JP5252739B2 - 真空圧力測定装置 - Google Patents

真空圧力測定装置 Download PDF

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Publication number
JP5252739B2
JP5252739B2 JP2009539582A JP2009539582A JP5252739B2 JP 5252739 B2 JP5252739 B2 JP 5252739B2 JP 2009539582 A JP2009539582 A JP 2009539582A JP 2009539582 A JP2009539582 A JP 2009539582A JP 5252739 B2 JP5252739 B2 JP 5252739B2
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JP
Japan
Prior art keywords
vacuum
measuring device
pressure measuring
vacuum pressure
cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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JP2009539582A
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English (en)
Japanese (ja)
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JP2010511875A5 (https=
JP2010511875A (ja
Inventor
クナップ，ボルフラム
ビュエスト，マルティン
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Inficon GmbH Deutschland
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Inficon GmbH Deutschland
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Publication of JP2010511875A publication Critical patent/JP2010511875A/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G01L21/32—Vacuum gauges by making use of ionisation effects using electric discharge tubes with thermionic cathodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G01L21/34—Vacuum gauges by making use of ionisation effects using electric discharge tubes with cold cathodes

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP2009539582A 2006-12-06 2007-11-23 真空圧力測定装置 Expired - Fee Related JP5252739B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CH19832006 2006-12-06
CH1983/06 2006-12-06
PCT/CH2007/000588 WO2008067681A1 (de) 2006-12-06 2007-11-23 Elektronenquelle für vakuumdruckmessgerät

Publications (3)

Publication Number Publication Date
JP2010511875A JP2010511875A (ja) 2010-04-15
JP2010511875A5 JP2010511875A5 (https=) 2010-12-16
JP5252739B2 true JP5252739B2 (ja) 2013-07-31

Family

ID=37840464

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009539582A Expired - Fee Related JP5252739B2 (ja) 2006-12-06 2007-11-23 真空圧力測定装置

Country Status (5)

Country Link
US (1) US8018234B2 (https=)
JP (1) JP5252739B2 (https=)
DE (1) DE112007002399B4 (https=)
GB (1) GB2457831B (https=)
WO (1) WO2008067681A1 (https=)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7845235B2 (en) 2007-11-06 2010-12-07 Costin Sandu Non-invasive system and method for measuring vacuum pressure in a fluid
DE102008003676B4 (de) * 2008-01-09 2011-07-21 Bruker Daltonik GmbH, 28359 Ionenmobilitätsspektrometer mit einer nicht radioaktiven Elektronenquelle
DE102008032333A1 (de) * 2008-07-09 2010-06-10 Drägerwerk AG & Co. KGaA Miniaturisierter nicht-radioaktiver Elektronenemitter
WO2012091715A1 (en) 2010-12-30 2012-07-05 Utc Fire & Security Corporation Ionization window
DE102011055089B4 (de) * 2011-11-07 2014-10-09 Gsi Helmholtzzentrum Für Schwerionenforschung Gmbh Messvorrichtung
US11406415B2 (en) 2012-06-11 2022-08-09 Tenex Health, Inc. Systems and methods for tissue treatment
WO2014014742A1 (en) * 2012-07-17 2014-01-23 Fergenson David Phillip System for and techniques of manufacturing a monolithic analytical instrument
US9962181B2 (en) 2014-09-02 2018-05-08 Tenex Health, Inc. Subcutaneous wound debridement
US10692692B2 (en) * 2015-05-27 2020-06-23 Kla-Tencor Corporation System and method for providing a clean environment in an electron-optical system
US10545258B2 (en) * 2016-03-24 2020-01-28 Schlumberger Technology Corporation Charged particle emitter assembly for radiation generator
EP3998467B1 (en) * 2019-09-13 2024-01-03 Canon Anelva Corporation Ionization vacuum gauge and cartridge
US11976992B2 (en) * 2019-09-20 2024-05-07 Inficon ag Vacuum-tight electrical feedthrough
CN110702301B (zh) * 2019-11-19 2024-11-01 川北真空科技(北京)有限公司 一种薄膜真空计
CH719946A2 (de) * 2022-08-08 2024-02-15 Inficon ag Kammer für Ionisationsvakuummeter.

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60139241U (ja) * 1984-02-27 1985-09-14 日本原子力研究所 荷電粒子分析器の電離真空計
JP3324395B2 (ja) * 1995-10-31 2002-09-17 富士電機株式会社 電界型真空管とそれを用いた圧力センサ、加速度センサおよびそれらの製造方法
JP2003149069A (ja) * 2001-11-13 2003-05-21 Ishikawajima Harima Heavy Ind Co Ltd 真空スイッチ及びこれを用いた真空排気装置並びにイオン式真空計
ITTO20030627A1 (it) * 2003-08-08 2005-02-09 Varian Spa Vacuometro a ionizzazione.
ITTO20030626A1 (it) * 2003-08-08 2005-02-09 Varian Spa Vacuometro a ionizzazione.
US7030619B2 (en) * 2004-02-19 2006-04-18 Brooks Automation, Inc. Ionization gauge
US8182590B2 (en) * 2005-04-29 2012-05-22 University Of Rochester Ultrathin porous nanoscale membranes, methods of making, and uses thereof

Also Published As

Publication number Publication date
WO2008067681A1 (de) 2008-06-12
US20100066380A1 (en) 2010-03-18
US8018234B2 (en) 2011-09-13
GB2457831B (en) 2011-08-24
GB2457831A (en) 2009-09-02
DE112007002399A5 (de) 2009-10-22
DE112007002399B4 (de) 2014-02-06
GB0907151D0 (en) 2009-06-03
JP2010511875A (ja) 2010-04-15

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