprise the vacuum hole 26 by providing the adsorption | suction part 24 in which the recessed part was formed in the lower surface side on the plate-shaped support part 22. FIG.

  The support plate 22 and the suction portion 24 are formed from a metal such as stainless steel.

  The suction part 24 disposed on the vacuum hole 26 is formed with a plurality of suction holes 24a for suction that communicate with the vacuum hole 26 and penetrate in the thickness direction. The diameter of the suction hole 24a for suction is, for example, about 10 mm.

  Further, the support portion 22 disposed under the vacuum hole 26 is provided with an exhaust port 22a that communicates with the vacuum hole 26 and penetrates in the thickness direction. A vacuum pump 28 (exhaust means) is connected to the exhaust port 22a, and the air in the vacuum hole 26 is exhausted and reduced in pressure by the vacuum pump 28.

  Further, as shown in FIG. 4B, when attention is paid to the upper inner wall line W1 and the right inner wall line W2 intersecting at the intersection B in the four inner wall lines of the rectangular vacuum hole 26, the left side of the intersection B extends to the left. Positioning suction holes 24b are formed side by side in the portion of the suction portion 24 on the existing upper inner wall line W1. Similarly, positioning suction holes 24b are formed side by side in the portion of the suction portion 24 on the right inner wall line W2 extending downward from the intersection B.

  In the present embodiment, the upper and lower inner wall lines W1, W2 intersect to form a bent portion.

  In the positioning suction hole 24b, only the inner part on the vacuum hole 26 side communicates with the vacuum hole 26, and the upper surface of the support portion 22 is disposed on the outer part. That is, when the positioning suction hole 24b is viewed from above (FIG. 4B), the inner wall lines W1 and W2 of the vacuum hole 26 are disposed below the positioning suction hole 24b.

  The diameter of the positioning suction hole 24b is set to be equal to or smaller than the diameter of the suction suction hole 24a (about 10 mm).

  In the example of FIG. 4B, a small-diameter positioning suction hole 24b is disposed at the intersection B of the upper and right inner wall lines W1 and W2, and a small diameter and a large diameter are disposed on the upper and right inner wall lines W1 and W2. Four positioning suction holes 24b are arranged. Further, in the triangular area formed by intersecting the upper and right inner wall lines W1 and W2 (the upper right area of the vacuum hole 26), a small-sized positioning suction hole 24b is disposed between the suction suction holes 24a. Has been.

  The positioning suction holes 24b arranged on and in the vicinity of the upper and right inner wall lines W1 and W2 have a center line of a triangular area composed of the upper and right inner wall lines W1 and W2 of two intersecting sides as the symmetry axis AS. They are arranged symmetrically.

  That is, the axis of symmetry AS is a bisector of an angle formed by the upper side and right inner wall lines W1 and W2 of the two sides forming one vertex (intersection) of the vacuum hole 26. More specifically, the axis of symmetry AS is a line that shifts inward by 45 ° from the upper and right inner wall lines W1 and W2 and extends inward from the intersection B thereof.

  The positioning suction holes 24b are preferably arranged so as to be completely symmetric with respect to the symmetry axis AS, but the symmetry may be slightly shifted. Further, the positioning suction hole 24 b is not necessarily arranged inside the vacuum hole 26. Further, the shape, the number, and the arrangement position of the positioning suction holes 24b can be arbitrarily set.

  Thus, in the present embodiment, the positioning suction holes 24b are arranged in the suction portion 24 along the upper and right inner wall lines W1 and W2 constituting one corner of the square vacuum hole 26.

  Further, two first guide pins 30 (guide members) for determining the position of the workpiece in the vertical direction are attached to the outside of the upper inner wall line W1 of the vacuum hole 26 on the suction portion 24. The two first guide pins 30 are arranged such that a line 30 </ b> L drawn inside them is parallel to the upper inner wall line W <b> 1 of the vacuum hole 26.

  Two second guide pins 32 (guide members) for determining the position of the workpiece in the lateral direction are attached to the outside of the right inner wall line W2 of the vacuum hole 26 on the suction portion 24. The two second guide pins 32 are arranged such that a line 32 </ b> L drawn inside them is parallel to the right inner wall line W <b> 2 of the vacuum hole 26.

  In this way, on the suction portion 24, the first and second inner wall lines of the four sides of the vacuum hole 26 are first and only outside the upper and right inner wall lines W1, W2 where the positioning suction holes 24b are arranged side by side. Two guide pins 30 and 32 are arranged, respectively.

  By doing so, as will be described later, since the regions on the opposite side of the first and second guide pins 30 and 32 are in a free state, workpieces of different sizes are arranged on one vacuum chuck jig 1. become able to.

  As the guide member, the two guide pins 30 are arranged outside the upper and right inner wall lines W1, W2, respectively, but a longitudinal guide plate may be arranged in parallel with the upper and right inner wall lines W1, W2. In addition, the number of the first and second guide pins 30 and 32 can be set arbitrarily (plural).

  Next, as shown in FIGS. 5A and 5B, the upper side surface S1 and the right side surface S2 of the rectangular workpiece 40 are brought into contact with the first guide pin 30 and the second guide pin 32, respectively. In this state, the workpiece 40 is placed on the vacuum chuck jig 20. In FIG.5 (b), the workpiece | work 40 is drawn transparently.

  Further, the vacuum pump 28 exhausts the air in the vacuum hole 26, the suction suction hole 24 a and the positioning suction hole 24 b to reduce the pressure, so that the work 40 is attracted to the suction part 24 of the vacuum chuck jig 20.

  At this time, in the positioning suction hole 24b disposed on the right inner wall line W2 of the vacuum hole 26, air is exhausted from the inside of the vacuum hole 26 (to the left side (see arrow in FIG. 5B)).

  Accordingly, when the work 40 is placed and sucked, a propulsive force that moves to the right is given to the work 40. Similarly, in the positioning suction hole 24b arranged on the upper inner wall line W1 of the vacuum hole 26, air is exhausted from the inside of the vacuum hole 26 to the inside of the vacuum hole 26 (see the lower side (see the arrow in FIG. 5B)). Is done. Thereby, when the work 40 is arranged and sucked, a propulsive force that moves upward is given to the work 40.

  As a result, as a result, the work 40 is applied with a thrust that is a combination of a thrust that moves to the right (lateral direction) and a thrust that moves to the upper side (vertical direction). At this time, as described above, since the positioning suction holes 24b disposed on the upper and right inner wall lines W1 and W2 are disposed symmetrically, the workpiece 40 has an upper side of about 45 ° from the horizontal direction. A propulsive force that moves in an obliquely upward direction inclined to (2) is given (FIG. 5B).

  When it is necessary to obtain a strong driving force, an exhaust port is provided in a triangular area (near the positioning suction hole 24b) formed by the upper and right inner wall lines W1 and W2 of the vacuum hole 26 in which the positioning suction hole 24b is disposed. It is preferable to provide 22a (FIG. 5A).

  Since the first and second guide pins 30 and 32 are respectively disposed on the upper side and the right side of the workpiece 40, the first and second guide pins 30 and 32 function as stoppers that prevent the workpiece 40 from moving.

  Since the first and second guide pins 30 and 32 are provided at desired reference positions for arranging the work 40, the work 40 fixed in contact with the first and second guide pins 30 and 32 is at a high position. Arranged at a desired position with accuracy.

  Moreover, even if the workpiece 40 is arranged with clearance (gap) between the first and second guide pins 30 and 32, the workpiece 40 is caused by the driving force when the air is exhausted from the positioning suction holes 24b. The first and second guide pins 30 and 32 are moved to contact with them and fixed to a desired position.

  The moving distance of the workpiece 40 when adsorbing the workpiece 40 is 50 to 100 μm.

  In the present embodiment, the positioning suction hole 24b and the guide pins 30 and 32 are arranged on the upper right corner area side of the square vacuum hole 26, but may be similarly arranged in other corner areas. Of course.

  Further, in the present embodiment, the rectangular vacuum hole 26 is exemplified, but the positioning suction hole may be formed in the suction portion along the inner wall lines of two sides constituting the bent portion of the vacuum hole. Accordingly, the vacuum hole 26 may be an ellipse or a triangle with rounded corners other than a square shape.

  As shown in FIG. 5A, the processing apparatus of this embodiment includes a vacuum chuck device 1 provided on the mounting base 10 and a cutting tool 50 such as a drill or an end mill. Then, the workpiece 40 (carbon plate or the like) fixed on the vacuum chuck device 1 is processed by the cutting tool 50 to form a reference hole, a recess, or the like.

  In the vacuum chuck device 1 of the present embodiment, the workpiece 40 is fixed horizontally without being inclined on the vacuum chuck jig 20, and therefore, when forming a reference hole penetrating the workpiece 40, the workpiece 40 is oriented with respect to the substrate direction. Can be processed vertically.

  In addition, when treating a large number of workpieces 40, the workpieces 40 are positioned in contact with the first and second guide pins 30 and 32, so that the reference holes can be formed with high positional accuracy.

  For this reason, when a plurality of workpieces with reference holes are stacked and used as a jig, the workpieces are positioned accurately when inserting the guide pins into the reference holes of the stacked workpieces. And can function sufficiently as a jig.

  In this embodiment, although the example which employ | adopts the vacuum chuck apparatus 1 as the processing apparatus for a cutting use was shown, it can employ | adopt as various apparatuses which fix and process a workpiece | work. As the workpiece 40, a vinyl chloride plate, an acrylic plate, or the like can be suitably used in addition to the carbon plate.

  As described above, in the vacuum chuck device 1 of the present embodiment, the first and second guide pins 30 and 32 are provided only on the upper side and the right side of the workpiece 40. For this reason, since the lower side and the left side of the workpiece 40 are in a free state, the workpiece 40 having a different size can be processed by one vacuum chuck apparatus 1 unlike the related art.

  That is, as illustrated in FIG. 6, in the present embodiment, in addition to the workpiece 40 (first workpiece) having the size shown in FIG. It is possible to process the workpiece 40a, the third workpiece 40b having a larger width in the vertical and horizontal directions than the first workpiece 40, and further the fourth workpiece 40c having a larger vertical width than the third workpiece 40b.

  By adjusting the area of the vacuum chuck jig 20, the area of the vacuum hole 26, and the location of the suction port 24 a for suction, it becomes possible to process workpieces of various sizes with one vacuum chuck jig 20. .

  The inventor of the present application uses the second chuck device (vacuum suction method) of the related art described above and the vacuum chuck device 1 of the present embodiment to actually form reference holes in 32 carbon plates, The positional accuracy was compared between.

  According to the result, when using the 2nd chuck apparatus of related technology, position shift was 0.05-0.2 mm. On the other hand, when using the vacuum chuck device 1 of this embodiment, the positional deviation can be suppressed to 0.016 to -0.018 mm (absolute value average: 0.005 mm), and the positional accuracy is remarkably improved. It was confirmed that it was possible.

(Second Embodiment)
7A and 7B are a sectional view and a plan view showing a vacuum chuck device according to a second embodiment of the present invention. In 2nd Embodiment, the same code | symbol is attached | subjected to the same element as Fig.4 (a) and (b) of 1st Embodiment, and the description is abbreviate | omitted.

  As shown in FIGS. 7A and 7B, in the vacuum chuck device 1 a of the second embodiment, the positioning suction hole 24 b formed in the suction portion 24 of the vacuum chuck jig 20 is located above the vacuum hole 26. And it is arrange | positioned along the inner side of the right inner wall line W1, W2.

  That is, the inner peripheral surface of the opening end of the positioning suction hole 24b is in contact with the upper and right inner wall lines W1, W2 of the vacuum hole 26. In other words, the positioning suction hole 24b is formed by disposing the upper and right inner wall lines W1, W2 of the vacuum hole 26 below the inner wall on the outside thereof.

  The shape of the positioning suction hole 24b is preferably set to be elliptical in order to increase the driving force of the workpiece. In this case, the inner wall in the longitudinal direction of the positioning suction hole 24b is arranged so as to form the same plane as the upper and right inner wall lines W1, W2 of the vacuum hole 26.

  As in the first embodiment, the positioning suction hole 24b is symmetric with the bisector (center line) of the triangular area formed by the upper and right inner wall lines W1 and W2 of the vacuum hole 26 as the symmetry axis AS. Arranged.

  Also in the second embodiment, when the work is arranged on the vacuum chuck jig 20 and the inside of the vacuum hole 26 is depressurized by the vacuum pump 28 as in the first embodiment, the positioning suction hole 24b acts. Propulsive force is generated to move the workpiece diagonally upward. Thereby, the workpiece can be positioned by contacting the first and second guide pins 30 and 32.

(Third embodiment)
8A and 8B are a sectional view and a plan view showing a vacuum chuck device according to a third embodiment of the present invention. In 3rd Embodiment, the same code | symbol is attached | subjected to the same element as FIG. 4 (a) and (b) of 1st Embodiment, and the description is abbreviate | omitted.

  In the third embodiment, as shown in FIGS. 8A and 8B, the suction suction holes 24a formed in the suction portion 24 of the vacuum chuck jig 20 are provided on the upper and right inner wall lines W1 of the vacuum hole 26. , W2 is inclined at an angle of 45 ° to 60 ° inward and obliquely processed in the extending direction of the line L (in the direction of the arrow) extending inward from the intersection B thereof.

  That is, the upper portion TP of the suction suction hole 24a may be obliquely processed so as to be disposed on the upper side of the lower portion BP and on the side of the intersection B (bent portion of the inner wall line) of the right inner wall lines W1, W2. In other words, a propulsive force that moves toward the bent portion of the inner wall line of the vacuum hole 26 (the upper right intersection B in the example of FIG. 8B) may be applied to the workpiece 40.

  Furthermore, the 1st, 2nd guide pins 30 and 32 are each arrange | positioned in parallel with those on the outer side of the upper side and right side inner wall lines W1 and W2 which comprise the intersection B (bending part).

  In the third embodiment, the positioning suction hole described in the first and second embodiments is omitted, and the suction suction hole 24a is formed by oblique machining, so that the suction suction hole 24a is a positioning suction hole. It has a function.

  In the third embodiment, the exhaust port 22a provided in the support portion 22 has an end portion in the direction of oblique processing of the suction hole 24a for suction (FIGS. 8A and 8). In (b), it is preferably provided on the lower left side (not shown).

  Thus, as in the first embodiment, when the work 40 is disposed on the vacuum chuck jig 20 and the vacuum hole 28 is decompressed by the vacuum pump 28, the air exhausted from the suction suction hole 24a is It is exhausted diagonally downward. As a result, a propulsive force that moves the workpiece 40 obliquely upward is generated, and the two sides of the workpiece 40 can be positioned in contact with the first and second guide pins 30 and 32.

DESCRIPTION OF SYMBOLS 1, 1a, 1b ... Vacuum chuck apparatus, 10 ... Mounting base, 20 ... Vacuum chuck jig, 21 ... Recessed part, 22 ... Support part, 22a ... Exhaust port, 24 ... Adsorption part, 24a ... Suction hole for adsorption, 24b ... Positioning suction hole, 26 ... Vacuum hole, 28 ... Vacuum pump, 30 ... First guide pin, 32 ... Second guide pin, 40, 40a, 40b, 40c ... Workpiece, 50 ... Cutting tool, AS ... Symmetric axis, W1 ... upper inner wall line, W2 ... right inner wall line, L, 30L, 32L ... line.

Claims (6)

A support part;
A suction part provided on the support part and on which a workpiece is placed;
A vacuum hole provided integrally between the support part and the suction part;
A plurality of suction suction holes formed in the suction section in a state of communicating with the vacuum holes,
An exhaust port formed in the support portion and connected to the exhaust means in communication with the vacuum hole;
A plurality of positioning suctions formed side by side along two inner wall lines that form a bent portion of the sides forming the outer shape of the vacuum hole and formed in the suction portion in communication with the vacuum hole With holes,
A vacuum chuck apparatus comprising a guide member provided outside the inner wall line of the two sides on the suction portion and for positioning the workpiece.   2. The vacuum chuck device according to claim 1, wherein the positioning suction hole is disposed on an inner wall line of the vacuum hole, and the inner wall line is disposed below the positioning suction hole.   2. The vacuum chuck device according to claim 1, wherein an inner peripheral surface of an opening end of the positioning suction hole is in contact with an inner wall line of the vacuum hole. The vacuum hole is square,
The positioning suction holes are symmetrically arranged with a bisector of an angle formed by two inner wall lines forming one vertex of the vacuum hole as an axis of symmetry. 4. The vacuum chuck device according to any one of 3 above.   4. The guide pin according to claim 1, wherein a plurality of guide pins are arranged as the guide members only on the outer sides of the inner wall lines on the two sides of the vacuum hole in which the positioning suction holes are arranged. 5. The vacuum chuck device according to one item. The vacuum chuck device according to any one of claims 1 to 5, provided on a mounting base in a region where a workpiece is placed;
A vacuum pump for depressurizing the vacuum hole;
A processing apparatus comprising a cutting tool for processing the workpiece.

Images