JP5320309B2 - プローブカード - Google Patents

プローブカード Download PDF

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Publication number
JP5320309B2
JP5320309B2 JP2010006642A JP2010006642A JP5320309B2 JP 5320309 B2 JP5320309 B2 JP 5320309B2 JP 2010006642 A JP2010006642 A JP 2010006642A JP 2010006642 A JP2010006642 A JP 2010006642A JP 5320309 B2 JP5320309 B2 JP 5320309B2
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JP
Japan
Prior art keywords
probe
spacer
substrate
wiring board
board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2010006642A
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English (en)
Japanese (ja)
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JP2011145192A (ja
JP2011145192A5 (https=
Inventor
太志 上村
昭 主原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Electronic Materials Corp
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Japan Electronic Materials Corp
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Application filed by Japan Electronic Materials Corp filed Critical Japan Electronic Materials Corp
Priority to JP2010006642A priority Critical patent/JP5320309B2/ja
Publication of JP2011145192A publication Critical patent/JP2011145192A/ja
Publication of JP2011145192A5 publication Critical patent/JP2011145192A5/ja
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Publication of JP5320309B2 publication Critical patent/JP5320309B2/ja
Expired - Fee Related legal-status Critical Current
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  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP2010006642A 2010-01-15 2010-01-15 プローブカード Expired - Fee Related JP5320309B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010006642A JP5320309B2 (ja) 2010-01-15 2010-01-15 プローブカード

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010006642A JP5320309B2 (ja) 2010-01-15 2010-01-15 プローブカード

Publications (3)

Publication Number Publication Date
JP2011145192A JP2011145192A (ja) 2011-07-28
JP2011145192A5 JP2011145192A5 (https=) 2012-07-05
JP5320309B2 true JP5320309B2 (ja) 2013-10-23

Family

ID=44460175

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010006642A Expired - Fee Related JP5320309B2 (ja) 2010-01-15 2010-01-15 プローブカード

Country Status (1)

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JP (1) JP5320309B2 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013044591A (ja) * 2011-08-23 2013-03-04 Ngk Spark Plug Co Ltd 電子部品検査装置用配線基板およびその製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1610375A3 (en) * 1995-05-26 2008-11-05 FormFactor, Inc. Contact carriers for populating substrates with spring contacts
JP5190195B2 (ja) * 2006-11-29 2013-04-24 株式会社日本マイクロニクス 電気的接続装置
JP2009216466A (ja) * 2008-03-07 2009-09-24 Yamaichi Electronics Co Ltd 接触子ユニットを備えるプローブカード、および、接触子ユニットの交換方法

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Publication number Publication date
JP2011145192A (ja) 2011-07-28

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