JP5207163B2 - 埋込配線の形成方法、表示装置用基板及び当該基板を有する表示装置 - Google Patents
埋込配線の形成方法、表示装置用基板及び当該基板を有する表示装置 Download PDFInfo
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- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 claims description 3
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- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
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- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/12—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
- H05K3/1258—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by using a substrate provided with a shape pattern, e.g. grooves, banks, resist pattern
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- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
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- G—PHYSICS
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
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- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
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- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
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- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/107—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by filling grooves in the support with conductive material
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136286—Wiring, e.g. gate line, drain line
- G02F1/136295—Materials; Compositions; Manufacture processes
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
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- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/02—Fillers; Particles; Fibers; Reinforcement materials
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- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/05—Patterning and lithography; Masks; Details of resist
- H05K2203/0562—Details of resist
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- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
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Description
絶縁性基板の表面に、所望の配線パターンに対応する開口部を持つマスクを形成する工程と、
前記マスクを用いて前記絶縁性基板の表面を選択的に除去することにより、前記配線パターンに対応する平面形状を持つ溝を前記絶縁性基板の表面に形成する工程と、
前記マスクを除去することなく前記絶縁性基板の表面全体に金属ナノ粒子インクを載置して、前記溝の内部に前記金属ナノ粒子インクを充填する工程と、
加熱により前記金属ナノ粒子インクを仮硬化させて金属ナノ粒子インク膜を形成する工程と、
前記マスクを剥離することにより前記金属ナノ粒子インク膜の当該マスク上にある部分を選択的に除去し、もって前記溝の内部に当該金属ナノ粒子インク膜を残す工程と、
加熱により前記溝の内部に残った当該金属ナノ粒子インク膜を本硬化させ、もって所望の埋込配線を得る工程と
を備えたことを特徴とするものである。
絶縁性基板の表面の溝の内部に形成された埋込配線を有する表示装置用基板において、
前記埋込配線が、硬化した金属ナノ粒子から形成されていることを特徴とするものである。
絶縁性基板の表面の溝の内部に形成された埋込配線を有する表示装置用基板において、
前記埋込配線が、本発明の第1の観点による埋込配線の形成方法を用いて前記絶縁性基板の表面の溝の内部に形成されていることを特徴とするものである。
本発明の第4の観点による表示装置用基板を備えていることを特徴とするものである。
なお、上記実施形態は、本発明の好適な例を示すものであり、本発明はこの実施形態に限定されず、種々の変更が可能なことは言うまでもない。
2 ゲート配線
3 ゲート電極
4 アイランド状半導体膜
5 ソース電極
6 コンタクトホール
7 ドレイン配線
8 ドレイン電極8
9 ゲート遮光膜
10 画素電極
11 コンタクトホール
12 透明導電膜
13 ゲート絶縁膜
14 n+型半導体膜
15 パッシベーション膜
17 マスク
18 絶縁性基板の溝
19 親インク処理層
20 金属ナノ粒子インク膜
Claims (7)
- 絶縁性基板の表面に、所望の配線パターンに対応する開口部を持つマスクを形成する工程と、
前記マスクを用いて前記絶縁性基板の表面を選択的に除去することにより、前記配線パターンに対応する平面形状を持つ溝を前記絶縁性基板の表面に形成する工程と、
表面エネルギーを増加させて金属ナノ粒子インクの密着性を向上させるための親インク処理を、前記マスクの表面及び前記マスクより露出した前記溝の表面に対して行う工程と、
前記マスクを除去することなく金属ナノ粒子インクを前記絶縁性基板の表面全体に載置することにより、前記親インク処理を行った前記マスクの表面及び前記マスクより露出した前記溝の表面を前記金属ナノ粒子インクで覆うと共に、前記溝の内部に前記金属ナノ粒子インクを充填する工程と、
前記マスクの表面及び前記溝の内部にある前記金属ナノ粒子インクを加熱して仮硬化させる工程と、
前記マスクを剥離することにより、仮硬化した前記金属ナノ粒子インクの前記マスクの表面にある部分を除去し、もって仮硬化した前記金属ナノ粒子インクの前記溝の内部にある部分を残す工程と、
仮硬化した前記金属ナノ粒子インクの前記溝の内部にある部分を加熱により本硬化させ、もって所望の埋込配線を得る工程とを備え、
前記親インク処理を行う前記工程では、前記親インク処理として前記絶縁性基板に対するプラズマ処理もしくは紫外線処理が行われ、それによって前記溝の内面の表面エネルギーが前記金属ナノ粒子インクの表面張力よりも大きくされることを特徴とする埋込配線の形成方法。 - 前記金属ナノ粒子の平均粒径が1nm〜100nmの範囲に設定されている請求項1に記載の埋込配線の形成方法。
- 前記金属ナノ粒子が、Cr,Fe,Ni,Cu,Zn,Ge,Pd,Pt,Ag,In,Sn,Te,Au,B,MnおよびRhからなる群から選ばれる少なくとも1種の金属または合金の微粒子である請求項1または2に記載の埋込配線の形成方法。
- 前記金属ナノ粒子が、Cr−Ni,Fe−Si,Fe−Ni,Co−Ni,Fe−Co,Cu−Si,Cu−Sn,Pd−Pt,Ag−Pd,Ag−In,Ag−Au,Ag−Cu,Au−Ge,Au−Sn,Au−Pd,Fe−Pd,Co−PdおよびNi−Pdからなる群から選ばれる少なくとも1種の合金の微粒子とされる請求項1または2に記載の埋込配線の形成方法。
- 絶縁性基板の表面の溝の内部に形成された埋込配線を有する表示装置用基板において、
前記埋込配線が、請求項1〜4のいずれか1項に記載の埋込配線の形成方法を用いて前記絶縁性基板の表面の溝の内部に形成されていることを特徴とする表示装置用基板。 - 前記埋込配線が液晶表示装置用基板のゲート配線である請求項5に記載の表示装置用基板。
- 請求項5または6に記載の表示装置用基板を備えていることを特徴とする表示装置。
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US12/059,765 US20080239680A1 (en) | 2007-03-30 | 2008-03-31 | Method of forming buried wiring lines, and substrate and display device using the same |
CN2008100902429A CN101276779B (zh) | 2007-03-30 | 2008-03-31 | 用于形成隐蔽布线的方法及采用其的衬底和显示装置 |
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TWI339444B (en) | 2007-05-30 | 2011-03-21 | Au Optronics Corp | Conductor structure, pixel structure, and methods of forming the same |
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WO2010079706A1 (ja) * | 2009-01-08 | 2010-07-15 | シャープ株式会社 | 液晶パネル用アレイ基板と該基板を備える液晶表示装置 |
KR101046099B1 (ko) * | 2009-06-05 | 2011-07-01 | 삼성전기주식회사 | 금속 배선의 형성방법 및 이를 이용하여 제조된 인쇄회로기판 |
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US9148957B2 (en) * | 2011-03-04 | 2015-09-29 | Sharp Kabushiki Kaisha | Electronic circuit substrate, display device, and wiring substrate |
KR101954985B1 (ko) * | 2012-09-17 | 2019-03-08 | 삼성디스플레이 주식회사 | 디스플레이 장치 |
FR3023979B1 (fr) * | 2014-07-17 | 2016-07-29 | Saint Gobain | Support electroconducteur pour oled, oled l'incorporant, et sa fabrication. |
CN104238172A (zh) * | 2014-09-10 | 2014-12-24 | 中国科学院微电子研究所 | 一种像素表面高平整度实现方法 |
CN105093751B (zh) * | 2015-08-18 | 2018-09-11 | 京东方科技集团股份有限公司 | 预防esd的goa布局设计 |
US10295875B2 (en) | 2017-05-12 | 2019-05-21 | A.U. Vista, Inc. | TFT array having conducting lines with low resistance |
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US7625814B2 (en) * | 2006-03-29 | 2009-12-01 | Asm Nutool, Inc. | Filling deep features with conductors in semiconductor manufacturing |
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