JP5293413B2 - 圧力センサー及びその製造方法 - Google Patents

圧力センサー及びその製造方法 Download PDF

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Publication number
JP5293413B2
JP5293413B2 JP2009132836A JP2009132836A JP5293413B2 JP 5293413 B2 JP5293413 B2 JP 5293413B2 JP 2009132836 A JP2009132836 A JP 2009132836A JP 2009132836 A JP2009132836 A JP 2009132836A JP 5293413 B2 JP5293413 B2 JP 5293413B2
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pressure
temperature
frequency
pressure sensor
coefficient
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JP2009132836A
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Japanese (ja)
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JP2010281581A (ja
JP2010281581A5 (enExample
Inventor
俊信 櫻井
健太 佐藤
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Seiko Epson Corp
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Seiko Epson Corp
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JP2009132836A 2009-06-02 2009-06-02 圧力センサー及びその製造方法 Expired - Fee Related JP5293413B2 (ja)

Priority Applications (1)

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JP2009132836A JP5293413B2 (ja) 2009-06-02 2009-06-02 圧力センサー及びその製造方法

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JP2009132836A JP5293413B2 (ja) 2009-06-02 2009-06-02 圧力センサー及びその製造方法

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JP2010281581A JP2010281581A (ja) 2010-12-16
JP2010281581A5 JP2010281581A5 (enExample) 2012-05-31
JP5293413B2 true JP5293413B2 (ja) 2013-09-18

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Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103946672B (zh) * 2011-12-28 2016-06-01 富士电机株式会社 物理量传感器或其装置的输出值修正方法及装置
JP2019158476A (ja) 2018-03-09 2019-09-19 セイコーエプソン株式会社 物理量センサーデバイス、物理量センサーデバイスを用いた傾斜計、慣性計測装置、構造物監視装置、及び移動体
CN116754107B (zh) * 2023-08-23 2023-10-20 清华四川能源互联网研究院 具有放大结构的高灵敏度谐振压力传感器及信号调理方法
CN119334532B (zh) * 2024-12-20 2025-04-11 吉林大学 基于压力检测探头的高精度压力感知方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS532097A (en) * 1976-06-29 1978-01-10 Seiko Instr & Electronics Ltd Quartz crystal oscillator
JPS54158150A (en) * 1978-06-05 1979-12-13 Seiko Instr & Electronics Ltd Crystal oscillation circuit
JPS5726723A (en) * 1980-07-25 1982-02-12 Seiko Epson Corp Crystal thermometer
JP3010922B2 (ja) * 1992-08-28 2000-02-21 セイコーエプソン株式会社 温度検出用水晶振動子及びその製造方法
JPS63281033A (ja) * 1987-05-13 1988-11-17 Daiwa Shinku Kogyosho:Kk 圧力検出装置
JP5403200B2 (ja) * 2006-06-09 2014-01-29 セイコーエプソン株式会社 圧力センサ
JP2008076075A (ja) * 2006-09-19 2008-04-03 Epson Toyocom Corp 絶対圧センサ

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JP2010281581A (ja) 2010-12-16

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