JP2010281581A5 - - Google Patents

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Publication number
JP2010281581A5
JP2010281581A5 JP2009132836A JP2009132836A JP2010281581A5 JP 2010281581 A5 JP2010281581 A5 JP 2010281581A5 JP 2009132836 A JP2009132836 A JP 2009132836A JP 2009132836 A JP2009132836 A JP 2009132836A JP 2010281581 A5 JP2010281581 A5 JP 2010281581A5
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JP
Japan
Prior art keywords
pressure
pressure sensor
frequency
approximate polynomial
coefficients
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JP2009132836A
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English (en)
Japanese (ja)
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JP2010281581A (ja
JP5293413B2 (ja
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Priority to JP2009132836A priority Critical patent/JP5293413B2/ja
Priority claimed from JP2009132836A external-priority patent/JP5293413B2/ja
Publication of JP2010281581A publication Critical patent/JP2010281581A/ja
Publication of JP2010281581A5 publication Critical patent/JP2010281581A5/ja
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Publication of JP5293413B2 publication Critical patent/JP5293413B2/ja
Expired - Fee Related legal-status Critical Current
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JP2009132836A 2009-06-02 2009-06-02 圧力センサー及びその製造方法 Expired - Fee Related JP5293413B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009132836A JP5293413B2 (ja) 2009-06-02 2009-06-02 圧力センサー及びその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009132836A JP5293413B2 (ja) 2009-06-02 2009-06-02 圧力センサー及びその製造方法

Publications (3)

Publication Number Publication Date
JP2010281581A JP2010281581A (ja) 2010-12-16
JP2010281581A5 true JP2010281581A5 (enExample) 2012-05-31
JP5293413B2 JP5293413B2 (ja) 2013-09-18

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ID=43538463

Family Applications (1)

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JP2009132836A Expired - Fee Related JP5293413B2 (ja) 2009-06-02 2009-06-02 圧力センサー及びその製造方法

Country Status (1)

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JP (1) JP5293413B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103946672B (zh) * 2011-12-28 2016-06-01 富士电机株式会社 物理量传感器或其装置的输出值修正方法及装置
JP2019158476A (ja) 2018-03-09 2019-09-19 セイコーエプソン株式会社 物理量センサーデバイス、物理量センサーデバイスを用いた傾斜計、慣性計測装置、構造物監視装置、及び移動体
CN116754107B (zh) * 2023-08-23 2023-10-20 清华四川能源互联网研究院 具有放大结构的高灵敏度谐振压力传感器及信号调理方法
CN119334532B (zh) * 2024-12-20 2025-04-11 吉林大学 基于压力检测探头的高精度压力感知方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS532097A (en) * 1976-06-29 1978-01-10 Seiko Instr & Electronics Ltd Quartz crystal oscillator
JPS54158150A (en) * 1978-06-05 1979-12-13 Seiko Instr & Electronics Ltd Crystal oscillation circuit
JPS5726723A (en) * 1980-07-25 1982-02-12 Seiko Epson Corp Crystal thermometer
JP3010922B2 (ja) * 1992-08-28 2000-02-21 セイコーエプソン株式会社 温度検出用水晶振動子及びその製造方法
JPS63281033A (ja) * 1987-05-13 1988-11-17 Daiwa Shinku Kogyosho:Kk 圧力検出装置
JP5403200B2 (ja) * 2006-06-09 2014-01-29 セイコーエプソン株式会社 圧力センサ
JP2008076075A (ja) * 2006-09-19 2008-04-03 Epson Toyocom Corp 絶対圧センサ

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