JP5233221B2 - アクチュエータ、光スキャナ、および画像形成装置 - Google Patents
アクチュエータ、光スキャナ、および画像形成装置 Download PDFInfo
- Publication number
- JP5233221B2 JP5233221B2 JP2007246298A JP2007246298A JP5233221B2 JP 5233221 B2 JP5233221 B2 JP 5233221B2 JP 2007246298 A JP2007246298 A JP 2007246298A JP 2007246298 A JP2007246298 A JP 2007246298A JP 5233221 B2 JP5233221 B2 JP 5233221B2
- Authority
- JP
- Japan
- Prior art keywords
- shaft member
- wiring
- resin layer
- movable plate
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003287 optical effect Effects 0.000 title claims description 29
- 229920005989 resin Polymers 0.000 claims description 72
- 239000011347 resin Substances 0.000 claims description 72
- 229910052710 silicon Inorganic materials 0.000 claims description 13
- 239000010703 silicon Substances 0.000 claims description 13
- 229910052751 metal Inorganic materials 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 11
- 230000000694 effects Effects 0.000 claims description 9
- 238000012546 transfer Methods 0.000 description 35
- 238000000034 method Methods 0.000 description 19
- 238000001514 detection method Methods 0.000 description 13
- 239000000463 material Substances 0.000 description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 12
- 239000000758 substrate Substances 0.000 description 9
- 239000000470 constituent Substances 0.000 description 8
- 239000013078 crystal Substances 0.000 description 8
- 239000010408 film Substances 0.000 description 8
- 238000004140 cleaning Methods 0.000 description 6
- 230000005684 electric field Effects 0.000 description 6
- 238000005304 joining Methods 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 5
- 239000012535 impurity Substances 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- 238000011161 development Methods 0.000 description 4
- 238000003384 imaging method Methods 0.000 description 4
- 239000003086 colorant Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 108091008695 photoreceptors Proteins 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 230000002787 reinforcement Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229920001187 thermosetting polymer Polymers 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004640 Melamine resin Substances 0.000 description 1
- 229920000877 Melamine resin Polymers 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229920001807 Urea-formaldehyde Polymers 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000001579 optical reflectometry Methods 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 229920005749 polyurethane resin Polymers 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 238000007751 thermal spraying Methods 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
- 229920006337 unsaturated polyester resin Polymers 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Images
Landscapes
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Laser Beam Printer (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Facsimile Scanning Arrangements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007246298A JP5233221B2 (ja) | 2007-09-21 | 2007-09-21 | アクチュエータ、光スキャナ、および画像形成装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007246298A JP5233221B2 (ja) | 2007-09-21 | 2007-09-21 | アクチュエータ、光スキャナ、および画像形成装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009077595A JP2009077595A (ja) | 2009-04-09 |
| JP2009077595A5 JP2009077595A5 (enrdf_load_stackoverflow) | 2010-10-07 |
| JP5233221B2 true JP5233221B2 (ja) | 2013-07-10 |
Family
ID=40612028
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007246298A Expired - Fee Related JP5233221B2 (ja) | 2007-09-21 | 2007-09-21 | アクチュエータ、光スキャナ、および画像形成装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5233221B2 (enrdf_load_stackoverflow) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7986076B2 (en) | 2009-11-02 | 2011-07-26 | Toyota Motor Engineering & Manufacturing North America, Inc, | Energy harvesting device |
| DE102010029074B4 (de) * | 2010-05-18 | 2018-03-08 | Robert Bosch Gmbh | Anbindungsstruktur für Mikroschwingeneinrichtungen |
| WO2013076844A1 (ja) * | 2011-11-24 | 2013-05-30 | パイオニア株式会社 | アクチュエータ |
| JPWO2013136759A1 (ja) | 2012-03-15 | 2015-08-03 | パナソニックＩｐマネジメント株式会社 | 光学反射素子とアクチュエータ |
| WO2014002183A1 (ja) * | 2012-06-26 | 2014-01-03 | パイオニア株式会社 | アクチュエータ |
| JP2014102355A (ja) * | 2012-11-19 | 2014-06-05 | Stanley Electric Co Ltd | 光偏向器 |
| JP6092589B2 (ja) * | 2012-11-19 | 2017-03-08 | スタンレー電気株式会社 | 光偏向器 |
| JP6742860B2 (ja) * | 2016-08-24 | 2020-08-19 | キヤノン株式会社 | 振動型アクチュエータ及び電子機器 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10341580A (ja) * | 1997-06-10 | 1998-12-22 | Nikon Corp | 振動アクチュエータ |
| JP4147784B2 (ja) * | 2001-10-09 | 2008-09-10 | 富士通株式会社 | 角速度センサ |
| JP3733383B2 (ja) * | 2002-01-15 | 2006-01-11 | 日産自動車株式会社 | ２次元光スキャナ |
| JP2004354442A (ja) * | 2003-05-27 | 2004-12-16 | Mitsubishi Electric Corp | 電磁式ミラー装置及びその製造方法 |
| JP4749790B2 (ja) * | 2004-08-20 | 2011-08-17 | 佐々木 実 | マイクロミラーデバイスとその製造方法、マイクロミラーデバイスの角度計測方法、およびマイクロミラーデバイス応用装置 |
-
2007
- 2007-09-21 JP JP2007246298A patent/JP5233221B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2009077595A (ja) | 2009-04-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5233221B2 (ja) | アクチュエータ、光スキャナ、および画像形成装置 | |
| JP4241791B2 (ja) | アクチュエータ、光スキャナ、および画像形成装置 | |
| US7684102B2 (en) | Oscillator device and image forming apparatus using the same | |
| JP4337862B2 (ja) | 光学デバイス、光スキャナ、および画像形成装置 | |
| JP2007322466A (ja) | 光偏向器、及びそれを用いた光学機器 | |
| JP2005099760A (ja) | アクチュエータ | |
| JP2011107675A (ja) | 光偏向素子、光偏向器、及び画像形成装置 | |
| JP6743353B2 (ja) | 光偏向器、光走査装置、画像形成装置、画像投影装置及びヘッドアップディスプレイ | |
| JP2015132762A (ja) | 光偏向装置、画像形成装置、及び画像投影装置 | |
| JP4172627B2 (ja) | 振動ミラー、光書込装置及び画像形成装置 | |
| US8681408B2 (en) | Optical scanning device, image forming apparatus, and image projection device | |
| JP6682774B2 (ja) | 光偏向器、光走査装置、画像形成装置、画像投影装置、ヘッドアップディスプレイ装置、およびレーダ装置 | |
| JP2008070863A (ja) | 振動ミラー、光書込装置および画像形成装置 | |
| JP4983266B2 (ja) | 光学デバイス、光スキャナ、および画像形成装置 | |
| JP5023907B2 (ja) | アクチュエータ、光スキャナ、および画像形成装置 | |
| JP2007171929A (ja) | 揺動体装置、光偏向器、及びそれを用いた光学機器 | |
| JP5554895B2 (ja) | 揺動構造体、及び揺動構造体を用いた揺動体装置 | |
| JP6819330B2 (ja) | 光偏向器、光走査装置、画像形成装置及び画像投影装置 | |
| JP4525652B2 (ja) | アクチュエータ、光スキャナ、および画像形成装置 | |
| JP4910668B2 (ja) | 光学デバイス、光スキャナ、および画像形成装置 | |
| JP2014085547A (ja) | 圧電光偏向器、光走査装置、画像形成装置及び画像投影装置 | |
| JP2009069341A (ja) | アクチュエータ、光スキャナ、および画像形成装置 | |
| JP2009069339A (ja) | アクチュエータ、アクチュエータの製造方法、光スキャナ、および画像形成装置 | |
| JP2008145542A (ja) | 光学デバイス、光スキャナ、および画像形成装置 | |
| JP2008145543A (ja) | 光学デバイス、光スキャナ、および画像形成装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100825 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20100825 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20120530 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120605 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120725 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20130226 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20130311 |
|
| R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 Ref document number: 5233221 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20160405 Year of fee payment: 3 |
|
| S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| LAPS | Cancellation because of no payment of annual fees |