JP5243284B2 - 補正位置検出装置、補正位置検出方法及びボンディング装置 - Google Patents
補正位置検出装置、補正位置検出方法及びボンディング装置 Download PDFInfo
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Description
また、複数の半導体ダイがずれて多段に積層されているため、積層型半導体装置のズレ方向に沿って補正位置を粗検出することで、隣接するパターンとの位置関係が特定しやすくなり、より高精度に補正位置の並び順を特定することができる。
また、複数の半導体ダイがずれて多段に積層されているため、積層型半導体装置のズレ方向に沿って補正位置を粗検出することで、隣接するパターンとの位置関係が特定しやすくなり、より高精度に補正位置の並び順を特定することができる。
また、複数の半導体ダイがずれて多段に積層されているため、積層型半導体装置のズレ方向に沿って補正位置を粗検出することで、隣接するパターンとの位置関係が特定しやすくなり、より高精度に補正位置の並び順を特定することができる。
Claims (5)
- 所定のパターンが形成された半導体ダイが複数段に積層された積層型半導体装置におけるパターンの補正位置を検出する補正位置検出装置であって、
複数のパターンを撮像可能な低倍率撮像手段により撮像された画像に基づいてパターンの候補であるパターン候補を検出し、このパターン候補同士の位置関係と登録位置同士の位置関係に基づき積層型半導体装置のズレ方向に沿って補正位置を粗検出する粗検出手段と、
粗検出手段により粗検出された補正位置に基づいて、低倍率撮像手段よりも高倍率な高倍率撮像手段により撮像された画像から補正位置を検出する本検出手段と、
を有することを特徴とする補正位置検出装置。 - 粗検出手段は、パターン候補の並び順と登録位置の並び順とに基づいて補正位置を粗検出することを特徴とする請求項1に記載の補正位置検出装置。
- 粗検出手段は、所定のパターンモデルとのマッチング処理により、低倍率撮像手段により撮像された画像からパターン候補を検出することを特徴とする請求項1又は2に記載の補正位置検出装置。
- 所定のパターンが形成された半導体ダイが複数段に積層された積層型半導体装置におけるパターンの補正位置を検出する補正位置検出方法であって、
複数のパターンを撮像可能な低倍率撮像装置により撮像された画像に基づいてパターンの候補であるパターン候補を検出し、このパターン候補同士の位置関係と登録位置同士の位置関係に基づき積層型半導体装置のズレ方向に沿って補正位置を粗検出する粗検出ステップと、
粗検出ステップにより粗検出された補正位置に基づいて、低倍率撮像装置よりも高倍率な高倍率撮像装置により撮像された画像から補正位置を検出する本検出ステップと、
を有することを特徴とする補正位置検出方法。 - 所定のパターンが形成された半導体ダイが複数段に積層された積層型半導体装置にボンディングを行うボンディング装置であって、
パターンの補正位置を検出する補正位置検出装置を備え、
補正位置検出装置は、
複数のパターンを撮像可能な低倍率撮像手段により撮像された画像に基づいてパターンの候補であるパターン候補を検出し、このパターン候補同士の位置関係と登録位置同士の位置関係に基づき積層型半導体装置のズレ方向に沿って補正位置を粗検出する粗検出手段と、
粗検出手段により粗検出された補正位置に基づいて、低倍率撮像手段よりも高倍率な高倍率撮像手段により撮像された画像から補正位置を検出する本検出手段と、
を有することを特徴とするボンディング装置。
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JP2009019627A JP5243284B2 (ja) | 2009-01-30 | 2009-01-30 | 補正位置検出装置、補正位置検出方法及びボンディング装置 |
PCT/JP2010/050006 WO2010087213A1 (ja) | 2009-01-30 | 2010-01-04 | 補正位置検出装置、補正位置検出方法及びボンディング装置 |
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JP2005101143A (ja) * | 2003-09-24 | 2005-04-14 | Matsushita Electric Ind Co Ltd | 半導体装置の製造方法および製造装置 |
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KR102041310B1 (ko) | 2017-08-02 | 2019-11-07 | 세메스 주식회사 | 기판 처리 장치 및 기판의 안착 상태 판단 방법 |
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