JP5294077B2 - Substrate laminate and method for separating the substrate laminate - Google Patents

Substrate laminate and method for separating the substrate laminate Download PDF

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JP5294077B2
JP5294077B2 JP2009141627A JP2009141627A JP5294077B2 JP 5294077 B2 JP5294077 B2 JP 5294077B2 JP 2009141627 A JP2009141627 A JP 2009141627A JP 2009141627 A JP2009141627 A JP 2009141627A JP 5294077 B2 JP5294077 B2 JP 5294077B2
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glass substrate
substrate
thin glass
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water
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JP2010285324A (en
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武志 乾
辰夫 笹井
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Nippon Electric Glass Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate laminate produced by stacking and integrating a thin glass substrate and a support substrate, the laminate facilitating the separation process of the thin glass substrate from the support substrate and preventing contamination on the surface of the thin glass substrate upon separation. <P>SOLUTION: The substrate laminate 1 is produced by stacking and integrating a thin glass substrate 2 and a support glass substrate 3, wherein an adhesive 6 composed of a water-insoluble adhesive resin that peels by impregnation with water is applied over the entire surface between the thin glass substrate 2 and the support glass substrate 3. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

本発明は、液晶表示基板や有機EL表示基板などの表示基板や、有機EL照明基板などの照明基板などに用いられる薄肉ガラス基板に関するもので、詳しくは、当該薄肉ガラス基板と支持基板とを積層して一体化した基板積層体に関する。   The present invention relates to a thin glass substrate used for a display substrate such as a liquid crystal display substrate or an organic EL display substrate, or an illumination substrate such as an organic EL illumination substrate. Specifically, the thin glass substrate and a support substrate are laminated. It is related with the board | substrate laminated body integrated.

周知のように、液晶表示装置や有機EL表示装置などの表示装置や、有機EL照明装置などの照明装置などには、薄型化及び軽量化が要請されている。そのため、当該装置に用いられるガラス基板においても、薄板化が推進されているのが実情である。しかしながら、ガラス基板は薄板化が進むに連れて、強度低下や撓みの発生が避けられないため、当該薄肉ガラス基板単体では、既存の製造工程へ投入できないという問題が生じていた。加えて、薄肉ガラス基板単体では、上記の強度低下等の理由から、取り扱い自体も困難となるため、作業効率の低下を招くという問題も生じていた。   As is well known, thinning and lightening are required for display devices such as liquid crystal display devices and organic EL display devices, and lighting devices such as organic EL lighting devices. Therefore, the actual situation is that the thinning of the glass substrate used in the apparatus is promoted. However, as the thickness of the glass substrate is reduced, a decrease in strength and the occurrence of bending are unavoidable. Therefore, the thin glass substrate alone cannot be put into an existing manufacturing process. In addition, with a thin glass substrate alone, the handling itself is difficult due to the above-described decrease in strength and the like, which causes a problem of reducing work efficiency.

そこで、当該薄肉ガラス基板を、他の支持基板と貼り合わせた基板積層体の状態で、製造工程へ投入して所定の処理を行い、一連の処理が終了した後に薄肉ガラス基板と支持基板とを分離する方法が提案されるに至っている。   Therefore, the thin glass substrate is put into a manufacturing process in the state of a substrate laminate bonded to another support substrate, and a predetermined process is performed. After the series of processes is completed, the thin glass substrate and the support substrate are combined. A method of separation has been proposed.

すなわち、例えば、特許文献1には、貼着と剥離を繰り返し行うことが可能な粘着力を有する粘着材層を介して、薄肉ガラス基板を支持基板に貼り合わせて基板積層体を製作することが開示されている。また、その従来技術として、段落0007には、水溶性型のシリコーン樹脂によって支持基板にガラス基板を貼り合わせることが開示されている。   That is, for example, in Patent Document 1, it is possible to manufacture a substrate laminate by bonding a thin glass substrate to a support substrate via an adhesive layer having an adhesive force that can be repeatedly applied and peeled off. It is disclosed. As the prior art, paragraph 0007 discloses that a glass substrate is bonded to a support substrate with a water-soluble silicone resin.

また、特許文献2には、薄肉ガラス基板の周縁部のみを熱硬化性樹脂を介在させて支持基板に貼り合わせることで基板積層体を製作することが開示されている。そして、薄肉ガラス基板を分離する際には、熱硬化性樹脂を介在された周縁部を含んだ積層体の端部付近を切断除去することで、薄肉ガラス基板を取り出すようにしている。   Patent Document 2 discloses that a substrate laminate is manufactured by attaching only a peripheral portion of a thin glass substrate to a support substrate with a thermosetting resin interposed therebetween. When the thin glass substrate is separated, the thin glass substrate is taken out by cutting and removing the vicinity of the end portion of the laminated body including the peripheral portion where the thermosetting resin is interposed.

特開平8−86993号公報Japanese Patent Laid-Open No. 8-86993 特開2006−220757号公報JP 2006-220757 A

しかしながら、特許文献1に開示の方法では、薄肉ガラス基板を支持基板に固定するのに十分な粘着力を粘着材層に付与したときには、薄肉ガラス基板と支持基板との分離が困難となるばかりでなく、分離時に薄肉ガラス基板に破損が生じるおそれがあるので問題となる。また、このような再粘着性の粘着材層を用いた場合には、分離後も薄肉ガラス基板に粘着材の一部が付着したまま残存しやすい。そのため、薄肉ガラス基板の表面に残存する粘着材自体が汚れとなるばかりでなく、その粘着力によって周囲の粉塵等の他の異物を吸着して汚れが悪化するという問題も生じ得る。   However, in the method disclosed in Patent Document 1, when the adhesive layer is provided with an adhesive force sufficient to fix the thin glass substrate to the support substrate, it is difficult to separate the thin glass substrate from the support substrate. However, there is a possibility that the thin glass substrate may be broken during the separation. Further, when such a re-adhesive pressure-sensitive adhesive layer is used, a part of the pressure-sensitive adhesive material tends to remain on the thin glass substrate even after separation. For this reason, not only the adhesive material itself remaining on the surface of the thin glass substrate becomes dirty, but also the problem that the foreign matter such as surrounding dust is adsorbed by the adhesive force, and the contamination becomes worse.

また、特許文献1の従来技術の欄に開示されているように、支持基板と薄肉ガラス基板との接着に水溶性のシリコーン樹脂を使用した場合には、当該構成を備えた基板積層体を水に浸漬した際に、シリコーン樹脂の成分が水中に溶け出してしまう。そのため、分離した薄肉ガラス基板の表面に水中に溶け出したシリコーン樹脂に由来する汚れが付着する可能性が高く、薄肉ガラス基板の清浄性を保つことが困難となる。   In addition, as disclosed in the prior art section of Patent Document 1, when a water-soluble silicone resin is used for adhesion between the support substrate and the thin glass substrate, the substrate laminate having the configuration is water-treated. When immersed in water, the components of the silicone resin dissolve into the water. Therefore, there is a high possibility that dirt derived from the silicone resin dissolved in water adheres to the surface of the separated thin glass substrate, and it becomes difficult to maintain the cleanliness of the thin glass substrate.

一方、特許文献2に開示の方法では、薄肉ガラス基板と支持基板とを分離する際に、熱硬化性樹脂を介在された周縁部を含んだ積層体の端部付近を切断する必要があるので、分離作業に面倒且つ煩雑な作業が強いられる。また、切断時に発生する切粉によって薄肉ガラス基板の表面に汚れが生じるおそれもある。   On the other hand, in the method disclosed in Patent Document 2, when the thin glass substrate and the support substrate are separated, it is necessary to cut the vicinity of the end portion of the laminate including the peripheral portion interposed with the thermosetting resin. Therefore, troublesome and complicated work is required for the separation work. In addition, the surface of the thin glass substrate may be contaminated by chips generated during cutting.

本発明の課題は、薄肉ガラス基板と支持基板とを積層して一体化した基板積層体において、薄肉ガラス基板と支持基板との分離作業を容易にするとともに、分離の際に薄肉ガラス基板の表面に汚れが生じないようにすることを技術的課題とする。   An object of the present invention is to facilitate separation of a thin glass substrate and a support substrate in a substrate laminate in which a thin glass substrate and a support substrate are laminated and integrated, and at the time of separation, the surface of the thin glass substrate It is a technical problem to prevent contamination from occurring.

上記課題を解決するために創案された本発明は、薄肉ガラス基板と支持基板とを積層して一体化した基板積層体であって、前記薄肉ガラス基板と前記支持基板との間に、水を含むことで剥離する非水溶性の接着剤を介在させたことに特徴づけられる。   The present invention devised to solve the above problems is a substrate laminate in which a thin glass substrate and a support substrate are laminated and integrated, and water is provided between the thin glass substrate and the support substrate. It is characterized by interposing a water-insoluble adhesive that peels off when included.

このような構成によれば、基板積層体を水に浸漬するだけで、接着剤が水を含んで剥離するので、薄肉ガラス基板と支持基板とを容易に分離することができる。しかも、当該接着剤は、非水溶性であることから、基板積層体を浸漬した水中に接着剤の成分が溶け出すという事態を確実に抑制することができる。そのため、水中で分離された薄肉ガラス基板に接着剤に由来する汚れが付着することがない。したがって、分離後の薄肉ガラス基板の表面の清浄性を確実に確保することができる。   According to such a configuration, since the adhesive is peeled off by including water only by immersing the substrate laminate in water, the thin glass substrate and the support substrate can be easily separated. And since the said adhesive agent is water-insoluble, the situation that the component of an adhesive agent melt | dissolves in the water which immersed the board | substrate laminated body can be suppressed reliably. Therefore, the stain | pollution | contamination originating in an adhesive agent does not adhere to the thin glass substrate isolate | separated in water. Therefore, the cleanliness of the surface of the thin glass substrate after separation can be reliably ensured.

上記の構成において、前記接着剤としては、接着用樹脂を使用することができる。   In the above configuration, an adhesive resin can be used as the adhesive.

上記の構成において、前記接着剤を、前記薄肉ガラス基板と前記支持基板との間の全面に亘って介在させることが好ましい。   Said structure WHEREIN: It is preferable to interpose the said adhesive agent over the whole surface between the said thin glass substrate and the said support substrate.

このようにすれば、薄肉ガラス基板を確実に支持基板に固定することができる。また、接着剤を薄肉ガラス基板と支持基板との間の全面に亘って介在させれば、薄肉ガラス基板と支持基板との間に接着剤を介在させない部分を形成した場合のように、接着剤の肉厚の変化部が形成されることがない。したがって、接着剤の肉厚の変化に伴って薄肉ガラス基板の表面が波打つという事態を確実に防止することが可能となる。その結果、薄肉ガラス基板の表面を平坦に保つことができるので、薄肉ガラス基板に対して成膜等の各種処理を正確に行うことができる。   In this way, the thin glass substrate can be reliably fixed to the support substrate. Further, if the adhesive is interposed over the entire surface between the thin glass substrate and the support substrate, the adhesive is formed as if a portion where no adhesive is interposed is formed between the thin glass substrate and the support substrate. The change part of the wall thickness of is not formed. Therefore, it is possible to reliably prevent a situation in which the surface of the thin glass substrate undulates as the thickness of the adhesive changes. As a result, since the surface of the thin glass substrate can be kept flat, various processes such as film formation can be accurately performed on the thin glass substrate.

上記の構成において、前記薄肉ガラス基板の片面又は両面に飛散防止用フィルムが貼り付けられていることが好ましい。   Said structure WHEREIN: It is preferable that the film for scattering prevention is affixed on the single side | surface or both surfaces of the said thin glass substrate.

このようにすれば、製造工程の途中や、表示装置や照明装置等の最終製品に組み込まれた段階で、薄肉ガラス基板が破損しても、その破片等が周囲に飛散することを防止することができる。   In this way, even if the thin glass substrate is damaged during the manufacturing process or when it is incorporated in the final product such as a display device or a lighting device, it prevents the broken pieces from scattering around. Can do.

また、上記の構成において、前記薄板ガラスの片面に透明電極膜が形成されていてもよいし、前記薄板ガラスの一方の面に飛散防止用のフィルムが貼り付けられ、他方の面に透明電極膜が形成されていてもよい。   In the above configuration, a transparent electrode film may be formed on one surface of the thin glass, or a film for preventing scattering is attached to one surface of the thin glass, and the transparent electrode film is formed on the other surface. May be formed.

以上のように本発明によれば、基板積層体を水に浸漬するだけで、薄肉ガラス基板と支持基板との間に介在させた接着剤が水を含んで剥離するので、薄肉ガラス基板と支持基板とを容易に分離することができる。また、薄肉ガラス基板と支持基板との間に介在させた接着剤は非水溶性であることから、基板積層体を浸漬させた水に溶け出すことがなく、接着剤に由来する汚れが分離後の薄肉ガラス基板の表面に付くという事態を確実に防止することができる。したがって、分離後の薄肉ガラス基板の表面の清浄性を確実に確保することが可能となる。   As described above, according to the present invention, since the adhesive interposed between the thin glass substrate and the support substrate peels off including the water simply by immersing the substrate laminate in water, the thin glass substrate and the support are separated. The substrate can be easily separated. In addition, since the adhesive interposed between the thin glass substrate and the support substrate is water-insoluble, it does not dissolve in the water in which the substrate laminate is soaked, and the dirt derived from the adhesive is separated. It is possible to reliably prevent the situation of sticking to the surface of the thin glass substrate. Therefore, it becomes possible to ensure the cleanliness of the surface of the thin glass substrate after separation.

本発明に係る基板積層体を示す概略縦断面図である。It is a schematic longitudinal cross-sectional view which shows the board | substrate laminated body which concerns on this invention.

以下、本発明の一実施形態を添付図面に基づいて説明する。   Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings.

図1は、本発明の実施形態に係る基板積層体を示す図である。この基板積層体1は、薄肉ガラス基板2と、支持基板としての支持ガラス基板3とを積層して一体化させたもので、詳しくは次のような構成を備えている。すなわち、本実施形態では、基板積層体1は、支持ガラス基板3の表面側に、順に、飛散防止フィルム4と、薄肉ガラス基板2と、透明電極膜5とを積層した構成とされている。   FIG. 1 is a view showing a substrate laminate according to an embodiment of the present invention. The substrate laminate 1 is obtained by laminating and integrating a thin glass substrate 2 and a support glass substrate 3 as a support substrate, and has the following configuration in detail. In other words, in the present embodiment, the substrate laminate 1 has a configuration in which the scattering prevention film 4, the thin glass substrate 2, and the transparent electrode film 5 are sequentially laminated on the surface side of the support glass substrate 3.

支持ガラス基板3の表面と飛散防止フィルム4の裏面の間には、双方の全面に接触した状態で、水を含むことで剥離する非水溶性の樹脂接着剤6が介在されており、この接着剤6によって、支持ガラス基板3と飛散防止フィルム4とが互いに貼り合わされている。   Between the front surface of the supporting glass substrate 3 and the back surface of the anti-scattering film 4, there is interposed a water-insoluble resin adhesive 6 that peels off when it contains water in contact with both surfaces. The supporting glass substrate 3 and the scattering prevention film 4 are bonded to each other by the agent 6.

飛散防止フィルム4の表面と薄肉ガラス基板2の裏面との間には、双方の全面に接触した状態で、水を含んで剥離することがない非水溶性の樹脂接着剤7が介在されており、この接着剤7によって、飛散防止フィルム4と薄肉ガラス基板2とが互いに貼り合わされている。   Between the surface of the anti-scattering film 4 and the back surface of the thin glass substrate 2, there is interposed a water-insoluble resin adhesive 7 that is in contact with both surfaces and does not peel off with water. The anti-scattering film 4 and the thin glass substrate 2 are bonded to each other by the adhesive 7.

透明電極膜5は、薄肉ガラス基板2の表面に直接成膜されている。なお、透明電極膜5の成膜は、薄板ガラス基板2を支持基板3に固定した後、すなわち、上記の構成を備えた基板積層体1から透明電極膜5を除いた積層体の状態とされた薄肉ガラス基板2の表面に対して行われる。   The transparent electrode film 5 is directly formed on the surface of the thin glass substrate 2. The transparent electrode film 5 is formed after the thin glass substrate 2 is fixed to the support substrate 3, that is, in a state of a laminate in which the transparent electrode film 5 is removed from the substrate laminate 1 having the above-described configuration. This is performed on the surface of the thin glass substrate 2.

以上の基板積層体1の各構成部材は、液晶表示装置や有機EL表示装置などの表示装置や、有機EL照明装置などの照明装置の製造工程で行われる熱処理(例えば、200℃の熱処理)に耐え得る耐熱性を備えていることが好ましい。以下、各構成部材について詳述する。   Each component of the above substrate laminate 1 is subjected to a heat treatment (for example, a heat treatment at 200 ° C.) performed in a manufacturing process of a display device such as a liquid crystal display device or an organic EL display device or a lighting device such as an organic EL lighting device. It is preferable to have heat resistance that can withstand. Hereinafter, each component will be described in detail.

薄肉ガラス基板2としては、板厚が100〜300μmのガラス基板が使用され、支持ガラス基板3としては、板厚が200〜700μmのガラス基板が使用される。薄肉ガラス基板2の組成としては、例えば、無アルカリガラスや硼珪酸ガラス、或いはソーダ石灰ガラスなどのガラスが使用されるが、支持ガラス基板3は、表示装置や照明装置などの最終製品には組み込まれないため、その組成は、窓板ガラスと同じソーダ石灰ガラス等を使用すれば十分である。なお、支持基板は、ガラス基板3に代えて、プラスチック等の樹脂や金属、或いはセラミック等の基板を使用することもできる。また、薄肉ガラス基板2および支持ガラス基板3は、丸形などの形状であってもよいが、本実施形態では、例えば縦方向寸法が100〜300mmで、横方向寸法が100〜300mmの矩形状であって、同じ大きさのものが使用される。   As the thin glass substrate 2, a glass substrate with a plate thickness of 100 to 300 μm is used, and as the support glass substrate 3, a glass substrate with a plate thickness of 200 to 700 μm is used. As the composition of the thin glass substrate 2, for example, glass such as alkali-free glass, borosilicate glass, or soda lime glass is used, but the supporting glass substrate 3 is incorporated in a final product such as a display device or a lighting device. Therefore, it is sufficient to use the same soda-lime glass or the like as the window glass. In addition, it can replace with the glass substrate 3 and can use substrates, such as resin, metals, such as a plastics, or a ceramic, for a support substrate. The thin glass substrate 2 and the supporting glass substrate 3 may have a round shape or the like, but in the present embodiment, for example, a rectangular shape having a vertical dimension of 100 to 300 mm and a horizontal dimension of 100 to 300 mm. The same size is used.

支持ガラス基板3と飛散防止フィルム4との間に介在させる接着剤6としては、水で剥離可能であって、且つ、耐熱性を有するエポキシ系、アクリル系、或いはシリコーン系の紫外線硬化樹脂又は熱硬化性樹脂を選択することができる。なお、この接着剤6は、水を含ませたときに生じる面方向への膨張を1つの要因として剥離が生じるものである。具体的には、この接着剤6としては、紫外線硬化樹脂である電気化学工業株式会社製のテンプロック(商品名)を使用することができる。なお、接着剤6の厚みは、10〜200μm程度である。   The adhesive 6 interposed between the supporting glass substrate 3 and the anti-scattering film 4 is an epoxy-based, acrylic-based, or silicone-based ultraviolet curable resin or heat that can be peeled off with water and has heat resistance. A curable resin can be selected. The adhesive 6 is peeled off due to the expansion in the surface direction that occurs when water is included. Specifically, as this adhesive 6, Templock (trade name) manufactured by Denki Kagaku Kogyo Co., Ltd., which is an ultraviolet curable resin, can be used. In addition, the thickness of the adhesive agent 6 is about 10-200 micrometers.

また、飛散防止フィルム4と薄肉ガラス基板2との間に介在させる接着剤7としては、水で剥離することがなく、非水溶性であれば特に限定されるものではないが、例えば、耐熱性が高く、硬化収縮及び吸水率の小さいアクリル系やエポキシ系、或いはシリコーン系の紫外線硬化樹脂又は熱硬化性樹脂を使用することができる。接着剤7の厚みは、10〜200μm程度である。   The adhesive 7 interposed between the anti-scattering film 4 and the thin glass substrate 2 is not particularly limited as long as it does not peel off with water and is insoluble in water. An acrylic, epoxy, or silicone ultraviolet curable resin or thermosetting resin that has a high curing shrinkage and a low water absorption rate can be used. The thickness of the adhesive 7 is about 10 to 200 μm.

飛散防止フィルム4としては、ポリエチレンナフタレート樹脂やノルボルネン樹脂など、耐候性及び耐熱性に富んだ素材を選択することが好ましい。   As the anti-scattering film 4, it is preferable to select a material having excellent weather resistance and heat resistance such as polyethylene naphthalate resin and norbornene resin.

そして、以上のように構成された基板積層体1は、一連の処理が完了した後、水(好ましくは80〜90℃の温水)中に浸漬されて、薄肉ガラス基板2と支持ガラス基板3とが分離される。詳述すると、本実施形態では、水で剥離可能な接着剤6が、支持ガラス基板3と飛散防止フィルム4との間に双方に接触した状態で介在しているので、基板積層体1を水に浸漬した状態で所定時間が経過すると、基板積層体1が、支持ガラス基板3と、表面に透明電極膜5が形成され且つ裏面に飛散防止フィルム4が貼り付けられた薄肉ガラス基板2との2つに分離される。この際、接着剤6は、非水溶性であるので、基板積層体1を浸漬した温水中に溶け出すことなく、フィルム状の形状を維持した状態のまま水中に残存する。   And the board | substrate laminated body 1 comprised as mentioned above is immersed in water (preferably 80-90 degreeC hot water) after a series of processes are completed, and the thin glass substrate 2, the support glass substrate 3, and Are separated. More specifically, in this embodiment, the adhesive 6 that can be peeled with water is interposed between the supporting glass substrate 3 and the anti-scattering film 4 in a state where both are in contact with each other. When a predetermined time elapses in the state of being immersed in the substrate, the substrate laminate 1 is composed of the supporting glass substrate 3 and the thin glass substrate 2 having the transparent electrode film 5 formed on the front surface and the anti-scattering film 4 attached on the back surface. Separated into two. At this time, since the adhesive 6 is insoluble in water, it remains in the water while maintaining the film-like shape without dissolving in the warm water in which the substrate laminate 1 is immersed.

したがって、水に浸漬するだけで、薄肉ガラス基板2と支持ガラス基板3とを容易に分離できるとともに、水中で分離された薄肉ガラス基板2に接着剤6に由来する不要な汚れが付着することがなく、分離後の薄肉ガラス基板2の清浄性を確実に確保することができる。   Therefore, the thin glass substrate 2 and the supporting glass substrate 3 can be easily separated by simply immersing them in water, and unnecessary dirt derived from the adhesive 6 may adhere to the thin glass substrate 2 separated in water. In addition, the cleanliness of the thin glass substrate 2 after separation can be reliably ensured.

なお、本発明は、上記の実施形態に限定されるものではなく、種々の形態で実施することができる。例えば、上記の実施形態では、支持ガラス基板3と、薄肉ガラス基板2との間に、飛散防止フィルム4を介在させて積層した場合を説明したが、飛散防止フィルム4を省略して、水で剥離可能な接着剤6によって、支持ガラス基板3の表面に薄肉ガラス基板2を直接貼り付けてもよい。   In addition, this invention is not limited to said embodiment, It can implement with a various form. For example, in the above embodiment, the case where the anti-scattering film 4 is laminated between the supporting glass substrate 3 and the thin glass substrate 2 has been described, but the anti-scattering film 4 is omitted and water is used. The thin glass substrate 2 may be directly attached to the surface of the supporting glass substrate 3 by the peelable adhesive 6.

また、上記の実施形態では、支持ガラス基板3の表面全体に亘って接着剤6を介在させた場合を説明したが、接着剤6を薄肉ガラス基板2の周縁部に対応する部分のみに介在させたり、或いは薄肉ガラス基板2の板面に対応した領域内に格子状の形態で介在させるなどしてもよい。   In the above embodiment, the case where the adhesive 6 is interposed over the entire surface of the support glass substrate 3 has been described. However, the adhesive 6 is interposed only in the portion corresponding to the peripheral edge of the thin glass substrate 2. Or, it may be interposed in a lattice form in a region corresponding to the plate surface of the thin glass substrate 2.

さらに、上記の実施形態では、薄肉ガラス基板2と支持ガラス基板3との大きさを同じにし、各々の端面を揃えた状態で積層した場合を図示して説明したが、薄肉ガラス基板2よりも支持ガラス基板3の大きさを大きくし、平面視で薄肉ガラス基板2の外方から支持ガラス基3が外方に食み出すようにしてもよい。これにより、積層体1のハンドリング時に、薄肉ガラス基板2に触れることなく、支持ガラス基板3のみを掴んで作業をすることができるので、薄肉ガラス基板2との接触回数を可及的に低減し、その破損をより確実に防止することができる。   Further, in the above embodiment, the thin glass substrate 2 and the supporting glass substrate 3 are made the same size, and the case where the respective end surfaces are aligned is illustrated and described. The size of the supporting glass substrate 3 may be increased so that the supporting glass base 3 protrudes outward from the outside of the thin glass substrate 2 in plan view. As a result, when handling the laminated body 1, it is possible to work by gripping only the supporting glass substrate 3 without touching the thin glass substrate 2, so that the number of contacts with the thin glass substrate 2 is reduced as much as possible. The damage can be prevented more reliably.

1 基板積層体
2 薄肉ガラス基板
3 支持ガラス基板
4 飛散防止フィルム
5 透明電極膜
6 樹脂接着剤
7 樹脂接着剤
DESCRIPTION OF SYMBOLS 1 Substrate laminated body 2 Thin glass substrate 3 Support glass substrate 4 Anti-scattering film 5 Transparent electrode film 6 Resin adhesive 7 Resin adhesive

Claims (7)

薄肉ガラス基板と支持基板とを積層して一体化した基板積層体であって、
前記薄肉ガラス基板と前記支持基板との間に、水を含むことで剥離する非水溶性の接着剤を介在させたことを特徴とする基板積層体。
A substrate laminate in which a thin glass substrate and a support substrate are laminated and integrated,
A substrate laminate, wherein a water-insoluble adhesive that peels off when water is contained is interposed between the thin glass substrate and the support substrate.
前記接着剤が、接着用樹脂である請求項1に記載の基板積層体。   The substrate laminate according to claim 1, wherein the adhesive is an adhesive resin. 前記接着剤を、前記薄肉ガラス基板と前記支持基板との間の全面に亘って介在させた請求項1又は2に記載の基板積層体。   The board | substrate laminated body of Claim 1 or 2 which interposed the said adhesive agent over the whole surface between the said thin glass substrate and the said support substrate. 前記薄肉ガラス基板の片面又は両面に飛散防止用フィルムが貼り付けられている請求項1〜3のいずれか1項に記載の基板積層体。   The board | substrate laminated body of any one of Claims 1-3 by which the film for scattering prevention is affixed on the single side | surface or both surfaces of the said thin glass substrate. 前記薄肉ガラス基板の片面に透明電極膜が形成されている請求項1〜3のいずれか1項に記載の基板積層体。   The board | substrate laminated body of any one of Claims 1-3 in which the transparent electrode film is formed in the single side | surface of the said thin glass substrate. 前記薄肉ガラス基板は、一方の面に飛散防止用のフィルムが貼り付けられ、他方の面に透明電極膜が形成されている請求項1〜3のいずれか1項に記載の基板積層体。   The said thin glass substrate is a board | substrate laminated body of any one of Claims 1-3 by which the film for scattering prevention is affixed on one surface, and the transparent electrode film is formed in the other surface. 請求項1〜6のいずれか1項に記載の基板積層体を水に浸漬して、前記薄肉ガラス基板を前記支持基板から分離させることを特徴とする基板積層体の分離方法。   A method for separating a substrate laminate, comprising: immersing the substrate laminate according to any one of claims 1 to 6 in water to separate the thin glass substrate from the support substrate.
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