JP5335929B2 - トランジスタ評価装置の製造方法 - Google Patents
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/124—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
- H01L22/34—Circuits for electrically characterising or monitoring manufacturing processes, e. g. whole test die, wafers filled with test structures, on-board-devices incorporated on each die, process control monitors or pad structures thereof, devices in scribe line
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133351—Manufacturing of individual cells out of a plurality of cells, e.g. by dicing
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
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- Engineering & Computer Science (AREA)
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- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Thin Film Transistor (AREA)
- Liquid Crystal (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Description
図6は、トランジスタ評価装置500の評価回路が形成されたマザーガラス300の平面図である。
Claims (5)
- 液晶表示用の第1マトリックス回路を形成可能な第1回路形成領域(300A)、および前記第1回路形成領域よりも歩留まりが低く、液晶表示用の第2マトリックス回路を形成可能な第2回路形成領域(300B)を含むマザー基板(300)を準備する工程と、
前記第1回路形成領域に前記第1マトリックス回路を形成する工程と、
前記第2回路形成領域にトランジスタ評価回路を形成する工程と、
前記マザー基板を切断して、前記トランジスタ評価回路を切り出す工程とを備えた、トランジスタ評価装置の製造方法。 - 前記第1回路形成領域に前記第1マトリックス回路を形成すると共に、前記第2回路形成領域に前記トランジスタ評価回路を形成する、請求項1に記載のトランジスタ評価装置の製造方法。
- 前記トランジスタ評価回路を形成する工程は、
ゲート電極(232A,232B)を形成する工程と、
前記ゲート電極に接続されたゲートパッド(212)を形成する工程と、
前記ゲート電極上にゲート絶縁膜(233)を形成する工程と、
前記ゲート絶縁膜上に半導体層(234A,234B)を形成する工程と、
前記半導体層上に形成され、互いに間隔をあけて配置されたドレイン電極(236A,236B)およびソース電極(235A,235B)を形成する工程と、
前記ドレイン電極に接続された検査用ドレインパッド(226)を形成する工程と、
前記ソース電極に接続された検査用ソースパッド(214A)を形成する工程と、
を含む、請求項1または請求項2に記載のトランジスタ評価装置の製造方法。 - 前記ゲート電極を形成する工程は、第1ゲート電極(232A)および第2ゲート電極(232B)を形成する工程を含み、
前記ドレイン電極および前記ソース電極を形成する工程は、前記第1ゲート電極の上方に位置する第1ドレイン電極(236A)および第1ソース電極(235A)と、前記第2ゲート電極の上方に位置する第2ドレイン電極(236B)および第2ソース電極(235A)とを形成する工程を含み、
前記検査用ドレインパッドは、前記第1ドレイン電極に接続され、
前記トランジスタ評価回路を形成する工程は、
前記検査用ソースパッドから間隔をあけて配置されたダミーソースパッド(214B)を形成する工程と、
前記第1ソース電極および前記検査用ソースパッドを接続する第1ソース配線(213A)と、前記第2ソース電極および前記ダミーソースパッドの間に配置され、一部が断線するように形成された第2ソース配線(213B)とを形成する工程と、
前記第2ソース配線の断線部分を通って、前記ドレインパッドと前記第1ドレイン電極とを接続するドレイン配線を形成する工程とを含む、請求項3に記載のトランジスタ評価装置の製造方法。 - 前記第1マトリックス回路および前記トランジスタ評価回路を形成する工程は、前記マザー基板をプラズマ装置(600)内に配置する工程を含み、
前記プラズマ装置内において、前記第2回路形成領域は、前記第1回路形成領域よりも前記プラズマ装置の挿入口から離れるように配置される、請求項1に記載のトランジスタ評価装置の製造方法。
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JP2009236194 | 2009-10-13 | ||
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JP2011536087A JP5335929B2 (ja) | 2009-10-13 | 2010-09-27 | トランジスタ評価装置の製造方法 |
PCT/JP2010/066687 WO2011046012A1 (ja) | 2009-10-13 | 2010-09-27 | トランジスタ評価装置の製造方法およびトランジスタ評価装置 |
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JPWO2011046012A1 JPWO2011046012A1 (ja) | 2013-03-07 |
JP5335929B2 true JP5335929B2 (ja) | 2013-11-06 |
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Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0815722A (ja) * | 1994-06-28 | 1996-01-19 | Kyocera Corp | 液晶表示装置 |
JP2005249939A (ja) * | 2004-03-02 | 2005-09-15 | Seiko Epson Corp | 電気光学装置用大型パネル構造体、電気光学装置、電気光学装置用基板、電気光学装置の製造方法、及び電気光学装置の検査方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2000075319A (ja) * | 1998-08-26 | 2000-03-14 | Sharp Corp | アクティブマトリクス基板の欠陥修正方法、製造方法及び欠陥修正装置 |
JP4184522B2 (ja) * | 1999-01-29 | 2008-11-19 | 富士通株式会社 | 薄膜トランジスタ基板 |
WO2008096483A1 (ja) * | 2007-02-09 | 2008-08-14 | Sharp Kabushiki Kaisha | アクティブマトリクス基板、液晶パネル、液晶表示ユニット、液晶表示装置、テレビジョン受像機、アクティブマトリクス基板の製造方法、液晶パネルの製造方法 |
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2010
- 2010-09-27 WO PCT/JP2010/066687 patent/WO2011046012A1/ja active Application Filing
- 2010-09-27 JP JP2011536087A patent/JP5335929B2/ja not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0815722A (ja) * | 1994-06-28 | 1996-01-19 | Kyocera Corp | 液晶表示装置 |
JP2005249939A (ja) * | 2004-03-02 | 2005-09-15 | Seiko Epson Corp | 電気光学装置用大型パネル構造体、電気光学装置、電気光学装置用基板、電気光学装置の製造方法、及び電気光学装置の検査方法 |
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WO2011046012A1 (ja) | 2011-04-21 |
JPWO2011046012A1 (ja) | 2013-03-07 |
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