JP2011145192A5 - - Google Patents

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Publication number
JP2011145192A5
JP2011145192A5 JP2010006642A JP2010006642A JP2011145192A5 JP 2011145192 A5 JP2011145192 A5 JP 2011145192A5 JP 2010006642 A JP2010006642 A JP 2010006642A JP 2010006642 A JP2010006642 A JP 2010006642A JP 2011145192 A5 JP2011145192 A5 JP 2011145192A5
Authority
JP
Japan
Prior art keywords
probe
substrate
wiring
contacts
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2010006642A
Other languages
English (en)
Japanese (ja)
Other versions
JP5320309B2 (ja
JP2011145192A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2010006642A priority Critical patent/JP5320309B2/ja
Priority claimed from JP2010006642A external-priority patent/JP5320309B2/ja
Publication of JP2011145192A publication Critical patent/JP2011145192A/ja
Publication of JP2011145192A5 publication Critical patent/JP2011145192A5/ja
Application granted granted Critical
Publication of JP5320309B2 publication Critical patent/JP5320309B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2010006642A 2010-01-15 2010-01-15 プローブカード Expired - Fee Related JP5320309B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010006642A JP5320309B2 (ja) 2010-01-15 2010-01-15 プローブカード

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010006642A JP5320309B2 (ja) 2010-01-15 2010-01-15 プローブカード

Publications (3)

Publication Number Publication Date
JP2011145192A JP2011145192A (ja) 2011-07-28
JP2011145192A5 true JP2011145192A5 (https=) 2012-07-05
JP5320309B2 JP5320309B2 (ja) 2013-10-23

Family

ID=44460175

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010006642A Expired - Fee Related JP5320309B2 (ja) 2010-01-15 2010-01-15 プローブカード

Country Status (1)

Country Link
JP (1) JP5320309B2 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013044591A (ja) * 2011-08-23 2013-03-04 Ngk Spark Plug Co Ltd 電子部品検査装置用配線基板およびその製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1610375A3 (en) * 1995-05-26 2008-11-05 FormFactor, Inc. Contact carriers for populating substrates with spring contacts
JP5190195B2 (ja) * 2006-11-29 2013-04-24 株式会社日本マイクロニクス 電気的接続装置
JP2009216466A (ja) * 2008-03-07 2009-09-24 Yamaichi Electronics Co Ltd 接触子ユニットを備えるプローブカード、および、接触子ユニットの交換方法

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