JP5274603B2 - 複合銅微粉 - Google Patents
複合銅微粉 Download PDFInfo
- Publication number
- JP5274603B2 JP5274603B2 JP2011041211A JP2011041211A JP5274603B2 JP 5274603 B2 JP5274603 B2 JP 5274603B2 JP 2011041211 A JP2011041211 A JP 2011041211A JP 2011041211 A JP2011041211 A JP 2011041211A JP 5274603 B2 JP5274603 B2 JP 5274603B2
- Authority
- JP
- Japan
- Prior art keywords
- fine powder
- copper fine
- copper
- refractory metal
- composite copper
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title claims description 93
- 229910052802 copper Inorganic materials 0.000 title claims description 90
- 239000010949 copper Substances 0.000 title claims description 90
- 239000000843 powder Substances 0.000 title claims description 75
- 239000002131 composite material Substances 0.000 title claims description 49
- 239000002245 particle Substances 0.000 claims description 42
- 239000003870 refractory metal Substances 0.000 claims description 31
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 18
- 229910052721 tungsten Inorganic materials 0.000 claims description 18
- 239000010937 tungsten Substances 0.000 claims description 18
- 239000010419 fine particle Substances 0.000 claims description 12
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 5
- 229910052750 molybdenum Inorganic materials 0.000 claims description 5
- 239000011733 molybdenum Substances 0.000 claims description 5
- 229910052715 tantalum Inorganic materials 0.000 claims description 5
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 5
- 238000005191 phase separation Methods 0.000 claims description 3
- 239000003985 ceramic capacitor Substances 0.000 description 15
- 238000010304 firing Methods 0.000 description 15
- 229910052751 metal Inorganic materials 0.000 description 15
- 239000002184 metal Substances 0.000 description 15
- 239000007789 gas Substances 0.000 description 14
- 238000000034 method Methods 0.000 description 13
- 238000005245 sintering Methods 0.000 description 11
- 238000002844 melting Methods 0.000 description 8
- 230000008018 melting Effects 0.000 description 8
- 239000002994 raw material Substances 0.000 description 8
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 230000032798 delamination Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 239000011261 inert gas Substances 0.000 description 6
- 239000012298 atmosphere Substances 0.000 description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 5
- 239000007772 electrode material Substances 0.000 description 5
- 150000002736 metal compounds Chemical class 0.000 description 5
- 230000003647 oxidation Effects 0.000 description 5
- 238000007254 oxidation reaction Methods 0.000 description 5
- 239000001301 oxygen Substances 0.000 description 5
- 229910052760 oxygen Inorganic materials 0.000 description 5
- 239000012071 phase Substances 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 239000005749 Copper compound Substances 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 150000001880 copper compounds Chemical class 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 3
- QGLKJKCYBOYXKC-UHFFFAOYSA-N nonaoxidotritungsten Chemical compound O=[W]1(=O)O[W](=O)(=O)O[W](=O)(=O)O1 QGLKJKCYBOYXKC-UHFFFAOYSA-N 0.000 description 3
- 238000011084 recovery Methods 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 229910001930 tungsten oxide Inorganic materials 0.000 description 3
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 2
- 239000005751 Copper oxide Substances 0.000 description 2
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000009835 boiling Methods 0.000 description 2
- 229910052791 calcium Inorganic materials 0.000 description 2
- 239000011575 calcium Substances 0.000 description 2
- 229910000431 copper oxide Inorganic materials 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000007791 liquid phase Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000008188 pellet Substances 0.000 description 2
- ZNOKGRXACCSDPY-UHFFFAOYSA-N tungsten trioxide Chemical compound O=[W](=O)=O ZNOKGRXACCSDPY-UHFFFAOYSA-N 0.000 description 2
- 230000008016 vaporization Effects 0.000 description 2
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 239000006243 Fine Thermal Substances 0.000 description 1
- 229910001111 Fine metal Inorganic materials 0.000 description 1
- 229910002367 SrTiO Inorganic materials 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000012300 argon atmosphere Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 238000005065 mining Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- SWELZOZIOHGSPA-UHFFFAOYSA-N palladium silver Chemical compound [Pd].[Ag] SWELZOZIOHGSPA-UHFFFAOYSA-N 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 230000000930 thermomechanical effect Effects 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
Images
Description
上記実施例と同じ条件で、銅粉末のみを気化・凝縮させて、試料5の純銅微粉を得た。得られた試料5の純銅微粉について、実施例と同様に測定した平均粒径と熱収縮開始温度を、下記表1に示した。純銅微粉の場合は、タングステンを添加した場合より粒成長が起こり、平均粒径は111nmであった。また、熱収縮開始温度は実施例の複合銅微粉よりも低く、340℃であった。
2 プラズマガス供給口
3 シースガス供給口
4 原料粉末供給口
5 プラズマ炎
6 プラズマ尾炎部
7 反応チャンバー
8 冷却チャンバー
9 回収装置
Claims (4)
- 銅と1〜20重量%の高融点金属とからなり、該高融点金属がタングステン、モリブデン、タンタルから選ばれた少なくとも1種であり、平均粒径が10〜100nmであって、熱プラズマ尾炎部で凝縮した溶融状態から二相分離して析出した該高融点金属が銅微粒子表面に粒子状態ないしは膜状態で存在することを特徴とする複合銅微粉。
- 前記粒子状態で存在する高融点金属の粒子径が1〜20nmであることを特徴とする、請求項1に記載の複合銅微粉。
- 前記膜状態で存在する高融点金属の膜厚が1〜10nmであることを特徴とする、請求項1に記載の複合銅微粉。
- 熱収縮開始温度が400℃以上900℃以下であることを特徴とする、請求項1〜3のいずれかに記載の複合銅微粉。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011041211A JP5274603B2 (ja) | 2011-02-28 | 2011-02-28 | 複合銅微粉 |
Applications Claiming Priority (1)
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---|---|---|---|
JP2011041211A JP5274603B2 (ja) | 2011-02-28 | 2011-02-28 | 複合銅微粉 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006035552A Division JP4731347B2 (ja) | 2006-02-13 | 2006-02-13 | 複合銅微粉の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011153381A JP2011153381A (ja) | 2011-08-11 |
JP5274603B2 true JP5274603B2 (ja) | 2013-08-28 |
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JP2011041211A Expired - Fee Related JP5274603B2 (ja) | 2011-02-28 | 2011-02-28 | 複合銅微粉 |
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JP (1) | JP5274603B2 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN113178328B (zh) * | 2021-03-30 | 2023-04-25 | 大连海外华昇电子科技有限公司 | 一种多层陶瓷电容器用铜内电极导电浆料及其应用 |
CN115094265B (zh) * | 2022-07-22 | 2022-11-11 | 合肥工业大学 | 一种钨/金属氧化物颗粒复相强化铜基复合材料及其制备方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002275511A (ja) * | 2001-03-15 | 2002-09-25 | Murata Mfg Co Ltd | 金属粉末の製造方法、金属粉末、導電性ペーストならびに積層セラミック電子部品 |
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2011
- 2011-02-28 JP JP2011041211A patent/JP5274603B2/ja not_active Expired - Fee Related
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