JP5320309B2 - プローブカード - Google Patents
プローブカード Download PDFInfo
- Publication number
- JP5320309B2 JP5320309B2 JP2010006642A JP2010006642A JP5320309B2 JP 5320309 B2 JP5320309 B2 JP 5320309B2 JP 2010006642 A JP2010006642 A JP 2010006642A JP 2010006642 A JP2010006642 A JP 2010006642A JP 5320309 B2 JP5320309 B2 JP 5320309B2
- Authority
- JP
- Japan
- Prior art keywords
- probe
- spacer
- substrate
- wiring board
- board
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000523 sample Substances 0.000 title claims abstract description 320
- 239000000758 substrate Substances 0.000 claims abstract description 138
- 125000006850 spacer group Chemical group 0.000 claims abstract description 136
- 230000000149 penetrating effect Effects 0.000 claims abstract description 6
- 239000000853 adhesive Substances 0.000 claims description 103
- 230000001070 adhesive effect Effects 0.000 claims description 103
- 239000004840 adhesive resin Substances 0.000 abstract description 55
- 229920006223 adhesive resin Polymers 0.000 abstract description 55
- 230000002708 enhancing effect Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 description 30
- 239000004065 semiconductor Substances 0.000 description 12
- 229920005989 resin Polymers 0.000 description 8
- 239000011347 resin Substances 0.000 description 8
- 229920001187 thermosetting polymer Polymers 0.000 description 7
- 210000000078 claw Anatomy 0.000 description 6
- 230000003014 reinforcing effect Effects 0.000 description 6
- 238000005452 bending Methods 0.000 description 5
- 239000004020 conductor Substances 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 229910000990 Ni alloy Inorganic materials 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000009713 electroplating Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000006835 compression Effects 0.000 description 2
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- 239000010949 copper Substances 0.000 description 2
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- 239000011159 matrix material Substances 0.000 description 2
- 229920002379 silicone rubber Polymers 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000009477 glass transition Effects 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920006122 polyamide resin Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
Images
Landscapes
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010006642A JP5320309B2 (ja) | 2010-01-15 | 2010-01-15 | プローブカード |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010006642A JP5320309B2 (ja) | 2010-01-15 | 2010-01-15 | プローブカード |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011145192A JP2011145192A (ja) | 2011-07-28 |
| JP2011145192A5 JP2011145192A5 (https=) | 2012-07-05 |
| JP5320309B2 true JP5320309B2 (ja) | 2013-10-23 |
Family
ID=44460175
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010006642A Expired - Fee Related JP5320309B2 (ja) | 2010-01-15 | 2010-01-15 | プローブカード |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5320309B2 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013044591A (ja) * | 2011-08-23 | 2013-03-04 | Ngk Spark Plug Co Ltd | 電子部品検査装置用配線基板およびその製造方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1610375A3 (en) * | 1995-05-26 | 2008-11-05 | FormFactor, Inc. | Contact carriers for populating substrates with spring contacts |
| JP5190195B2 (ja) * | 2006-11-29 | 2013-04-24 | 株式会社日本マイクロニクス | 電気的接続装置 |
| JP2009216466A (ja) * | 2008-03-07 | 2009-09-24 | Yamaichi Electronics Co Ltd | 接触子ユニットを備えるプローブカード、および、接触子ユニットの交換方法 |
-
2010
- 2010-01-15 JP JP2010006642A patent/JP5320309B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2011145192A (ja) | 2011-07-28 |
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