JP5328939B2 - 電子放出素子およびこれを備えた撮像装置 - Google Patents
電子放出素子およびこれを備えた撮像装置 Download PDFInfo
- Publication number
- JP5328939B2 JP5328939B2 JP2011548857A JP2011548857A JP5328939B2 JP 5328939 B2 JP5328939 B2 JP 5328939B2 JP 2011548857 A JP2011548857 A JP 2011548857A JP 2011548857 A JP2011548857 A JP 2011548857A JP 5328939 B2 JP5328939 B2 JP 5328939B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- electrode layer
- electron
- gate electrode
- emission
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000003384 imaging method Methods 0.000 title description 19
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 48
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 47
- 239000012212 insulator Substances 0.000 claims description 115
- 239000000758 substrate Substances 0.000 claims description 32
- 238000005530 etching Methods 0.000 claims description 30
- 230000002093 peripheral effect Effects 0.000 claims description 18
- 238000006243 chemical reaction Methods 0.000 claims description 16
- 230000015572 biosynthetic process Effects 0.000 abstract description 11
- 239000010410 layer Substances 0.000 description 462
- 238000000034 method Methods 0.000 description 32
- 238000000926 separation method Methods 0.000 description 14
- 229920002120 photoresistant polymer Polymers 0.000 description 12
- 239000000463 material Substances 0.000 description 9
- 230000004048 modification Effects 0.000 description 9
- 238000012986 modification Methods 0.000 description 9
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 9
- 229910052721 tungsten Inorganic materials 0.000 description 9
- 239000010937 tungsten Substances 0.000 description 9
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 8
- 229910021417 amorphous silicon Inorganic materials 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000001020 plasma etching Methods 0.000 description 6
- 230000005684 electric field Effects 0.000 description 5
- 239000011159 matrix material Substances 0.000 description 5
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 5
- 238000004528 spin coating Methods 0.000 description 5
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 230000020169 heat generation Effects 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J31/00—Cathode ray tubes; Electron beam tubes
- H01J31/08—Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
- H01J31/10—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
- H01J31/12—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
- H01J31/123—Flat display tubes
- H01J31/125—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection
- H01J31/127—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection using large area or array sources, i.e. essentially a source for each pixel group
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
- H01J29/467—Control electrodes for flat display tubes, e.g. of the type covered by group H01J31/123
Landscapes
- Cold Cathode And The Manufacture (AREA)
- Electrodes For Cathode-Ray Tubes (AREA)
- Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2010/000069 WO2011083512A1 (fr) | 2010-01-07 | 2010-01-07 | Élément émetteur d'électrons et dispositif de capture d'image le comprenant |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2011083512A1 JPWO2011083512A1 (ja) | 2013-05-13 |
JP5328939B2 true JP5328939B2 (ja) | 2013-10-30 |
Family
ID=44305258
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011548857A Expired - Fee Related JP5328939B2 (ja) | 2010-01-07 | 2010-01-07 | 電子放出素子およびこれを備えた撮像装置 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP5328939B2 (fr) |
CN (1) | CN102696089B (fr) |
WO (1) | WO2011083512A1 (fr) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPWO2012168970A1 (ja) * | 2011-06-08 | 2015-02-23 | パイオニア株式会社 | 電子放出素子およびこれを備えた撮像装置 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002260546A (ja) * | 2001-02-27 | 2002-09-13 | Hewlett Packard Co <Hp> | 平坦な放射領域と集束構造を有する電子源 |
JP2003123625A (ja) * | 2001-10-05 | 2003-04-25 | Hewlett Packard Co <Hp> | 改良された電子電界エミッタスピント型先端構造体及びそれを製造するための方法 |
JP2005228556A (ja) * | 2004-02-12 | 2005-08-25 | Pioneer Electronic Corp | 電子放出素子を用いた光電変換装置および撮像装置 |
WO2006064634A1 (fr) * | 2004-12-17 | 2006-06-22 | Pioneer Corporation | Element d'ejection d'electrons et son procede de fabrication |
WO2007114103A1 (fr) * | 2006-03-31 | 2007-10-11 | Pioneer Corporation | élément d'émission d'électrons, dispositif d'affichage utilisant UN élément d'émission d'électrons, et méthode de fabrication d'un élément d'émission d'électrons |
WO2007119524A1 (fr) * | 2006-03-31 | 2007-10-25 | Pioneer Corporation | élément émettant des électrons, méthode de fabrication dudit élément, élément de conversion photoélectrique utilisant l'élément émettant des électrons, appareil d'imagerie et AFFICHAGE D'écran plat. |
JP2008078161A (ja) * | 2007-12-12 | 2008-04-03 | Hitachi Ltd | 冷陰極型フラットパネルディスプレイ |
-
2010
- 2010-01-07 WO PCT/JP2010/000069 patent/WO2011083512A1/fr active Application Filing
- 2010-01-07 JP JP2011548857A patent/JP5328939B2/ja not_active Expired - Fee Related
- 2010-01-07 CN CN201080060892.4A patent/CN102696089B/zh not_active Expired - Fee Related
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002260546A (ja) * | 2001-02-27 | 2002-09-13 | Hewlett Packard Co <Hp> | 平坦な放射領域と集束構造を有する電子源 |
JP2003123625A (ja) * | 2001-10-05 | 2003-04-25 | Hewlett Packard Co <Hp> | 改良された電子電界エミッタスピント型先端構造体及びそれを製造するための方法 |
JP2005228556A (ja) * | 2004-02-12 | 2005-08-25 | Pioneer Electronic Corp | 電子放出素子を用いた光電変換装置および撮像装置 |
WO2006064634A1 (fr) * | 2004-12-17 | 2006-06-22 | Pioneer Corporation | Element d'ejection d'electrons et son procede de fabrication |
WO2007114103A1 (fr) * | 2006-03-31 | 2007-10-11 | Pioneer Corporation | élément d'émission d'électrons, dispositif d'affichage utilisant UN élément d'émission d'électrons, et méthode de fabrication d'un élément d'émission d'électrons |
WO2007119524A1 (fr) * | 2006-03-31 | 2007-10-25 | Pioneer Corporation | élément émettant des électrons, méthode de fabrication dudit élément, élément de conversion photoélectrique utilisant l'élément émettant des électrons, appareil d'imagerie et AFFICHAGE D'écran plat. |
JP2008078161A (ja) * | 2007-12-12 | 2008-04-03 | Hitachi Ltd | 冷陰極型フラットパネルディスプレイ |
Also Published As
Publication number | Publication date |
---|---|
CN102696089A (zh) | 2012-09-26 |
WO2011083512A1 (fr) | 2011-07-14 |
CN102696089B (zh) | 2015-02-04 |
JPWO2011083512A1 (ja) | 2013-05-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US7173366B2 (en) | Field emission display having carbon nanotube emitter and method of manufacturing the same | |
JP2005183388A (ja) | 電界放出素子、それを適用した表示素子及びその製造方法 | |
US7268480B2 (en) | Field emission device, display adopting the same and method of manufacturing the same | |
JP5328939B2 (ja) | 電子放出素子およびこれを備えた撮像装置 | |
US6313043B1 (en) | Manufacture of field emission element | |
JP5301683B2 (ja) | 電子放出素子およびこれを備えた撮像装置 | |
JP2008034699A (ja) | 固体撮像素子およびその製造方法、電子情報機器、イオン化スパッタリング装置 | |
JP2969081B2 (ja) | 水平電界効果を有する電子放出素子及びその製造方法 | |
CN101673653A (zh) | 电子束器件以及使用所述电子束器件的图像显示装置 | |
WO2007119524A1 (fr) | élément émettant des électrons, méthode de fabrication dudit élément, élément de conversion photoélectrique utilisant l'élément émettant des électrons, appareil d'imagerie et AFFICHAGE D'écran plat. | |
JP2001043790A (ja) | 冷陰極電界電子放出素子の製造方法及び冷陰極電界電子放出表示装置の製造方法 | |
JP2006040863A (ja) | 炭素ナノチューブエミッタを備える電界放出ディスプレイ及びその製造方法 | |
JP3239285B2 (ja) | 電界放出カソードの製造方法 | |
JP2015201412A (ja) | 微小電子放出源、電子源アレイ及びその製造方法 | |
WO2012168970A1 (fr) | Élément d'émission d'électrons et appareil de capture d'images équipé d'un tel élément | |
JP2606406Y2 (ja) | 真空気密装置および表示装置 | |
JP2007005049A (ja) | 画像表示装置 | |
JP4401245B2 (ja) | 冷陰極電子源の製造方法 | |
JPWO2012168970A1 (ja) | 電子放出素子およびこれを備えた撮像装置 | |
CN101038848A (zh) | 图像显示装置及其制造方法 | |
JP4831009B2 (ja) | 集束型電界放出カソードと電界放出型表示装置 | |
WO2016009484A1 (fr) | Réseau d'éléments émetteurs d'électrons, dispositif de capture d'image, et procédé de fabrication de réseau d'éléments émetteurs d'électrons | |
JP2009199939A (ja) | 電子放出装置及び電子放出装置の製造方法 | |
JP4241766B2 (ja) | 照明ランプ用冷電子放出素子 | |
JP2007180092A (ja) | 撮像装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7422 Effective date: 20130510 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20130510 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20130625 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20130723 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
LAPS | Cancellation because of no payment of annual fees |