JP5353555B2 - 電子線装置 - Google Patents

電子線装置 Download PDF

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Publication number
JP5353555B2
JP5353555B2 JP2009191656A JP2009191656A JP5353555B2 JP 5353555 B2 JP5353555 B2 JP 5353555B2 JP 2009191656 A JP2009191656 A JP 2009191656A JP 2009191656 A JP2009191656 A JP 2009191656A JP 5353555 B2 JP5353555 B2 JP 5353555B2
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Japan
Prior art keywords
lid
container
rings
electron gun
electron beam
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JP2009191656A
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Japanese (ja)
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JP2011044330A5 (enExample
JP2011044330A (ja
Inventor
茂宏 三田村
徹 高島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
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Shimadzu Corp
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Priority to JP2009191656A priority Critical patent/JP5353555B2/ja
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Publication of JP2011044330A5 publication Critical patent/JP2011044330A5/ja
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JP2009191656A 2009-08-21 2009-08-21 電子線装置 Active JP5353555B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009191656A JP5353555B2 (ja) 2009-08-21 2009-08-21 電子線装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009191656A JP5353555B2 (ja) 2009-08-21 2009-08-21 電子線装置

Publications (3)

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JP2011044330A JP2011044330A (ja) 2011-03-03
JP2011044330A5 JP2011044330A5 (enExample) 2012-02-23
JP5353555B2 true JP5353555B2 (ja) 2013-11-27

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ID=43831604

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JP2009191656A Active JP5353555B2 (ja) 2009-08-21 2009-08-21 電子線装置

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JP (1) JP5353555B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5299167B2 (ja) * 2009-08-21 2013-09-25 株式会社島津製作所 電子線装置
US12044313B2 (en) * 2021-02-12 2024-07-23 Kla Corporation Dual vacuum seal
CN118737784B (zh) * 2024-07-26 2025-10-28 苏州矽视科技有限公司 真空隔离装置与扫描电子显微镜

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0430459Y2 (enExample) * 1985-04-23 1992-07-22
JP3644556B2 (ja) * 1996-03-29 2005-04-27 アルプス電気株式会社 成膜装置
JP2009068973A (ja) * 2007-09-12 2009-04-02 Hamamatsu Photonics Kk 電子線照射装置

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JP2011044330A (ja) 2011-03-03

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