JP5279299B2 - 反復学習制御回路を備える位置制御装置、露光装置及びデバイス製造方法 - Google Patents
反復学習制御回路を備える位置制御装置、露光装置及びデバイス製造方法 Download PDFInfo
- Publication number
- JP5279299B2 JP5279299B2 JP2008050126A JP2008050126A JP5279299B2 JP 5279299 B2 JP5279299 B2 JP 5279299B2 JP 2008050126 A JP2008050126 A JP 2008050126A JP 2008050126 A JP2008050126 A JP 2008050126A JP 5279299 B2 JP5279299 B2 JP 5279299B2
- Authority
- JP
- Japan
- Prior art keywords
- control
- filter
- learning
- parameter
- position control
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
- G03F7/70725—Stages control
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70775—Position control, e.g. interferometers or encoders for determining the stage position
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
- G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
- G05B13/0265—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric the criterion being a learning criterion
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/19—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/41—Servomotor, servo controller till figures
- G05B2219/41439—Position error ffw for compensation of speed
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/42—Servomotor, servo controller kind till VSS
- G05B2219/42012—H-infinite controller
Description
Synthesis of robust multivariable iterative learning controllers with application to a wafer stage motionsystem,DICK DE ROOVER and OKKO H.BOSGRA,INT.J.CONTROL,2000,VOL.73,NO.10,968−979
図19は、本発明の位置制御装置を適用した露光装置の概念図である。なお、本実施例では露光装置について例示的に説明するものであり、露光装置の構成はこの記述により限定されないものとする。
2 減算部
3,4 加算部
5,11,12 メモリ
6 反復学習制御回路
7 位置制御装置
80 制御基板
81 照明光学系
82 レチクル
83 レチクルステージ
84 投影光学系
85 ウエハ
86 ウエハステージ
88 センサ
Claims (8)
- 制御対象の位置を検出する検出部と、
前記検出部の出力を目標値から減算する減算部と、
前記検出部の出力と前記目標値との偏差が入力される第1フィルタと、所定の帯域を遮断する線形時不変の第2フィルタを含み、前記制御対象に制御入力をフィードフォワードする反復学習制御回路と、を備える位置制御装置であって、
前記制御対象のパラメータ変動を算出する算出手段を備え、
前記制御対象のパラメータ変動に応じて前記第1フィルタの特性が変更されることを特徴とする位置制御装置。 - 前記第1フィルタは、線形パラメータ変動系のモデルから導出されることを特徴とする請求項1に記載の位置制御装置。
- 前記パラメータは前記制御対象を駆動する駆動手段の推力定数を含み、
前記算出手段は、予め記憶された前記制御対象の位置と前記推力定数との関係を用いて、前記検出部の出力にもとづいて前記推力定数の変動を算出することを特徴とする請求項1または2に記載の位置制御装置。 - 外乱オブザーバを備え、
該外乱オブザーバの出力にもとづいて前記パラメータ変動が算出されることを特徴とする請求項1または2に記載の位置制御装置。 - 前記パラメータは前記制御対象の姿勢を含み、
前記制御対象の姿勢を検出する姿勢検出部を備えることを特徴とする請求項1または2に記載の位置制御装置。 - 前記第1フィルタは、特性が不変である2つの不変フィルタをもち、前記2つの不変フィルタの間を補間する補間演算部と、を備えることを特徴とする請求項1に記載の位置制御装置。
- 請求項1乃至6のいずれか1項に記載の位置制御装置を用いて、基板または原版を搭載するステージの位置を制御することを特徴とする露光装置。
- 請求項7に記載の露光装置を用いて基板にパターンを露光する工程と、
露光された基板を現像する工程とを備えることを特徴とするデバイス製造方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008050126A JP5279299B2 (ja) | 2008-02-29 | 2008-02-29 | 反復学習制御回路を備える位置制御装置、露光装置及びデバイス製造方法 |
EP09002581.8A EP2096494B1 (en) | 2008-02-29 | 2009-02-24 | Iterative learning for position control in an exposure apparatus |
US12/393,871 US8676355B2 (en) | 2008-02-29 | 2009-02-26 | Position control apparatus including iterative learning circuit, exposure apparatus, method for manufacturing device, and iterative learning method for use in position control apparatus having iterative learning circuit including learning filter |
KR1020090016881A KR101068319B1 (ko) | 2008-02-29 | 2009-02-27 | 반복 학습 회로를 포함하는 위치 제어 장치, 노광 장치, 디바이스 제조 방법, 및, 학습 필터를 포함하는 반복 학습 회로를 갖는 위치 제어 장치에서 사용하기 위한 반복 학습 방법 |
TW098106449A TWI418947B (zh) | 2008-02-29 | 2009-02-27 | 包含反覆學習電路的位置控制設備,曝光設備,製造裝置的方法,及用於具有包含學習過濾器之反覆學習電路的位置控制設備中的反覆學習方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008050126A JP5279299B2 (ja) | 2008-02-29 | 2008-02-29 | 反復学習制御回路を備える位置制御装置、露光装置及びデバイス製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009205641A JP2009205641A (ja) | 2009-09-10 |
JP5279299B2 true JP5279299B2 (ja) | 2013-09-04 |
Family
ID=40436314
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008050126A Expired - Fee Related JP5279299B2 (ja) | 2008-02-29 | 2008-02-29 | 反復学習制御回路を備える位置制御装置、露光装置及びデバイス製造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US8676355B2 (ja) |
EP (1) | EP2096494B1 (ja) |
JP (1) | JP5279299B2 (ja) |
KR (1) | KR101068319B1 (ja) |
TW (1) | TWI418947B (ja) |
Families Citing this family (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2485380B8 (en) * | 2009-09-30 | 2017-09-20 | Mitsubishi Electric Corporation | Dc/dc converter control device |
JP4850956B2 (ja) * | 2010-02-19 | 2012-01-11 | ファナック株式会社 | 学習制御機能を備えたロボット |
CN102163047B (zh) * | 2010-02-19 | 2014-02-12 | 发那科株式会社 | 学习控制机器人 |
NL2006981A (en) | 2010-07-26 | 2012-01-30 | Asml Netherlands Bv | Position control system, lithographic apparatus, and method to control a position of a movable object. |
EP2732341B1 (en) * | 2011-07-11 | 2016-11-30 | Mapper Lithography IP B.V. | Lithography system and method for storing positional data of a target |
US20130116814A1 (en) * | 2011-11-07 | 2013-05-09 | Nikon Corporation | Feedforward control adjusted with iterative learning |
US9329584B2 (en) | 2011-12-15 | 2016-05-03 | International Business Machines Corporation | Method, system and program for constructing a controller |
AT512977B1 (de) * | 2013-05-22 | 2014-12-15 | Avl List Gmbh | Methode zur Ermittlung eines Modells einer Ausgangsgröße eines technischen Systems |
JP6216545B2 (ja) * | 2013-06-17 | 2017-10-18 | ヤマハ発動機株式会社 | 自律走行車両、車両の自律走行システム及び自律走行車両の制御方法 |
WO2015062791A1 (en) * | 2013-10-30 | 2015-05-07 | Asml Netherlands B.V. | Object positioning in lithography |
JP6362024B2 (ja) * | 2014-04-14 | 2018-07-25 | 株式会社ニコン | 駆動システム及び駆動方法、露光装置及び露光方法、並びにデバイス製造方法 |
US10451977B2 (en) | 2014-12-02 | 2019-10-22 | Asml Netherlands B.V. | Lithographic method and apparatus |
CN104503244A (zh) * | 2014-12-29 | 2015-04-08 | 中国科学技术大学 | 基于非重复性扰动观测器的精密定位选择性ilc系统及方法 |
JP6617771B2 (ja) * | 2015-06-02 | 2019-12-11 | 日本電気株式会社 | 線形パラメータ変動モデル推定システム、方法およびプログラム |
WO2017050523A1 (en) | 2015-09-24 | 2017-03-30 | Asml Netherlands B.V. | Method of reducing effects of reticle heating and/or cooling in a lithographic process |
EP3377432B1 (en) * | 2015-11-16 | 2022-01-12 | KONE Corporation | A method and an apparatus for determining an allocation decision for at least one elevator |
CN107045286A (zh) * | 2017-04-28 | 2017-08-15 | 青岛科技大学 | 基于知识增强和重复学习的高效率自适应控制方法 |
WO2019069649A1 (ja) | 2017-10-06 | 2019-04-11 | キヤノン株式会社 | 制御装置、リソグラフィ装置、測定装置、加工装置、平坦化装置及び物品製造方法 |
JP7229686B2 (ja) * | 2017-10-06 | 2023-02-28 | キヤノン株式会社 | 制御装置、リソグラフィ装置、測定装置、加工装置、平坦化装置及び物品製造方法 |
CN108563123B (zh) * | 2018-04-16 | 2021-04-06 | 东南大学 | 直线电机x-y的自适应迭代学习鲁棒控制系统及设计方法 |
DE112018000172B4 (de) * | 2018-07-05 | 2020-09-24 | Mitsubishi Electric Corporation | Numerische Steuervorrichtung |
JP6740290B2 (ja) * | 2018-07-17 | 2020-08-12 | ファナック株式会社 | 機械学習装置、制御装置、及び機械学習方法 |
CN110412866B (zh) * | 2019-05-14 | 2022-12-23 | 上海大学 | 基于自适应迭代学习的外骨骼单腿协同控制方法 |
KR102236802B1 (ko) | 2019-11-25 | 2021-04-06 | 건국대학교 산학협력단 | 진단 모델용 데이터의 특징 추출 장치 및 방법 |
CN111142550B (zh) * | 2020-01-09 | 2021-07-27 | 上海交通大学 | 民用飞机辅助驾驶控制方法、系统及飞行品质评估方法 |
JP2022011044A (ja) | 2020-06-29 | 2022-01-17 | キヤノン株式会社 | 管理装置、リソグラフィー装置、管理方法および物品製造方法 |
KR102375355B1 (ko) * | 2020-11-20 | 2022-03-16 | 강릉원주대학교 산학협력단 | 전자 장치에 의해 수행되는 고정밀 위치 제어를 위한 강인한 최적 외란 관측기를 포함하는 시스템 및 제어 방법 |
CN112636719B (zh) * | 2020-12-17 | 2023-10-13 | 郑州轻工业大学 | 数据丢失和信道噪声干扰下的ilc系统输入信号滤波方法 |
CN114690754B (zh) * | 2020-12-25 | 2024-02-09 | 天津大学 | 重复作业式无人车迭代学习自趋优的循迹控制算法 |
CN112947090B (zh) * | 2021-03-23 | 2023-05-26 | 河南理工大学 | 一种dos攻击下轮式机器人数据驱动迭代学习控制方法 |
CN114185274B (zh) * | 2021-12-06 | 2023-07-04 | 东北大学 | 基于迭代学习的钢铁生产过程重复性误差补偿控制方法 |
CN116774585B (zh) * | 2023-06-25 | 2023-11-14 | 哈尔滨工业大学 | 一种纳米精度运动台学习控制系统及方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6267876B1 (en) * | 1998-07-31 | 2001-07-31 | Trinity Flywheel Power | Control of magnetic bearing-supported rotors |
KR100408288B1 (ko) * | 2001-06-20 | 2003-12-03 | 삼성전자주식회사 | 편심 보상을 위한 디스크 드라이브 서보 시스템 및 외란보상 방법 |
US7181296B2 (en) * | 2003-08-06 | 2007-02-20 | Asml Netherlands B.V. | Method of adaptive interactive learning control and a lithographic manufacturing process and apparatus employing such a method |
JP4400745B2 (ja) * | 2003-11-28 | 2010-01-20 | 株式会社ニコン | 露光方法及びデバイス製造方法、露光装置、並びにプログラム |
US20070081133A1 (en) * | 2004-12-14 | 2007-04-12 | Niikon Corporation | Projection exposure apparatus and stage unit, and exposure method |
KR100605914B1 (ko) * | 2004-07-06 | 2006-08-02 | 동부일렉트로닉스 주식회사 | 리소그래피 공정의 오버레이 향상 방법 |
JP2006140204A (ja) | 2004-11-10 | 2006-06-01 | Nikon Corp | 計測条件の最適化方法、該最適化方法を使用した位置計測方法、該位置計測方法を使用した位置合わせ方法、該位置合わせ方法を使用したデバイス製造方法、計測条件の最適化システム、該最適化システムを使用した位置計測装置及び該位置計測装置を使用した露光装置 |
US7379156B2 (en) * | 2004-12-29 | 2008-05-27 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
KR100765491B1 (ko) | 2006-08-16 | 2007-10-09 | 에이엠테크놀로지 주식회사 | 웨이퍼 자동 정렬 방법 |
-
2008
- 2008-02-29 JP JP2008050126A patent/JP5279299B2/ja not_active Expired - Fee Related
-
2009
- 2009-02-24 EP EP09002581.8A patent/EP2096494B1/en not_active Not-in-force
- 2009-02-26 US US12/393,871 patent/US8676355B2/en not_active Expired - Fee Related
- 2009-02-27 TW TW098106449A patent/TWI418947B/zh not_active IP Right Cessation
- 2009-02-27 KR KR1020090016881A patent/KR101068319B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
JP2009205641A (ja) | 2009-09-10 |
TWI418947B (zh) | 2013-12-11 |
EP2096494B1 (en) | 2018-01-03 |
KR20090093879A (ko) | 2009-09-02 |
KR101068319B1 (ko) | 2011-09-28 |
US8676355B2 (en) | 2014-03-18 |
US20090222109A1 (en) | 2009-09-03 |
TW201001086A (en) | 2010-01-01 |
EP2096494A1 (en) | 2009-09-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5279299B2 (ja) | 反復学習制御回路を備える位置制御装置、露光装置及びデバイス製造方法 | |
US7818073B2 (en) | Method for obtaining improved feedforward data, a lithographic apparatus for carrying out the method and a device manufacturing method | |
US7868577B2 (en) | Electric motor control apparatus | |
JP2009245419A (ja) | システム制御装置及びシステム制御方法 | |
JP2017538156A (ja) | リソグラフィ方法及び装置 | |
Huang et al. | Iterative learning control of inhomogeneous distributed parameter systems—Frequency domain design and analysis | |
JP2005135186A (ja) | 規範モデル追従型制御システム及び規範モデル追従型制御方法 | |
CA2411378A1 (en) | Multi-variable matrix process control | |
US20080200998A1 (en) | Lithographic apparatus and device manufacturing method | |
JP7293905B2 (ja) | 摩擦補償装置 | |
JP2009245420A (ja) | システムを制御するための装置および方法 | |
Tang et al. | A review on control methodologies of disturbance rejections in optical telescope | |
Heertjes et al. | Self-tuning of a switching controller for scanning motion systems | |
Dey et al. | A simple nonlinear PD controller for integrating processes | |
US11241786B2 (en) | Servo control device, robot, and servo control method | |
Hunnekens et al. | Performance optimization of piecewise affine variable-gain controllers for linear motion systems | |
CN113179044B (zh) | 一种压电陶瓷驱动器的迟滞补偿方法、系统及定位设备 | |
JP5017984B2 (ja) | サーボ制御装置とその速度追従制御方法 | |
CN116643468B (zh) | 一种光刻机工件台的内外扰动在线观测方法及相关装置 | |
Subramanian et al. | A model-based inferential feedforward approach to deal with hysteresis in a motion system | |
CN116819966B (zh) | 一种光刻机工件台的自抗扰运动控制方法及相关装置 | |
US9762167B2 (en) | Computer-readable storage medium, generating method, generating apparatus, driving apparatus, processing apparatus, lithography apparatus, and method of manufacturing article | |
US20080281438A1 (en) | Critical dimension estimation | |
JP2000039921A (ja) | 位置決め制御装置 | |
JP2006042473A (ja) | 電動機制御システムの自律設計方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20100201 |
|
RD01 | Notification of change of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7421 Effective date: 20100630 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20110228 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120515 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20120516 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120717 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130205 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130408 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20130423 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20130521 |
|
R151 | Written notification of patent or utility model registration |
Ref document number: 5279299 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R151 |
|
LAPS | Cancellation because of no payment of annual fees |