JP5352390B2 - Substrate processing apparatus schedule creation method and program thereof - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To suppress a reduction in productivity by preventing an increase in load of scheduling in a substrate processing apparatus. <P>SOLUTION: A control part 35 of a first substrate processing apparatus A generates a single batch schedule for each lot, and transmits all the single batch schedules and resource information to an external computer C. On the basis of the single batch schedule, the external computer C generates an overall schedule including all the single batch schedules of the first substrate processing apparatus A arranged therein. A control part 35 of the first substrate processing apparatus A receives the overall schedule generated by the external computer C, and performs actual processing on each lot based on the overall schedule. The overall schedule with high load is processed by the external computer C, and hence it is possible to suppress the load of scheduling at the control part 35 of the first substrate processing apparatus A even when the number of lots is increased. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  The present invention relates to a schedule creation method for a substrate processing apparatus for performing predetermined processing such as cleaning, etching, and drying on a glass substrate (hereinafter simply referred to as a substrate) for a semiconductor wafer or a liquid crystal display device, and a program therefor.

  Conventionally, as a method of this type, for example, processing is started in a substrate processing apparatus that transports a plurality of lots between resources such as a chemical processing unit, a pure water processing unit, and a drying processing unit and processes the lot Before starting, create a schedule that prescribes which lot to process with which resource based on the recipe, and then create a schedule for the substrate processing equipment that actually processes each lot while controlling each resource according to the schedule There exists a method (for example, refer patent document 1).

  In this schedule creation method, the control unit of the substrate processing apparatus creates a single schedule for each lot by referring to the recipe specified for each lot and the resource information indicating what resources the apparatus has. To do. The schedule created in this way is called a single batch schedule. Furthermore, a control part arrange | positions the single batch schedule of each lot on the same time axis, and produces the whole schedule. When the entire schedule is completed, the control unit performs processing for all lots while controlling each resource according to the entire schedule from a predetermined time.

JP 2009-37595 A

However, the conventional example having such a configuration has the following problems.
That is, the conventional apparatus, the number of lots to be processed is increased, because the number of calculations in particular to the entire scheduling extremely increased, the load is increased in the control unit, or other processing Tsu extreme slow, other Processing may stop. Therefore, there is a problem that productivity needs to be reduced due to the necessity to reduce the number of lots to be input. Since the control unit is an industrial computer for control equipment, there is a limit to increasing the processing capability. On the other hand, if the control unit has a high processing capability, the cost of the substrate processing apparatus increases.

  Further, when the control unit cannot process the scheduling of many lots and falls into a stopped state, there is a possibility that the actual processing based on the entire schedule already completed and being executed may be stopped. When the actual processing is stopped, for example, a lot or the like for which the chemical processing is being performed becomes a processing failure and may be discarded. Therefore, there is a problem that the productivity of the lot is lowered.

  The present invention has been made in view of such circumstances, and by distributing functions, it is possible to suppress an increase in scheduling load in the substrate processing apparatus while suppressing an apparatus cost of the substrate processing apparatus. And it aims at providing the schedule preparation method of the substrate processing apparatus which can suppress the fall of productivity, and its program.

In order to achieve such an object, the present invention has the following configuration.
That is, according to the first aspect of the present invention, when the control unit controls each resource, when processing a plurality of lots with each resource, a schedule is created in advance and the actual processing is performed. In the schedule creation method for a substrate processing apparatus, the control unit refers to the resource information indicating the configuration of each resource in the apparatus and the recipe stored in advance in the storage unit, and the control unit sets a schedule corresponding to the recipe for each lot. Board processing created by an external computer based on the process of creating as a schedule, the process of transmitting resource information and all single batch schedules to an external computer, and the resource information and all single batch schedules of the total for each device schedule, over-control unit only entire schedule of the device to receive If, the control unit controls the respective resources based on the entire received schedule, and is characterized in that it comprises a, a process of performing the actual processing for each lot in the device.

[Operation / Effect] According to the invention described in claim 1, the control unit of the substrate processing apparatus refers to the resource information and the recipe stored in the storage unit in advance , and sets a single batch schedule corresponding to the recipe. Every single batch schedule and resource information are sent to an external computer. The external computer creates an overall schedule in which all single batch schedules are arranged for each substrate processing apparatus based on the resource information and all single batch schedules. The control unit of the substrate processing apparatus receives only the entire schedule of the apparatus out of the entire schedule for each substrate processing apparatus created by the external computer, and performs actual processing for each lot in the apparatus based on the entire schedule. . Since the entire schedule with a high load is performed by an external computer, the scheduling load in the control unit of the substrate processing apparatus can be suppressed even when the number of lots increases. Therefore, it is not necessary to reduce the number of lots, and productivity can be prevented from decreasing. Further, even if the overall scheduling load becomes too high and the external computer falls into a stopped state, the control unit of the substrate processing apparatus that executes the already received overall schedule is not affected. Therefore, the process being executed does not stop halfway, and a decrease in productivity can be suppressed. In addition, an external computer may be introduced without changing the control unit of the substrate processing apparatus, and the apparatus cost can be suppressed as compared with the case where the control units of all the substrate processing apparatuses are made to have high performance. Further, by rewriting the resource information and the recipe in the storage unit, it is possible to deal with devices having various configurations, and it is possible to deal with various types of processing.

(Delete)

In the present invention, the resource information includes individual identification information of the substrate processing apparatus,
It is preferable that the external computer refers to the individual identification information included in the resource information and transmits the created overall schedule to an apparatus corresponding to the individual identification information (claim 2 ). Even when there are a plurality of substrate processing apparatuses, it is possible to determine which overall schedule the external computer should transmit to which substrate processing apparatus based on the individual identification information of the resource information. Therefore, the external computer can transmit to the substrate processing apparatus to which the created entire schedule corresponds.

Further, in the present invention, in the process in which the external computer creates the overall schedule, all the devices other than the device indicated by the single batch schedule corresponding to the resource information are based on all the received resource information and the single batch schedule. A process of creating a schedule and comparing the results to determine the overall schedule of the device that completes processing the earliest as the fastest overall schedule, and a process of notifying that the fastest overall schedule exists Preferred (Claim 3 ). When there are a plurality of substrate processing apparatuses and different configurations, the processing may be completed earlier when executed by another apparatus. Therefore, the external computer creates an overall schedule for devices other than the device indicated by the single batch schedule corresponding to the resource information, compares the results, and notifies that the fastest overall schedule exists. Accordingly, the operator of the apparatus can respond by moving the lot to another apparatus according to the fastest overall schedule and starting processing. As a result, improvement in production efficiency can be expected.

In the invention according to claim 4 , when the control unit controls each resource, when processing a plurality of lots with each resource, a schedule is created in advance and the actual processing is performed. In the schedule creation program of the substrate processing apparatus, the schedule corresponding to the recipe is created as a single batch schedule for each lot by referring to the resource information and the recipe indicating the configuration of each resource in the apparatus, which is stored in advance in the storage unit. A function for transmitting the resource information and all single batch schedules to the external computer, and an overall schedule for each substrate processing apparatus created by the external computer based on the resource information and all single batch schedules. among them, a function of receiving only the entire schedule of the device, the entire received schedule It controls each resource based on Yuru is a function that performs actual processing for each lot of the apparatus, what is characterized by to be executed by the control unit.

According to scheduling method of a substrate processing apparatus according to the present invention, the control unit of the substrate processing apparatus receives only the entire schedule of the device of the total schedule created by the external computer, based on the overall schedule the The actual processing is performed for each lot in the apparatus . Since the entire schedule with a high load is performed by an external computer, the scheduling load in the control unit of the substrate processing apparatus can be suppressed even when the number of lots increases. Therefore, it is not necessary to reduce the number of lots, and productivity can be prevented from decreasing. Further, even if the overall scheduling load becomes too high and the external computer falls into a stopped state, the control unit of the substrate processing apparatus that executes the already received overall schedule is not affected. Therefore, the process being executed does not stop halfway, and a decrease in productivity can be suppressed. In addition, an external computer may be introduced without changing the control unit of the substrate processing apparatus, and the apparatus cost can be suppressed as compared with the case where the control units of all the substrate processing apparatuses are made to have high performance. Further, by rewriting the resource information and the recipe in the storage unit, it is possible to deal with devices having various configurations, and it is possible to deal with various types of processing.

It is the block diagram which showed schematic structure of the substrate processing system which concerns on an Example. It is the top view which showed schematic structure of the 1st substrate processing apparatus which concerns on an Example. It is the top view which showed schematic structure of the 2nd substrate processing apparatus which concerns on an Example. It is a schematic diagram which shows an example of resource information. It is a time chart which shows an example of a recipe and a single batch schedule, (a) shows lot 1, (b) shows lot 2. FIG. It is a flowchart showing the operation | movement in the control part of a substrate processing apparatus. It is a flowchart showing the operation | movement in an external computer. It is a time chart which shows an example of a whole schedule. It is a flowchart showing the modification of the operation | movement in an external computer. It is a figure with which it uses for description of creation of the cross whole schedule, (a) shows the scheduling of the lots 1 and 2 in the apparatus A, (b) shows the scheduling of the lots 3 and 4 in the apparatus B, and (c) shows the apparatus A. (D) shows the scheduling of lots 1 and 2 in apparatus B. FIG.

  The present invention will be described below with reference to the drawings. FIG. 1 is a block diagram illustrating a schematic configuration of the substrate processing system according to the embodiment. FIG. 2 is a plan view showing a schematic configuration of the first substrate processing apparatus according to the embodiment. FIG. 3 is a plan view showing a schematic configuration of the second substrate processing apparatus according to the embodiment. is there.

  The substrate processing system includes, for example, two substrate processing apparatuses A and B and an external computer C. Here, the substrate processing apparatus A is the first substrate processing apparatus A, and the substrate processing equipment B is the second substrate processing apparatus B.

  The first substrate processing apparatus A is an apparatus for performing chemical treatment, pure water treatment, and drying treatment on the substrate W, for example. A plurality of (for example, 25) substrates W are stacked and accommodated in the FOUP 1 in a horizontal posture. The FOUP 1 containing the unprocessed substrate W is placed on the loading unit 3. The input unit 3 includes two mounting tables 5 on which the FOUP 1 is mounted. On the opposite side of the loading unit 3 across the center of the first substrate processing apparatus A, a dispensing unit 7 is provided. The payout unit 7 stores the processed substrate W in the FOUP 1 and pays out the FOUP 1 together. The payout unit 7 that functions in this manner includes two mounting bases 9 for mounting the FOUP 1, similarly to the input unit 3.

  A first transport mechanism CTC configured to be movable between these is provided at a position along the input unit 3 and the payout unit 7. The first transport mechanism CTC takes out all the substrates W stored in the FOUP 1 placed on the loading unit 3, converts the substrates W from a horizontal posture to a vertical posture, and then transports them to the second transport mechanism WTR. To do. The first transport mechanism CTC receives the processed substrate W from the second transport mechanism WTR, converts the substrate W from a vertical posture to a horizontal posture, and then stores the substrate W in the FOUP 1. The second transport mechanism WTR is configured to be movable along the longitudinal direction of the substrate processing apparatus.

  On the payout unit 7 side in the moving direction of the second transport mechanism WTR described above, a drying processing unit LPD for storing and drying a plurality of substrates W in a low-pressure chamber is provided.

  A first processing unit 19 is disposed at a position adjacent to the drying processing unit LPD in the moving direction of the second transport mechanism WTR. The first processing unit 19 includes a pure water processing unit ONB1 for performing pure water processing on a plurality of substrates W, and chemical processing is performed on the plurality of substrates W with a processing liquid containing a chemical. A chemical treatment unit CHB1 is provided. The first processing unit 19 includes a sub-transport mechanism LFS1 that delivers the substrate W to and from the second transport mechanism WTR and can be moved up and down only by the pure water processing unit ONB1 and the chemical solution processing unit CHB1.

  A second processing unit 21 is provided at a position adjacent to the first processing unit 19. The second processing unit 21 has the same configuration as the first processing unit 19 described above. That is, the apparatus includes the pure water treatment unit ONB2, the chemical solution treatment unit CHB2, and the sub-transport mechanism LFS2.

  The second substrate processing apparatus B is different in configuration from the first substrate processing apparatus A described above. In addition, detailed description is abbreviate | omitted by attaching | subjecting the same code | symbol about a common structure.

  The second substrate processing apparatus B includes more processing units than the first substrate processing apparatus A described above. That is, the third processing unit 23 is provided adjacent to the second processing unit 21. The third processing unit 23 includes a pure water processing unit ONB3, a chemical solution processing unit CHB3, and a sub transport mechanism LFS3.

  As shown in FIG. 1, the first substrate processing apparatus A includes a control unit 25. The control unit 25 includes a CPU, a counter / timer, and the like, and includes a communication unit 27, a single batch scheduling unit 29, and a process execution instruction unit 31. A storage unit 33 is connected to the control unit 25. The single batch scheduling unit 29 creates a single batch schedule as described later. Further, the process execution instructing unit 31 issues an operation instruction to each resource based on the received overall schedule for the device.

  The control unit 25 handles the first transport mechanism CTC, the second transport mechanism WTR, the drying processing unit LPD, the pure water processing units ONB1 and ONB2, the chemical processing units CHB1 and CHB2, and the sub transport mechanisms LFS1 and LFS2 described above as resources. Control target. The storage unit 33 connected to the control unit 25 is a recipe that is created in advance by a user of the substrate processing apparatus and the like, and is recipe information including a plurality of processing steps that define how to process the substrate W. Data, a single batch schedule creation program, a processing program for executing the received overall schedule, resource information to be described later, and the like are stored in advance.

  The second substrate processing unit B includes a control unit 35 as shown in FIG. The control unit 35 has the same configuration as the control unit 25 described above. That is, a communication unit 37, a single batch scheduling unit 39, and a process execution instruction unit 41 are provided. A storage unit 43 is connected to the control unit 35.

  The external computer C includes a communication unit 45 and a scheduling function unit 47. The communication unit 45 performs communication between the first substrate processing apparatus A and the second substrate processing apparatus B. The scheduling function unit 47 creates an overall schedule as will be described later.

  Reference is now made to FIG. FIG. 4 is a schematic diagram illustrating an example of resource information.

  In the first substrate processing apparatus A and the second substrate processing apparatus B described above, resource information is stored in advance in the storage units 33 and 43. This resource information defines the apparatus configuration. For example, the first substrate processing apparatus A or the second substrate processing apparatus B as individual identification information, the resource name, and the resource type corresponding to the resource name It consists of The individual identification information represents which of the plurality of substrate processing apparatuses. The resource name represents the name of each processing unit, but is represented by a code name in FIG. The resource type is information indicating whether or not it is possible to make a lot stand by in each resource, and is expressed as being ready or not ready. The storage unit 33 stores resource information of the first substrate processing apparatus A, and the storage unit 43 stores resource information of the second substrate processing apparatus B.

  Next, a recipe and a single batch schedule will be described with reference to FIG. In this embodiment, as an example, the first substrate processing apparatus A processes two lots 1 and 2. FIG. 5 is a time chart showing an example of a recipe and a single batch schedule, where (a) shows lot 1 and (b) shows lot 2.

The recipe for lot 1 in this example is, for example, as shown in FIG.
That is, the recipe of lot 1 includes a processing step 1A by the first transport mechanism CTC, a processing step 1B by the second transport mechanism WTR, a processing step 1C by the chemical solution processing unit CHB1, and a processing step 1D by the sub transport mechanism LFS1. Processing step 1E by the pure water processing unit ONB1, processing step 1F by the second transport mechanism WTR, processing step 1G by the drying processing unit LPD, processing step 1H by the second transport mechanism WTR, and processing by the first transport mechanism CTC Step 1I. The recipe viewed from the user side is generally a processing step 1C by the chemical solution processing unit CHB1, a processing step 1E by the pure water processing unit ONB1, and a processing step 1G by the drying processing unit LPD. That is, the recipe viewed from the user side generally does not include the processing step 1A by the first transport mechanism CTC, but here, these are included as the recipe viewed from the control unit 25 side.

  In addition, the recipe of lot 2 includes a processing step 2A by the first transport mechanism CTC, a processing step 2B by the second transport mechanism WTR, a processing step 2C by the pure water treatment unit ONB2, and a processing step 2D by the second transport mechanism WTR. A processing step 2E by the pure water processing unit ONB1, a processing step 2F by the second transport mechanism WTR, a processing step 2G by the drying processing unit LPD, a processing step 2H by the second transport mechanism WTR, and a first transport mechanism CTC. Process step 2I.

  Of each processing step, the actual processing is the hatched part in the figure, and the part corresponding to the blank before that is the preparatory work for preparing to use the resource, and the part after that. The part is a post-work to clean up used resources.

  As described above, the recipe is composed of a plurality of processing steps. Before the entire schedule is created by the external computer C, a plurality of processing steps are combined into a plurality of blocks as a minimum unit of arrangement. Summarize the processing steps. At that time, the scheduling unit 29 refers to the above-described resource information (FIG. 4) in the storage unit 33. In general, when chemical processing is performed, excessive processing with chemicals adversely affects the lot, so that the chemical processing unit or the like is not divided into blocks so that a waiting time does not occur after the processing step. On the other hand, in the case of performing pure water treatment, since excessive treatment with pure water does not occur, a pure water treatment unit or the like can be arranged at the end of the block so that a standby time may occur after the treatment step.

  Reference is now made to FIGS. FIG. 6 is a flowchart showing the operation in the control unit of the substrate processing apparatus, and FIG. 7 is a flowchart showing the operation in the external computer. In the following description, processing by the first substrate processing apparatus A will be described as an example.

Step S1
A plurality of lots to be processed are sequentially transferred from the input unit 3 into the first substrate processing apparatus A. Here, it is assumed that the above-described lot 1 and lot 2 are carried in.

Step S2, S3
The user designates recipes for lot 1 and lot 2. Here, it is assumed that the above-described recipe of FIG. 5A is designated for lot 1 and the recipe of FIG. 5B is designated for lot 2. The scheduling unit 29 reads the designated recipe data from the storage unit 33.

Step S4
The scheduling unit 29 creates a single batch schedule for each of the lots 1 and 2. Specifically, it is as shown in FIGS. 5 (a) and 5 (b). Furthermore, the scheduling unit 29 divides each single batch schedule into a plurality of processing steps into blocks so that a processing step using resources that can be on standby is the last block while referring to the resource information in the storage unit 33.

  Specifically, lot 1 is as shown in FIG. 5A, and lot 2 is as shown in FIG. 5B. As shown in FIG. 4, in the recipe information, the chemical processing units CHB1 and CHB2 are set in the resource information as being incapable of waiting, so that other processing steps are divided so as to be the last of the block. Specifically, processing step 1A is block 1-A, processing steps 1B to 1E are block 1-B, processing steps 1F and 1G are block 1-C, and processing steps 1H and 1I are block 1-D. . In lot 2, processing step 2A is block 2-A, processing steps 2B and 2C are block 2-B, processing steps 2D and 2E are block 2-C, processing steps 2F and 2G are block 2-D, Processing steps 2H and 2I are referred to as processing step 2-E.

  Each single batch schedule delimited by the blocks created as described above is stored in the storage unit 33.

Step S5
The communication unit 27 transmits the single batch schedule of the lots 1 and 2 created as described above and the resource information of the storage unit 33 to the external computer C.

  Reference is now made to FIG.

Step T1
The external computer C receives the single batch schedule and resource information of the lots 1 and 2 from the communication unit 27 of the first substrate processing apparatus A through the communication unit 45.

Step T2
The scheduling function unit 47 of the external computer C creates a whole schedule by arranging single batch schedules of lots 1 and 2 on the same time axis. Assume that this entire schedule is as shown in FIG. 8, for example. FIG. 8 is a time chart showing an example of the entire schedule. Here, detailed description of the creation of the entire schedule is omitted, but there are various block arrangement methods as in the conventional example (Japanese Patent Laid-Open No. 2009-37595). This indicates that the number of calculations increases dramatically as the number of lots increases and the number of blocks increases. Here, since the scheduling function unit 47 of the external computer C independently performs an operation associated with the entire schedule, there is no need to consider the load.

Step T2
The communication unit 45 of the external computer transmits the created overall schedule to the device corresponding to the individual identification information with reference to the resource information. Here, the entire schedule is transmitted to the first substrate processing apparatus A.

  Returning now to FIG.

Step S6
The first substrate processing apparatus A receives the entire schedule from the external computer C via the communication unit 37.

Step S7
The process execution instructing unit 31 of the control unit 25 performs actual processing on the lots 1 and 2 by controlling each resource based on the received overall schedule.

  In the above description, the first substrate processing apparatus A has been described as an example. However, the same applies to the second substrate processing apparatus B, and the first substrate processing apparatus A and the second substrate processing apparatus A are the same. This is the same even if the two substrate processing apparatuses B are operated in parallel.

  As described above, the control unit 35 of the first substrate processing apparatus A refers to the resource information and the recipe, creates a single batch schedule corresponding to the recipe for each lot, and stores all the single batch schedule and the resource information. Send to external computer C. The external computer C creates an overall schedule for arranging all the single batch schedules of the first substrate processing apparatus A based on the resource information and all the single batch schedules. The control unit 35 of the first substrate processing apparatus A receives the entire schedule created by the external computer C, and performs actual processing for each lot based on the entire schedule. Since the entire schedule with a high load is performed by the external computer C, the scheduling load in the control unit 35 of the first substrate processing apparatus A can be suppressed even if the number of lots increases. Therefore, it is not necessary to reduce the number of lots, and productivity can be prevented from decreasing. Further, even if the overall scheduling load becomes too high and the external computer C falls into a stopped state, the control unit 35 of the first substrate processing apparatus A that executes the already received overall schedule is not affected. Therefore, the process being executed does not stop halfway, and a decrease in productivity can be suppressed. In addition, the control unit 35 of the first substrate processing apparatus A may be introduced as it is, and the external computer C may be introduced, and the control units 25 and 35 of the first substrate processing apparatus A and the second substrate processing apparatus B can The device cost can be reduced compared with the case of making it.

  In the above-described embodiment, the resource information and the recipe are stored in advance in the storage units 33 and 43. However, the resource information and the recipe may be set together when the lot is loaded. Further, it may be fixedly stored in a mask ROM or the like built in the control units 35 and 43.

  In the above embodiment, the external computer C refers to the individual identification information included in the resource information and determines to which device the entire schedule is transmitted. However, the individual identification information is different from the resource information. It may be included in the information, and based on this information, the transmission destination of the entire schedule may be determined.

<Modification>
The operation of the external computer C described above is as shown in FIG. 7, but may be operated as follows, for example. Reference is now made to FIGS. FIG. 9 is a flowchart showing a modified example of the operation in the external computer, FIG. 10 is a diagram for explaining the creation of the entire cross schedule, and (a) shows the scheduling of lots 1 and 2 in apparatus A. (B) shows the scheduling of lots 3 and 4 in apparatus B, (c) shows the scheduling of lots 3 and 4 in apparatus A, and (d) shows the scheduling of lots 1 and 2 in apparatus B.

  Steps T1, T2, and T3 are the same as those described above, but steps T2a, T2b, and T2c are added. In the following description, it is assumed that lots 1 and 2 are processed by the above-described first substrate processing apparatus A, and lots 3 and 4 are processed by the second substrate processing apparatus B.

Step T2
The external computer C creates an overall schedule for processing by the first substrate processing apparatus A based on the single batch schedules of the lots 1 and 2 and the resource information (FIG. 10A). Further, based on the single batch schedule of lots 3 and 4 and the resource information, an overall schedule for processing by the second substrate processing apparatus B is created (FIG. 10B). At that time, the external computer C stores the scheduled completion times te1 and te2 of the respective overall schedules. These correspond to the creation of the entire schedule described above except that the scheduled completion times te1 and te2 are stored.

Step T2a
Create an overall cross schedule. The cross overall schedule represents that an overall schedule is created for apparatuses other than the apparatus indicated by the single batch schedule corresponding to the resource information. In this example, lots 1 and 2 are to be processed by the first substrate processing apparatus A, and lots 3 and 4 are to be processed by the second substrate processing apparatus B. Try to create an overall schedule. In this example, an overall schedule is created when lots 3 and 4 are processed by the first substrate processing apparatus A (FIG. 10C), and lots 1 and 2 are processed by the second substrate processing apparatus B. (FIG. 10D), and the scheduled completion time points te3 and te4 are stored.

Step T2b
It is determined whether or not there is the fastest overall schedule, and the process branches. That is, the scheduled completion time te1 when the lots 1 and 2 are processed by the first substrate processing apparatus A and the scheduled completion time te4 when the lots 1 and 2 are processed by the second substrate processing apparatus B are obtained. Compare. Further, a scheduled completion time te2 when the lots 3 and 4 are processed by the second substrate processing apparatus B and a scheduled completion time te3 when the lots 3 and 4 are processed by the first substrate processing apparatus A Compare. The one that completes earlier is the fastest overall schedule for the lot.

Step T2c
If there is the fastest overall schedule, this is notified. By this notification, the operator of the apparatus can determine that the process can be completed quickly when the lot is moved to another apparatus according to the fastest overall schedule and the process is started.

  Production efficiency can be expected to improve by creating an overall schedule in cross and comparing the completion points.

  The present invention is not limited to the above embodiment, and can be modified as follows.

  (1) In the above-described embodiment, the scheduling by the substrate processing apparatus having the arrangement configuration shown in FIGS. 2 and 3 has been described as an example. However, the present invention is not limited to the substrate processing apparatus having such an arrangement configuration.

  (2) In the embodiment described above, the recipe shown in FIG. 5 has been described as an example, but the present invention is not limited to such a recipe.

  (3) In the embodiment described above, the combination of lots 1 and 2 and the combination of lots 3 and 4 have been described. However, the present invention is not limited to such a number of lots.

W ... Substrate A ... First substrate processing apparatus B ... Second substrate processing apparatus C ... External computer 1 ... FOUP
DESCRIPTION OF SYMBOLS 3 ... Input part CTC ... 1st conveyance mechanism WTR ... 2nd conveyance mechanism LPD ... Drying process part 19 ... 1st process part 21 ... 2nd process part 23 ... 3rd process part ONB1-ONB3 ... Pure water process part LFS1-LFS3 ... Sub-transport mechanism CHB1 to CHB3 ... Chemical solution processing unit 25, 35 ... Control unit 27, 37, 45 ... Communication unit 29, 39 ... Single batch scheduling unit 31, 41 ... Processing execution instruction unit 33, 43 ... Storage unit 47 ... Scheduling Functional unit 1A to 1D ... Lot 1 processing step 2A to 2D ... Lot 2 processing step 1-A to 1-D ... Lot 1 block 2-A to 2-D ... Lot 2 block te1 to te4 ... Scheduled completion Time

Claims (4)

In the method for creating a schedule of a substrate processing apparatus that performs actual processing after creating a schedule in advance when processing a plurality of lots with each resource by controlling each resource,
A process in which the control unit creates a schedule corresponding to the recipe as a single batch schedule for each lot with reference to resource information and a recipe indicating the configuration of each resource in the device, which is stored in advance in the storage unit ,
A process in which the control unit transmits resource information and all single batch schedules to an external computer;
A process in which the control unit receives only the entire schedule of the apparatus among the entire schedule for each substrate processing apparatus created by the external computer based on the resource information and all single batch schedules;
A process in which the control unit controls each resource based on the received overall schedule and performs actual processing for each lot in the device ,
A method of creating a schedule for a substrate processing apparatus, comprising: In the schedule preparation method of the substrate processing apparatus of Claim 1 ,
The resource information includes individual identification information of the substrate processing apparatus,
The external computer refers to the individual identification information included in the resource information, and transmits the created entire schedule to an apparatus according to the individual identification information. In the schedule preparation method of the substrate processing apparatus of Claim 1 or 2 ,
In the process of creating the overall schedule by the external computer, based on all the received resource information and the single batch schedule, the overall schedule is also created for devices other than the device indicated by the single batch schedule corresponding to the resource information. The process of comparing the results and determining the overall schedule of the device that completes processing earliest as the fastest overall schedule;
Informing that the fastest overall schedule exists;
A method of creating a schedule for a substrate processing apparatus, comprising: In the schedule creation program of the substrate processing apparatus that performs the actual processing after creating a schedule in advance when performing processing on a plurality of lots with each resource by controlling each resource,
A function for creating a schedule corresponding to a recipe as a single batch schedule for each lot with reference to resource information and recipes indicating the configuration of each resource in the device, which is stored in advance in the storage unit ,
The ability to send resource information and all single batch schedules to an external computer;
A function for receiving only the entire schedule of the apparatus among the entire schedule for each substrate processing apparatus created by an external computer based on the resource information and all single batch schedules;
A function for controlling each resource based on the received overall schedule and performing actual processing for each lot in the device ;
Is executed by the control unit. A program for creating a schedule for a substrate processing apparatus.

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