JP5316748B2 - 振動片の製造方法 - Google Patents

振動片の製造方法 Download PDF

Info

Publication number
JP5316748B2
JP5316748B2 JP2008086873A JP2008086873A JP5316748B2 JP 5316748 B2 JP5316748 B2 JP 5316748B2 JP 2008086873 A JP2008086873 A JP 2008086873A JP 2008086873 A JP2008086873 A JP 2008086873A JP 5316748 B2 JP5316748 B2 JP 5316748B2
Authority
JP
Japan
Prior art keywords
film
section
base
arm
silicon oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2008086873A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009239860A (ja
JP2009239860A5 (enExample
Inventor
隆 山崎
司 舩坂
剛夫 舟川
誠 古畑
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2008086873A priority Critical patent/JP5316748B2/ja
Publication of JP2009239860A publication Critical patent/JP2009239860A/ja
Publication of JP2009239860A5 publication Critical patent/JP2009239860A5/ja
Application granted granted Critical
Publication of JP5316748B2 publication Critical patent/JP5316748B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2008086873A 2008-03-28 2008-03-28 振動片の製造方法 Expired - Fee Related JP5316748B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008086873A JP5316748B2 (ja) 2008-03-28 2008-03-28 振動片の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008086873A JP5316748B2 (ja) 2008-03-28 2008-03-28 振動片の製造方法

Publications (3)

Publication Number Publication Date
JP2009239860A JP2009239860A (ja) 2009-10-15
JP2009239860A5 JP2009239860A5 (enExample) 2011-04-21
JP5316748B2 true JP5316748B2 (ja) 2013-10-16

Family

ID=41253226

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008086873A Expired - Fee Related JP5316748B2 (ja) 2008-03-28 2008-03-28 振動片の製造方法

Country Status (1)

Country Link
JP (1) JP5316748B2 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5581887B2 (ja) * 2009-12-29 2014-09-03 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器、および周波数調整方法
JP2011199453A (ja) * 2010-03-18 2011-10-06 Seiko Epson Corp 振動体および振動デバイス
JP5533349B2 (ja) * 2010-06-30 2014-06-25 セイコーエプソン株式会社 屈曲振動片、屈曲振動子、発振器、および電子機器
JP5685962B2 (ja) 2011-02-02 2015-03-18 セイコーエプソン株式会社 振動片、振動子、発振器及び電子機器
JP2013062643A (ja) * 2011-09-13 2013-04-04 Seiko Epson Corp 振動片、振動子、発振器及び電子機器
US8581669B2 (en) 2011-02-02 2013-11-12 Seiko Epson Corporation Vibrator element, vibrator, oscillator, and electronic apparatus
KR101232629B1 (ko) 2011-07-19 2013-02-13 연세대학교 산학협력단 공진주파수의 자가조정이 가능한 진동에너지 변환장치, 이에 이용가능한 외팔보 진동체 및 그 제작방법
JP5785470B2 (ja) * 2011-09-30 2015-09-30 シチズンファインデバイス株式会社 圧電振動子の製造方法
JP6482169B2 (ja) * 2013-07-19 2019-03-13 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器及び移動体
CN107112967B (zh) 2014-12-26 2020-07-07 株式会社村田制作所 谐振器的制造方法
CN110274679B (zh) * 2019-06-25 2024-05-28 中交一公局桥隧工程有限公司 一种振动预警装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3212804B2 (ja) * 1994-06-08 2001-09-25 三菱電機株式会社 角速度センサおよび角速度検出装置
JP3843779B2 (ja) * 2001-08-14 2006-11-08 セイコーエプソン株式会社 圧電デバイス、圧電デバイスを利用した携帯電話装置及び圧電デバイスを利用した電子機器
JP3972790B2 (ja) * 2001-11-27 2007-09-05 松下電器産業株式会社 薄膜微小機械式共振子および薄膜微小機械式共振子ジャイロ
JP2005311849A (ja) * 2004-04-23 2005-11-04 Seiko Epson Corp 圧電薄膜共振子、フィルタ及び圧電薄膜共振子の製造方法
JP4697517B2 (ja) * 2004-12-16 2011-06-08 株式会社村田製作所 圧電薄膜共振子およびその製造方法
JP2006258527A (ja) * 2005-03-16 2006-09-28 Seiko Epson Corp ジャイロ素子、ジャイロセンサ、及びジャイロ素子の製造方法
WO2007072409A2 (en) * 2005-12-23 2007-06-28 Nxp B.V. A mems resonator, a method of manufacturing thereof, and a mems oscillator
JP4930381B2 (ja) * 2006-01-31 2012-05-16 株式会社村田製作所 圧電振動装置
JP4404218B2 (ja) * 2006-03-29 2010-01-27 セイコーエプソン株式会社 音叉振動子およびその製造方法
JP4715652B2 (ja) * 2006-06-30 2011-07-06 セイコーエプソン株式会社 圧電振動片

Also Published As

Publication number Publication date
JP2009239860A (ja) 2009-10-15

Similar Documents

Publication Publication Date Title
JP5316748B2 (ja) 振動片の製造方法
JP4533934B2 (ja) 振動片及び振動子の製造方法
JP4415389B2 (ja) 圧電デバイス
JP5912557B2 (ja) 音叉型圧電振動片及び圧電デバイス
JP5062413B2 (ja) 音叉型圧電振動片及び音叉型圧電振動子
JP2007258917A (ja) 圧電デバイス
JP2007258918A (ja) 圧電デバイス
JP2006148857A (ja) 圧電振動片および圧電デバイス
JP2009010717A (ja) 圧電振動子及びその製造方法
JP4553157B2 (ja) 音叉型圧電振動片及び音叉型圧電振動子
CN101330282B (zh) 压电振子及其制造方法以及压电振子用盖
JP2007096900A (ja) 圧電振動片および圧電デバイス
JP4301201B2 (ja) 圧電発振器
JP4265499B2 (ja) 圧電振動片および圧電デバイス
JP4687993B2 (ja) 圧電振動片、圧電振動子、および圧電振動片の周波数調整方法
JP2008048274A (ja) 圧電振動片および圧電デバイス
JP2009290778A (ja) 音叉型圧電振動素子
JP2009236885A (ja) 角速度検出振動片の製造方法
JP4784168B2 (ja) 圧電振動片および圧電デバイス
CN113872546A (zh) 振动元件的制造方法、振动元件以及振动器件
JP5170405B2 (ja) 圧電振動子の製造方法
JP5099385B2 (ja) 振動片及び振動子
JP5877746B2 (ja) 圧電振動片およびその製造方法
JP2010246126A (ja) 圧電振動片および圧電デバイス
JP5494994B2 (ja) 振動子の製造方法

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110308

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20110308

A711 Notification of change in applicant

Free format text: JAPANESE INTERMEDIATE CODE: A712

Effective date: 20110729

RD03 Notification of appointment of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7423

Effective date: 20110729

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A821

Effective date: 20110729

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110819

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20120809

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20120815

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20121011

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20130410

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20130524

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20130612

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20130625

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

LAPS Cancellation because of no payment of annual fees