JP5271820B2 - 光学部品保持部材およびその作製方法 - Google Patents
光学部品保持部材およびその作製方法 Download PDFInfo
- Publication number
- JP5271820B2 JP5271820B2 JP2009140331A JP2009140331A JP5271820B2 JP 5271820 B2 JP5271820 B2 JP 5271820B2 JP 2009140331 A JP2009140331 A JP 2009140331A JP 2009140331 A JP2009140331 A JP 2009140331A JP 5271820 B2 JP5271820 B2 JP 5271820B2
- Authority
- JP
- Japan
- Prior art keywords
- powder
- holding member
- silicon
- optical component
- composite material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 36
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 9
- 239000000919 ceramic Substances 0.000 claims abstract description 37
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 23
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims abstract description 23
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 23
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 16
- 239000002131 composite material Substances 0.000 claims abstract description 15
- 229910010271 silicon carbide Inorganic materials 0.000 claims abstract description 13
- 238000000034 method Methods 0.000 claims abstract description 8
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 8
- 238000005121 nitriding Methods 0.000 claims abstract description 7
- 150000002506 iron compounds Chemical class 0.000 claims abstract description 6
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 claims description 48
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 26
- 239000000463 material Substances 0.000 claims description 26
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 18
- 239000000843 powder Substances 0.000 claims description 16
- 239000011863 silicon-based powder Substances 0.000 claims description 11
- 238000009423 ventilation Methods 0.000 claims description 8
- 239000011153 ceramic matrix composite Substances 0.000 claims description 7
- 238000001746 injection moulding Methods 0.000 claims description 4
- 239000011812 mixed powder Substances 0.000 claims description 4
- 238000005273 aeration Methods 0.000 claims description 3
- 229910052742 iron Inorganic materials 0.000 claims 1
- 150000004767 nitrides Chemical class 0.000 claims 1
- 229910021332 silicide Inorganic materials 0.000 claims 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 abstract description 16
- 239000010703 silicon Substances 0.000 abstract description 16
- 238000009833 condensation Methods 0.000 abstract description 10
- 230000005494 condensation Effects 0.000 abstract description 9
- 230000035699 permeability Effects 0.000 abstract description 7
- 239000002994 raw material Substances 0.000 description 6
- 239000011230 binding agent Substances 0.000 description 4
- 238000005245 sintering Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 238000005238 degreasing Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 229910052878 cordierite Inorganic materials 0.000 description 2
- JSKIRARMQDRGJZ-UHFFFAOYSA-N dimagnesium dioxido-bis[(1-oxido-3-oxo-2,4,6,8,9-pentaoxa-1,3-disila-5,7-dialuminabicyclo[3.3.1]nonan-7-yl)oxy]silane Chemical compound [Mg++].[Mg++].[O-][Si]([O-])(O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2)O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2 JSKIRARMQDRGJZ-UHFFFAOYSA-N 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- XUIMIQQOPSSXEZ-NJFSPNSNSA-N silicon-30 atom Chemical compound [30Si] XUIMIQQOPSSXEZ-NJFSPNSNSA-N 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000013022 venting Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/001—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Ceramic Products (AREA)
- Lens Barrels (AREA)
Description
上記窒化ケイ素セラミックス基複合材料中に炭化ケイ素および鉄化合物を含有し、その窒化ケイ素基セラミックスの厚さ1mmのサンプルの両面間に気圧差0.4MPaの気圧を加えたときの有効通気面積1.5cm2での1分間あたりの通気量が50ミリリットル以上であることを特徴とする。
上記光学部品保持部材を得るためには、ケイ素粉末に対して炭化ケイ素及び鉄化合物粉末を混合、成形後に窒素中にて主成分のケイ素を窒化せしめる工程を経ることで、それらの含有量に応じて通気量がコントロールされた窒化ケイ素セラミックス基複合材料が作製される。
10 レンズホルダ
11 ホルダキャップ
100 中空部
101 対物側開口
110 装着側開口
L1〜L4 レンズ
SP1〜SP3 間隔環
SR1 雄ネジ
Claims (4)
- 窒化ケイ素セラミックス基複合材料からなる、光学部品を保持するための光学部品保持部材であって、
前記窒化ケイ素セラミックス基複合材料中に炭化ケイ素および鉄化合物を含有し、該窒化ケイ素セラミックス基複合材の厚さ1mmのサンプルの両面間に気圧差0.4MPaの気圧を加えたときの有効通気面積1.5cm2での1分間あたりの通気量が50ミリリットル以上であり、
前記窒化ケイ素セラミックス基複合材料は、ケイ素粉末に対して、30mass%の炭化ケイ素粉末を添加し、さらに、それらケイ素粉末と炭化ケイ素粉末の総和に対して5mass%以下の酸化鉄Fe 3 O 4 粉末を添加して混合し、得られた混合粉末を用いて成形体を作製、窒素と反応させ窒化せしめる工程を経て作製されるものであることを特徴とする光学部品保持部材。 - 前記窒化ケイ素セラミックス基複合材料中に含まれる鉄化合物がケイ化鉄であることを特徴とする請求項1記載の光学部品保持部材。
- ケイ素粉末に対して、30mass%の炭化ケイ素粉末を添加し、さらに、それらケイ素粉末と炭化ケイ素粉末の総和に対して5mass%以下の酸化鉄Fe 3 O 4 粉末を添加して混合し、得られた混合粉末を用いて成形体を作製、窒素と反応させ窒化せしめる工程を経て作製される窒化ケイ素セラミックス基複合材料からなる光学部品保持部材において、前記窒化ケイ素セラミックス基複合材料からなる光学部品保持部材の厚さ1mmのサンプルの両面間に気圧差0.4MPaの気圧を加えたときの有効通気面積1.5cm2での1分間あたりの通気量が50ミリリットル以上である窒化ケイ素セラミックス基複合材料からなる光学部品保持部材を作製することを特徴とする光学部品保持部材の作製方法。
- 前記混合粉末を用いて、射出成形により成形体を作製することを特徴とする請求項3記載の光学部品保持部材の作製方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009140331A JP5271820B2 (ja) | 2009-06-11 | 2009-06-11 | 光学部品保持部材およびその作製方法 |
US12/782,219 US7952820B2 (en) | 2009-06-11 | 2010-05-18 | Optical part holding member and production method thereof |
EP10165063.8A EP2261715B1 (en) | 2009-06-11 | 2010-06-07 | Method of producing an optical part holding member |
CN201010200106.8A CN101962296B (zh) | 2009-06-11 | 2010-06-08 | 光学部件保持构件及其制造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009140331A JP5271820B2 (ja) | 2009-06-11 | 2009-06-11 | 光学部品保持部材およびその作製方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010285314A JP2010285314A (ja) | 2010-12-24 |
JP5271820B2 true JP5271820B2 (ja) | 2013-08-21 |
Family
ID=42674575
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009140331A Active JP5271820B2 (ja) | 2009-06-11 | 2009-06-11 | 光学部品保持部材およびその作製方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7952820B2 (ja) |
EP (1) | EP2261715B1 (ja) |
JP (1) | JP5271820B2 (ja) |
CN (1) | CN101962296B (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8916090B2 (en) * | 2011-07-07 | 2014-12-23 | Karl Storz Imaging, Inc. | Endoscopic camera component manufacturing method |
JP6772622B2 (ja) * | 2016-07-27 | 2020-10-21 | 日亜化学工業株式会社 | 光源装置 |
CN112684651B (zh) * | 2020-03-20 | 2022-08-02 | 江西联创电子有限公司 | 一种附加镜头 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3007287U (ja) * | 1994-07-18 | 1995-02-14 | 株式会社リボール | 浴室の結露防止天井装置 |
JPH11343168A (ja) | 1998-05-29 | 1999-12-14 | Kyocera Corp | 低熱膨張黒色セラミックス及びその製造方法、並びに半導体製造装置用部材 |
US6265334B1 (en) * | 1997-10-24 | 2001-07-24 | Kyocera Corporation | Ceramic sintered product and process for producing the same |
JP4809987B2 (ja) * | 2000-03-30 | 2011-11-09 | キヤノン株式会社 | 光学要素の支持構造、それを用いた露光装置及び半導体デバイスの製造方法 |
JP4446611B2 (ja) | 2001-01-24 | 2010-04-07 | 株式会社フェローテックセラミックス | 黒色低熱膨張セラミックスおよび露光装置用部材 |
EP1323684B9 (en) * | 2000-09-20 | 2010-03-03 | Ferrotec Ceramics Corporation | Low thermal expansion ceramic and member for exposure system |
JP2002336190A (ja) * | 2001-03-12 | 2002-11-26 | Olympus Optical Co Ltd | 内視鏡 |
WO2003098724A1 (fr) * | 2002-05-22 | 2003-11-27 | Nippon Shokubai Co., Ltd. | Substrat support d'electrode utilise comme pile a combustible de type oxyde solide et son procede de production |
JP2003343966A (ja) * | 2002-05-27 | 2003-12-03 | Sharp Corp | 冷凍冷蔵庫 |
JP2004184882A (ja) * | 2002-12-06 | 2004-07-02 | Taiheiyo Cement Corp | 光学用部材 |
JP4379598B2 (ja) | 2004-06-30 | 2009-12-09 | オムロン株式会社 | 防水型視覚センサ |
JP2006350187A (ja) | 2005-06-20 | 2006-12-28 | Auto Network Gijutsu Kenkyusho:Kk | カメラ装置 |
TWI372271B (en) * | 2005-09-13 | 2012-09-11 | Zeiss Carl Smt Gmbh | Optical element unit, optical element holder, method of manufacturing an optical element holder, optical element module, optical exposure apparatus, and method of manufacturing a semiconductor device |
US7749931B2 (en) | 2006-02-13 | 2010-07-06 | Fujifilm Corporation | Ceramic optical parts and production methods thereof |
JP4904465B2 (ja) * | 2006-02-13 | 2012-03-28 | 独立行政法人産業技術総合研究所 | セラミックス光学部品及びその製造方法 |
JP5458246B2 (ja) * | 2009-06-11 | 2014-04-02 | 富士フイルム株式会社 | 光学部品保持部材およびその作製方法 |
-
2009
- 2009-06-11 JP JP2009140331A patent/JP5271820B2/ja active Active
-
2010
- 2010-05-18 US US12/782,219 patent/US7952820B2/en active Active
- 2010-06-07 EP EP10165063.8A patent/EP2261715B1/en not_active Not-in-force
- 2010-06-08 CN CN201010200106.8A patent/CN101962296B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
EP2261715B1 (en) | 2014-08-13 |
CN101962296A (zh) | 2011-02-02 |
EP2261715A1 (en) | 2010-12-15 |
US20100315728A1 (en) | 2010-12-16 |
JP2010285314A (ja) | 2010-12-24 |
US7952820B2 (en) | 2011-05-31 |
CN101962296B (zh) | 2013-08-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US7556676B2 (en) | Composite oxygen ion transport membrane | |
JP5271820B2 (ja) | 光学部品保持部材およびその作製方法 | |
US7749931B2 (en) | Ceramic optical parts and production methods thereof | |
US20020043734A1 (en) | Porous alumina and its fabrication procedures | |
CN110015910B (zh) | 烧成用承烧板 | |
JPH0223511B2 (ja) | ||
US8049976B2 (en) | Optical part holding member and production method thereof | |
CN110423113A (zh) | 一种使用钇稳定氧化锆材料制备陶瓷膜扩散层的制备方法及应用 | |
JPH06300907A (ja) | 炭化珪素焼結体を用いた光学用及びx線用部品及びその製造方法 | |
JP2014152053A (ja) | ガラス成型用型材 | |
US20040023789A1 (en) | Porous silicon nitride article and method for production thereof | |
JP2001151579A (ja) | SiC多孔体及びその製造方法 | |
KR100502815B1 (ko) | 이중 기공구조를 갖는 세라믹 다공질체 및 그 제조방법 | |
US20180207578A1 (en) | Hydrogen gas production device and hydrogen gas production method | |
JP2022141457A (ja) | 多孔質体およびその製造方法 | |
KR100584742B1 (ko) | 강도 및 윤활성이 우수한 질화붕소계 복합체 | |
JPH03199164A (ja) | 炭化ケイ素炭素複合セラミックス成形体の製造方法 | |
JP2021086925A (ja) | 基板保持部材及び真空吸着装置 | |
JP2002201083A (ja) | セラミックス多孔体及びその製造方法 | |
JPH05139845A (ja) | ホウ化チタン焼結体の製造方法 | |
JP2016023131A (ja) | 管状体およびその製造方法 | |
KR100914632B1 (ko) | 니켈 옥사이드 소결체의 제조방법 | |
JPH0687664A (ja) | 窒化珪素焼結体の製造方法 | |
JPS6046972A (ja) | 炭化ケイ素焼結体の製造法 | |
JPH04210405A (ja) | 金属粉末成形体焼成用棚板 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120105 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20120124 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20121129 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20121211 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130208 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20130423 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20130513 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 Ref document number: 5271820 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |