JP2013193402A - Screen printing machine and screen printing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a screen printing machine and a screen printing method for enabling imaging operation of a camera unit and cleaning operation of a cleaning head for a mask simultaneously in parallel.SOLUTION: A camera unit 16 for imaging a mask-side mark 15m arranged on a mask 15 and a substrate-side mark 2m arranged on the upper side of a substrate 2 held below the mask 15, moves in a first horizontal moving plane S1 set below the mask 15. A cleaning head 18 which performs cleaning operation for cleaning the lower side of the mask 15, moves independently of the camera unit 16 in a second horizontal moving plane S2 set at a position lower than the mask 15 and is higher than the first horizontal moving surface S1 where the camera unit 16 moves.

Description

  The present invention relates to a screen printing machine and a screen printing method for transferring a paste to a substrate by sliding a squeegee on a mask in contact with the substrate.

  The screen printing machine is provided on the mask side mark provided on the mask and the upper surface of the substrate held below the mask by a camera unit that moves in a horizontal movement plane set below the mask that is in contact with the substrate. The substrate side mark is imaged, the substrate is brought into contact with the mask based on the positional relationship between the obtained mask side mark and the substrate side mark, and then the squeegee is slid on the mask to be supplied onto the mask. In this configuration, paste such as solder is transferred to the substrate. Then, after the paste is transferred to the substrate, the plate is separated to separate the substrate from the mask, and after the plate separation, the cleaning head is moved in the horizontal plane under the mask and attached to the lower surface of the mask. Mask cleaning for wiping and removing the paste is performed.

  Conventionally, in such a screen printing machine, the camera unit and the cleaning head are arranged in the same horizontal orthogonal coordinate table installed below the mask so that they are moved together in the same horizontal movement plane. (For example, Patent Document 1).

JP 2011-189668 A

  However, in the above-described conventional configuration, the camera unit and the cleaning head cannot be moved separately from each other. Therefore, the image pickup operation of the mark (mask side mark and substrate side mark) by the camera unit is essentially an independent operation. The cleaning operation of the mask by the cleaning head cannot be performed in parallel, and the image capturing operation of the mark by the camera unit must be performed after the mask cleaning operation by the mask unit is completed. For this reason, there has been a problem that the working time required for one substrate becomes long, and improvement of the productivity of the substrate is hindered.

  Therefore, an object of the present invention is to provide a screen printing machine and a screen printing method capable of simultaneously performing an imaging operation by a camera unit and a mask cleaning operation by a cleaning head.

  The screen printing machine according to claim 1, wherein the mask is in contact with the substrate, the mask side mark provided on the mask by moving in a first horizontal movement plane set below the mask, and the mask A camera unit that performs an imaging operation of a substrate-side mark provided on the upper surface of the substrate held below the substrate, and a position that is below the mask and higher than the first horizontal movement surface on which the camera unit moves A cleaning head that performs a cleaning operation for cleaning the lower surface of the mask by moving independently of the camera unit in a second horizontal movement plane set to the mask side mark and the mask side mark imaged by the camera unit And sliding on the mask after the substrate is brought into contact with the mask based on the positional relationship between the substrate side mark and the substrate side mark. The supplied onto serial mask paste and a squeegee to transfer to the substrate.

  A screen printer according to a second aspect is the screen printer according to the first aspect, wherein the imaging operation by the camera unit and the cleaning operation by the cleaning head are performed in parallel.

  The screen printing machine according to claim 3 is the screen printing machine according to claim 1 or 2, wherein the cleaning head has a paste wiped from a lower surface of the mask in the cleaning operation below the cleaning head. A paste receiver was provided to prevent it from falling.

  According to a fourth aspect of the present invention, there is provided a screen printing method comprising: a mask side mark provided on the mask; and a mask side mark provided on the mask by a camera unit that moves in a first horizontal movement plane set below the mask that is in contact with the substrate. An imaging process for performing an imaging operation of a substrate-side mark provided on the upper surface of the substrate held below, and a position below the mask and higher than the first horizontal movement plane on which the camera unit moves. A cleaning step of performing a cleaning operation for cleaning the lower surface of the mask with a cleaning head that moves independently of the camera unit within the set second horizontal movement plane; and the mask side mark imaged in the imaging step; Based on the positional relationship with the substrate side mark, the substrate is brought into contact with the mask, and then a squeegee is slid on the mask. And a transfer step of transferring the supplied paste on the mask to the substrate by the.

  A screen printing method according to a fifth aspect is the screen printing method according to the fourth aspect, wherein the imaging step and the cleaning step are performed in parallel.

  In the present invention, the camera unit moves in a first horizontal movement surface set below the mask, and the cleaning head is located below the mask and in a second position set higher than the first horizontal movement surface. Since the camera unit and the cleaning head move in different horizontal movement planes, the image pickup operation by the camera unit and the cleaning operation by the cleaning head can be performed in parallel. In addition, the work time required for each substrate can be shortened and the productivity of the substrate can be improved.

The top view of the screen printer in one embodiment of the present invention The front view of the screen printer in one embodiment of the present invention The side view of the screen printer in one embodiment of the present invention The block diagram which shows the control system of the screen printer in one embodiment of this invention The flowchart which shows the procedure of the screen printing operation which the screen printer in one embodiment of this invention performs (A) (b) The figure explaining the execution procedure of the screen printing operation which the screen printer in one embodiment of this invention performs The figure which shows the state which is cleaning the mask with the cleaning head with which the screen printer in one embodiment of this invention is provided. (A) (b) The figure explaining the execution procedure of the screen printing operation which the screen printer in one embodiment of this invention performs

  Embodiments of the present invention will be described below with reference to the drawings. A screen printing machine 1 shown in FIGS. 1, 2 and 3 is a device for screen-printing a paste Pt such as solder on an electrode portion 2a of a substrate 2, and a substrate carry-in conveyor 11 and a substrate holding unit on a base 10. In addition to the substrate holding unit 13 and the substrate carry-out conveyor 14 that are moved by the moving mechanism 12, a mask 15 that is held in a horizontal position above the substrate holding unit 13 and a camera unit 16 that is movably provided below the mask 15 are provided. The squeegee unit 17 is movably provided in the upper region of the mask 15 and the cleaning head 18 is movably provided below the mask 15.

  The substrate carry-in conveyor 11 carries in the substrate 2 input from the outside of the screen printer 1 and delivers it to the substrate holding unit 13. The substrate carry-out conveyor 14 carries the substrate 2 received from the substrate holding unit 13 out of the screen printer 1. That is, the substrate 2 is conveyed in the order of the substrate carry-in conveyor 11, the substrate holding unit 13, and the substrate carry-out conveyor 14, and the movement direction of the substrate 2 is set as the X-axis direction (left-right direction as viewed from the operator OP). Further, the horizontal plane direction orthogonal to the X-axis direction is defined as the Y-axis direction (front-rear direction as viewed from the operator OP), and the vertical direction is defined as the Z-axis direction.

  In FIG. 1, the mask 15 is formed of a rectangular plate-like member, and the outer edge thereof is supported by a rectangular frame-shaped mask frame 15w. A large number of openings 15 h corresponding to the electrode portions 2 a of the substrate 2 are provided in the central portion of the mask 15.

  In FIG. 1, two substrate side marks 2m are provided at one diagonal position on the substrate 2, and two mask side marks 15m corresponding to these two substrate side marks 2m are provided on the mask 15. Is provided. When the substrate 2 is raised with the two substrate-side marks 2m and the two mask-side marks 15m opposed to each other and the substrate 2 is brought into contact with the mask 15, the electrodes 2a of the substrate 2 and the mask 15 are provided. It will be in the state which the opening part 15h corresponded.

  2 and 3, the substrate holding unit 13 is provided with a base portion 13 a provided so as to be movable up and down with respect to the base 10, and a substrate transport conveyor 13 b (attached to the base portion 13 a and transporting the substrate 2 in the X-axis direction ( 1), the substrate lifting cylinder 13d that lifts and lowers the substrate 2 conveyed by the substrate conveying conveyor 13b and positioned at a predetermined substrate holding position by the lower receiving member 13c and the substrate lifting cylinder 13d are pushed up. And a pair of clamp members 13e (see also FIG. 1) for holding the substrate 2 clamped from the Y-axis direction.

  In FIG. 4, a clamp including a substrate carry-in conveyor 11, a substrate transfer conveyor 13 b of the substrate holding unit 13, an operation control of the substrate carry-out conveyor 14, an operation control of the substrate lifting cylinder 13 d, and an actuator (not shown) that drives the pair of clamp members 13 e. The control of the clamping operation of the substrate 2 by the member driving mechanism 13A is performed by the control device 20 provided in the screen printing machine 1.

  The substrate holding unit moving mechanism 12 is composed of an XYZ robot. The operation of the substrate holding unit 12 is controlled by the control device 20 to move (including rotation) the substrate holding unit 13 in the horizontal plane, and the substrate holding unit 13 is moved in the vertical direction (Z axis direction). Move (FIG. 4).

  1 and 3, the camera unit 16 includes a lower imaging camera 16a whose imaging field of view is directed downward, and an upper imaging camera 16b whose imaging field of view is directed upward, and includes a camera unit moving mechanism 16M (FIGS. 2 and 2). 3), the lower part of the mask 15 is moved in the horizontal plane direction.

  1, 2, and 3, the camera unit moving mechanism 16 </ b> M is provided on each of two left columns and two right columns among four vertical columns 21 that extend upward from the four corners of the base 10. Two lower Y-axis ball screws 22 that are attached to both the front and rear ends and extend in the Y-axis direction, a lower moving table 23 that extends in the X-axis direction by screwing both left and right ends to these two lower Y-axis ball screws 22, A lower X-axis ball screw 24 extending in the X-axis direction on the front side of the moving table 23, a camera mounting block 25 screwed into the lower X-axis ball screw 24, and two lower Y-axis ball screws 22 are driven synchronously. Then, the two lower Y-axis ball screw drive motors 26 and the lower X-axis ball screw 24 that move the lower moving table 23 in the Y-axis direction are driven to move the camera mounting block 25 in the X-axis direction. And it made from the lower X-axis ball screw drive motor 27 to the camera unit 16 is attached to the front surface of the downward moving table 23. For this reason, the camera unit 16 is integrated with the lower moving table 23 by the rotational operation of the two lower Y-axis ball screw driving motors 26 and the lower X-axis ball screw driving motor 27, so that the first horizontal moving surface below the mask 15. Move in S1 (FIGS. 2 and 3).

  In FIG. 4, rotation control of two lower Y-axis ball screw drive motors 26 and lower X-axis ball screw drive motors 27 constituting the camera unit moving mechanism 16M is performed by the control device 20. The imaging operation of the lower imaging camera 16a and the imaging operation of the upper imaging camera 16b are controlled by the control device 20, and obtained by the image data obtained by the imaging operation of the lower imaging camera 16a and the imaging operation of the upper imaging camera 16b. The image data is sent to the control device 20.

  1, 2 and 3, the squeegee unit 17 is disposed below the base portion 17 a which is movable in the Y-axis direction above the mask 15 by the operation of the squeegee unit moving mechanism 17 </ b> M composed of a horizontal orthogonal coordinate table. The squeegee 17b has a configuration provided with two squeegees 17b provided to face each other, and each squeegee 17b is independently below the base portion 17a by two pneumatic cylinders 17c attached to the base portion 17a. Is to be lifted and lowered. The operation control of the squeegee unit moving mechanism 17M and the elevation control of the squeegee 17b by the operation of each pneumatic cylinder 17c are performed by the control device 20 (FIG. 4).

  In FIG. 3, the cleaning head 18 includes two rotating bodies 31 a and 31 b (a feeding-side rotating body 31 a and a winding-side rotating body 31 b) provided in a housing 30 so as to be rotatable about the X axis, It has a paper member 32 spanned between the two rotating bodies 31a and 31b and a nozzle 33 extending in the X-axis direction that pushes up the paper member 32. The two rotating bodies 31a and 31b are arranged in the same direction. By driving the paper member 32 forward in the Y-axis direction, the cleaning part located on the upper surface of the nozzle 33 of the paper member 32 can be updated. A suction port is provided at the upper end of the nozzle 33 to contact the lower surface of the mask 15 from below through the paper member 32.

  The cleaning head 18 is movable in the Y-axis direction by a cleaning head moving mechanism 18M (FIGS. 2 and 3) composed of a horizontal rectangular coordinate robot. The cleaning head moving mechanism 18M includes two upper Y-axis ball screws 41 that extend in the Y-axis direction with the front and rear ends attached to the left two and the right two of the four vertical struts 21 described above. The left and right ends of the two upper Y-axis ball screws 41 are screwed into the two upper Y-axis ball screws 41 to extend in the X-axis direction, and the upper moving table 42 to which the housing 30 of the cleaning head 18 is attached, and the two upper Y-axis ball screws 41. It consists of two upper Y-axis ball screw drive motors 43 that drive in synchronization and move the upper moving table 42 in the Y-axis direction.

  Here, the two upper Y-axis ball screws 41 and the upper moving table 42 are positioned above the two lower Y-axis ball screws 22 and the lower X-axis ball screw 24 that constitute the camera unit moving mechanism 16M. Therefore, the cleaning head 18 moves in the second horizontal movement surface S2 (FIGS. 2 and 3) below the mask 15 together with the upper movement table 42 by the operation of the two upper Y-axis ball screw drive motors 43. Moving. The second horizontal movement surface S <b> 2 on which the cleaning head 18 moves is at a higher position than the first horizontal movement surface S <b> 1 on which the camera unit 16 moves. Therefore, the cleaning head 18 has a lower horizontal movement surface than the camera unit 16. Will move within.

  In FIG. 4, rotation control of the two upper Y-axis ball screw drive motors 43 constituting the cleaning head moving mechanism 18 </ b> M is performed by the control device 20. Further, the operation of causing the paper member 32 to advance and updating the cleaning portion of the paper member 32 stretched over the upper surface of the nozzle 33 is performed by a rotating body drive motor in which the control device 20 drives the two rotating bodies 31a and 31b described above. This is done by activating 31A. Further, the vacuum suction operation through the suction port of the nozzle 33 is performed when the control device 20 controls the operation of the suction mechanism 18A including an actuator (not shown).

  Next, the execution procedure of the screen printing operation by the screen printer 1 will be described with reference to the flowchart of FIG. 5 and the explanatory diagrams of FIGS.

  When the screen printing operation is performed, the control device 20 first loads the substrate 2 loaded from the outside of the screen printing machine 1 by the substrate carry-in conveyor 11, transfers it to the substrate transfer conveyor 13 b, and positions it at the predetermined work position described above. (Substrate carrying-in process. Step ST1 shown in FIG. 5). Then, the substrate 2 is pushed up by the substrate elevating cylinder 13d (arrow A shown in FIG. 6A) and the substrate 2 is clamped by the clamp member 13e (arrow B shown in FIG. 6A). Holding (substrate loading and holding step; step ST2 shown in FIG. 5; FIG. 6A).

  When holding the substrate 2 as described above, the control device 20 controls the operation of the two lower Y-axis ball screw drive motors 26 and the lower X-axis ball screw drive motor 27 that constitute the camera unit moving mechanism 16M. The unit 16 is moved within the first horizontal movement surface S1. Then, the upper imaging camera 16b is positioned immediately below the mask side mark 15m provided on the mask 15, and then the upper imaging camera 16b performs imaging of the mask side mark 15m, and the position of the mask 15 is determined from the image data. After grasping (mask-side mark imaging step; step ST3 shown in FIG. 5), the controller 20 completes the imaging of the mask-side mark 15m by the camera unit 16, and similarly, the two lower Y-axis ball screw drive motors 26 and The operation of the lower X-axis ball screw drive motor 27 is controlled to move the camera unit 16 within the first horizontal movement plane S1, and the lower imaging camera 16a is positioned immediately above the board-side mark 2m provided on the board 2. In addition, the lower imaging camera 16a captures the board-side mark 2m and grasps the position of the board 2 from the image data. Substrate side marks imaging step. Step ST4 shown in FIG. 5).

  Here, the order of step ST3 and step ST4 may be reversed, but imaging of the mask side mark 15m is performed only when the mask 15 is first installed.

  As described above, in the present embodiment, the camera unit 16 moves within the first horizontal movement plane S1 set below the mask 15 and below the mask side mark 15m provided on the mask 15 and the mask 15. The imaging operation of the substrate side mark 2m provided on the upper surface of the held substrate 2 is performed.

  The controller 20 cleans the lower surface of the mask 15 with the cleaning head 18 in parallel with the imaging of the mask side mark 15m in step ST3 and the imaging of the substrate side mark 2m in step ST4 (cleaning execution process, FIG. 5). Step ST5 shown). That is, the imaging operation by the camera unit 16 (imaging process of step ST3 and step ST4) and the cleaning operation by the cleaning head 18 (step ST5) are executed simultaneously.

  In the cleaning of the mask 15 in step ST5, the control device 20 controls the operation of the two upper Y-axis ball screw drive motors 43 constituting the cleaning head moving mechanism 18M, and the cleaning portion of the paper member 32 is placed on the lower surface of the mask 15. Then, the operation of the suction mechanism 18A is controlled to cause the nozzle 33 to perform vacuum suction while moving the cleaning head 18 in the second horizontal movement surface S2 in the Y-axis direction (shown in FIG. 7). This is done by making the arrow C). As a result, the paste Pt (the remaining residue of the paste Pt) adhering to the lower surface of the mask 15 is wiped off by the paper member 32, and the lower surface of the mask 15 is cleaned.

  The cleaning of the mask 15 by the cleaning head 18 may be performed for each substrate, but may be performed for each predetermined number of substrates.

  As described above, in the present embodiment, the cleaning head 18 is located in the second horizontal movement surface S2 that is set below the mask 15 and higher than the first horizontal movement surface S1 on which the camera unit 16 moves. Is moved independently of the camera unit 16 to perform a cleaning operation for cleaning the lower surface of the mask 15.

  During the cleaning of the lower surface of the mask 15, the paste Pt wiped from the lower surface of the mask 15 may fall without adhering to the paper member 32 or after adhering to the paper member 32. Is stored in the housing 30 so that it does not fall below the cleaning head 18. That is, in the present embodiment, the housing 30 of the cleaning head 18 functions as a paste receiver that prevents the paste Pt wiped from the lower surface of the mask 15 from dropping below the cleaning head 18.

  The control device 20 captures the substrate side mark 2m and the mask side mark 15m by the camera unit 16 in step ST3 and step ST4. If necessary, the substrate holding is performed after the mask 15 is cleaned in step ST5. The unit 13 is moved in the horizontal plane so that the substrate-side mark 2m and the mask-side mark 15m face each other vertically (that is, the positional relationship between the mask-side mark 15m imaged by the camera unit 16 and the substrate-side mark 2m). Based on the above, alignment in the horizontal plane direction of the substrate 2 with respect to the mask 15 is performed (alignment step; step ST6 shown in FIG. 5).

  When the alignment of the substrate 2 with respect to the mask 15 is completed, the control device 20 controls the operation of the substrate holding unit moving mechanism 12 to raise the substrate holding unit 13 with respect to the base 10 (in FIG. 6B). Arrow D1), the substrate 2 is brought into contact with the mask 15 by bringing the upper surface of the substrate 2 held by the pair of clamp members 13e into contact with the lower surface of the mask 15 (contact process; step ST7 shown in FIG. 5; FIG. b)). As a result, the electrode portion 2a on the substrate 2 and the opening 15h of the mask 15 are brought into agreement.

  When the control device 20 brings the substrate 2 into contact with the mask 15, squeegeeing is performed by the squeegee 17 b to transfer the paste Pt previously supplied onto the mask 15 to the electrode portion 2 a of the substrate 2 (transfer process, FIG. 5). Step ST8 shown). Specifically, this squeezing is a state in which one of the two squeegees 17b included in the squeegee unit 17 is moved downward (arrow E1 shown in FIG. 8A) and brought into contact with the upper surface of the mask 15. This is performed by moving the base portion 17a in the horizontal direction (arrow F shown in FIG. 8A) while maintaining the above. As a result, the squeegee 17b slides on the mask 15, and the paste Pt on the mask 15 is scraped by the squeegee 17b and pushed into the opening 15h of the mask 15 and transferred onto the electrode portions 2a of the respective substrates 2. .

  That is, in this embodiment, the squeegee 17b slides on the mask 15 after the mask 15 is brought into contact with the substrate 2 based on the positional relationship between the mask side mark 15m and the substrate side mark 2m imaged by the camera unit 16. By moving, the paste Pt supplied onto the mask 15 is pushed into the opening 15 h of the mask 15 and transferred to the electrode portion 2 a of the substrate 2.

  After transferring the paste Pt to the electrode portion 2a of the substrate 2, the control device 20 moves up the squeegee 17b that is in contact with the mask 15 (arrow E2 shown in FIG. 8B), and then the substrate. By operating the holding unit moving mechanism 12 and lowering the substrate holding unit 13, the substrate 2 is separated from the mask 15 (arrow D <b> 2 shown in FIG. 8B), and plate separation is performed (plate separation step, FIG. 5). Step ST9 shown in Fig. 8B). As a result, the paste Pt remains on the electrode portion 2 a of the substrate 2, and the paste Pt is printed on the substrate 2.

  Here, the substrate holding unit moving mechanism 12 functions as a plate separating mechanism for separating the substrate 2 from the mask 15 after the transfer of the paste Pt to the substrate 2 by the squeegee 17b is completed.

  After separating the plate, the control device 20 controls the operation of the substrate holding unit 13 to release the substrate 2 (holding release step, step ST10 shown in FIG. 5). Specifically, the release of the holding of the substrate 2 is performed by the control device 20 controlling the operation of the clamp member driving mechanism 13A to open the clamp member 13e, and then operating the substrate lifting cylinder 13d to move the substrate 2 out. This is done by lowering and lowering both ends of the substrate 2 onto the pair of substrate transfer conveyors 13b (see FIG. 3).

  When the control device 20 releases the holding of the substrate 2, the substrate holding unit moving mechanism 12 is operated to move the substrate holding unit 13 in the horizontal plane, and the orientation of the substrate transfer conveyor 13 b is adjusted, and then the substrate transfer conveyor 13 b and the substrate are moved. The carry-out conveyor 14 is operated to carry the substrate 2 out of the screen printing machine 1 (substrate carry-out process, step ST11 shown in FIG. 5). This completes a series of screen printing operations.

  In the state where the separation of the plate is performed in the above-described step ST9, the remaining residue of the paste Pt is attached to the lower surface of the mask 15, but the remaining residue of the paste Pt is about the next substrate 2. In the screen printing operation, the mask 15 is removed by the cleaning head 18 (step ST5) performed in parallel with the imaging of the mask side mark 15m and the substrate side mark 2m by the camera unit 16 (step ST3 and step ST4). .

  As described above, the screen printing method by the screen printer 1 according to the present embodiment is performed by the camera unit 16 that moves in the first horizontal movement surface S1 set below the mask 15 that is in contact with the substrate 2. An imaging step (step ST3 and step ST4) for performing an imaging operation of the mask side mark 15m provided on the substrate 15 and the substrate side mark 2m provided on the upper surface of the substrate 2 held below the mask 15; The lower surface of the mask 15 is moved by the cleaning head 18 that moves independently of the camera unit 16 in the second horizontal movement surface S2 set at a position higher than the first horizontal movement surface S1 on which the camera unit 16 moves. The mask side imaged in the cleaning process (step ST5) for performing the cleaning operation for cleaning the image and the imaging process After the substrate 2 is brought into contact with the mask 15 based on the positional relationship between the mark 15m and the substrate-side mark 2m, the paste Pt supplied on the mask 15 is slid on the mask 15 by sliding the squeegee 17b. This includes a transfer step (step ST8) for transferring to the substrate.

  As described above, in the screen printer 1 (screen printing method) in the present embodiment, the camera unit 16 moves within the first horizontal movement surface S1 set below the mask 15, and the cleaning head 18 The camera unit 16 and the cleaning head 18 are moved in different horizontal directions below the mask 15 and in a second horizontal movement surface S2 set at a position higher than the first horizontal movement surface S1. Since it moves in the moving plane, the imaging operation by the camera unit 16 and the cleaning operation by the cleaning head 18 can be performed in parallel, and the work time required for each substrate 2 can be shortened and the productivity of the substrate 2 can be reduced. Can be improved.

  Provided are a screen printing machine and a screen printing method capable of simultaneously performing an imaging operation by a camera unit and a mask cleaning operation by a cleaning head.

DESCRIPTION OF SYMBOLS 1 Screen printer 2 Board | substrate 2m Board | substrate side mark 15 Mask 15m Mask side mark 16 Camera unit 17b Squeegee 18 Cleaning head 30 Case (paste receptacle)
S1 First horizontal movement surface S2 Second horizontal movement surface Pt Paste

Claims (5)

A mask in contact with the substrate;
Imaging of a mask-side mark provided on the mask by moving within a first horizontal movement plane set below the mask and a substrate-side mark provided on the upper surface of the substrate held below the mask A camera unit that operates,
The mask moves by moving independently of the camera unit in a second horizontal movement plane set below the mask and higher than the first horizontal movement plane on which the camera unit moves. A cleaning head for performing a cleaning operation for cleaning the lower surface of
Based on the positional relationship between the mask-side mark and the substrate-side mark imaged by the camera unit, the substrate is brought into contact with the mask and then supplied onto the mask by sliding on the mask. A screen printing machine comprising a squeegee for transferring the paste to the substrate.   The screen printing machine according to claim 1, wherein the imaging operation by the camera unit and the cleaning operation by the cleaning head are performed in parallel.   3. The screen printing according to claim 1, wherein the cleaning head includes a paste receiver that prevents the paste wiped off from the lower surface of the mask in the cleaning operation from dropping below the cleaning head. 4. Machine. Provided on a mask side mark provided on the mask and an upper surface of the substrate held below the mask by a camera unit that moves within a first horizontal movement plane set below the mask that is in contact with the substrate. An imaging process for performing an imaging operation of the substrate-side mark that has been performed;
A cleaning head that moves independently of the camera unit in a second horizontal movement plane that is set below the mask and higher than the first horizontal movement plane on which the camera unit moves. A cleaning process for performing a cleaning operation for cleaning the lower surface of the mask;
After the substrate is brought into contact with the mask based on the positional relationship between the mask-side mark and the substrate-side mark imaged in the imaging step, the squeegee is slid on the mask to be supplied onto the mask. And a transfer step of transferring the paste to the substrate.   The screen printing method according to claim 4, wherein the imaging step and the cleaning step are performed in parallel.

Images