JP2011044330A5 - - Google Patents

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Publication number
JP2011044330A5
JP2011044330A5 JP2009191656A JP2009191656A JP2011044330A5 JP 2011044330 A5 JP2011044330 A5 JP 2011044330A5 JP 2009191656 A JP2009191656 A JP 2009191656A JP 2009191656 A JP2009191656 A JP 2009191656A JP 2011044330 A5 JP2011044330 A5 JP 2011044330A5
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JP
Japan
Prior art keywords
container
electron gun
container body
axial direction
electron beam
Prior art date
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Granted
Application number
JP2009191656A
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English (en)
Japanese (ja)
Other versions
JP5353555B2 (ja
JP2011044330A (ja
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Application filed filed Critical
Priority to JP2009191656A priority Critical patent/JP5353555B2/ja
Priority claimed from JP2009191656A external-priority patent/JP5353555B2/ja
Publication of JP2011044330A publication Critical patent/JP2011044330A/ja
Publication of JP2011044330A5 publication Critical patent/JP2011044330A5/ja
Application granted granted Critical
Publication of JP5353555B2 publication Critical patent/JP5353555B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2009191656A 2009-08-21 2009-08-21 電子線装置 Active JP5353555B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009191656A JP5353555B2 (ja) 2009-08-21 2009-08-21 電子線装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009191656A JP5353555B2 (ja) 2009-08-21 2009-08-21 電子線装置

Publications (3)

Publication Number Publication Date
JP2011044330A JP2011044330A (ja) 2011-03-03
JP2011044330A5 true JP2011044330A5 (enExample) 2012-02-23
JP5353555B2 JP5353555B2 (ja) 2013-11-27

Family

ID=43831604

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009191656A Active JP5353555B2 (ja) 2009-08-21 2009-08-21 電子線装置

Country Status (1)

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JP (1) JP5353555B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5299167B2 (ja) * 2009-08-21 2013-09-25 株式会社島津製作所 電子線装置
US12044313B2 (en) * 2021-02-12 2024-07-23 Kla Corporation Dual vacuum seal
CN118737784B (zh) * 2024-07-26 2025-10-28 苏州矽视科技有限公司 真空隔离装置与扫描电子显微镜

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0430459Y2 (enExample) * 1985-04-23 1992-07-22
JP3644556B2 (ja) * 1996-03-29 2005-04-27 アルプス電気株式会社 成膜装置
JP2009068973A (ja) * 2007-09-12 2009-04-02 Hamamatsu Photonics Kk 電子線照射装置

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