JP5341647B2 - 圧電振動片、圧電振動子及び圧電発振器 - Google Patents

圧電振動片、圧電振動子及び圧電発振器 Download PDF

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JP5341647B2
JP5341647B2 JP2009163672A JP2009163672A JP5341647B2 JP 5341647 B2 JP5341647 B2 JP 5341647B2 JP 2009163672 A JP2009163672 A JP 2009163672A JP 2009163672 A JP2009163672 A JP 2009163672A JP 5341647 B2 JP5341647 B2 JP 5341647B2
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arm
arm portion
piezoelectric
width
vibrating piece
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JP2011019159A (ja
JP2011019159A5 (enExample
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英紀 芦沢
宏輔 高橋
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River Eletec Corp
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River Eletec Corp
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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2009163672A 2009-07-10 2009-07-10 圧電振動片、圧電振動子及び圧電発振器 Active JP5341647B2 (ja)

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JP2009163672A JP5341647B2 (ja) 2009-07-10 2009-07-10 圧電振動片、圧電振動子及び圧電発振器

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JP2011019159A JP2011019159A (ja) 2011-01-27
JP2011019159A5 JP2011019159A5 (enExample) 2012-08-09
JP5341647B2 true JP5341647B2 (ja) 2013-11-13

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160218694A1 (en) * 2015-01-26 2016-07-28 Sii Crystal Technology Inc. Piezoelectric vibrating reed and piezoelectric vibrator
US20160268996A1 (en) * 2015-03-12 2016-09-15 Sii Crystal Technology Inc. Piezoelectric vibrating piece and piezoelectric vibrator

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201242246A (en) 2011-02-25 2012-10-16 Seiko Epson Corp Piezoelectric vibration element, piezoelectric vibrator, piezoelectric oscillator, vibration gyro element, vibration gyro sensor, and electronic apparatus
JP5732903B2 (ja) * 2011-02-25 2015-06-10 セイコーエプソン株式会社 振動素子、振動子、発振器、ジャイロセンサー及び電子機器
JP6349622B2 (ja) * 2013-03-14 2018-07-04 セイコーエプソン株式会社 振動素子、振動子、発振器、電子機器および移動体
JP6107333B2 (ja) 2013-03-29 2017-04-05 セイコーエプソン株式会社 振動子、発振器、電子機器および移動体
US9257959B2 (en) 2013-03-29 2016-02-09 Seiko Epson Corporation Resonator element, resonator, oscillator, electronic apparatus, sensor, and moving object
JP6155897B2 (ja) 2013-06-24 2017-07-05 セイコーエプソン株式会社 振動片、振動子、電子デバイス、電子機器及び移動体
JP2015023422A (ja) 2013-07-18 2015-02-02 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器および移動体
JP2015097366A (ja) * 2013-11-16 2015-05-21 セイコーエプソン株式会社 振動素子、振動子、発振器、電子機器および移動体
JP6375611B2 (ja) * 2013-11-16 2018-08-22 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器および移動体
JP6340774B2 (ja) * 2013-11-16 2018-06-13 セイコーエプソン株式会社 振動素子、振動子、発振器、電子機器および移動体
JP6375622B2 (ja) 2013-12-27 2018-08-22 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器、センサーおよび移動体
JP5885825B1 (ja) 2014-12-25 2016-03-16 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動子および圧電振動子の製造方法
JP5855221B1 (ja) * 2014-12-26 2016-02-09 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動子
JP6716283B2 (ja) * 2016-02-23 2020-07-01 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片、及び圧電振動子
JP6614227B2 (ja) * 2017-11-15 2019-12-04 セイコーエプソン株式会社 振動素子、振動子、発振器、電子機器および移動体
JP7060073B2 (ja) * 2020-12-23 2022-04-26 セイコーエプソン株式会社 振動素子、振動子、発振器、電子機器および移動体

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5437488A (en) * 1977-07-20 1979-03-19 Seiko Epson Corp Tuning fork type crystal oscillator
JP4356366B2 (ja) * 2003-06-10 2009-11-04 セイコーエプソン株式会社 圧電振動片、圧電振動片の製造方法および圧電振動子、圧電振動子を搭載した電子機器
JP2007116563A (ja) * 2005-10-24 2007-05-10 Hitachi Ltd 水晶発振器

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160218694A1 (en) * 2015-01-26 2016-07-28 Sii Crystal Technology Inc. Piezoelectric vibrating reed and piezoelectric vibrator
US9584094B2 (en) * 2015-01-26 2017-02-28 Sii Crystal Technology Inc. Piezoelectric vibrating reed and piezoelectric vibrator
US20160268996A1 (en) * 2015-03-12 2016-09-15 Sii Crystal Technology Inc. Piezoelectric vibrating piece and piezoelectric vibrator
US9590588B2 (en) * 2015-03-12 2017-03-07 Sii Crystal Technology Inc. Piezoelectric vibrating piece and piezoelectric vibrator

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