JP5224782B2 - 液体吐出ヘッドの製造方法 - Google Patents

液体吐出ヘッドの製造方法 Download PDF

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Publication number
JP5224782B2
JP5224782B2 JP2007288550A JP2007288550A JP5224782B2 JP 5224782 B2 JP5224782 B2 JP 5224782B2 JP 2007288550 A JP2007288550 A JP 2007288550A JP 2007288550 A JP2007288550 A JP 2007288550A JP 5224782 B2 JP5224782 B2 JP 5224782B2
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Japan
Prior art keywords
wafer
electrode
substrate
liquid
forming
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2007288550A
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English (en)
Japanese (ja)
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JP2008168619A5 (https=
JP2008168619A (ja
Inventor
博和 小室
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
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Canon Inc
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Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2007288550A priority Critical patent/JP5224782B2/ja
Priority to US11/955,772 priority patent/US8152278B2/en
Publication of JP2008168619A publication Critical patent/JP2008168619A/ja
Publication of JP2008168619A5 publication Critical patent/JP2008168619A5/ja
Application granted granted Critical
Publication of JP5224782B2 publication Critical patent/JP5224782B2/ja
Expired - Fee Related legal-status Critical Current
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/18—Electrical connection established using vias

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  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2007288550A 2006-12-14 2007-11-06 液体吐出ヘッドの製造方法 Expired - Fee Related JP5224782B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2007288550A JP5224782B2 (ja) 2006-12-14 2007-11-06 液体吐出ヘッドの製造方法
US11/955,772 US8152278B2 (en) 2006-12-14 2007-12-13 Liquid jet head chip and manufacturing method therefor

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2006337030 2006-12-14
JP2006337030 2006-12-14
JP2007288550A JP5224782B2 (ja) 2006-12-14 2007-11-06 液体吐出ヘッドの製造方法

Publications (3)

Publication Number Publication Date
JP2008168619A JP2008168619A (ja) 2008-07-24
JP2008168619A5 JP2008168619A5 (https=) 2010-12-24
JP5224782B2 true JP5224782B2 (ja) 2013-07-03

Family

ID=39697158

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007288550A Expired - Fee Related JP5224782B2 (ja) 2006-12-14 2007-11-06 液体吐出ヘッドの製造方法

Country Status (1)

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JP (1) JP5224782B2 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5341688B2 (ja) * 2009-09-10 2013-11-13 キヤノン株式会社 液体吐出ヘッド及びその製造方法
JP7433817B2 (ja) * 2018-10-19 2024-02-20 キヤノン株式会社 液体吐出ヘッド

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07156409A (ja) * 1993-10-04 1995-06-20 Xerox Corp 一体形成した流路構造を有するインクジェット・プリントヘッドおよびその作製方法
JP2730481B2 (ja) * 1994-03-31 1998-03-25 日本電気株式会社 インクジェット記録ヘッドの製造方法
JPH10119276A (ja) * 1996-10-17 1998-05-12 Canon Inc インクジェット記録ヘッド
US6123410A (en) * 1997-10-28 2000-09-26 Hewlett-Packard Company Scalable wide-array inkjet printhead and method for fabricating same
JP3592172B2 (ja) * 1999-01-27 2004-11-24 キヤノン株式会社 インクジェット記録ヘッドの製造方法、該製法によって製造されたインクジェット記録ヘッド及び該インクジェット記録ヘッドを搭載したインクジェット記録装置
JP3652321B2 (ja) * 2001-05-08 2005-05-25 キヤノン株式会社 インクジェット記録ヘッド
JP2006044222A (ja) * 2004-06-11 2006-02-16 Fuji Xerox Co Ltd インクジェット記録ヘッド及びインクジェット記録装置
JP2006321222A (ja) * 2005-04-18 2006-11-30 Canon Inc 液体吐出ヘッド

Also Published As

Publication number Publication date
JP2008168619A (ja) 2008-07-24

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