JP5323155B2 - ミラー駆動装置及びその駆動方法並びに製造方法 - Google Patents

ミラー駆動装置及びその駆動方法並びに製造方法 Download PDF

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Publication number
JP5323155B2
JP5323155B2 JP2011196295A JP2011196295A JP5323155B2 JP 5323155 B2 JP5323155 B2 JP 5323155B2 JP 2011196295 A JP2011196295 A JP 2011196295A JP 2011196295 A JP2011196295 A JP 2011196295A JP 5323155 B2 JP5323155 B2 JP 5323155B2
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Prior art keywords
mirror
piezoelectric
piezoelectric actuator
torsion bar
rotation axis
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Japanese (ja)
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JP2013057819A (ja
JP2013057819A5 (zh
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崇幸 直野
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Fujifilm Corp
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Fujifilm Corp
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Priority to JP2011196295A priority Critical patent/JP5323155B2/ja
Priority to CN201210330420.7A priority patent/CN102998795B/zh
Priority to US13/608,901 priority patent/US8879132B2/en
Publication of JP2013057819A publication Critical patent/JP2013057819A/ja
Publication of JP2013057819A5 publication Critical patent/JP2013057819A5/ja
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Micromachines (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Physical Vapour Deposition (AREA)
JP2011196295A 2011-09-08 2011-09-08 ミラー駆動装置及びその駆動方法並びに製造方法 Active JP5323155B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2011196295A JP5323155B2 (ja) 2011-09-08 2011-09-08 ミラー駆動装置及びその駆動方法並びに製造方法
CN201210330420.7A CN102998795B (zh) 2011-09-08 2012-09-07 反射镜驱动设备、驱动该反射镜驱动设备的方法和制造该反射镜驱动设备的方法
US13/608,901 US8879132B2 (en) 2011-09-08 2012-09-10 Mirror driving apparatus, method of driving same and method of manufacturing same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011196295A JP5323155B2 (ja) 2011-09-08 2011-09-08 ミラー駆動装置及びその駆動方法並びに製造方法

Publications (3)

Publication Number Publication Date
JP2013057819A JP2013057819A (ja) 2013-03-28
JP2013057819A5 JP2013057819A5 (zh) 2013-05-09
JP5323155B2 true JP5323155B2 (ja) 2013-10-23

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JP2011196295A Active JP5323155B2 (ja) 2011-09-08 2011-09-08 ミラー駆動装置及びその駆動方法並びに製造方法

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US (1) US8879132B2 (zh)
JP (1) JP5323155B2 (zh)
CN (1) CN102998795B (zh)

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JP2014215534A (ja) * 2013-04-26 2014-11-17 株式会社デンソー 光走査装置
DE102013209234B4 (de) 2013-05-17 2018-04-05 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung mit einem schwingfähig aufgehängten optischen Element
JP2015022206A (ja) * 2013-07-22 2015-02-02 船井電機株式会社 振動ミラー素子および距離計測装置
JP6289957B2 (ja) * 2014-03-25 2018-03-07 スタンレー電気株式会社 光偏向器
WO2015146144A1 (ja) * 2014-03-28 2015-10-01 住友精密工業株式会社 駆動装置
JP6310786B2 (ja) * 2014-06-24 2018-04-11 スタンレー電気株式会社 光偏向器
CN106646857B (zh) * 2015-11-02 2020-01-21 华为技术有限公司 一种压电微镜和控制方法
EP3287830B1 (en) * 2016-08-24 2023-04-12 Murata Manufacturing Co., Ltd. A scanning mems reflector system
JP6880385B2 (ja) * 2016-09-28 2021-06-02 ミツミ電機株式会社 光走査装置
CN109844609B (zh) * 2016-10-19 2021-11-19 索尼半导体解决方案公司 半导体器件、显示装置和电子设备
JP6680364B2 (ja) * 2016-11-09 2020-04-15 第一精工株式会社 可動反射素子
US10532922B2 (en) * 2017-11-27 2020-01-14 Stmicroelectronics S.R.L. Micro-electro-mechanical actuator device of piezoelectric type and apparatus integrating the micro-electro-mechanical actuator device
JP2019058993A (ja) * 2017-09-27 2019-04-18 セイコーエプソン株式会社 ロボットシステム
JP2019059004A (ja) * 2017-09-28 2019-04-18 セイコーエプソン株式会社 ロボットシステム
DE102017220813A1 (de) * 2017-11-22 2019-05-23 Robert Bosch Gmbh Laserprojektionsvorrichtung
JP7089157B2 (ja) * 2018-03-02 2022-06-22 ミツミ電機株式会社 アクチュエータ及び光走査装置
CN108494284B (zh) * 2018-03-26 2020-09-18 徐明秀 一种微角度驱动装置的制备方法
CN108428786B (zh) * 2018-03-26 2020-10-02 浙江宝纺印染有限公司 一种微角度驱动装置的制备方法
DE102018215528A1 (de) 2018-09-12 2020-03-12 Robert Bosch Gmbh Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil
US11221478B2 (en) * 2019-04-15 2022-01-11 Microsoft Technology Licensing, Llc MEMS scanner
JP7375471B2 (ja) 2019-10-30 2023-11-08 株式会社リコー 可動装置、画像投影装置、ヘッドアップディスプレイ、レーザヘッドランプ、ヘッドマウントディスプレイ、物体認識装置、及び車両
DE102019218468A1 (de) * 2019-11-28 2021-06-02 Robert Bosch Gmbh Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil
IT201900025084A1 (it) * 2019-12-20 2021-06-20 St Microelectronics Srl Dispositivo microelettromeccanico dotato di una struttura orientabile protetta da urti
US11796638B2 (en) * 2020-06-18 2023-10-24 Beijing Voyager Technology Co., Ltd. Mirror assembly for light steering with flexible support structure
US11815627B2 (en) 2020-06-18 2023-11-14 Beijing Voyager Technology Co., Ltd. Mirror assembly for light steering with reduced finger thickness
CN111568386B (zh) * 2020-06-22 2021-07-06 中国科学院长春光学精密机械与物理研究所 一种自适应光学相干层析成像设备
US20220026537A1 (en) * 2020-07-22 2022-01-27 Beijing Voyager Technology Co., Ltd. Systems and methods for sensing rotation angles of a micro mirror in an optical sensing system
US20220137393A1 (en) * 2020-11-05 2022-05-05 Compertum Microsystems Inc. Electromagnetic driven micro mirror with fluid of high refractive index and its manufacturing thereof
CN112817141B (zh) * 2020-12-31 2023-03-24 歌尔股份有限公司 Mems扫描镜及其驱动方法、激光投影仪
CN112817143A (zh) * 2020-12-31 2021-05-18 歌尔股份有限公司 Mems扫描镜
CN112731653B (zh) * 2020-12-31 2023-09-12 歌尔股份有限公司 Mems扫描镜及激光投影仪
CN117255969A (zh) * 2021-05-07 2023-12-19 宁波舜宇光电信息有限公司 摄像模组、光学致动器、感光组件及其制造方法
CN113485063A (zh) * 2021-06-29 2021-10-08 歌尔股份有限公司 一种光机光路系统及其控制方法
CN113655612B (zh) * 2021-09-03 2023-07-25 上海科技大学 一种高稳定性二维姿态调整机构

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JP2005177876A (ja) 2003-12-16 2005-07-07 Canon Inc マイクロ構造体及びその製造方法
JP4926596B2 (ja) * 2006-08-08 2012-05-09 スタンレー電気株式会社 光偏向器及びその製造方法
JP5319939B2 (ja) 2007-03-15 2013-10-16 株式会社リコー 光偏向器および光学装置
US8553306B2 (en) * 2007-03-15 2013-10-08 Ricoh Company, Ltd. Optical deflector and optical device
JP2009136120A (ja) * 2007-11-30 2009-06-18 Seiko Epson Corp アクチュエータおよび画像形成装置
JP5172364B2 (ja) * 2008-01-16 2013-03-27 スタンレー電気株式会社 光偏向器
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JP2010148265A (ja) * 2008-12-19 2010-07-01 Panasonic Corp ミアンダ形振動子およびこれを用いた光学反射素子
JP5509742B2 (ja) * 2009-09-04 2014-06-04 ミツミ電機株式会社 圧電アクチュエータ及びこれを用いた光走査装置
JP2011123246A (ja) * 2009-12-10 2011-06-23 Panasonic Corp 光学反射素子
CN101852917B (zh) * 2010-03-31 2012-02-22 重庆大学 大转角压电扫描微镜

Also Published As

Publication number Publication date
CN102998795A (zh) 2013-03-27
CN102998795B (zh) 2016-12-21
JP2013057819A (ja) 2013-03-28
US8879132B2 (en) 2014-11-04
US20130063800A1 (en) 2013-03-14

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