JP5224667B2 - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
- Publication number
- JP5224667B2 JP5224667B2 JP2006247496A JP2006247496A JP5224667B2 JP 5224667 B2 JP5224667 B2 JP 5224667B2 JP 2006247496 A JP2006247496 A JP 2006247496A JP 2006247496 A JP2006247496 A JP 2006247496A JP 5224667 B2 JP5224667 B2 JP 5224667B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- light
- polarized light
- resist
- reflectance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000004065 semiconductor Substances 0.000 title claims description 38
- 238000004519 manufacturing process Methods 0.000 title claims description 25
- 238000001514 detection method Methods 0.000 claims description 124
- 239000000758 substrate Substances 0.000 claims description 73
- 238000007654 immersion Methods 0.000 claims description 64
- 238000000034 method Methods 0.000 claims description 40
- 239000000463 material Substances 0.000 claims description 24
- 239000007788 liquid Substances 0.000 claims description 23
- 239000011368 organic material Substances 0.000 claims description 11
- 229910010272 inorganic material Inorganic materials 0.000 claims description 9
- 239000011147 inorganic material Substances 0.000 claims description 9
- 238000000059 patterning Methods 0.000 claims description 8
- 230000001678 irradiating effect Effects 0.000 claims description 5
- 150000001875 compounds Chemical class 0.000 claims description 4
- 239000010408 film Substances 0.000 description 334
- 239000010410 layer Substances 0.000 description 92
- 230000003287 optical effect Effects 0.000 description 38
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 26
- 229910052814 silicon oxide Inorganic materials 0.000 description 26
- 230000010287 polarization Effects 0.000 description 24
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 22
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 15
- 229920000642 polymer Polymers 0.000 description 15
- 229920005591 polysilicon Polymers 0.000 description 15
- 238000004364 calculation method Methods 0.000 description 8
- 239000012535 impurity Substances 0.000 description 8
- 238000010521 absorption reaction Methods 0.000 description 7
- 238000005286 illumination Methods 0.000 description 7
- 239000012528 membrane Substances 0.000 description 7
- 239000000178 monomer Substances 0.000 description 7
- 238000012545 processing Methods 0.000 description 7
- 239000010409 thin film Substances 0.000 description 7
- 239000003513 alkali Substances 0.000 description 6
- 238000005229 chemical vapour deposition Methods 0.000 description 6
- 239000011229 interlayer Substances 0.000 description 6
- 239000010949 copper Substances 0.000 description 5
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 5
- AZQWKYJCGOJGHM-UHFFFAOYSA-N 1,4-benzoquinone Chemical compound O=C1C=CC(=O)C=C1 AZQWKYJCGOJGHM-UHFFFAOYSA-N 0.000 description 4
- 235000000177 Indigofera tinctoria Nutrition 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 239000002253 acid Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 229940097275 indigo Drugs 0.000 description 4
- COHYTHOBJLSHDF-UHFFFAOYSA-N indigo powder Natural products N1C2=CC=CC=C2C(=O)C1=C1C(=O)C2=CC=CC=C2N1 COHYTHOBJLSHDF-UHFFFAOYSA-N 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 229910052721 tungsten Inorganic materials 0.000 description 4
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 238000002513 implantation Methods 0.000 description 3
- 229910052740 iodine Inorganic materials 0.000 description 3
- 239000011630 iodine Substances 0.000 description 3
- 238000002955 isolation Methods 0.000 description 3
- 238000002310 reflectometry Methods 0.000 description 3
- 230000007261 regionalization Effects 0.000 description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 2
- 125000003158 alcohol group Chemical group 0.000 description 2
- 150000001349 alkyl fluorides Chemical class 0.000 description 2
- 229910052785 arsenic Inorganic materials 0.000 description 2
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000003431 cross linking reagent Substances 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000018109 developmental process Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- -1 hafnium nitride Chemical class 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- DVUVKWLUHXXIHK-UHFFFAOYSA-N tetraazanium;tetrahydroxide Chemical compound [NH4+].[NH4+].[NH4+].[NH4+].[OH-].[OH-].[OH-].[OH-] DVUVKWLUHXXIHK-UHFFFAOYSA-N 0.000 description 2
- ANRHNWWPFJCPAZ-UHFFFAOYSA-M thionine Chemical compound [Cl-].C1=CC(N)=CC2=[S+]C3=CC(N)=CC=C3N=C21 ANRHNWWPFJCPAZ-UHFFFAOYSA-M 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 229910004143 HfON Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
- 239000003377 acid catalyst Substances 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- BFNBIHQBYMNNAN-UHFFFAOYSA-N ammonium sulfate Chemical compound N.N.OS(O)(=O)=O BFNBIHQBYMNNAN-UHFFFAOYSA-N 0.000 description 1
- 229910052921 ammonium sulfate Inorganic materials 0.000 description 1
- 235000011130 ammonium sulphate Nutrition 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 125000000751 azo group Chemical group [*]N=N[*] 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 125000002843 carboxylic acid group Chemical group 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007334 copolymerization reaction Methods 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000572 ellipsometry Methods 0.000 description 1
- 238000007687 exposure technique Methods 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- 229910000449 hafnium oxide Inorganic materials 0.000 description 1
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000000671 immersion lithography Methods 0.000 description 1
- PNDPGZBMCMUPRI-UHFFFAOYSA-N iodine Chemical compound II PNDPGZBMCMUPRI-UHFFFAOYSA-N 0.000 description 1
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical group O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- RUFLMLWJRZAWLJ-UHFFFAOYSA-N nickel silicide Chemical compound [Ni]=[Si]=[Ni] RUFLMLWJRZAWLJ-UHFFFAOYSA-N 0.000 description 1
- 229910021334 nickel silicide Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 230000000379 polymerizing effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- HWEYZGSCHQNNEH-UHFFFAOYSA-N silicon tantalum Chemical compound [Si].[Ta] HWEYZGSCHQNNEH-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 125000000542 sulfonic acid group Chemical group 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2041—Exposure; Apparatus therefor in the presence of a fluid, e.g. immersion; using fluid cooling means
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
- G03F9/7023—Aligning or positioning in direction perpendicular to substrate surface
- G03F9/7026—Focusing
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7065—Production of alignment light, e.g. light source, control of coherence, polarization, pulse length, wavelength
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28026—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor
- H01L21/28035—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor the final conductor layer next to the insulator being silicon, e.g. polysilicon, with or without impurities
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
- H01L21/32139—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer using masks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66568—Lateral single gate silicon transistors
- H01L29/66575—Lateral single gate silicon transistors where the source and drain or source and drain extensions are self-aligned to the sides of the gate
- H01L29/6659—Lateral single gate silicon transistors where the source and drain or source and drain extensions are self-aligned to the sides of the gate with both lightly doped source and drain extensions and source and drain self-aligned to the sides of the gate, e.g. lightly doped drain [LDD] MOSFET, double diffused drain [DDD] MOSFET
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/942—Masking
- Y10S438/948—Radiation resist
- Y10S438/95—Multilayer mask including nonradiation sensitive layer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/942—Masking
- Y10S438/948—Radiation resist
- Y10S438/952—Utilizing antireflective layer
Landscapes
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Ceramic Engineering (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
Description
(実施の形態1)
図1は、本発明の実施の形態1における液浸露光装置20の概略構成を示す図である。本実施の形態1の液浸露光装置20は、ステップアンドスキャン方式の露光装置であってもよく、ステップアンドリピート方式その他の露光方式を採用した露光装置であってもよい。
次に、本発明の実施の形態2について、図19〜図24を用いて説明する。
次に、図3を用いて、本発明の実施の形態3について説明する。本実施の形態3では、露光時に焦点位置を検知する焦点検出装置の構成が、実施の形態1における露光装置20の場合とは異なっている。これ以外の構成については実施の形態1の場合と基本的に同様である。
次に、図25を用いて、本発明の実施の形態4について説明する。本実施の形態4では、レジスト下に、検出光の波長域に高い吸収性を持つ反射防止膜を形成している。これ以外の構成については実施の形態1の場合と基本的に同様である。
次に、図4を用いて、本発明の実施の形態5について説明する。本実施の形態5では、露光媒体を液体ではなく気体(たとえば空気)とする。
Claims (11)
- 基板の主表面上に被加工膜を含む第1膜を形成する工程と、
前記第1膜上に感光性材料を含む第2膜を形成する工程と、
前記第2膜にp偏光の焦点検出光を照射して、前記焦点検出光から取り出したp偏光を用いて露光時の焦点位置を検出する工程と、
前記第2膜を露光する工程と、
前記第2膜をパターニングする工程と、
パターニングされた前記第2膜をマスクとして前記第1膜をパターニングする工程とを備え、
前記第2膜の形成工程は、
前記第1膜上に、前記焦点検出光の波長域に吸収性を有する反射防止膜を形成する工程と、
前記反射防止膜上に前記第2膜を形成する工程とを含む、半導体装置の製造方法。 - 前記反射防止膜は、有機材料と無機材料との少なくとも一方を含む膜である、請求項1に記載の半導体装置の製造方法。
- 前記反射防止膜は、有機材料の膜であり、前記焦点検出光の波長域に吸収性を有する化合物を含む、請求項2に記載の半導体装置の製造方法。
- 基板の主表面上に被加工膜を含む第1膜を形成する工程と、
前記第1膜上に感光性材料を含む第2膜を形成する工程と、
前記第2膜上に、該第2膜よりも屈折率の高い第3膜を形成する工程と、
前記第3膜にp偏光の焦点検出光を照射して、前記焦点検出光から取り出したp偏光を用いて露光時の焦点位置を検出する工程と、
前記第2膜を露光する工程と、
前記第3膜を除去するとともに前記第2膜をパターニングする工程と、
パターニングされた前記第2膜をマスクとして前記第1膜をパターニングする工程と、を備えた半導体装置の製造方法。 - 前記第3膜は、前記焦点検出光の波長域に吸収性を有する化合物を含む、請求項4に記載の半導体装置の製造方法。
- 前記露光工程は液浸露光工程である、請求項1から請求項5のいずれかに記載の半導体装置の製造方法。
- 基板の主表面上に被加工膜を含む第1膜を形成する工程と、
前記第1膜上に感光性材料を含む第2膜を形成する工程と、
前記第2膜に焦点検出光としてp偏光を照射して、前記第2膜の上面で反射した前記p偏光を用いて露光時の焦点位置を検出する工程と、
検出された前記焦点位置に基づいて前記第2膜を露光する工程と、
前記第2膜をパターニングする工程と、
パターニングされた前記第2膜をマスクとして前記第1膜をパターニングする工程と、を備えた半導体装置の製造方法。 - 前記第2膜の形成工程は、
前記第1膜上に、前記焦点検出光の波長域に吸収性を有する反射防止膜を形成する工程と、
前記反射防止膜上に前記第2膜を形成する工程とを含む、請求項7に記載の半導体装置の製造方法。 - 前記反射防止膜は、有機材料と無機材料との少なくとも一方を含む膜である、請求項7または8に記載の半導体装置の製造方法。
- 前記反射防止膜は、有機材料の膜であり、前記焦点検出光の波長域に吸収性を有する化合物を含む、請求項9に記載の半導体装置の製造方法。
- 前記露光工程は液浸露光工程である、請求項7から請求項10のいずれかに記載の半導体装置の製造方法。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006247496A JP5224667B2 (ja) | 2005-09-29 | 2006-09-13 | 半導体装置の製造方法 |
TW095135334A TWI390596B (zh) | 2005-09-29 | 2006-09-25 | 半導體裝置之製造方法 |
US11/535,273 US7544619B2 (en) | 2005-09-29 | 2006-09-26 | Method of fabricating semiconductor device |
CN2006100639468A CN1983510B (zh) | 2005-09-29 | 2006-09-29 | 半导体装置的制造方法 |
KR1020060095918A KR101279270B1 (ko) | 2005-09-29 | 2006-09-29 | 반도체 장치의 제조 방법 |
US12/466,549 US7935636B2 (en) | 2005-09-29 | 2009-05-15 | Method of fabricating semiconductor device |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005285012 | 2005-09-29 | ||
JP2005285012 | 2005-09-29 | ||
JP2006247496A JP5224667B2 (ja) | 2005-09-29 | 2006-09-13 | 半導体装置の製造方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2007123842A JP2007123842A (ja) | 2007-05-17 |
JP2007123842A5 JP2007123842A5 (ja) | 2009-08-27 |
JP5224667B2 true JP5224667B2 (ja) | 2013-07-03 |
Family
ID=37894613
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006247496A Expired - Fee Related JP5224667B2 (ja) | 2005-09-29 | 2006-09-13 | 半導体装置の製造方法 |
Country Status (5)
Country | Link |
---|---|
US (2) | US7544619B2 (ja) |
JP (1) | JP5224667B2 (ja) |
KR (1) | KR101279270B1 (ja) |
CN (1) | CN1983510B (ja) |
TW (1) | TWI390596B (ja) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5224667B2 (ja) * | 2005-09-29 | 2013-07-03 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
JP2007096089A (ja) * | 2005-09-29 | 2007-04-12 | Renesas Technology Corp | 露光装置 |
US7592265B2 (en) * | 2007-01-04 | 2009-09-22 | United Microelectronics Corp. | Method of trimming a hard mask layer, method for fabricating a gate in a MOS transistor, and a stack for fabricating a gate in a MOS transistor |
JP2009010196A (ja) * | 2007-06-28 | 2009-01-15 | Advanced Lcd Technologies Development Center Co Ltd | レーザー結晶化方法及び結晶化装置 |
JP4452311B2 (ja) * | 2007-08-30 | 2010-04-21 | 株式会社有沢製作所 | 反射防止膜形成用組成物、及び画像表示装置 |
NL1036018A1 (nl) * | 2007-10-09 | 2009-04-15 | Asml Netherlands Bv | A method of optimizing a model, a method of measuring a property, a device manufacturing method, a spectrometer and a lithographic apparatus. |
JP2009194196A (ja) * | 2008-02-15 | 2009-08-27 | Nec Electronics Corp | 半導体装置の製造方法および半導体装置 |
FR2927708A1 (fr) * | 2008-02-19 | 2009-08-21 | Commissariat Energie Atomique | Procede de photolithographie ultraviolette a immersion |
US7883946B1 (en) * | 2008-05-08 | 2011-02-08 | Altera Corporation | Angled implantation for deep submicron device optimization |
JP2009277903A (ja) * | 2008-05-15 | 2009-11-26 | Panasonic Corp | 電子部品形成装置および電子部品 |
WO2024120766A1 (en) * | 2022-12-09 | 2024-06-13 | Asml Netherlands B.V. | Determining a focus position for imaging a substrate with an integrated photonic sensor |
Family Cites Families (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62140418A (ja) * | 1985-12-16 | 1987-06-24 | Canon Inc | 面位置検知装置 |
US4846552A (en) * | 1986-04-16 | 1989-07-11 | The United States Of America As Represented By The Secretary Of The Air Force | Method of fabricating high efficiency binary planar optical elements |
US5227862A (en) * | 1989-04-21 | 1993-07-13 | Hitachi, Ltd. | Projection exposure apparatus and projection exposure method |
US6094268A (en) * | 1989-04-21 | 2000-07-25 | Hitachi, Ltd. | Projection exposure apparatus and projection exposure method |
US5298365A (en) * | 1990-03-20 | 1994-03-29 | Hitachi, Ltd. | Process for fabricating semiconductor integrated circuit device, and exposing system and mask inspecting method to be used in the process |
US5539514A (en) * | 1991-06-26 | 1996-07-23 | Hitachi, Ltd. | Foreign particle inspection apparatus and method with front and back illumination |
JP2924344B2 (ja) * | 1991-08-09 | 1999-07-26 | キヤノン株式会社 | 投影露光装置 |
JP3204406B2 (ja) * | 1991-10-30 | 2001-09-04 | 株式会社ニコン | 面位置検出方法及び装置、半導体露光装置、並びに前記方法を用いた露光方法 |
JP3303436B2 (ja) * | 1993-05-14 | 2002-07-22 | キヤノン株式会社 | 投影露光装置及び半導体素子の製造方法 |
US5677757A (en) * | 1994-03-29 | 1997-10-14 | Nikon Corporation | Projection exposure apparatus |
KR0153796B1 (ko) * | 1993-09-24 | 1998-11-16 | 사토 후미오 | 노광장치 및 노광방법 |
KR950033689A (ko) * | 1994-03-02 | 1995-12-26 | 오노 시게오 | 노광장치 및 이를 이용한 회로패턴 형성방법 |
US5783833A (en) * | 1994-12-12 | 1998-07-21 | Nikon Corporation | Method and apparatus for alignment with a substrate, using coma imparting optics |
JPH0936017A (ja) * | 1995-07-20 | 1997-02-07 | Hitachi Ltd | パタン形成方法及びそれを用いた半導体素子の製造方法 |
JP3618907B2 (ja) * | 1996-07-05 | 2005-02-09 | キヤノン株式会社 | パターン形成状態検出装置、及びこれを用いた投影露光装置 |
US6594012B2 (en) * | 1996-07-05 | 2003-07-15 | Canon Kabushiki Kaisha | Exposure apparatus |
JPH1070064A (ja) * | 1996-08-27 | 1998-03-10 | Nikon Corp | 投影露光装置 |
JPH10284402A (ja) * | 1997-04-03 | 1998-10-23 | Canon Inc | パターン位置情報検出装置及びそれを用いた投影露光装置 |
WO2000058761A1 (fr) | 1999-03-29 | 2000-10-05 | Nikon Corporation | Film multicouche antireflechissant, composant optique, et systeme reduisant l'exposition a des projections |
US7127098B2 (en) * | 2001-09-13 | 2006-10-24 | Hitachi, Ltd. | Image detection method and its apparatus and defect detection method and its apparatus |
JP3605064B2 (ja) * | 2001-10-15 | 2004-12-22 | 株式会社ルネサステクノロジ | フォーカスモニタ用フォトマスク、フォーカスモニタ方法、フォーカスモニタ用装置および装置の製造方法 |
JP2003303761A (ja) * | 2002-04-11 | 2003-10-24 | Matsushita Electric Ind Co Ltd | パターン形成方法 |
JP3997199B2 (ja) | 2002-12-10 | 2007-10-24 | キヤノン株式会社 | 露光方法及び装置 |
JP2004301825A (ja) * | 2002-12-10 | 2004-10-28 | Nikon Corp | 面位置検出装置、露光方法、及びデバイス製造方法 |
JP2004273940A (ja) * | 2003-03-11 | 2004-09-30 | Semiconductor Leading Edge Technologies Inc | パターン形成方法およびパターン形成装置 |
JP4265766B2 (ja) | 2003-08-25 | 2009-05-20 | 東京応化工業株式会社 | 液浸露光プロセス用レジスト保護膜形成用材料、該保護膜形成材料からなるレジスト保護膜、および該レジスト保護膜を用いたレジストパターン形成方法 |
JPWO2005038885A1 (ja) * | 2003-10-16 | 2007-02-01 | 株式会社ニコン | 光学特性計測装置及び光学特性計測方法、露光装置及び露光方法、並びにデバイス製造方法 |
JP3984950B2 (ja) * | 2003-11-12 | 2007-10-03 | キヤノン株式会社 | 照明光学系及びそれを有する露光装置 |
US7265364B2 (en) * | 2004-06-10 | 2007-09-04 | Asml Netherlands B.V. | Level sensor for lithographic apparatus |
CN100517569C (zh) * | 2004-08-09 | 2009-07-22 | 株式会社尼康 | 光学特性测量装置及方法、曝光装置及方法及组件制造方法 |
JP2007096089A (ja) * | 2005-09-29 | 2007-04-12 | Renesas Technology Corp | 露光装置 |
JP5224667B2 (ja) * | 2005-09-29 | 2013-07-03 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
-
2006
- 2006-09-13 JP JP2006247496A patent/JP5224667B2/ja not_active Expired - Fee Related
- 2006-09-25 TW TW095135334A patent/TWI390596B/zh not_active IP Right Cessation
- 2006-09-26 US US11/535,273 patent/US7544619B2/en not_active Expired - Fee Related
- 2006-09-29 KR KR1020060095918A patent/KR101279270B1/ko not_active IP Right Cessation
- 2006-09-29 CN CN2006100639468A patent/CN1983510B/zh not_active Expired - Fee Related
-
2009
- 2009-05-15 US US12/466,549 patent/US7935636B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US7935636B2 (en) | 2011-05-03 |
KR101279270B1 (ko) | 2013-06-26 |
US20090227046A1 (en) | 2009-09-10 |
CN1983510A (zh) | 2007-06-20 |
US20070072351A1 (en) | 2007-03-29 |
US7544619B2 (en) | 2009-06-09 |
TW200725697A (en) | 2007-07-01 |
JP2007123842A (ja) | 2007-05-17 |
TWI390596B (zh) | 2013-03-21 |
CN1983510B (zh) | 2010-05-12 |
KR20070036725A (ko) | 2007-04-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5224667B2 (ja) | 半導体装置の製造方法 | |
CN109690235B (zh) | 用于测量高纵横比结构的红外光谱反射计 | |
US6986971B2 (en) | Reflective mask useful for transferring a pattern using extreme ultraviolet (EUV) radiation and method of making the same | |
JP2007096089A (ja) | 露光装置 | |
JP4308202B2 (ja) | 基板に関する情報を測定する方法及びリソグラフィ装置に使用する基板 | |
JP2005354073A (ja) | リソグラフィ装置用のレベル・センサ | |
JP2005527964A (ja) | 反射マスクを使用した集積回路 | |
JP2007043167A (ja) | 多重反射防止層を備えた半導体構造物及びその構造物を利用したprパターンの形成方法及び半導体素子パターンの形成方法 | |
JP2006235595A (ja) | 光学要素、このような光学要素を含むリソグラフィ装置、デバイス製造方法およびそれによって製造したデバイス | |
WO2020126248A1 (en) | Methods and apparatus for metrology | |
US6905801B2 (en) | High performance EUV mask | |
US8227180B2 (en) | Photolithography focus improvement by reduction of autofocus radiation transmission into substrate | |
JP2008041740A (ja) | 反射型フォトマスクブランク、反射型フォトマスク及び極端紫外線の露光方法 | |
US9607833B2 (en) | System and method for photomask particle detection | |
Vanleenhove et al. | A litho-only approach to double patterning | |
JP2007250613A (ja) | 反射型マスクブランク、反射型マスク及び極端紫外線の露光方法 | |
TWI391786B (zh) | 光阻覆蓋膜形成材料、光阻圖案形成方法、以及電子元件及其製造方法 | |
Lee et al. | Double exposure technology using silicon containing materials | |
TWI708114B (zh) | 極紫外光光罩及其製造方法 | |
TWI236542B (en) | Projection optical system | |
Hwang et al. | Improvement of alignment and overlay accuracy on amorphous carbon layers | |
JP2007049026A (ja) | 微細パターンの形成方法およびその形成材料 | |
Chou et al. | Antireflection strategies for sub-0.18-um dual-damascene structure patterning in KrF 248-nm lithography | |
US7855048B1 (en) | Wafer assembly having a contrast enhancing top anti-reflecting coating and method of lithographic processing | |
Huang et al. | Focus improvement with NIR absorbing underlayer attenuating substructure reflectivity |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20090709 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20090709 |
|
A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A712 Effective date: 20100526 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20110916 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110927 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20111128 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120925 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20121120 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20130305 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20130312 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20160322 Year of fee payment: 3 |
|
S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
LAPS | Cancellation because of no payment of annual fees |