JP5218181B2 - Screen printing machine and screen printing method - Google Patents

Description

  The present invention relates to a screen printer and a screen printing method for printing a paste on an electrode of a substrate through a pattern hole of a mask member.

The screen printing machine aligns the substrate and the mask member so that the electrode of the substrate and the pattern hole of the mask member are aligned vertically, and then moves the mask member in the horizontal direction by bringing the squeegee into contact with the mask member. The paste supplied above is scraped with a squeegee to fill the pattern hole of the mask member with the paste, and then the substrate and the mask member are relatively spaced apart so that the paste in the pattern hole is released onto the electrode. It has become. Among such screen printing machines, there are known ones that have a pair of squeegees that face each other in the moving direction, and that switch the squeegee that scrapes the paste according to the moving direction. (Patent Document 1). In such a screen printing machine, when switching the squeegee, the squeegee that has been scraping the paste up is raised so that the squeegee is separated from the paste, and the other squeegee is placed over the scraped paste. After moving down, move the squeegee in the opposite direction.
JP 2008-119851 A

  However, in the past, when separating the squeegee from the paste, the squeegee was lifted as it was, so after a part of the paste adhering to the squeegee was pulled upward and tapered, it fell down like drawing a ring with the separation of the squeegee Therefore, there is a problem that air may be involved and cause printing defects.

  Then, an object of this invention is to provide the screen printing machine and screen printing method which can suppress generation | occurrence | production of the printing defect by a paste entraining air.

The screen printing machine according to claim 1 is aligned with the substrate and a mask member that is aligned with the substrate so that pattern holes provided corresponding to the electrodes of the substrate are vertically aligned with the electrodes of the substrate. A squeegee that fills the pattern hole of the mask member with the paste supplied on the mask member by moving horizontally in contact with the mask member from above, and the squeegee puts the paste in the pattern hole of the mask member. after filling, by lowering the after rising without separating from the paste on the mask member while continuing to move in the horizontal direction, with respect to the mask member adhering paste after it Shin pull on the mask member Rise .

The screen printing method according to claim 2 , wherein the substrate and the mask member are aligned so that the electrode of the substrate and the pattern hole of the mask member are aligned vertically, and the squeegee is positioned above the mask member aligned with the substrate. The paste supplied on the mask member is filled in the pattern hole of the mask member by moving it in the horizontal direction, and after filling the pattern hole of the mask member with the squeegee, by lowering the squeegee while continuing to move in the horizontal direction after raised without separating from the paste on the mask member, with respect to the mask after it Shin pull the paste adhering to the squeegee on the mask member to rise Te and a step.

In the present invention, the squeegee that has been filled with the paste in the pattern hole of the mask member rises without being separated from the paste on the mask member while continuing to move in the horizontal direction and then descends to mask the adhered paste. Since it is lifted with respect to the mask member after being stretched on the member, the taper paste that adheres to the squeegee falls like a circle as the squeegee separates, as in the conventional case. And the occurrence of printing defects due to air entraining the paste can be suppressed.

  Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a partial plan view of a screen printer according to an embodiment of the present invention, FIG. 2 is a front view of a printing execution unit provided in the screen printer according to an embodiment of the present invention, and FIG. 3 is an embodiment of the present invention. FIG. 4 is a block diagram showing a control system of the screen printer in one embodiment of the present invention, and FIG. 5 is a screen printer in one embodiment of the present invention. FIG. 6 (a), (b), FIG. 7 (a), (b), FIG. 8 (a), (b), FIG. 9 (a), (b). ), (C), (d), FIG. 10 (a), (b) and FIG. 11 (a), (b) are explanatory diagrams of the operation of the screen printing machine in one embodiment of the present invention.

  In FIG. 1, a screen printing machine 1 according to the present embodiment includes a base 2, a substrate transport path 3 that is provided on the base 2, and transports and positions a substrate PB that is a printing target, and a substrate transport path. 3 includes a print execution unit 4 that performs screen printing on the substrate PB positioned by 3. Hereinafter, the transport direction of the substrate PB in the screen printer 1 is defined as the X-axis direction, and the direction in the horizontal plane perpendicular to the X-axis direction is defined as the Y-axis direction. The operator OP of the screen printing machine 1 performs work on one end side in the Y-axis direction of the screen printing machine 1, but the side on which the operator OP performs work (downward on the paper surface in FIG. 1) is the front side of the screen printing machine 1 and the opposite side. The side (upper side in FIG. 1) is the rear side of the screen printing machine 1.

  In FIG. 1, the substrate transport path 3 includes a carry-in conveyor 11, a positioning conveyor 12, and a carry-out conveyor 13 provided side by side in the X-axis direction. The carry-in conveyor 11 carries the substrate PB loaded from the outside of the screen printing machine 1 (left side in FIG. 1) into the screen printing machine 1 and delivers it to the positioning conveyor 12. The positioning conveyor 12 positions the substrate PB received from the carry-in conveyor 11 at the printing execution position (the position of the substrate PB shown in FIG. 1), and after the screen printing on the substrate PB is completed, the substrate PB is delivered to the carry-out conveyor 13. The carry-out conveyor 13 carries out the substrate PB received from the positioning conveyor 12 to the outside of the screen printing machine 1 (right side of the paper in FIG. 1).

In FIG. 2, the print execution unit 4 clamps the substrate PB on the positioning conveyor 12 and moves the substrate PB in the horizontal plane and in the vertical direction (Z-axis direction). A pair of support rails 22 extending in the Y-axis direction above the substrate moving unit 21, a plate-like mask member 23 slidably supported in the Y-axis direction by the support rails 22, and above the mask member 23 A space between the substrate moving unit 21 and the mask member 23 can be moved in a horizontal plane by a squeegee unit 24 provided movably in the Y-axis direction and an XY robot 25 (FIG. 1) provided on the base 2. A syringe unit 27 that supplies paste PT such as solder paste or conductive paste is provided on the camera unit 26 and the mask member 23.

  In FIG. 2, the substrate moving unit 21 of the print execution unit 4 includes a Y table 21a that moves relative to the base 2 in the Y axis direction, an X table 21b that moves relative to the Y table 21a in the X axis direction, and X A θ table 21c that rotates relative to the table 21b around the Z axis, a base plate 21d fixed to the θ table 21c, a first elevating plate 21e that elevates relative to the base plate 21d, and a relative elevating relative to the first elevating plate 21e A second elevating plate 21f, a receiving unit 21g fixed to the second elevating plate 21f, a positioning conveyor 12 constituting the substrate transport path 3, and a pair of clampers 21h (opening / closing in the Y-axis direction above the positioning conveyor 12) 1).

  1 and 3, the mask member 23 is supported by a frame member 23w having a rectangular shape in plan view, and a predetermined region (mask region MR) on the mask member 23 in a region surrounded by the frame member 23w. Are provided with a large number of pattern holes 23h corresponding to the electrodes DT (FIG. 1) provided on the substrate PB.

  In FIG. 1, a pair of substrate alignment marks m are provided at diagonal positions of the substrate PB. On the other hand, in FIG. 3, the mask member 23 is provided with a pair of mask member alignment marks MK for aligning the mask member 23 with the substrate PB corresponding to the substrate alignment mark m.

  The mask member 23 is inserted between the pair of support rails 22 from the front of the screen printing machine 1 by the operator OP holding the mask member 23 with both hands (arrow A shown in FIG. 1), and the top of the frame member 23w. The unit is installed at a predetermined position by pushing backward until it comes into contact with a stopper 22 a provided on the support rail 22.

  In FIG. 2, the squeegee unit 24 includes two squeegee bases 24p provided above the support rails 22 so as to be movable in the Y-axis direction relative to the substrate moving unit 21, and two squeegee bases 24p attached to the squeegee base 24p and extending vertically. A pair of squeegees (pneumatic cylinders) 24s and a pair of squeegees (front squeegees 24a provided on the front side) that are attached to the lower part of each squeegee raising / lowering cylinders 24s and have the surfaces that scrape the paste PT face each other in the Y-axis direction. And a rear squeegee 24b) provided on the rear side. Both the front squeegee 24a and the rear squeegee 24b are “spar” -shaped members extending in the X-axis direction, and are raised and lowered with respect to the squeegee base 24p by a downward projecting and retracting operation of the squeegee lifting cylinder 24s.

  In FIG. 1, the XY robot 25 extends above the base 2 in the Y-axis direction, and is provided with a Y-axis stage 25 a fixed relative to the base 2, extending in the X-axis direction, and on the Y-axis stage 25 a. Are configured to be movable in the Y-axis direction and a moving plate 25c provided to be movable in the X-axis direction on the X-axis stage 25b. In FIG. 2, the camera unit 26 has a configuration in which a first camera 26 a with an imaging surface facing downward and a second camera 26 b with an imaging surface facing upward are attached to a moving plate 25 c of an XY robot 25. .

  In FIG. 2, the syringe unit 27 has a configuration in which a syringe 27 s for discharging the paste PT downward is attached to a syringe base 27 p provided so as to be movable in a horizontal plane direction with respect to the substrate moving unit 21.

The substrate PB is conveyed and positioned by the carry-in conveyor 11, the positioning conveyor 12 and the carry-out conveyor 13 constituting the substrate conveyance path 3, and the control device 30 (FIG. 4) provided in the screen printing machine 1 includes an actuator (not shown). This is done by controlling the operation of the transport path operating mechanism 31 (FIG. 4).

  Movement of the Y table 21a with respect to the base 2 in the Y axis direction, movement of the X table 21b with respect to the Y table 21a in the X axis direction, rotation of the θ table 21c with respect to the X table 21b around the Z axis, and rotation with respect to the base plate 21d (that is, θ The controller 30 controls the Y table to move the first elevating plate 21e (with respect to the table 21c), the second elevating plate 21f with respect to the first elevating plate 21e (that is, the lowering unit 21g) and the opening / closing operation of the clamper 21h. This is done by controlling the operation of the substrate moving unit operating mechanism 32 (FIG. 4) including actuators such as the drive motor My and the X table drive motor Mx (FIG. 2).

  The movement operation of the squeegee unit 24 (of the squeegee base 24p) in the Y-axis direction is performed when the control device 30 controls the operation of a squeegee unit moving mechanism 33 (FIG. 4) including an actuator (not shown). The raising / lowering operation of each of the squeegee 24b and the rear squeegee 24b is performed when the control device 30 controls the operation of the squeegee raising / lowering mechanism 34 (FIG. 4) including the squeegee raising / lowering cylinder 24s.

  The movement operation of the X-axis stage 25b constituting the XY robot 25 in the Y-axis direction and the movement operation of the movement plate 25c in the X-axis direction are performed by an XY robot actuating mechanism 35 (FIG. 4) including an actuator (not shown). ).

  The first camera 26 a is controlled by the control device 30 to image the substrate alignment mark m provided on the substrate PB, and the second camera 26 b is controlled by the control device 30 and provided on the mask member 23. The mask member alignment mark MK is imaged. Image data obtained by imaging with the first camera 26a and image data obtained by imaging with the second camera 26b are input to the control device 30 (FIG. 4).

  The movement of the syringe unit 27 (movement of the syringe base 27p) is performed when the control device 30 controls the operation of the syringe moving mechanism 36 (FIG. 4) including an actuator (not shown), and the paste supply operation by the syringe 27s is performed. The control device 30 controls the operation of a syringe operation mechanism 37 (FIG. 4) including an actuator (not shown).

  Next, the flow of the screen printing process by the screen printer 1 will be described with reference to the flowchart of FIG. 5 and the operation explanatory diagrams of FIGS. The control device 30 of the screen printing machine 1 allows the substrate PB to be transferred from the operator OP (or another device (not shown) installed on the upstream side of the screen printing machine 1) from the operator OP (not shown) to the substrate transport path 3 (loading conveyor 11). If it detects that it was thrown in, the carrying-in conveyor 11 and the positioning conveyor 12 will operate | move, and the board | substrate PB will be carried in in the screen printer 1 (board | substrate carrying-in process. Step ST1 of FIG. 5).

When the controller 30 carries in the substrate PB, the substrate PB is fixed by the substrate moving unit 21 (substrate fixing step; step ST2 in FIG. 5). First, the second lifting plate 21f of the substrate moving unit 21 is raised relative to the first lifting plate 21e (arrow C1 shown in FIG. 6A), and the upper surface of the lower receiving unit 21g is placed on the substrate PB. The substrate PB is supported on the lower receiving unit 21g by contacting the lower surface with the lower surface (FIG. 6A). When the substrate PB is supported by the lower receiving unit 21g, the substrate PB is clamped by the clamper 21h, and then the second elevating plate 21f is further raised (arrow C2 shown in FIG. 6B), and the lower receiving unit 21g. To push up the substrate PB. As a result, the substrate PB is lifted while sliding both ends with respect to the clamper 21h, separated from the positioning conveyor 12, and the top surface of the substrate PB is at the same height as the top surfaces of both the clampers 21h. It is fixed to the moving unit 21 (FIG. 6B).

  When the fixing of the substrate PB is completed, the control device 30 aligns the substrate PB and the mask member 23 so that the electrode DT of the substrate PB and the pattern hole 23h of the mask member 23 are aligned vertically (alignment process, FIG. 5 step ST3).

  In this alignment step, first, the control device 30 performs the movement of the camera unit 26 and the imaging operation control of the first camera 26a to acquire image data of the substrate alignment mark m provided on the substrate PB. As well as grasping the position, the image data of the mask member alignment mark MK provided on the mask member 23 is obtained by moving the camera unit 26 and controlling the imaging operation of the second camera 26b, and grasping the position of the mask member 23. To do.

  When the controller 30 grasps the position of the substrate PB and the position of the mask member 23, the substrate PB is positioned below the mask region MR of the mask member 23 by the movement operation of the substrate PB in the horizontal plane by the substrate moving unit 21. After that, the substrate moving unit 21 performs the vertical movement of the substrate PB (the first elevating plate 21e is lifted) so that the substrate alignment mark m and the mask member alignment mark MK are aligned vertically. The upper surface of the substrate PB is brought into contact with the lower surface of the mask member 23 from below (arrow C3 shown in FIG. 7A). Thus, the alignment process between the substrate PB and the mask member 23 is completed (FIG. 7A).

  When the positioning process is completed, the control device 30 executes a first paste filling process for filling the pattern hole 23h with the paste PT by the front squeegee 24a (step ST4 in FIG. 5). For this, first, the control device 30 pastes the paste by the syringe unit 27 on the mask member 23 corresponding to the upper surface of the clamper 21h (front clamper 21h) positioned in front of the screen printing machine 1 among the pair of clampers 21h. PT is supplied (FIG. 7A). Then, the squeegee unit 24 is moved above the front clamper 21h to lower the front squeegee 24a, and its lower end is brought into contact with the mask member 23 corresponding to the upper surface of the front clamper 21h (FIG. 7B). )), By moving the squeegee unit 24 backward (arrow C4 shown in FIG. 8A), the front squeegee 24a is slid on the mask member 23, and the paste PT is raked on the mask member 23. Then, the paste PT is pushed and filled into the pattern hole 23h in the mask region MR. When the front squeegee 24a reaches the mask member 23 corresponding to the upper surface of the clamper 21h (rear clamper 21h) located behind the screen printing machine 1 (FIG. 8B), the first paste filling step. Ends.

  When the first paste filling process in step ST4 is completed, the control device 30 executes a first squeegee separation process for separating the front squeegee 24a from the paste PT (step ST5 in FIG. 5). First, the control device 30 once raises the front squeegee 24a while continuing to move the front squeegee 24a in the horizontal direction (backward) (see arrow C4 shown in FIG. 9) (FIG. 9 ( a) Arrow C5 shown in the figure and lowered (FIG. 9B. Arrow C6 shown in the figure) so that a part of the paste PT adhering to the front squeegee 24a approaches the surface of the mask member 23. The front squeegee 24a is separated from the paste PT by stretching on the mask member 23 (FIG. 9C). When the front squeegee 24a is separated from the paste PT, the front squeegee 24a is raised (arrow C7 shown in FIG. 9D). This completes the first squeegee separation step.

The front squeegee 24a is once lifted and then lowered, and the adhered paste PT is stretched on the mask member 23 (or rubbed against the surface of the mask member 23) to be separated from the paste PT. As the PT is stretched, the paste PT on the mask member 23 is reduced, and a part of the paste PT attached to the front squeegee 24a is hardly pulled upward. For this reason, even when a part of the paste PT attached to the front squeegee 24a is tapered upward as if the front squeegee 24a is raised as it is, it falls down with the separation of the front squeegee 24a. There is no possibility that printing will be caused by entraining air.

  Further, while the front squeegee 24a continues to move in the horizontal direction while the front squeegee 24a is raised and then lowered, the front squeegee 24a is not separated from the paste PT. Therefore, it is possible to more reliably prevent printing defects due to air entrainment.

  Note that the amount of upward and downward movement of the front squeegee 24a in the operation of the front squeegee 24a (the same applies to the operation of the rear squeegee 24b described later) is such that the paste squeegee 24a does not entrain air and the front squeegee 24a It is preferable that data of an operation amount that can be separated from the image is acquired in advance by an experiment or the like and determined based on the acquired data.

  When the first squeegee separation step of step ST5 is completed, the control device 30 executes a second paste filling step of filling the pattern hole 23h with the paste PT by the rear squeegee 24b (step ST6 of FIG. 5). First, the control device 30 lowers the rear squeegee 24b with the squeegee unit 24 positioned above the rear clamper 21h, and lowers the lower end of the squeegee unit 24 on the mask member 23 corresponding to the upper surface of the rear clamper 21h. (FIG. 10A). Accordingly, the rear squeegee 24b is disposed at a position straddling the paste PT scraped by the front squeegee 24a. Then, the control device 30 moves the squeegee unit 24 forward (arrow C8 shown in FIG. 10B) to slide the rear squeegee 24b on the mask member 23 and paste the PT on the mask member 23. The paste PT is pushed into the pattern hole 23h in the mask region MR, and the paste PT is filled into the pattern hole 23h that is not filled with the paste PT by sliding of the front squeegee 24a. When the rear squeegee 24b reaches the mask member 23 corresponding to the upper surface of the front clamper 21h (FIG. 11A), the second paste filling process ends.

  When the second paste filling process in step ST6 is completed, the control device 30 executes a second squeegee separation process for separating the rear squeegee 24b from the paste PT (step ST7 in FIG. 5). In the second squeegee separation step, the control device 30 separates the rear squeegee 24b from the paste PT on the mask member 23 corresponding to the upper surface of the front clamper 21h in the same manner as in the first squeegee separation step of step ST5. (FIG. 11B). This prepares for execution of the paste filling step (first paste filling step) for the next substrate PB.

  When the second squeegee separation process in step ST7 is completed, the control device 30 then executes a plate removal process (step ST8 in FIG. 5). The plate removal process is performed by the control device 30 lowering the first elevating plate 21e (arrow C9 shown in FIG. 11B) and relatively separating the substrate PB and the mask member 23 from each other. As a result, the paste PT filled in each pattern hole 23h is released on the electrode DT of the substrate PB, and the paste PT is printed (transferred) onto the substrate PB.

When the plate removal process in step ST8 is completed, the control device 30 opens the clamper 21h to release the substrate PB from being fixed to the substrate moving unit 21 (substrate fixation releasing step, step ST9 in FIG. 5). Then, the second elevating plate 21f is lowered to place the substrate PB on the positioning conveyor 12, and the substrate moving unit 21 is operated to adjust the position of the positioning conveyor 12 relative to the carry-out conveyor 13. When the position adjustment of the positioning conveyor 12 with respect to the carry-out conveyor 13 is completed, the control device 30 operates the positioning conveyor 12 and the carry-out conveyor 13 in an interlocked manner to carry out the substrate PB from the screen printer 1 (substrate carry-out process, FIG. 5). Step ST10).

  After unloading the substrate PB, the control device 30 determines whether there is another substrate PB to be screen printed (determination step; step ST11 in FIG. 5). As a result, if there is another substrate PB to be screen-printed, the process returns to step ST1 to carry in the substrate PB, and if there is no other substrate PB to be screen-printed, the series of screen printing steps is completed. To do.

  As described above, the screen printing machine 1 according to the present embodiment aligns with the substrate PB so that the pattern hole 23h provided corresponding to the electrode DT of the substrate PB is vertically aligned with the electrode DT of the substrate PB. The mask member 23 and the mask member 23 aligned with the substrate PB are contacted from above and moved in the horizontal direction, whereby the paste PT supplied on the mask member 23 is placed in the pattern holes 23h of the mask member 23. The squeegee (front squeegee 24a and rear squeegee 24b) is filled with the paste PT in the pattern hole 23h of the mask member 23 and then moved in the horizontal direction. The adhered paste PT is stretched on the mask member 23 by descending after rising while continuing. It has become as to be separated from the paste PT Te.

  The screen printing method according to the present embodiment includes a step of aligning the substrate PB and the mask member 23 so that the electrode DT of the substrate PB and the pattern hole 23h of the mask member 23 are aligned vertically (positioning step). The paste PT supplied onto the mask member 23 is moved to the mask member 23 by moving the squeegee (front squeegee 24a or rear squeegee 24b) from above to the mask member 23 aligned with the substrate PB in the horizontal direction. After filling the pattern hole 23h in the pattern hole 23h of the mask member 23 with the step of filling the pattern hole 23h (the first paste filling step or the second paste filling step) and the pattern hole 23h of the mask member 23, the horizontal direction of the squeegee Lift the squeegee while continuing to move it and then lower it so that the peg attached to the squeegee Strike PT has to include a step of separating the squeegee stretched on the mask member 23 from the paste PT (first paste spaced steps or second paste spaced steps).

As described above, in the screen printer 1 and the screen printing method according to the present embodiment, the squeegee (the front squeegee 24a or the rear squeegee 24b) that has been filled with the paste PT in the pattern hole 23h of the mask member 23 is moved horizontally. Since it continues to move and rises without being separated from the paste PT on the mask member 23, it descends, and the attached paste PT is stretched on the mask member 23 and then rises with respect to the mask member 23. Thus, unlike the conventional case, the taped paste PT attached to the squeegee does not fall down like a ring as the squeegee is separated, and the occurrence of printing defects due to the air entraining the paste PT is suppressed. be able to.

  Further, in the screen printing machine 1 according to the present embodiment, the squeegee (the front squeegee 24a and the rear squeegee 24b) is pasted on the mask member 23 while descending after rising while continuing to move in the horizontal direction. Further, in the screen printing method according to the present embodiment, the squeegee (the front squeegee 24a and the rear squeegee 24b) is moved downward while being moved in the horizontal direction. In the meantime, since the squeegee is not separated from the paste PT on the mask member 23, it is possible to more reliably prevent printing defects due to air entrainment.

Although the embodiments of the present invention have been described so far, the present invention is not limited to those shown in the above-described embodiments. For example, in the above-described embodiment, one substrate PB is filled with the paste PT by one reciprocation of the squeegee unit 24 in which the pair of squeegees (the front squeegee 24a and the rear squeegee 24b) are moved once each. However, the paste PT may be filled in one substrate PB by a plurality of reciprocating operations of the squeegee unit 24 that moves the pair of squeegees a plurality of times.

  Provided are a screen printing machine and a screen printing method capable of suppressing the occurrence of printing defects due to air entraining a paste.

The partial top view of the screen printer in one embodiment of this invention The front view of the printing execution part with which the screen printer in one embodiment of this invention is provided The top view of the mask member with which the screen printer in one embodiment of the present invention is provided The block diagram which shows the control system of the screen printer in one embodiment of this invention The flowchart which shows the flow of the screen printing process which the screen printer in one embodiment of this invention performs (A) (b) Operation | movement explanatory drawing of the screen printer in one embodiment of this invention (A) (b) Operation | movement explanatory drawing of the screen printer in one embodiment of this invention (A) (b) Operation | movement explanatory drawing of the screen printer in one embodiment of this invention (A) (b) (c) (d) Operation explanatory diagram of the screen printer in one embodiment of the present invention (A) (b) Operation | movement explanatory drawing of the screen printer in one embodiment of this invention (A) (b) Operation | movement explanatory drawing of the screen printer in one embodiment of this invention

1 Screen Printer 23 Mask Member 23h Pattern Hole 24a Front Squeegee (Squeegee)
24b Rear squeegee (squeegee)
PB substrate DT electrode PT paste

Claims (2)

A mask member that is aligned with the substrate such that the pattern holes provided corresponding to the electrodes of the substrate are vertically aligned with the electrodes of the substrate;
A squeegee that fills the pattern hole of the mask member with the paste supplied on the mask member by moving horizontally in contact with the mask member aligned with the substrate from above;
The squeegee fills the pattern holes of the mask member with the paste, then moves up without leaving the paste on the mask member while continuing to move in the horizontal direction, and then descends to remove the adhered paste on the mask member. screen printing machine, characterized by increasing the mask member after it Shin pull. A step of aligning the substrate and the mask member such that the electrode of the substrate and the pattern hole of the mask member are aligned vertically;
A step of causing the squeegee to contact the mask member aligned with the substrate from above and moving the mask member in the horizontal direction to fill the pattern holes of the mask member with the paste supplied on the mask member;
After filling the pattern hole of the mask member with the squeegee, the squeegee is moved up in the horizontal direction while being moved away from the paste on the mask member and then lowered to lower the squeegee. screen printing method characterized by adhering paste after it Shin pull on the mask member and the step of increasing the mask member.

Images