JP5314239B2 - 光学式変位計、光学式変位測定方法、光学式変位測定プログラム及びコンピュータで読み取り可能な記録媒体並びに記録した機器 - Google Patents

光学式変位計、光学式変位測定方法、光学式変位測定プログラム及びコンピュータで読み取り可能な記録媒体並びに記録した機器 Download PDF

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JP5314239B2
JP5314239B2 JP2006274528A JP2006274528A JP5314239B2 JP 5314239 B2 JP5314239 B2 JP 5314239B2 JP 2006274528 A JP2006274528 A JP 2006274528A JP 2006274528 A JP2006274528 A JP 2006274528A JP 5314239 B2 JP5314239 B2 JP 5314239B2
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light
measurement
shape
optical displacement
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JP2008096119A5 (enExample
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佳晃 西尾
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Keyence Corp
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Keyence Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
JP2006274528A 2006-10-05 2006-10-05 光学式変位計、光学式変位測定方法、光学式変位測定プログラム及びコンピュータで読み取り可能な記録媒体並びに記録した機器 Active JP5314239B2 (ja)

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JP2006274528A JP5314239B2 (ja) 2006-10-05 2006-10-05 光学式変位計、光学式変位測定方法、光学式変位測定プログラム及びコンピュータで読み取り可能な記録媒体並びに記録した機器
US11/973,036 US7489410B2 (en) 2006-10-05 2007-10-05 Optical displacement meter, optical displacement measuring method, optical displacement measuring program, computer-readable recording medium, and device that records the program
US12/346,929 US7667857B2 (en) 2006-10-05 2008-12-31 Optical displacement meter, optical displacement measuring method, optical displacement measuring program, computer-readable recording medium, and device that records the program

Applications Claiming Priority (1)

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JP2006274528A JP5314239B2 (ja) 2006-10-05 2006-10-05 光学式変位計、光学式変位測定方法、光学式変位測定プログラム及びコンピュータで読み取り可能な記録媒体並びに記録した機器

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JP2008096119A JP2008096119A (ja) 2008-04-24
JP2008096119A5 JP2008096119A5 (enExample) 2009-11-12
JP5314239B2 true JP5314239B2 (ja) 2013-10-16

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US7489410B2 (en) 2009-02-10
US20090141288A1 (en) 2009-06-04
US20080088856A1 (en) 2008-04-17
US7667857B2 (en) 2010-02-23
JP2008096119A (ja) 2008-04-24

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