CN115169997B - Method and device for planning in and out time of material processing and readable storage medium - Google Patents

Method and device for planning in and out time of material processing and readable storage medium Download PDF

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CN115169997B
CN115169997B CN202211081714.0A CN202211081714A CN115169997B CN 115169997 B CN115169997 B CN 115169997B CN 202211081714 A CN202211081714 A CN 202211081714A CN 115169997 B CN115169997 B CN 115169997B
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time
starting
current
optimal
task
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CN115169997A (en
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朱宽
刘斌
李�杰
郭宇翔
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Ax Industries Ltd
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Exxon Industries Guangdong Co ltd
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    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q10/00—Administration; Management
    • G06Q10/06—Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling
    • G06Q10/063—Operations research, analysis or management
    • G06Q10/0631—Resource planning, allocation, distributing or scheduling for enterprises or organisations
    • G06Q10/06316—Sequencing of tasks or work
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q10/00—Administration; Management
    • G06Q10/06—Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling
    • G06Q10/063—Operations research, analysis or management
    • G06Q10/0633—Workflow analysis
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q50/00—Systems or methods specially adapted for specific business sectors, e.g. utilities or tourism
    • G06Q50/04—Manufacturing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

The invention discloses a method and equipment for planning the in-out time of material processing and a readable storage medium, and relates to the field of semiconductor manufacturing.

Description

Method and device for planning in and out time of material processing and readable storage medium
Technical Field
The invention relates to the field of semiconductor manufacturing, in particular to a planning method and equipment for material processing in-out time and a readable storage medium.
Background
Wafer fabrication is the most automated and complex process in semiconductor manufacturing. The wafer manufacturing comprises the processes of deposition, glue coating, exposure, development, etching and the like. In a semiconductor manufacturing process, a cleaning process is often required to ensure the quality of a wafer. In the cleaning process, chemical etching and cleaning are carried out for many times, and each step of etching and cleaning is washed by clean water. The semiconductor cleaning process runs through three major links of silicon wafer manufacturing, wafer manufacturing and packaging, and has great significance for chip manufacturing, and if the cleaning process does not meet the requirement, residual contamination impurities can cause chip failure.
The cleaning process is mainly completed by wafer cleaning equipment, and can be divided into semi-automatic equipment and full-automatic equipment according to the degree of automation. The cleaning equipment mainly comprises three parts: a front-end storage (Stocker, also called a material shelf) area, a Transfer (Transfer) area, a process area. The processing flow of the whole cleaning procedure can be divided into the following three stages of a feeding task (Carrier In task), a process task (Job task) and a discharging task (Carrier Out task), and the cleaning equipment at the high end can complete the whole cleaning processing flow in a full-automatic mode. At present, most of cleaning equipment uses a manipulator for transporting carrier in tasks, carrier out tasks and carrier in Job tasks, wherein the carrier includes wafers and carriers for loading wafers, the carriers can be loading boxes, and empty CST indicates that no loading box is loaded with wafers, and in order to ensure capacity, when scheduling is planned, the priority of the Job task is higher than that of the carrier in tasks, so the material waits at LP (LoadPort, wafer loader, or inlet) until the manipulator has enough clearance time to execute the carrier in tasks after the Job task, and the material is moved to the Stocker. Since the priority of a Job task is higher than that of a CarrierIn task, it is necessary to ensure that the manipulator can complete a Carrierln task and Move to the start position of the next Job task within the time from the end of the Move (command action) of the first Job to the start of the next Job task. For general cleaning equipment, the storage position of the materials in the Stocker area is not required, and clean materials (processed materials or empty CST without wafer) and unprocessed materials (dirty chips) can be mixed up and down, but for some special cleaning equipment, the mixed placement of the processed materials and the unprocessed materials may cause contamination, so that a chip reversing operation may be required before the CarrierIn task, thereby increasing the CarrierIn task time.
For the full-automatic cleaning equipment, because the external crown block cannot move when the material is positioned at the LP position, the crown block can be released to take new material only after the material is moved away. Therefore, the residence time of the material on the LP has a great influence on the productivity of the equipment, and similarly, the material needs to be returned to the outlet (same as the inlet position) from the material rack after the cleaning of the fully automatic cleaning equipment is completed, and if the residence time of the material on the material rack is too long, the influence on the productivity is also caused. According to actual production, the existing scheduling scheme with the action sequence of the cleaning equipment mainly has the technical problem that the residence time of materials at an inlet or on a material rack is too long, so that the whole capacity is influenced.
The above is only for the purpose of assisting understanding of the technical solution of the present invention, and does not represent an admission that the above is the prior art.
Disclosure of Invention
The invention mainly aims to provide a method, equipment and a readable storage medium for planning in and out time of material processing, and aims to solve the technical problem that the existing scheduling scheme with an action sequence of cleaning equipment mainly has the problem that the whole capacity is influenced because the residence time of materials at an inlet or on a material rack is too long.
In order to achieve the above object, the present invention provides a method for planning the time of material processing in and out, comprising the following steps:
when receiving an in-out task of a material, determining the current process step of a manipulator for transporting the material;
taking the ending time of the current process step as the current first starting time of the in-out task;
judging whether the execution time of starting to execute the in-and-out task at the current first starting time is less than the time interval between the current first starting time and the second starting time of the next process step, wherein the next process step is the next process step of the current process step;
if the time interval is smaller than the time interval, taking the current first starting moment as the starting moment for executing the in-out task;
and if the time interval is equal to or larger than the time interval, taking the next process step of the current process step as a new current process step, and executing the step of taking the ending time of the current process step as the current first starting time of the in-out task.
Further, before the step of determining whether the execution time of the in-out task starting from the current first start time is less than the time interval between the current first start time and the second start time of the next process step, the method includes:
acquiring loading information of the material rack at the current first starting moment and position information of the manipulator at the current first starting moment;
and generating an execution time of the in-out task when the in-out task starts to be executed at the current first starting moment based on the loading information and the position information, wherein the execution time is the time required by the manipulator to complete the in-out task.
Further, before the step of using the current first start time as the start timing for executing the task execution, the method further includes:
judging whether the starting of the task entering and exiting at the current first starting moment can cause the wrong execution of other process steps in the processing flow, wherein the other process steps comprise a first process step being executed in the processing flow and/or a second process step to be executed except the current process step;
if the other process steps cannot be executed mistakenly, executing the step of taking the current first starting moment as the starting moment for executing the in-out task;
and if the other process steps are caused to be executed wrongly, executing the next process step of the current process step as the new process step of the current process step.
Further, the first process step includes a cleaning process, and the step of determining whether starting to execute the in-and-out task at the current first start time may cause erroneous execution of other process steps in the process flow includes:
simulating the processing flow when the in-out task is executed at the current first starting moment to obtain a simulation process;
if the cleaning process is over-foamed or deadlocked in the simulation process, the other process steps are judged to be wrongly executed.
Further, the second process step further includes a combination process and a splitting process, and after the step of simulating that the process flow when the in-out task is executed at the current first starting time obtains a simulation process, the method further includes:
obtaining a third starting time of the combined process based on the simulation process;
judging whether the third starting time is smaller than the ending time of the first splitting process before the combined process;
and if the third starting time is less than the ending time of the first splitting process, judging that the other process steps are executed in error.
Further, after the step of determining whether the third starting time is less than the ending time of the first splitting process before the combining process, the method further includes:
if the third starting time is larger than or equal to the ending time of the first splitting process, obtaining the consumed time of the combined process based on the simulation process;
adding the consumption time to the third starting time to obtain a first finishing time corresponding to the combined process;
according to a difference value between the first ending moment and a first optimal ending moment of the combined process, adjusting the third starting moment to obtain a second optimal starting moment so that the second optimal ending moment corresponding to the second optimal starting moment is the same as the first optimal ending moment, wherein the first optimal ending moment of the combined process is generated by planning under the condition that the in-and-out task does not exist;
judging whether the second optimal starting time is less than the ending time of the first splitting process;
and if the second optimal starting time is smaller than the ending time of the first splitting process, judging that the other process steps are executed in error.
Further, after the step of determining whether the second optimal starting time is less than the ending time of the first splitting process, the method further includes:
if the second optimal starting time is greater than or equal to the ending time of the first splitting process and the second optimal starting time is less than the first optimal starting time corresponding to the first optimal ending time, taking the first optimal starting time as the actual starting time of the combined process;
and if the second optimal starting time is greater than or equal to the first optimal starting time, taking the second optimal starting time as the actual starting time of the combined process.
Further, after the step of using the first optimal start time as the actual start time of the combined process or using the second optimal start time as the actual start time of the combined process, the method further includes:
simulating the processing flow of the combined process starting from the actual starting moment, and judging whether the processing flow is deadlocked or over-foamed;
if deadlock or bubble passing occurs, judging that the other process steps are executed in error;
and if the deadlock or bubble passing does not occur, judging that the other process steps cannot be executed mistakenly, and judging that the actual starting moment of the combined process is effective.
In addition, in order to achieve the above object, the present invention further provides a device for planning the material processing in/out time, wherein the device for planning the material processing in/out time comprises: the system comprises a memory, a processor and a program for planning the material processing in-out time, wherein the program is stored on the memory and can be operated on the processor, and when the program for planning the material processing in-out time is executed by the processor, the steps of the method for planning the material processing in-out time are realized.
In addition, in order to achieve the above object, the present invention further provides a readable storage medium, where a program for planning the material processing entry and exit time is stored, and when the program is executed by a processor, the steps of the method for planning the material processing entry and exit time are implemented.
According to the planning method, the planning equipment and the readable storage medium for the material processing in-out time, provided by the embodiment of the invention, when the in-out task of the material is received, the current process step of a manipulator for transporting the material is determined; taking the ending time of the current process step as the current first starting time of the in-out task; judging whether the execution time of starting to execute the in-out task at the current first starting time is less than the time interval between the current first starting time and the second starting time of the next process step, wherein the next process step is the next process step of the current process step; if the time interval is smaller than the time interval, taking the current first starting moment as the starting moment for executing the in-out task; and if the time interval is equal to or larger than the time interval, taking the next process step of the current process step as a new current process step, and executing the step of taking the ending time of the current process step as the current first starting time of the in-out task. The method and the device have the advantages that the intervals among the process steps in the process tasks are also included in the planning range when the starting time of the material in-out tasks is planned, compared with the method and the device which only consider the intervals among the process tasks, the planning range is increased, the method and the device have more opportunities for calculating the starting time of the material in-out tasks, the possibility that materials are accumulated on inlets or material racks is reduced, and the overall production efficiency of wafers is improved.
Drawings
Fig. 1 is a schematic device structure diagram of a hardware operating environment according to an embodiment of the present invention;
FIG. 2 is a schematic flow chart illustrating a method for planning in-out times of material processing according to a first embodiment of the present invention;
FIG. 3 is a schematic flow chart illustrating a method for planning in-out times of material processing according to a second embodiment of the present invention;
FIG. 4 is a schematic diagram illustrating a sequence of robot movements of a process flow in the method for planning the material handling opportunities according to the present invention;
FIG. 5 is a schematic view of a storage position of a Stocker in the method for planning the material processing in-out timing of the invention;
FIG. 6 is a schematic view of a rewinding scene of a Stocker in the method for planning the material processing in-out opportunities;
fig. 7 is a scene schematic diagram of a process task in the method for planning the material processing in-out time of the present invention.
The implementation, functional features and advantages of the objects of the present invention will be further explained with reference to the accompanying drawings.
Detailed Description
It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
As shown in fig. 1, fig. 1 is a schematic device structure diagram of a hardware operating environment according to an embodiment of the present invention.
The equipment of the embodiment of the invention can be full-automatic wafer cleaning equipment, and can also be electronic terminal equipment with the display functions of data receiving, data processing and data sending, such as a PC, a smart phone, a portable computer and the like.
As shown in fig. 1, the apparatus may include: a processor 1001, such as a CPU, a network interface 1004, a user interface 1003, a memory 1005, a communication bus 1002. The communication bus 1002 is used to implement connection communication among these components. The user interface 1003 may include a Display screen (Display), an input unit such as a Keyboard (Keyboard), and the optional user interface 1003 may also include a standard wired interface, a wireless interface. The network interface 1004 may optionally include a standard wired interface, a wireless interface (e.g., WI-FI interface). The memory 1005 may be a high-speed RAM memory or a non-volatile memory (e.g., a magnetic disk memory). The memory 1005 may alternatively be a storage device separate from the processor 1001.
Optionally, the device may also include a camera, RF (Radio Frequency) circuitry, sensors, audio circuitry, wiFi modules, and so forth. Such as light sensors, motion sensors, and other sensors, among others. Specifically, the light sensor may include an ambient light sensor that may adjust the brightness of the display screen according to the brightness of ambient light, and a proximity sensor that may turn off the display screen and/or the backlight when the mobile terminal is moved to the ear. As one of the motion sensors, the gravity acceleration sensor can detect the magnitude of acceleration in each direction (generally, three axes), detect the magnitude and direction of gravity when the mobile terminal is stationary, and can be used for applications (such as horizontal and vertical screen switching, related games, magnetometer attitude calibration), vibration recognition related functions (such as pedometer and tapping) and the like for recognizing the attitude of the mobile terminal; of course, the mobile device may also be configured with other sensors such as a gyroscope, a barometer, a hygrometer, a thermometer, and an infrared sensor, which are not described herein again.
Those skilled in the art will appreciate that the configuration of the apparatus shown in fig. 1 is not intended to be limiting of the apparatus and may include more or fewer components than those shown, or some components may be combined, or a different arrangement of components.
As shown in fig. 1, the memory 1005, which is a kind of computer storage medium, may include an operating system, a network communication module, a user interface module, and a program for planning the material processing in and out opportunities.
In the terminal shown in fig. 1, the network interface 1004 is mainly used for connecting to a backend server and performing data communication with the backend server; the user interface 1003 is mainly used for connecting a client (user side) and performing data communication with the client; the processor 1001 may be configured to call the program for planning the material in and out processing time stored in the memory 1005, and perform the following operations:
when receiving an in-out task of a material, determining the current process step of a manipulator for transporting the material;
taking the ending time of the current process step as the current first starting time of the in-out task;
judging whether the execution time of starting to execute the in-and-out task at the current first starting time is less than the time interval between the current first starting time and the second starting time of the next process step, wherein the next process step is the next process step of the current process step;
if the time interval is smaller than the time interval, taking the current first starting moment as the starting moment for executing the in-out task;
and if the time interval is equal to or larger than the time interval, taking the next process step of the current process step as a new current process step, and executing the step of taking the ending time of the current process step as the current first starting time of the in-out task.
Further, the processor 1001 may call the program for planning the material processing in and out time stored in the memory 1005, and further perform the following operations:
before the step of determining whether the execution time of the in-out task started at the current first starting time is less than the time interval between the current first starting time and the second starting time of the next process step, the method includes:
acquiring loading information of the material rack at the current first starting moment and position information of the manipulator at the current first starting moment;
and generating an execution time of the in-out task when the in-out task starts to be executed at the current first starting moment based on the loading information and the position information, wherein the execution time is the time required by the manipulator to complete the in-out task.
Further, the processor 1001 may call a program for planning the material processing in and out time stored in the memory 1005, and further perform the following operations:
before the step of taking the current first start time as the start time for executing the task execution, the method further includes:
judging whether the starting of the task entering and exiting at the current first starting moment can cause the wrong execution of other process steps in the processing flow, wherein the other process steps comprise a first process step being executed in the processing flow and/or a second process step to be executed except the current process step;
if the other process steps cannot be executed mistakenly, the current first starting moment is used as the starting moment for executing the in-out task;
and if the other process steps are caused to be executed wrongly, executing the next process step of the current process step as the new process step of the current process step.
Further, the processor 1001 may call the program for planning the material processing in and out time stored in the memory 1005, and further perform the following operations:
the first process step comprises a cleaning process, and the step of judging whether the entering and exiting tasks are executed at the current first starting time to cause the wrong execution of other process steps in the processing flow comprises the following steps:
simulating the processing flow when the in-out task is executed at the current first starting moment to obtain a simulation process;
if the cleaning process is over-foamed or deadlocked in the simulation process, the other process steps are judged to be wrongly executed.
Further, the processor 1001 may call the program for planning the material processing in and out time stored in the memory 1005, and further perform the following operations:
the second process step further includes a combination process and a splitting process, and after the step of simulating that the machining flow when the in-and-out task is executed at the current first start time obtains a simulation process, the method further includes:
obtaining a third starting time of the combined process based on the simulation process;
judging whether the third starting time is smaller than the ending time of the first splitting process before the combined process;
and if the third starting time is less than the ending time of the first splitting process, judging that the other process steps are executed in error.
Further, the processor 1001 may call the program for planning the material processing in and out time stored in the memory 1005, and further perform the following operations:
after the step of determining whether the third starting time is less than the ending time of the first splitting process before the combining process, the method further comprises:
if the third starting time is larger than or equal to the ending time of the first splitting process, obtaining the consumed time of the combined process based on the simulation process;
adding the consumption time to the third starting time to obtain a first finishing time corresponding to the combined process;
adjusting the third starting time according to a difference value between the first ending time and a first optimal ending time of the combined process to obtain a second optimal starting time so that the second optimal ending time corresponding to the second optimal starting time is the same as the first optimal ending time, wherein the first optimal ending time of the combined process is generated by planning under the scene without the in-out task;
judging whether the second optimal starting time is less than the ending time of the first splitting process;
and if the second optimal starting time is less than the ending time of the first splitting process, judging that the other process steps are executed in error.
Further, the processor 1001 may call the program for planning the material processing in and out time stored in the memory 1005, and further perform the following operations:
after the step of determining whether the second optimal starting time is less than the ending time of the first splitting process, the method further comprises:
if the second optimal starting time is greater than or equal to the ending time of the first splitting process and the second optimal starting time is less than the first optimal starting time corresponding to the first optimal ending time, taking the first optimal starting time as the actual starting time of the combined process;
and if the second optimal starting time is greater than or equal to the first optimal starting time, taking the second optimal starting time as the actual starting time of the combined process.
Further, the processor 1001 may call a program for planning the material processing in and out time stored in the memory 1005, and further perform the following operations:
after the step of taking the first optimal start time as the actual start time of the combined process or taking the second optimal start time as the actual start time of the combined process, the method further comprises:
simulating the processing flow of the combined process starting from the actual starting time, and judging whether deadlock or bubble passing occurs in the processing flow;
if deadlock or bubble passing occurs, judging that the other process steps are executed in error;
and if the deadlock or bubble passing does not occur, judging that the other process steps cannot be executed mistakenly, and judging that the actual starting moment of the combined process is effective.
Referring to fig. 2, a method for planning the time of material processing in and out according to the first embodiment of the present invention includes:
step S10, when receiving a material in-out task, determining the current process step of a manipulator for transporting the material;
in this embodiment, the planning method of material processing business turn over opportunity is mainly applied to full-automatic wafer cleaning equipment, and consequently, the implementation main part of this scheme can be automatic wafer cleaning equipment, the CarrierIn task of present cleaning equipment, and CarrierOut task and Job task share a manipulator. Wherein, the feeding task (carrier in task) means: in the present embodiment, the CST refers to a process of transporting a carrier loaded with a wafer from an equipment inlet to a Stocker inside a cleaning apparatus, where the carrier may be a loading cassette, and an empty CST indicates a loading cassette not loaded with a wafer, and for a semi-automatic cleaning apparatus, the process is completed manually, and for a full-automatic cleaning apparatus, the material is transported to an equipment inlet (LP) by a crane outside the cleaning apparatus, and then transported by a manipulator to a material rack (Stocker) inside the apparatus for temporary storage, and waits to enter a process area for processing; process (Job) means: the materials on the Stocker are transported to the process area through the transmission area to be subjected to the cleaning process, and then returned to the Stocker for temporary storage after the cleaning process is finished; discharge (CarrierOut) means: the process of transporting the finished material from the Stocker to the outlet of the cleaning apparatus (common with the inlet area). In the current scheduling scheme, since the priority of the Job task (process task) is higher than the CarrierIn task (feed task) and the CarrierOut task (discharge task), the material waits at the entrance or the material shelf until the manipulator has enough time to perform the CarrierIn task or the CarrierOut task after the Job task is completed. The material processing in-out tasks refer to CarrierIn tasks and CarrierOut tasks. Therefore, the invention mainly aims at planning the starting time of the CarrierIn task and the CarrierOut task of the material, and because the planning processes of the starting time of the CarrierIn task and the CarrierOut task are the same, and the CarrierOut task is simpler than the planning process of the CarrierIn task (the CarrierOut task does not need to be subjected to rewinding operation, so the scene is simpler), in the subsequent process, the CarrierIn task is taken as an example for explanation, and the starting time of the CarrierIn task actually refers to the entering time (or entering time) when the material enters the processing flow.
It should be noted that, for some wafer cleaning apparatuses, there is a corresponding requirement for the Stocker to store the material, and therefore, the Stocker with the position placing requirement may need to perform the rewinding operation. Firstly, a Stocker with position and placement requirements is stored according to the storage principle when CST is stored as follows: the clean material is placed in the upper layer vacant site with the largest label, and the dirty material is placed in the lower layer vacant site with the smallest label, so that cross contamination is avoided. The same layer can be mixed clean and dirty, but if the current layer is mixed, the layer above the current layer must be put clean and the layer below must be put dirty. As shown in fig. 5, the storage position diagram of Stocker has a 4 × 4 structure, and has 16 storable positions, which are 1 to 16, including a clean wafer (i.e., a processed wafer is placed in the CST of the clean wafer position or an empty CST) and a dirty wafer (i.e., an unprocessed wafer is placed in the CST of the dirty wafer position). Wherein, the third layer 9 and 10 are used for placing clean sheets, the third layer 11 and 12 are used for placing dirty sheets, the upper layers 13 to 16 of the fourth layer must be used for placing clean sheets, and the lower first and second layers can only be used for placing dirty sheets. Further, referring to fig. 6, a schematic view of a rewinding scene of a Stocker, at this time, clean sheets are stored in a first layer of the Stocker, and if there is a batch of materials waiting for CarrierIn at an entrance at this time, the dirty sheets cannot be stored in the upper layer of the clean sheets according to the CST storage principle, so that a rewinding operation needs to be performed: the mechanical arm moves to a Stocker-1; the manipulator moves the material at the position of the Stocker-1 to the Stocker-14; the manipulator moves from the Stocker-14 to the LP inlet; the manipulator moves the material at the LP inlet to a Stocker-1; the robot moves to the starting position of the next process task. Thus, the rewinding operation results in an increased sequence of actions for the feeding task, with a consequent increase in the required time, and a corresponding increase in the residence time of the material at the LP. In addition, a more critical problem is that the rewinding has an influence on the process task, for example, if a clean wafer at the Stocker-1 is empty CST, the corresponding wafer is still processed in the process area, and when the clean wafer is rewound to the Stocker-14, the time of the transmission area is changed accordingly, which affects the originally planned scheduling action sequence, and may cause the material in the process area to bubble too, resulting in process failure. Thus, the scheduling of feed tasks will be more difficult.
As shown in fig. 4, the schematic diagram of the motion sequence of the robot in the process flow includes process tasks (1 robot on-load movement and 5 robot on-load movement) for the robot to perform the movement of Job task transporting materials, and feeding tasks (2 robot pre-movement, 3 robot on-load movement and 4 robot pre-movement) for the robot to perform the movement of CarrierIn task. Wherein, the 2 manipulator preliminary movement means that the manipulator moves from the 1 manipulator load movement end position to the LP entrance, the 3 manipulator load movement means that the manipulator moves the CST to the Stocker from the LP entrance, and the 4 manipulator preliminary movement means that the manipulator moves from the Stocker to the 5 manipulator load movement start position. Because the priority of the process tasks is higher than that of the feeding tasks, the feeding tasks are usually completed by selecting a time interval from the end of one process task to the start of the next process task, and the duration of the time interval needs to meet the requirement that the manipulator can complete the feeding tasks and can move to the starting position of the next process task.
In actual production, a process task (Job task) can be divided into three main process steps or stages, namely, jobIn (combinatorial process), jobMid (cleaning process), and JobOut (splitting process).
Wherein, jobIn means that the robot transfers CST from Stocker to TurnTable (Wafer separation stage), transfers wafers in CST to Pusher (Wafer merging stage) through Transfer region (Transfer region), and then transfers empty CST back to Stocker, repeating one or more times, transfers multiple sets of wafers (usually two sets of wafers) to Pusher, and combines them into a Job group (the process can be simply understood as combining one or more wafers in CST with the same process recipe into a Job group, where the process recipe means the cleaning step that the Wafer needs to go through).
JobMid is a process in which the robot returns a Job group from Pusher to Pusher through processing of one to a plurality of function modules according to a process recipe (or processing path) of the Job group. In the process, because the Job path has the conditions of re-entry in the reverse order and the like, deadlock is easily caused, and bubbles need to be considered, so that the device scheduling problem is very challenging. It should be noted that deadlock and bubble passing are problems that often occur in the field of wafer processing or manufacturing, and whether the deadlock or the bubble passing occurs may be determined in advance through a simulation calculation method, which is not described herein again.
JobOut means a process in which a Job group is split into a plurality of groups of wafers by pushers and returned to the Stocker hollow CST via a Transfer area and a manipulator. It should be noted here that when one Job group needs to pass through the JobIn, the JobMid, and the JobOut in the process order in the process task, and when the JobIn start time of one Job group is determined, the JobIn end time, the JobMid start and end time, and the JobOut start and end time of the Job group can be determined in the same manner (in the actual production process, the time of each process step in the process task of the Job group can be determined, and therefore, after the process task start time of the Job group is determined, the start and end time of each process step in the process task can be determined).
And a large time gap may exist between the end of the JobIn and the start of the next JobIn or the start of the JobOut to satisfy the condition of executing the feeding task. Therefore, in this embodiment, the current process step in the current process steps of the manipulator for determining the transportation material may include JobIn, jobMid and JobOut, and preferably JobIn and JobOut. For example, when a cleaning apparatus (fully automatic wafer cleaning apparatus) receives a feeding task (CarrierIn), the cleaning apparatus may determine a process step that is being performed by its own robot, i.e., a current process step. For example, referring to fig. 7, a schematic view of a process task scenario is shown, where the manipulator motion sequence planned when no material is added is such that the manipulator sequentially executes JobIn of jobgroup 1, jobOut of jobgroup 2, jobOut of jobgroup 3, and JobIn of job4 in the time direction, and the process task further includes a JobMid, and the JobMid does not need to occupy the manipulator for a long time when it is performed, and can be performed simultaneously with the JobIn or the JobOut, and therefore, it is not shown in fig. 7. If a material feeding task is received in a period (T1 to T2) of Job group 1 for JobIn. At this time, the current process step obtained is the JobIn process step of the Job group 1.
Step S20, taking the ending time of the current process step as the current first starting time of the in-out task;
specifically, also in the above example, since the robot is currently performing the JobIn process step of the Job group 1, the start time (T1) of the JobIn process step of the Job group 1 is already determined, and the end time (T2) of the JobIn process step of the Job group 1 may be determined. The end time (T2) is used as the current entry time of the material into the process flow, which is also in fact the current first starting time of the feed task (CarrierIn task).
Step S30, judging whether the execution time of the business turn-in and turn-out task is less than the time interval between the current first starting time and the second starting time of the next process step, wherein the next process step is the next process step of the current process step;
further, before the step of determining whether the execution time of the in-out task starting from the current first start time is less than the time interval between the current first start time and the second start time of the next process step, the method includes: acquiring loading information of the material rack at the current first starting moment and position information of the manipulator at the current first starting moment; and generating an execution time of the in-out task when the in-out task starts to be executed at the current first starting moment based on the loading information and the position information, wherein the execution time is the time required by the manipulator to complete the in-out task.
Specifically, loading information of a material rack (Stocker) at a current first starting time, that is, material storage conditions of positions on the material rack, and position information of the manipulator at the current starting time (or after completing a JobIn process step of the Job group 1) are obtained. After the loading information and the position information are determined, the transportation time required for transporting the material from the inlet to the material rack and moving the material to the starting position of the next process step when the manipulator moves to the inlet under the condition of the current first starting moment can be calculated in a simulation calculation mode (for example, according to the initial position of the manipulator, the rewinding (if the rewinding) process and the transportation process of the manipulator are simulated, the transportation time can be obtained, and the simulated process is determined by the structure of the cleaning equipment), wherein the transportation time is the time required for completing the feeding task, and the front and back transportation positions of the material in the discharging task are opposite). With further reference to fig. 7, the next process step for JobIn for current process step jobgroup 1 is JobOut for jobgroup 2. It should be noted that both the start time T3 and the end time T4 of JobOut of the jobgroup 2 are already determined (after the JobIn start time of the jobgroup 2 is determined, the time during the whole process task of the jobgroup 2 can be determined). The time interval between the end time and the start time of the next process step is therefore T3 minus T2 (T3-T2), and the transport time is compared in magnitude with T3-T2.
Step S40, if the time interval is smaller than the time interval, the current first starting moment is used as the starting moment for executing the in-out task;
specifically, if the transportation time is less than the time interval (T3-T2), it indicates that the feeding task can be completed between the JobIn process step of the Job group 1 and the JobOut process step of the Job group 2, and the obtained current entry time is also the start time of the feeding task as the time when the material enters the processing flow.
And S50, if the time interval is equal to or larger than the time interval, taking the next process step of the current process step as a new current process step, and executing the step of taking the ending time of the current process step as the current first starting time of the in-and-out task.
Specifically, if the transportation time is equal to or greater than the time interval (T3-T2), it indicates that the feeding task cannot be completed between the JobIn process step of Job group 1 and the JobOut process step of Job group 2. Then, the current process step is determined again, for example, based on the above example, the next process step of the current process step is the JobOut process step of the jobgroup 2, the JobOut process step of the jobgroup 2 is taken as a new current process step, and step S20 is executed correspondingly, at this time, the end time of the new current process step is T4, T4 is taken as the current entry time when the material enters the process flow, and whether the above condition can be met by T4 is recalculated and judged (the transportation time is less than the interval time). And circulating in such a way until the transportation time can be less than the interval time at the current entering moment, and jumping out of the circulation. It should be noted that in an actual production process, the cleaning plant may comprise two inlets (LP), and thus the cleaning plant may receive two material feed tasks. When the current first starting time of the feeding task of one material (material 1) is determined, the feeding task ending time of the material can be determined, the feeding task ending time of the material is directly used as the current first starting time of the next material (material 2), and the step of checking and judging the current first starting time is executed (namely, the feeding task of the material 1 is directly used as the current process step for planning the current first starting time of the material 2, and the processes from the step S20 to the step S50 are executed). In addition, for the same planning of the current first starting time of the discharging task of the material as the planning of the feeding task of the material, the planning process of the feeding task may be specifically referred to, and details are not repeated here.
In the embodiment, when an in-out task of a material is received, determining a current process step of a manipulator transporting the material; taking the ending time of the current process step as the current first starting time of the in-out task; judging whether the execution time of starting to execute the in-and-out task at the current first starting time is less than the time interval between the current first starting time and the second starting time of the next process step, wherein the next process step is the next process step of the current process step; if the time interval is smaller than the time interval, taking the current first starting moment as the starting moment for executing the in-out task; and if the time interval is equal to or larger than the time interval, taking the next process step of the current process step as a new current process step, and executing the step of taking the ending time of the current process step as the current first starting time of the in-out task. The method and the device have the advantages that the intervals among the process steps in the process tasks are also included in the planning range when the starting time of the material in-out tasks is planned, compared with the method and the device which only consider the intervals among the process tasks, the planning range is increased, the method and the device have more opportunities for calculating the starting time of the material in-out tasks, the possibility that materials are accumulated on inlets or material racks is reduced, and the overall production efficiency of wafers is improved.
Referring to fig. 3, a first embodiment of the method for planning the in-out time of material processing according to the present invention provides a second embodiment of the method for planning the in-out time of material processing according to the present invention.
Before the step of taking the current first start time as a start time for executing the ingress and egress task execution, the method further comprises:
step S301, judging whether the entering and exiting task is executed at the current first starting moment to cause the error execution of other process steps in the processing flow, wherein the other process steps comprise a first process step which is executed in the processing flow and/or a second process step to be executed except the current process step;
specifically, based on the example of the material feeding task, except that the transportation time of the material at the current entering time (the current first starting time of the feeding task) needs to be less than the interval time (specifically, refer to the first embodiment, which is not described herein), it may be determined whether the material entering the processing flow at the current entering time may cause erroneous execution of other process steps in the processing flow. It should be noted that, when a material enters a processing flow, the material belongs to a dirty piece (a wafer which is not cleaned and processed), and therefore, before the material is placed in the material rack, a piece rewinding operation may be performed on the material rack, similarly, referring to fig. 6, if the robot moves an empty material at the Stocker-1 to the lower layer position of the Stocker-14, the empty material position is changed, and therefore, the originally planned moving process of a wafer corresponding to the empty material is changed (for example, the time for placing a wafer corresponding to the empty material back into the empty material process is increased or reduced). Similarly, if the material at the Stocker-1 is not empty, the progress of the JobIn will change due to the change in the material position of the wafers to be combined into a JobIn group when the JobIn process step is performed. Therefore, after the rewinding operation is carried out, the originally planned overall action sequence of the mechanical arm can be influenced.
The above-mentioned further process steps comprise a first process step being performed and/or a second process step to be performed in the process flow in addition to the current process step. As shown in fig. 7, the current process step is a JobIn process step of the Job group 1, and the first process step being executed at this time may be a JobMid process step of another Job group, such as a JobMid process step of the Job group 2 (note that the JobMid process step is to process the Job group into one or more functional modules, and usually, soaking or cleaning the Job group with different solutions does not require a robot arm, and thus, the process may be performed simultaneously with the JobIn or the JobOut). And the second process step to be performed may be JobOut 2's JobOut, jobOut 3's JobOut, or jobsin of Job group 4.
Further, the first process step includes a cleaning process, and the step of determining whether starting to execute the in-and-out task at the current first start time may cause erroneous execution of other process steps in the process flow includes: simulating the processing flow when the in-out task is executed at the current first starting moment to obtain a simulation process; and if the cleaning process generates bubbles or deadlock in the simulation process, judging that the other process steps are executed in error.
Specifically, the process of simulating the process flow when the simulated material enters the process flow at the current entering time (that is, the process of the process flow when the simulated feeding task starts to be executed at the current first starting time). It will be appreciated that the entire process flow of the cleaning apparatus after the addition of material can be simulated under conditions where the cleaning apparatus is known and the current entry time of the material into the process flow can be determined. The cleaning process is a JobMid process step, and a jobgroup is placed into one or more functional modules for processing, specifically, different cleaning tanks (functional modules) contain different chemical solutions, the jobgroup is placed into the chemical solutions for soaking, usually, there is a time constraint when the jobgroup is soaked in one cleaning tank, that is, when the soaking time of the jobgroup exceeds the constraint, the JobMid process step can cause bubbling. Similarly, since there are multiple cleaning tanks, there can be multiple Job groups to perform the Jobmid process steps simultaneously, and when there are two Job groups that need to enter one cleaning tank simultaneously (the cleaning tank can only be put in one Job group at a time), deadlock occurs. Bubble passing and deadlock are both execution errors, and when the bubble passing or deadlock occurs, the process may fail or the process time may be increased, so that the current entry time corresponding to the material at this time is not available or effective.
Further, the second process step further includes a combination process and a splitting process, and after the step of simulating that the process flow when the in-out task is executed at the current first starting time obtains a simulation process, the method further includes: obtaining a third starting time of the combined process based on the simulation process; judging whether the third starting time is smaller than the ending time of the first splitting process before the combined process; and if the third starting time is less than the ending time of the first splitting process, judging that the other process steps are executed in error.
Specifically, the second process step includes a combination process and a splitting process, as shown in fig. 7, where the JobOut of the jobgroup 2, the JobOut of the jobgroup 3, and the JobIn of the jobgroup 4 correspond to the combination process being the JobIn of the jobgroup 4, and the splitting process being the JobOut of the jobgroup 2 and the JobOut of the jobgroup 3. Wherein, the start time and the end time of the JobOut of the Job group 2 correspond to the start time and the end time respectivelyThe start and end times of JobOut for jobgroup 3 are T3 and T4, respectively, corresponding to T5 and T6, and the start and end times of JobIn for jobgroup 4 are T7 and T8, respectively. In fig. 7, T3 to T8 are calculated by planning in a scene where no material enters the process flow (material-free feeding task). In addition, since the present embodiment is designed for the time when the material is processed to enter or exit the processing flow, the specific planning generation manner from T3 to T8 is not described herein again, and reference may be made to the prior art. After the material enters the processing flow (starts to execute the feeding task) at the current entering time (current first starting time), if the rewinding process is required (the box (non-empty material) with the wafer loaded therein is preferentially moved during the rewinding process, if the empty material is moved, the end time of the JobOut of the wafer which has already entered the cleaning process is caused to change), the start time of the JobIn may be caused to change, and the new start time after the change is the third starting time of the above-mentioned combination process, for example, the JobIn start time of the jobgroup 4 in fig. 7 is T7, and T7 is obtained by a scene where no material enters the processing flow, and T is used as T 1 And 7, a start time (third start time) of the Job group 4JobIn obtained by the scene planning of the material entering the processing flow. As shown in fig. 7, the first split process before the combination process is JobOut for jobgroup 3. Correspondingly, the end time of the JobOut of the Job group 3 is T6, and T6 is compared with T 1 7 size, T 1 And 7, if the value is less than T6, the JobIn of the Job group 4 cannot be executed, so that the execution error of other process steps is judged, and at the moment, the current entering moment corresponding to the material is not available or effective.
Further, after the step of determining whether the third starting time is less than the ending time of the first splitting process before the combining process, the method further includes: if the third starting time is greater than or equal to the ending time of the first splitting process, obtaining the consumed time of the combined process based on the simulation process; adding the consumed time to the third starting time to obtain a first finishing time corresponding to the combined process; according to a difference value between the first ending moment and a first optimal ending moment of the combined process, adjusting the third starting moment to obtain a second optimal starting moment so that the second optimal ending moment corresponding to the second optimal starting moment is the same as the first optimal ending moment, wherein the first optimal ending moment of the combined process is generated by planning under the condition that the in-and-out task does not exist; judging whether the second optimal starting time is less than the ending time of the first splitting process; and if the second optimal starting time is smaller than the ending time of the first splitting process, judging that the other process steps are executed in error.
Similarly, based on the example above, at T 1 And 7, when the time is more than or equal to T6, obtaining the consumption time of the combined process according to the simulation process, and obtaining the consumption time of the combined process through simulation calculation under the conditions that the starting time of the combined process is determined and the loading information of the materials on the material rack is updated (such as the loading information after the materials are added into the material rack), wherein the consumption time of the combined process is obtained through simulation calculation at T 1 7 plus the consumption time of the combinatorial process to obtain the first end time T of JobIn of Job4 1 8. Adjusting the first start time based on a difference between the first end time and the first optimal end time, including when the first end time is greater than the first optimal end time (T) 1 8 is greater than T8), a second optimal start time, e.g., a second optimal start time (T), is obtained by subtracting the difference between the first end time and the first optimal end time from the third start time 2 7）=T 1 7-（T 1 8-T8), it will be appreciated that since the first end time is greater than the first optimal end time, the end time corresponding to jobi of Job4 after addition of material is later than when no material is added (T 1 8 > T8), so that the second optimal end time (T) corresponding to the second optimal start time of JobIn of Job4 is ensured 2 8) The starting time of Jobi of Job4 after the material is added is advanced by T specific time to obtain a second optimal starting time without change compared with the first optimal ending time 1 The difference of 8-T8. Otherwise, if the first ending time is less than or equal to the first optimal junctionTime of beam (T8 ≧ T) 1 8) Then the difference between the first optimal ending time and the first ending time is added to the first starting time to obtain a second optimal starting time, e.g. T 2 8=T 1 7+（T8-T 1 8）。
Comparing the second optimal starting time of the combined process with the ending time of the first splitting process before the combined process (e.g., comparing T) 2 Between 8 and T6) if the second optimal starting time is less than the end time (T) of the first splitting process before the combining process 2 8 < T6), it indicates that the combinatorial process cannot be normally performed, and therefore, it is determined that the other process steps have performed wrong processing.
Further, after the step of determining whether the second optimal starting time is less than the ending time of the first splitting process, the method further includes: if the second optimal starting time is greater than or equal to the ending time of the first splitting process and the second optimal starting time is less than the first optimal starting time corresponding to the first optimal ending time, taking the first optimal starting time as the actual starting time of the combined process; and if the second optimal starting time is greater than or equal to the first optimal starting time, taking the second optimal starting time as the actual starting time of the combined process.
Specifically, if the second optimal starting time of the combination process is greater than or equal to the ending time of the first splitting process before the combination process, and the second optimal starting time of the combination process is less than the first optimal starting time corresponding to the first optimal ending time (e.g., T6 is less than or equal to T) 2 8 < T7), the first optimal start time is taken as the actual start time of the combinatorial process (e.g., T7 is taken as the actual start time of the combinatorial process). If the second optimal starting time of the combined process is greater than or equal to the first optimal starting time (such as T) 2 8 ≧ T7), the second optimal start time is taken as the actual start time of the combinatorial process (e.g., let T be T) 2 8 as the actual start time of the combined process).
Further, after the step of using the first optimal starting time as the actual starting time of the combined process or using the second optimal starting time as the actual starting time of the combined process, the method further comprises: simulating the processing flow of the combined process starting from the actual starting time, and judging whether deadlock or bubble passing occurs in the processing flow; if deadlock or bubble passing occurs, judging that the other process steps are executed in error; and if the deadlock or bubble passing does not occur, judging that the other process steps cannot be executed mistakenly, and judging that the actual starting moment of the combined process is effective.
Specifically, after the actual starting time of the combined process is determined, the machining flow of the combined process at the actual starting time is simulated. It is understood that the process tasks of the process flow (Job tasks) include JobIn (combinatorial process), jobMid (cleaning process), and JobOut (splitting process). The simulation processing flow is actually a cleaning process which is performed in a simulation combination process and simultaneously with the combination process, and whether the cleaning process is over-foamed or deadlocked due to the fact that the combination process is started at the actual starting moment is judged through simulation. If a deadlock or bubble is present, it is determined that the other process steps are erroneously performed. Otherwise, if the deadlock or bubble passing does not occur, the other process steps are judged not to be executed mistakenly, and the actual starting time of the combined process is judged to be effective. The actual starting time obtained by adjusting the starting time of the combined process is available and effective under the condition that the material enters the processing flow, the new combined process in the process task can still be normally executed after the material is added into the processing flow, the scheduling arrangement of the process task is not influenced, bubbles or deadlock is avoided, and the production efficiency and the production quality of the wafer product are ensured. In addition, it should be noted that, in the present embodiment, when the time when the material enters the processing flow is planned, the influence of the rewinding on the cleaning process and the combination process in the process task is also considered, so that the present invention is applicable to a special cleaning device which requires that the material is stored in the Stocker with clean pieces and dirty pieces.
Step S302, if the other process steps are not caused to be executed wrongly, the step of taking the current first starting moment as the starting moment for executing the in-out task execution is executed;
step S303, if the other process steps are erroneously executed, executing the step of taking the next process step of the current process step as the new current process step.
Specifically, after the judgment of the above steps, the material enters the processing flow at the current entering time, and other process steps in the processing flow are not affected to cause the wrong execution, so that the current entering time can be used as the time when the material enters the processing flow. Otherwise, if the other process steps are executed in error when the current entering time enters the processing flow, the next process step of the current process step is executed as the new process step. That is, the current entering time of the material entering the processing flow is determined again, and in detail, the process may refer to the first embodiment, which is not described herein again.
In this embodiment, simulation inspection is further performed on the scene where the material enters the processing flow at the current entering time, so as to avoid the influence of the addition of the material on other process steps in the processing flow (simulation inspection is performed on the scene when the feeding task is executed at the current first starting time, so as to avoid the influence of the feeding task on other process steps in the processing flow), thereby ensuring the production efficiency and the production quality of the wafer product.
In addition, an embodiment of the present invention further provides a device for planning a material processing in/out opportunity, where the device for planning the material processing in/out opportunity includes: the system comprises a memory, a processor and a program for planning the material processing in-out time, wherein the program is stored on the memory and can be operated on the processor, and when the program for planning the material processing in-out time is executed by the processor, the steps of the method for planning the material processing in-out time are realized.
The specific implementation of the device for planning the material processing in/out time of the invention is basically the same as the embodiments of the new method for planning the material processing in/out time, and is not described herein again.
In addition, an embodiment of the present invention further provides a readable storage medium, where a program for planning a material processing entry and exit time is stored, and when the program for planning the material processing entry and exit time is executed by a processor, the method for planning the material processing entry and exit time is implemented.
The specific implementation of the readable storage medium of the present invention is substantially the same as the embodiments of the method for planning the material processing in-out time, and is not described herein again.
It should be noted that, in this document, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or system that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or system. Without further limitation, an element defined by the phrases "comprising a," "8230," "8230," or "comprising" does not exclude the presence of other like elements in a process, method, article, or system comprising the element.
The above-mentioned serial numbers of the embodiments of the present invention are only for description, and do not represent the advantages and disadvantages of the embodiments.
Through the above description of the embodiments, those skilled in the art will clearly understand that the method of the above embodiments can be implemented by software plus a necessary general hardware platform, and certainly can also be implemented by hardware, but in many cases, the former is a better implementation manner. Based on such understanding, the technical solution of the present invention may be embodied in the form of a software product, which is stored in a storage medium (e.g., ROM/RAM, magnetic disk, optical disk) as described above, and includes instructions for enabling a terminal device (e.g., a mobile phone, a computer, a server, a full-automatic wafer cleaning device, or a network device) to execute the method according to the embodiments of the present invention.
The above description is only a preferred embodiment of the present invention, and not intended to limit the scope of the present invention, and all modifications of equivalent structures and equivalent processes, which are made by using the contents of the present specification and the accompanying drawings, or directly or indirectly applied to other related technical fields, are included in the scope of the present invention.

Claims (7)

1. A planning method for material processing in-out time is characterized by comprising the following steps:
when receiving an in-out task of a material, determining the current process step of a manipulator for transporting the material;
taking the ending time of the current process step as the current first starting time of the in-out task;
judging whether the execution time of starting to execute the in-and-out task at the current first starting time is less than the time interval between the current first starting time and the second starting time of the next process step, wherein the next process step is the next process step of the current process step;
if the time interval is smaller than the time interval, taking the current first starting moment as the starting moment for executing the in-out task;
if the time interval is equal to or larger than the time interval, taking the next process step of the current process step as a new current process step, and executing the step of taking the ending time of the current process step as the current first starting time of the in-out task;
before the step of taking the current first starting time as the starting time for executing the task execution, the method further includes:
judging whether the starting of the task entering and exiting at the current first starting moment can cause the wrong execution of other process steps in the processing flow, wherein the other process steps comprise a first process step being executed in the processing flow and/or a second process step to be executed except the current process step;
if the other process steps cannot be executed mistakenly, executing the step of taking the current first starting moment as the starting moment for executing the in-out task;
if the other process steps are caused to be executed wrongly, executing the step of taking the next process step of the current process step as the new current process step;
wherein the step of judging whether the entering and exiting tasks are executed at the current first starting moment to cause the wrong execution of other process steps in the processing flow comprises the following steps:
simulating the processing flow when the in-out task is executed at the current first starting moment to obtain a simulation process; the second process step further comprises a combination process and a resolution process;
obtaining a third starting time of the combined process based on the simulation process;
judging whether the third starting time is smaller than the ending time of the first splitting process before the combined process;
if the third starting time is less than the ending time of the first splitting process, judging that the other process steps are executed in error;
wherein after the step of determining whether the third starting time is less than the ending time of the first splitting process before the combining process, the method further comprises:
if the third starting time is greater than or equal to the ending time of the first splitting process, obtaining the consumed time of the combined process based on the simulation process;
adding the consumed time to the third starting time to obtain a first finishing time corresponding to the combined process;
adjusting the third starting time according to a difference value between the first ending time and a first optimal ending time of the combined process to obtain a second optimal starting time so that the second optimal ending time corresponding to the second optimal starting time is the same as the first optimal ending time, wherein the first optimal ending time of the combined process is generated by planning under the scene without the in-out task;
judging whether the second optimal starting time is smaller than the ending time of the first splitting process or not;
and if the second optimal starting time is smaller than the ending time of the first splitting process, judging that the other process steps are executed in error.
2. The method for scheduling material processing in-out opportunities according to claim 1, wherein before the step of determining whether the execution time when the in-out task is executed starting with the current first start time is less than the time interval between the current first start time and the second start time of the next process step, the method comprises:
acquiring loading information of the material rack at the current first starting moment and position information of the manipulator at the current first starting moment;
and generating an execution time of the in-out task when the in-out task starts to be executed at the current first starting moment based on the loading information and the position information, wherein the execution time is the time required by the manipulator to complete the in-out task.
3. The method for planning in-and-out opportunities for material processing according to claim 2, wherein the first process step comprises a cleaning process, after the step of simulating that the process flow when the in-and-out task is executed starting with the current first start time obtains a simulation process, the method comprising:
and if the cleaning process generates bubbles or deadlock in the simulation process, judging that the other process steps are executed in error.
4. The method for planning material handling in and out opportunity according to claim 3, wherein after the step of determining whether the second optimal starting time is less than the ending time of the first splitting process, the method further comprises:
if the second optimal starting time is greater than or equal to the ending time of the first splitting process and the second optimal starting time is less than the first optimal starting time corresponding to the first optimal ending time, taking the first optimal starting time as the actual starting time of the combined process;
and if the second optimal starting time is greater than or equal to the first optimal starting time, taking the second optimal starting time as the actual starting time of the combined process.
5. The method for scheduling material processing in and out opportunities of claim 4 wherein after the step of using the first optimal start time as an actual start time of the combined process or the second optimal start time as an actual start time of the combined process, the method further comprises:
simulating the processing flow of the combined process starting from the actual starting time, and judging whether deadlock or bubble passing occurs in the processing flow;
if deadlock or bubble passing occurs, judging that the other process steps are executed in error;
and if the deadlock or bubble passing does not occur, judging that the other process steps cannot be executed mistakenly, and judging that the actual starting moment of the combined process is effective.
6. A planning equipment for material processing in-out time is characterized in that the planning equipment for the material processing in-out time comprises: a memory, a processor and a program for planning material handling opportunities stored on and executable on the memory, the program for planning material handling opportunities when executed by the processor implementing the steps of the method for planning material handling opportunities as claimed in any one of claims 1 to 5.
7. A readable storage medium, wherein the readable storage medium stores thereon a program for planning material processing in/out opportunities, and the program for planning material processing in/out opportunities when executed by a processor implements the steps of the method for planning material processing in/out opportunities according to any one of claims 1 to 5.
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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107871194A (en) * 2016-09-28 2018-04-03 北京北方华创微电子装备有限公司 The dispatching method and device of a kind of apparatus for production line
CN111861299A (en) * 2019-04-30 2020-10-30 上海梅山钢铁股份有限公司 Iron and steel enterprise full-process inventory level early warning and control method
CN111923066A (en) * 2020-08-14 2020-11-13 北京北方华创微电子装备有限公司 Process scheduling method and device in wafer cleaning equipment
CN114462781A (en) * 2021-12-28 2022-05-10 西安北方华创微电子装备有限公司 Task scheduling method and semiconductor process equipment
CN114819778A (en) * 2022-07-01 2022-07-29 埃克斯工业(广东)有限公司 Method, device and equipment for generating time for entering process flow and readable storage medium

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002041643A (en) * 2000-07-28 2002-02-08 Hitachi Ltd System for recycling product
CN104062902B (en) * 2014-05-15 2017-01-04 江南大学 Delta robot time optimal trajectory planning method
CN108819269B (en) * 2015-12-31 2020-07-17 徐州德坤电气科技有限公司 Intelligent sheet metal part production system capable of automatically spraying
CN107507788B (en) * 2017-07-21 2019-11-08 志圣科技（广州）有限公司 Wafer processing machine and its processing and treating method

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107871194A (en) * 2016-09-28 2018-04-03 北京北方华创微电子装备有限公司 The dispatching method and device of a kind of apparatus for production line
CN111861299A (en) * 2019-04-30 2020-10-30 上海梅山钢铁股份有限公司 Iron and steel enterprise full-process inventory level early warning and control method
CN111923066A (en) * 2020-08-14 2020-11-13 北京北方华创微电子装备有限公司 Process scheduling method and device in wafer cleaning equipment
CN114462781A (en) * 2021-12-28 2022-05-10 西安北方华创微电子装备有限公司 Task scheduling method and semiconductor process equipment
CN114819778A (en) * 2022-07-01 2022-07-29 埃克斯工业(广东)有限公司 Method, device and equipment for generating time for entering process flow and readable storage medium

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
"Dynamic response analysis of structure under time-variant interval process model";Baizhan Xia等;《Journal of Sound and Vibration》;20161027;第121-138页 *
"浙赣线电气化提速改造施工技术研究";袁勇;《中国优秀硕士学位论文全文数据库 工程科技II辑》;20070415;C033-23页 *

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