JP5333813B2 - モータ制御装置及び機械システム - Google Patents

モータ制御装置及び機械システム Download PDF

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Publication number
JP5333813B2
JP5333813B2 JP2007337373A JP2007337373A JP5333813B2 JP 5333813 B2 JP5333813 B2 JP 5333813B2 JP 2007337373 A JP2007337373 A JP 2007337373A JP 2007337373 A JP2007337373 A JP 2007337373A JP 5333813 B2 JP5333813 B2 JP 5333813B2
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motor
orthogonal
acceleration
command
vibration
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Japanese (ja)
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JP2009159774A5 (enExample
JP2009159774A (ja
Inventor
泰史 吉浦
靖彦 加来
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Yaskawa Electric Corp
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Yaskawa Electric Corp
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JP2007337373A 2007-12-27 2007-12-27 モータ制御装置及び機械システム Expired - Fee Related JP5333813B2 (ja)

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JP2007337373A JP5333813B2 (ja) 2007-12-27 2007-12-27 モータ制御装置及び機械システム

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JP2007337373A JP5333813B2 (ja) 2007-12-27 2007-12-27 モータ制御装置及び機械システム

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JP2009159774A JP2009159774A (ja) 2009-07-16
JP2009159774A5 JP2009159774A5 (enExample) 2012-01-12
JP5333813B2 true JP5333813B2 (ja) 2013-11-06

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JP2007337373A Expired - Fee Related JP5333813B2 (ja) 2007-12-27 2007-12-27 モータ制御装置及び機械システム

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Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9188878B2 (en) * 2011-01-28 2015-11-17 The University Of Tokyo Driving system and driving method, exposure apparatus and exposure method, and driving system design method
JP5648870B2 (ja) * 2013-01-08 2015-01-07 株式会社安川電機 モータ制御装置、モータ制御方法及び機械システム
CN103383572B (zh) * 2013-08-07 2015-11-25 中联重科股份有限公司 一种工程机械及其臂架的振动控制方法、控制装置和控制系统
JP6275245B2 (ja) 2014-03-14 2018-02-07 株式会社牧野フライス製作所 送り軸の制御方法および数値制御工作機械
JP6731776B2 (ja) * 2016-04-22 2020-07-29 三菱電機株式会社 機械装置、および機械装置の製造方法
JP7277265B2 (ja) * 2019-06-05 2023-05-18 ファナック株式会社 振動を抑制するモータ制御装置及び産業機械

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6123212A (ja) * 1984-07-11 1986-01-31 Hitachi Ltd 多関節構造機械の制御装置
JPH083758B2 (ja) * 1986-04-04 1996-01-17 日立建機株式会社 多関節構造機械の制御装置
JP2531481Y2 (ja) * 1990-10-22 1997-04-02 三菱重工業株式会社 能動的振動制御装置
JP3442941B2 (ja) * 1996-09-30 2003-09-02 株式会社東芝 ロボットの振動抑制制御装置およびその制御方法
JP4335123B2 (ja) * 2004-11-26 2009-09-30 ファナック株式会社 制御装置
JP4299793B2 (ja) * 2005-01-20 2009-07-22 ファナック株式会社 制御装置

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JP2009159774A (ja) 2009-07-16

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