JP5110078B2 - Thin plate conveying method and thin plate processing equipment - Google Patents

Thin plate conveying method and thin plate processing equipment Download PDF

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JP5110078B2
JP5110078B2 JP2009503907A JP2009503907A JP5110078B2 JP 5110078 B2 JP5110078 B2 JP 5110078B2 JP 2009503907 A JP2009503907 A JP 2009503907A JP 2009503907 A JP2009503907 A JP 2009503907A JP 5110078 B2 JP5110078 B2 JP 5110078B2
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workpiece
thin plate
plate
temporary
processing apparatus
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JPWO2008111311A1 (en
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学 西原
利一 村越
圭哉 白石
聖人 西原
敬司 原田
純二 久保
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Panasonic Corp
Panasonic Holdings Corp
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Panasonic Corp
Matsushita Electric Industrial Co Ltd
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/0061—Tools for holding the circuit boards during processing; handling transport of printed circuit boards
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G13/00—Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/30—Stacked capacitors

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
  • Separation, Sorting, Adjustment, Or Bending Of Sheets To Be Conveyed (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Punching Or Piercing (AREA)
  • Devices For Post-Treatments, Processing, Supply, Discharge, And Other Processes (AREA)

Description

本発明は、グリーンシートなどの軟質部材で形成された薄板形状の被加工物を位置決めした後に搬送する薄板搬送方法と薄板加工装置に関する。   The present invention relates to a thin plate conveying method and a thin plate processing apparatus for conveying a thin plate-shaped workpiece formed of a soft member such as a green sheet after positioning.

従来のグリーンシートなどの軟質部材で形成された薄板形状の被加工物を位置決めする際には、吸着台の上で位置決めした後、吸着して被加工物を保持するようにしていた（例えば特許文献１参照）。   When positioning a thin plate-shaped workpiece formed of a soft member such as a conventional green sheet, the workpiece is positioned after being positioned on the suction table and held (for example, a patent) Reference 1).

図４Ａ〜図４Ｄは従来の薄板加工装置の搬送方法を示す図である。図４Ａにおいて、被加工物１０２は、仮置き台１００上で位置決め機構１０１により位置決めして固定される。位置決めされた仮置き台１００は、搬送装置１０３の横に設定される（図４Ｂ）。そして、搬送装置１０３は被加工物１０２を保持し搬送する（図４Ｃ）。被加工物１０２の搬送後、仮置き台１００はもとの位置に戻る（図４Ｄ）。   4A to 4D are diagrams showing a conveying method of a conventional thin plate processing apparatus. In FIG. 4A, the workpiece 102 is positioned and fixed by the positioning mechanism 101 on the temporary placement table 100. The positioned temporary placement table 100 is set beside the transfer device 103 (FIG. 4B). And the conveying apparatus 103 hold | maintains and conveys the to-be-processed object 102 (FIG. 4C). After the workpiece 102 is conveyed, the temporary placing table 100 returns to the original position (FIG. 4D).

また、このような被加工物を保持中に被加工物が変形した場合、プレスによって平面に整形し直していた（例えば特許文献２参照）。   Further, when the workpiece is deformed while holding such a workpiece, it has been reshaped into a flat surface by a press (see, for example, Patent Document 2).

しかし、上記従来の薄板加工装置では、被加工物を位置決め後の固定の際に被加工物と仮置き台との間にエアーが溜り、また搬送時に仮置き台とこすれるため、被加工物にシワが発生してしまう。従って、保持搬送後の加工物の品質を確保することが難しい。
特開平４−２２８５０号公報 特開２００１−２５７１２６号公報 However, in the conventional thin plate processing apparatus, air accumulates between the workpiece and the temporary table when the workpiece is fixed after positioning, and the workpiece is rubbed with the temporary table during conveyance. Wrinkles will occur. Therefore, it is difficult to ensure the quality of the workpiece after holding and conveying.
JP-A-4-22850 JP 2001-257126 A

本発明は、搬送工程におけるシワの発生や位置ズレを防止すると共に、高品質の加工物を提供する。   The present invention prevents the generation of wrinkles and misalignment in the conveying process, and provides a high-quality workpiece.

本発明に係る薄板搬送方法は、軟質部材で形成された薄板形状の被加工物を仮置き台の上で位置決めするステップと、位置決めした後、仮置き台に備えられた複数の列を形成する穴部のうち、被加工物の対向する２つの辺近傍を吸引しない状態で少なくとも１つの列を形成する穴部により、仮置き台上の被加工物を吸引するステップと、吸引した状態で搬送装置に設けられたプレートでプレスするステップと、プレスした後、プレートに備えられた複数の列を形成する穴部及び仮置き台に備えられた複数の列を形成する穴部から互いに吐出するステップと、プレートで吸引するステップと、プレートで吸引した後、被加工物を加工テーブルへ搬送するステップと、搬送した後、加工テーブルで被加工物を被加工物の対向する２辺で保持するステップと、を備える。 The thin plate conveying method according to the present invention includes a step of positioning a thin plate-shaped workpiece formed of a soft member on a temporary table, and forming a plurality of rows provided on the temporary table after positioning. The step of sucking the workpieces on the temporary table by the holes that form at least one row without sucking the vicinity of the two opposite sides of the workpiece among the holes, and conveying in the sucked state a step of pressing a plate provided in the apparatus, after pressing, the step of ejecting mutually from the hole portion to form a plurality of columns provided in the hole and temporary base to form a plurality of columns provided in the plate A step of sucking with a plate, a step of transporting the workpiece to the processing table after suction with the plate, and a step of holding the workpiece on the two opposite sides of the workpiece after the transport. Tsu includes a flop, the.

また、本発明に係る薄板加工装置は、軟質部材で形成された薄板形状の被加工物を着脱自在に吸引するとともに吐出を行う穴部を有する仮置き台と、仮置き台の上で被加工物の位置を決める位置決め部と、被加工物を着脱自在に吸引するとともに吐出を行うプレートを有し仮置き台から被加工物を搬送する搬送装置と、搬送装置で搬送した被加工物を被加工物の対向する２辺近傍で保持する加工テーブルと、を備える。そして、プレートの一辺の長さは、加工テーブルの被加工物を保持する間隔より短く構成し、仮置き台とプレートとは互いに吐出、吸引し合うことにより、被加工物と仮置き台及び被加工物とプレート間のエアーを排出するものである。 Further, the thin plate processing apparatus according to the present invention includes a temporary placement table having a hole portion for sucking and discharging a thin plate-shaped workpiece formed of a soft member, and a workpiece on the temporary placement table. A positioning unit that determines the position of the workpiece, a transport device that has a plate that detachably sucks and discharges the workpiece, and transports the workpiece from the temporary table, and the workpiece transported by the transport device And a machining table that is held near the two opposite sides of the workpiece. The length of one side of the plate is configured to be shorter than the interval for holding the workpiece on the processing table, and the temporary table and the plate are mutually discharged and sucked to each other. The air between the workpiece and the plate is discharged .

このような構成により、仮置き台に設定される被加工物の位置精度を確保し、プレス及び吐出と吸引を行うことによりエアー溜りとシワの発生を防止する。また、被加工物と加工テーブルとのこすれを無くすことができる。   With such a configuration, the position accuracy of the workpiece set on the temporary table is ensured, and the occurrence of air accumulation and wrinkles is prevented by performing pressing, discharging, and suction. Further, it is possible to eliminate rubbing between the workpiece and the processing table.

（実施の形態）
まず、被加工物１を加工する薄板加工装置について説明する。 (Embodiment)
First, a thin plate processing apparatus for processing the workpiece 1 will be described.

図１Ａ〜図１Ｅは本発明の実施の形態における薄板加工装置及びその動作を示す図である。図１Ａにおいて、Ｘ方向とＹ方向とを矢印にて示す。   1A to 1E are views showing a thin plate processing apparatus and its operation in an embodiment of the present invention. In FIG. 1A, the X direction and the Y direction are indicated by arrows.

薄型加工装置は、仮置き台２と、位置決め部と、搬送装置８と、昇降装置９と、加工テーブル１０と、を備える。薄板形状の被加工物１は軟質部材で形成されている。被加工物１の仮置き台２は後述する吐出と吸引機構に接続された穴部２０、２１、２２を有している。   The thin processing apparatus includes a temporary placement table 2, a positioning unit, a transport device 8, an elevating device 9, and a processing table 10. The thin plate-shaped workpiece 1 is formed of a soft member. The temporary placing table 2 for the workpiece 1 has holes 20, 21, and 22 connected to a discharge and suction mechanism described later.

位置決め部は位置決めピン３、４及び位置決め機構５、６で構成され、仮置き台２の上で被加工物の位置を決める。すなわち、位置決めピン３は仮置き台２上のＸ方向の基準となり、位置決めピン４はＹ方向の基準となる、Ｘ方向の位置決め機構５およびＹ方向の位置決め機構６は、図に示さない被加工物の供給位置から仮置き台２に供給された被加工物１の位置決めを行う。   The positioning portion is composed of positioning pins 3 and 4 and positioning mechanisms 5 and 6, and determines the position of the workpiece on the temporary placement table 2. That is, the positioning pin 3 serves as a reference in the X direction on the temporary table 2 and the positioning pin 4 serves as a reference in the Y direction. The positioning mechanism 5 in the X direction and the positioning mechanism 6 in the Y direction are not shown in the drawing. The workpiece 1 supplied to the temporary table 2 from the supply position of the workpiece is positioned.

搬送装置８はプレス及び吐出と吸引を行うプレート７で保持されている被加工物１を加工テーブル１０に搬送する。昇降装置９はプレス及び吐出と吸引を行うプレート７で保持されている被加工物１を昇降させる。加工テーブル１０は被加工物１をＹ方向において対向する２辺近傍で保持する。   The conveying device 8 conveys the workpiece 1 held by the plate 7 that performs pressing and discharging and suction to the processing table 10. The elevating device 9 elevates and lowers the workpiece 1 held by a plate 7 that performs press and discharge and suction. The processing table 10 holds the workpiece 1 in the vicinity of two sides facing each other in the Y direction.

プレス及び吐出と吸引を行うプレート７の寸法ｈは、被加工物１を対向する２辺で保持する加工テーブル１０の保持間隔寸法Ｈより短い。なお、被加工物１のＹ方向の長さは、加工テーブル１０の保持間隔寸法Ｈより長い。   The dimension h of the plate 7 that performs pressing and discharging and suction is shorter than the holding interval dimension H of the processing table 10 that holds the workpiece 1 on two opposite sides. The length in the Y direction of the workpiece 1 is longer than the holding interval dimension H of the processing table 10.

図２は本発明の実施の形態における仮置き台上の吐出と吸引機構を示す図である。図２において、仮置き台２にはＹ方向に吐出と吸引機構に接続された穴部２０、２１、２２が３列になって配置されている。３列のうち、中央の列は被加工物１を取り囲む４辺で規定される面積を実質的に２分する位置に配置されている。各列には複数の穴が備えてあり、例えば、エアーがこれらの穴から吸引されることにより、被加工物１(図示せず)が仮置き台２に固定される。このとき、被加工物１のＹ方向において対向する２辺近傍の穴（例えば、穴部２２のうちの穴２２１と穴２２２）では被加工物１（図示せず)を吸引しない。また、３列の穴部２０、２１、２２うち、少なくとも１列の穴部が被加工物１（図示せず）を吸引する。   FIG. 2 is a diagram showing a discharge and suction mechanism on the temporary table in the embodiment of the present invention. In FIG. 2, holes 20, 21, and 22 connected to the ejection and suction mechanism in the Y direction are arranged in three rows on the temporary table 2. Of the three rows, the center row is arranged at a position that substantially bisects the area defined by the four sides surrounding the workpiece 1. Each row includes a plurality of holes. For example, the workpiece 1 (not shown) is fixed to the temporary table 2 by sucking air from these holes. At this time, the workpiece 1 (not shown) is not sucked in the holes near the two sides facing each other in the Y direction of the workpiece 1 (for example, the holes 221 and 222 in the hole portion 22). Of the three rows of holes 20, 21, 22, at least one row of holes sucks the workpiece 1 (not shown).

プレート７はプレス及び吐出と吸引を行う。プレート７はＸ方向の位置決め機構５とＹ方向の位置決め機構６とにより位置決めされる。そして、前述した状態で仮置き台２に吸引された被加工物１をプレス後吐出と吸引を行うことにより、エアー溜りとしわを取り除く。   The plate 7 performs press and discharge and suction. The plate 7 is positioned by the positioning mechanism 5 in the X direction and the positioning mechanism 6 in the Y direction. Then, the workpiece 1 sucked by the temporary table 2 in the state described above is discharged and sucked after pressing to remove air pools and wrinkles.

以上のように構成された薄板加工装置について、図１Ａ〜図１Ｅ、図３を用いて、その動作を説明する。   About the thin plate processing apparatus comprised as mentioned above, the operation | movement is demonstrated using FIG. 1A-FIG. 1E and FIG.

図３は、本発明の実施の形態における薄板搬送方法のフローチャートである。図３において、被加工物１の供給装置(図示せず)から仮置き台２に被加工物１を搬送する（Ｓ６０）。次に、ＸＹ方向の基準となる位置決めピン３、４を動作させ（Ｓ６１）、吐出と吸引機構に接続した穴部２０、２１、２２から吐出を行いながら位置決め機構５、６により位置決めする（Ｓ６３）。被加工物１のＹ方向において対向する２辺近傍の穴では被加工物１を吸引しない。また、３列の穴部２０、２１、２２うち、少なくとも１列の穴部が被加工物１を吸引する。このようにして被加工物１を仮置き台２に固定後、動作していた位置決め機構３、４、５、６は基の位置に戻る（Ｓ６４、図１Ａ）。   FIG. 3 is a flowchart of the thin plate conveying method according to the embodiment of the present invention. In FIG. 3, the workpiece 1 is transported from the supply device (not shown) of the workpiece 1 to the temporary table 2 (S60). Next, the positioning pins 3 and 4 serving as the reference in the XY directions are operated (S61), and positioning is performed by the positioning mechanisms 5 and 6 while discharging from the holes 20, 21, and 22 connected to the discharge and suction mechanisms (S63). ). The workpiece 1 is not sucked in the holes near the two sides facing each other in the Y direction of the workpiece 1. Of the three rows of holes 20, 21, 22, at least one row of holes sucks the workpiece 1. After fixing the workpiece 1 to the temporary placing table 2 in this way, the positioning mechanisms 3, 4, 5, 6 that have been operating return to the original position (S64, FIG. 1A).

次に、搬送装置８が動作して、プレート７が仮置き台２の位置に移動する。そして、前述した状態で仮置き台２に吸引された被加工物１に対して、昇降装置９を下降動作させてプレート７でプレスを行う（Ｓ６５、図１Ｂ）。仮置き台２とプレート７が互いに吐出し合い、その後、吸引し合った後、再び吐出し合いを行う（Ｓ６６）。この時、被加工物１と仮置き台２及び被加工物１とプレート７間に入り込んだエアーを排出する。さらに、仮置き台２は吐出、プレート７は吸引を行い、昇降装置９を上昇動作させて受渡しを行う（Ｓ６７）。被加工物１は、シワ及びエアー溜りの無い状態でプレート７に吸引される（図１Ｃ）。   Next, the transport device 8 operates to move the plate 7 to the position of the temporary table 2. Then, the workpiece 1 sucked by the temporary table 2 in the above-described state is pressed by the plate 7 by moving the lifting device 9 downward (S65, FIG. 1B). The temporary placing table 2 and the plate 7 discharge each other, and after suctioning each other, discharge is performed again (S66). At this time, the air that has entered between the workpiece 1 and the temporary table 2 and between the workpiece 1 and the plate 7 is discharged. Further, the temporary table 2 performs discharge, the plate 7 performs suction, and the lifting device 9 is moved up to perform delivery (S67). The workpiece 1 is sucked into the plate 7 without wrinkles and air accumulation (FIG. 1C).

次に、搬送装置８を動作させ、昇降装置９を下降動作させて、プレート７にて吸引された被加工物１を加工テーブル１０に搬送する（Ｓ６８、図１Ｄ）。   Next, the conveying device 8 is operated, the lifting device 9 is moved down, and the workpiece 1 sucked by the plate 7 is conveyed to the processing table 10 (S68, FIG. 1D).

次に、被加工物１をＹ方向において対向する２辺近傍で保持し、昇降装置９を上昇動作させて加工テーブル１０にて受渡しを行う（Ｓ６９）。この時、搬送装置８に取り付けられているプレート７の寸法ｈは、被加工物１を対向する２辺で保持する加工テーブル１０の保持間隔寸法Ｈより短いので、昇降装置９での上方向からの受渡しが可能である（図１Ｅ）。従って、横方向の搬入動作時に発生する被加工物１の受け台とのこすれ等を防止できる。なお、加工テーブル１０は加工エリア（図示せず）に移動して被加工物１の加工を行う。   Next, the workpiece 1 is held in the vicinity of the two sides facing each other in the Y direction, and the lifting device 9 is moved up to perform delivery on the processing table 10 (S69). At this time, the dimension h of the plate 7 attached to the conveying device 8 is shorter than the holding interval dimension H of the processing table 10 that holds the workpiece 1 on two opposite sides. Can be delivered (FIG. 1E). Accordingly, it is possible to prevent the workpiece 1 from being rubbed with the cradle, etc., generated during the horizontal loading operation. The processing table 10 moves to a processing area (not shown) and processes the workpiece 1.

以上で一連の加工作業が終了する（Ｓ７０）。   Thus, a series of processing operations are completed (S70).

なお、本実施の形態における薄板加工装置の仮置き台２に設けられた吐出と吸引機構に接続された穴部は、３列で構成されている。しかし、この列は３列に限らず、４列でも５列でもよい。ただし、列の数が奇数の場合、中央の列は被加工物１を取り囲む４辺で規定される面積を実質的に２分する位置に配置されることが望ましい。   In addition, the hole part connected to the discharge and suction mechanism provided in the temporary placing stand 2 of the thin plate processing apparatus in this Embodiment is comprised in 3 rows. However, the number of columns is not limited to three, and may be four or five. However, when the number of rows is an odd number, it is desirable that the center row is arranged at a position that substantially bisects the area defined by the four sides surrounding the workpiece 1.

本発明の薄板搬送方法と薄板加工装置によれば、加工におけるしわ等の発生を防止でき、簡単に精度のよい加工を行うことができ産業上有用である。   According to the thin plate conveying method and the thin plate processing apparatus of the present invention, generation of wrinkles and the like in processing can be prevented, and accurate processing can be performed easily and is industrially useful.

本発明の実施の形態における薄板加工装置及びその動作を示す図The figure which shows the thin plate processing apparatus in embodiment of this invention, and its operation | movement. 本発明の実施の形態における薄板加工装置及びその動作を示す図The figure which shows the thin plate processing apparatus in embodiment of this invention, and its operation | movement. 本発明の実施の形態における薄板加工装置及びその動作を示す図The figure which shows the thin plate processing apparatus in embodiment of this invention, and its operation | movement. 本発明の実施の形態における薄板加工装置及びその動作を示す図The figure which shows the thin plate processing apparatus in embodiment of this invention, and its operation | movement. 本発明の実施の形態における薄板加工装置及びその動作を示す図The figure which shows the thin plate processing apparatus in embodiment of this invention, and its operation | movement. 本発明の実施の形態における仮置き台上の吐出と吸引機構を示す図The figure which shows the discharge and suction mechanism on the temporary placing stand in embodiment of this invention 本発明の実施の形態における薄板搬送方法のフローチャートThe flowchart of the thin plate conveyance method in embodiment of this invention 従来の薄板加工装置の搬送方法を示す図The figure which shows the conveyance method of the conventional thin plate processing apparatus 従来の薄板加工装置の搬送方法を示す図The figure which shows the conveyance method of the conventional thin plate processing apparatus 従来の薄板加工装置の搬送方法を示す図The figure which shows the conveyance method of the conventional thin plate processing apparatus 従来の薄板加工装置の搬送方法を示す図The figure which shows the conveyance method of the conventional thin plate processing apparatus

符号の説明Explanation of symbols

１ 被加工物
２ 仮置き台
３，４ 位置決めピン
５，６ 位置決め機構
７ プレート
８ 搬送装置
９ 昇降装置
１０ 加工テーブル
２０，２１，２２ 穴部
２２１，２２２ 穴 DESCRIPTION OF SYMBOLS 1 Workpiece 2 Temporary stand 3, 4 Positioning pin 5, 6 Positioning mechanism 7 Plate 8 Conveying device 9 Lifting device 10 Processing table 20, 21, 22 Hole part 221, 222 Hole

Claims (6)

軟質部材で形成された薄板形状の被加工物を仮置き台の上で位置決めするステップと、
前記位置決めした後、前記仮置き台に備えられた複数の列を形成する穴部のうち、前記被加工物の対向する２つの辺近傍を吸引しない状態で少なくとも１つの列を形成する前記穴部により、前記仮置き台上の前記被加工物を吸引するステップと、
前記吸引した状態で搬送装置に設けられたプレートでプレスするステップと、
前記プレスした後、前記プレートに備えられた複数の列を形成する穴部及び前記仮置き台に備えられた複数の列を形成する穴部から互いに吐出するステップと、
前記プレートで吸引するステップと、
前記プレートで吸引した後、前記被加工物を加工テーブルへ搬送するステップと、
前記搬送した後、前記加工テーブルで前記被加工物を前記被加工物の対向する２辺で保持するステップと、を備えた薄板搬送方法。Positioning a thin plate-shaped workpiece formed of a soft member on a temporary table;
After the positioning, among the hole portions forming the plurality of rows provided in the temporary placing table, the hole portions forming at least one row without sucking the vicinity of two opposite sides of the workpiece. Sucking the workpiece on the temporary table;
Pressing with a plate provided in the conveying device in the sucked state;
After the pressing, the step of discharging each other from the hole portion forming a plurality of rows provided in the plate and the hole portion forming a plurality of rows provided in the temporary placement table ;
Aspirating with the plate;
Transporting the workpiece to a processing table after suction with the plate;
And a step of holding the workpiece at two opposite sides of the workpiece on the processing table after the conveyance. 前記位置決めするステップを前記仮置き台に備えられた複数の列を形成する穴部から吐出を行いながら実行する請求項１記載の薄板搬送方法。The thin plate conveying method according to claim 1, wherein the positioning step is performed while discharging from holes forming a plurality of rows provided in the temporary table. 軟質部材で形成された薄板形状の被加工物を着脱自在に吸引するとともに吐出を行う穴部を有する仮置き台と、
前記仮置き台の上で前記被加工物の位置を決める位置決め部と、
前記被加工物を着脱自在に吸引するとともに吐出を行うプレートを有し、前記仮置き台から被加工物を搬送する搬送装置と、
前記搬送装置で搬送した前記被加工物を前記被加工物の対向する２辺近傍で保持する加工テーブルと、を備え、
前記プレートの一辺の長さは、前記加工テーブルの前記被加工物を保持する間隔より短く構成し、
前記仮置き台と前記プレートとは互いに吐出、吸引し合うことにより、前記被加工物と前記仮置き台及び前記被加工物と前記プレート間のエアーを排出することを特徴とする薄板加工装置。A temporary placement table having a hole portion for sucking and discharging a thin plate-shaped workpiece formed of a soft member;
A positioning part for determining the position of the workpiece on the temporary table;
A transporting device that transports the work piece from the temporary table, having a plate that detachably sucks and discharges the work piece;
A processing table for holding the workpiece conveyed by the conveying device in the vicinity of two opposite sides of the workpiece;
Length of one side of said plate, said by short rather arrangement than the distance for holding a workpiece the machining table,
A thin plate processing apparatus, wherein the temporary table and the plate discharge and suck each other to discharge air between the workpiece, the temporary table and the workpiece and the plate. 前記穴部は複数の列を構成し、前記被加工物の対向する２つの辺近傍を吸引しない状態で少なくとも１つの列を形成する前記穴部により、前記仮置き台上の前記被加工物を吸引する請求項３記載の薄板加工装置。The hole portion constitutes a plurality of rows, and the workpiece on the temporary table is formed by the hole portion that forms at least one row without sucking the vicinity of two opposite sides of the workpiece. The thin plate processing apparatus according to claim 3, wherein suction is performed. 複数の前記列のうちの一つの前記列は前記被加工物を取り囲む４辺で規定される面積を２分する位置に配置した請求項４記載の薄板加工装置。The thin plate processing apparatus according to claim 4, wherein one of the plurality of rows is arranged at a position that bisects an area defined by four sides surrounding the workpiece. 前記被加工物は前記加工テーブルの底面から離れた位置で保持される請求項３記載の薄板加工装置。The thin plate processing apparatus according to claim 3, wherein the workpiece is held at a position away from a bottom surface of the processing table.
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