JP5279344B2 - 光学素子の製造方法 - Google Patents

光学素子の製造方法 Download PDF

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Publication number
JP5279344B2
JP5279344B2 JP2008135692A JP2008135692A JP5279344B2 JP 5279344 B2 JP5279344 B2 JP 5279344B2 JP 2008135692 A JP2008135692 A JP 2008135692A JP 2008135692 A JP2008135692 A JP 2008135692A JP 5279344 B2 JP5279344 B2 JP 5279344B2
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JP
Japan
Prior art keywords
film
aluminum
water
optical element
substrate
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Expired - Fee Related
Application number
JP2008135692A
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English (en)
Japanese (ja)
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JP2009015310A5 (https=
JP2009015310A (ja
Inventor
博幸 田中
雅之 山田
佳範 小谷
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Canon Inc
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Canon Inc
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Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2008135692A priority Critical patent/JP5279344B2/ja
Priority to EP08009817.1A priority patent/EP2000289A3/en
Priority to US12/130,073 priority patent/US8603372B2/en
Priority to CN200810098680XA priority patent/CN101324676B/zh
Publication of JP2009015310A publication Critical patent/JP2009015310A/ja
Priority to US12/505,624 priority patent/US7767287B2/en
Publication of JP2009015310A5 publication Critical patent/JP2009015310A5/ja
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Publication of JP5279344B2 publication Critical patent/JP5279344B2/ja
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  • Surface Treatment Of Optical Elements (AREA)
JP2008135692A 2007-06-06 2008-05-23 光学素子の製造方法 Expired - Fee Related JP5279344B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2008135692A JP5279344B2 (ja) 2007-06-06 2008-05-23 光学素子の製造方法
EP08009817.1A EP2000289A3 (en) 2007-06-06 2008-05-29 Method of manufacturing optical element, and optical element
US12/130,073 US8603372B2 (en) 2007-06-06 2008-05-30 Method of manufacturing optical element, and optical element
CN200810098680XA CN101324676B (zh) 2007-06-06 2008-06-06 制造光学元件的方法和光学元件
US12/505,624 US7767287B2 (en) 2007-06-06 2009-07-20 Method of manufacturing optical element, and optical element

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2007150689 2007-06-06
JP2007150689 2007-06-06
JP2008135692A JP5279344B2 (ja) 2007-06-06 2008-05-23 光学素子の製造方法

Publications (3)

Publication Number Publication Date
JP2009015310A JP2009015310A (ja) 2009-01-22
JP2009015310A5 JP2009015310A5 (https=) 2011-07-07
JP5279344B2 true JP5279344B2 (ja) 2013-09-04

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ID=40188290

Family Applications (1)

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JP2008135692A Expired - Fee Related JP5279344B2 (ja) 2007-06-06 2008-05-23 光学素子の製造方法

Country Status (2)

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JP (1) JP5279344B2 (https=)
CN (1) CN101324676B (https=)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5814512B2 (ja) * 2009-03-31 2015-11-17 キヤノン株式会社 光学用部材、その製造方法及び光学系
JP2010271374A (ja) * 2009-05-19 2010-12-02 Canon Inc 光学系及びそれを有する光学機器
JP2010271534A (ja) * 2009-05-21 2010-12-02 Canon Inc 光学素子およびそれを有する光学装置
JP5653069B2 (ja) * 2010-05-07 2015-01-14 キヤノン株式会社 酸化アルミニウム前駆体ゾルの製造法、及び光学用部材の製造方法
JP5647924B2 (ja) * 2011-03-18 2015-01-07 富士フイルム株式会社 光学部材の製造方法
JP2015114381A (ja) * 2013-12-09 2015-06-22 東京エレクトロン株式会社 反射防止機能を有する部材およびその製造方法
JP6234857B2 (ja) * 2014-03-24 2017-11-22 富士フイルム株式会社 反射防止機能付きレンズの製造方法
WO2016170727A1 (ja) * 2015-04-20 2016-10-27 富士フイルム株式会社 構造物の製造方法
JP2019174781A (ja) 2017-08-24 2019-10-10 キヤノン株式会社 反射光学素子およびステレオカメラ装置
CN112213803A (zh) * 2020-11-13 2021-01-12 光驰科技(上海)有限公司 一种防水光学薄膜及制作方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09202649A (ja) * 1996-01-24 1997-08-05 Central Glass Co Ltd 花弁状透明アルミナ膜及びその形成法
JP4247354B2 (ja) * 1999-07-08 2009-04-02 財団法人大阪産業振興機構 表面微細凹凸組織の低温形成法および当該組織を有する基体
JP4488764B2 (ja) * 2004-02-23 2010-06-23 キヤノン株式会社 透明反射防止膜、その製造方法および光学部材
JP4182236B2 (ja) * 2004-02-23 2008-11-19 キヤノン株式会社 光学部材および光学部材の製造方法
CN100414321C (zh) * 2005-02-18 2008-08-27 佳能株式会社 光学透明部件和使用该光学透明部件的光学系统
JP4520418B2 (ja) * 2005-02-18 2010-08-04 キヤノン株式会社 光学用透明部材及びそれを用いた光学系

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Publication number Publication date
CN101324676A (zh) 2008-12-17
CN101324676B (zh) 2013-02-06
JP2009015310A (ja) 2009-01-22

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