DE112007002399B4 - Elektronenquelle für Vakuumdruckmessgerät - Google Patents

Elektronenquelle für Vakuumdruckmessgerät Download PDF

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Publication number
DE112007002399B4
DE112007002399B4 DE112007002399.6T DE112007002399T DE112007002399B4 DE 112007002399 B4 DE112007002399 B4 DE 112007002399B4 DE 112007002399 T DE112007002399 T DE 112007002399T DE 112007002399 B4 DE112007002399 B4 DE 112007002399B4
Authority
DE
Germany
Prior art keywords
vacuum
pressure gauge
vacuum pressure
nanomembrane
cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE112007002399.6T
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German (de)
English (en)
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DE112007002399A5 (de
Inventor
Wolfram Knapp
Martin Wüest
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inficon GmbH Deutschland
Original Assignee
Inficon GmbH Deutschland
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inficon GmbH Deutschland filed Critical Inficon GmbH Deutschland
Publication of DE112007002399A5 publication Critical patent/DE112007002399A5/de
Application granted granted Critical
Publication of DE112007002399B4 publication Critical patent/DE112007002399B4/de
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G01L21/32—Vacuum gauges by making use of ionisation effects using electric discharge tubes with thermionic cathodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G01L21/34—Vacuum gauges by making use of ionisation effects using electric discharge tubes with cold cathodes

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
DE112007002399.6T 2006-12-06 2007-11-23 Elektronenquelle für Vakuumdruckmessgerät Expired - Fee Related DE112007002399B4 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CH19832006 2006-12-06
CH1983/06 2006-12-06
PCT/CH2007/000588 WO2008067681A1 (de) 2006-12-06 2007-11-23 Elektronenquelle für vakuumdruckmessgerät

Publications (2)

Publication Number Publication Date
DE112007002399A5 DE112007002399A5 (de) 2009-10-22
DE112007002399B4 true DE112007002399B4 (de) 2014-02-06

Family

ID=37840464

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112007002399.6T Expired - Fee Related DE112007002399B4 (de) 2006-12-06 2007-11-23 Elektronenquelle für Vakuumdruckmessgerät

Country Status (5)

Country Link
US (1) US8018234B2 (https=)
JP (1) JP5252739B2 (https=)
DE (1) DE112007002399B4 (https=)
GB (1) GB2457831B (https=)
WO (1) WO2008067681A1 (https=)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7845235B2 (en) 2007-11-06 2010-12-07 Costin Sandu Non-invasive system and method for measuring vacuum pressure in a fluid
DE102008003676B4 (de) * 2008-01-09 2011-07-21 Bruker Daltonik GmbH, 28359 Ionenmobilitätsspektrometer mit einer nicht radioaktiven Elektronenquelle
DE102008032333A1 (de) * 2008-07-09 2010-06-10 Drägerwerk AG & Co. KGaA Miniaturisierter nicht-radioaktiver Elektronenemitter
WO2012091715A1 (en) 2010-12-30 2012-07-05 Utc Fire & Security Corporation Ionization window
DE102011055089B4 (de) * 2011-11-07 2014-10-09 Gsi Helmholtzzentrum Für Schwerionenforschung Gmbh Messvorrichtung
US11406415B2 (en) 2012-06-11 2022-08-09 Tenex Health, Inc. Systems and methods for tissue treatment
WO2014014742A1 (en) * 2012-07-17 2014-01-23 Fergenson David Phillip System for and techniques of manufacturing a monolithic analytical instrument
US9962181B2 (en) 2014-09-02 2018-05-08 Tenex Health, Inc. Subcutaneous wound debridement
US10692692B2 (en) * 2015-05-27 2020-06-23 Kla-Tencor Corporation System and method for providing a clean environment in an electron-optical system
US10545258B2 (en) * 2016-03-24 2020-01-28 Schlumberger Technology Corporation Charged particle emitter assembly for radiation generator
EP3998467B1 (en) * 2019-09-13 2024-01-03 Canon Anelva Corporation Ionization vacuum gauge and cartridge
US11976992B2 (en) * 2019-09-20 2024-05-07 Inficon ag Vacuum-tight electrical feedthrough
CN110702301B (zh) * 2019-11-19 2024-11-01 川北真空科技(北京)有限公司 一种薄膜真空计
CH719946A2 (de) * 2022-08-08 2024-02-15 Inficon ag Kammer für Ionisationsvakuummeter.

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050028602A1 (en) * 2003-08-08 2005-02-10 Raffaele Correale Ionisation vacuum gauge

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60139241U (ja) * 1984-02-27 1985-09-14 日本原子力研究所 荷電粒子分析器の電離真空計
JP3324395B2 (ja) * 1995-10-31 2002-09-17 富士電機株式会社 電界型真空管とそれを用いた圧力センサ、加速度センサおよびそれらの製造方法
JP2003149069A (ja) * 2001-11-13 2003-05-21 Ishikawajima Harima Heavy Ind Co Ltd 真空スイッチ及びこれを用いた真空排気装置並びにイオン式真空計
ITTO20030626A1 (it) * 2003-08-08 2005-02-09 Varian Spa Vacuometro a ionizzazione.
US7030619B2 (en) * 2004-02-19 2006-04-18 Brooks Automation, Inc. Ionization gauge
US8182590B2 (en) * 2005-04-29 2012-05-22 University Of Rochester Ultrathin porous nanoscale membranes, methods of making, and uses thereof

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050028602A1 (en) * 2003-08-08 2005-02-10 Raffaele Correale Ionisation vacuum gauge

Also Published As

Publication number Publication date
WO2008067681A1 (de) 2008-06-12
US20100066380A1 (en) 2010-03-18
US8018234B2 (en) 2011-09-13
JP5252739B2 (ja) 2013-07-31
GB2457831B (en) 2011-08-24
GB2457831A (en) 2009-09-02
DE112007002399A5 (de) 2009-10-22
GB0907151D0 (en) 2009-06-03
JP2010511875A (ja) 2010-04-15

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Effective date: 20141107

R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee