JP5194795B2 - レーザ光源のスタンバイ方法 - Google Patents
レーザ光源のスタンバイ方法 Download PDFInfo
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- JP5194795B2 JP5194795B2 JP2007544093A JP2007544093A JP5194795B2 JP 5194795 B2 JP5194795 B2 JP 5194795B2 JP 2007544093 A JP2007544093 A JP 2007544093A JP 2007544093 A JP2007544093 A JP 2007544093A JP 5194795 B2 JP5194795 B2 JP 5194795B2
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- 239000004065 semiconductor Substances 0.000 claims description 35
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
- H01S3/2383—Parallel arrangements
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
- G02F1/3534—Three-wave interaction, e.g. sum-difference frequency generation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
- H01S3/0092—Nonlinear frequency conversion, e.g. second harmonic generation [SHG] or sum- or difference-frequency generation outside the laser cavity
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
- H01S3/2375—Hybrid lasers
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
- G02F1/3532—Arrangements of plural nonlinear devices for generating multi-colour light beams, e.g. arrangements of SHG, SFG, OPO devices for generating RGB light beams
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
- G02F1/354—Third or higher harmonic generation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
- H01S3/067—Fibre lasers
- H01S3/06754—Fibre amplifiers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/10007—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating in optical amplifiers
- H01S3/10015—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating in optical amplifiers by monitoring or controlling, e.g. attenuating, the input signal
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
- H01S5/0607—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying physical parameters other than the potential of the electrodes, e.g. by an electric or magnetic field, mechanical deformation, pressure, light, temperature
- H01S5/0612—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying physical parameters other than the potential of the electrodes, e.g. by an electric or magnetic field, mechanical deformation, pressure, light, temperature controlled by temperature
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- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Semiconductor Lasers (AREA)
Description
Claims (7)
- レーザ発振部から発生するレーザ光を、光ファイバ増幅器を用いて光増幅し、波長変換素子を用いた波長変換光学系により波長変換し、深紫外光を形成するレーザ光源をスタンバイさせる方法であって、スタンバイ時には、前記光ファイバ増幅器を熱平衡状態とするように通常使用される場合とほぼ同じ出力のレーザ光を前記光ファイバ増幅器に入射させるとともに、前記波長変換素子の波長変換効率を低下させて深紫外光の発生を抑えることを特徴とするレーザ光源のスタンバイ方法。
- 前記波長変換素子の波長変換効率を低下させる方法が、前記レーザ発振部を構成する半導体レーザの少なくとも1つの、発振波長を制御する温度を、当該レーザ光源が通常使用されている場合の温度と異なる温度にし、前記レーザ発振部から発生するレーザ光の波長を変化させることであることを特徴とする請求項1に記載のレーザ光源のスタンバイ方法。
- 前記波長変換素子が温度位相整合結晶で構成され、前記波長変換素子の波長変換効率を低下させる方法が、前記温度位相整合結晶の位相整合状態を崩すように、前記波長変換素子のうち温度制御されている波長変換素子の少なくとも1つの温度を、当該レーザ光源が通常使用されている場合の温度と異なる温度することであることを特徴とする請求項1に記載のレーザ光源のスタンバイ方法。
- 前記波長変換素子が非線形光学結晶であり、前記波長変換素子の波長変換効率を低下させる方法が、前記非線形光学結晶の結晶軸と光軸とのなす角度を、当該レーザ光源が通常使用されている場合の角度と異なる角度にする方法であることを特徴とする請求項1に記載のレーザ光源のスタンバイ方法。
- 複数のレーザ発振部から発生するレーザ光を、光ファイバ増幅器を用いて光増幅し、波長変換素子を用いた波長変換光学系により深紫外光を形成するレーザ光源をスタンバイさせる方法であって、スタンバイ時には、前記光ファイバ増幅器を熱平衡状態とするように通常使用される場合とほぼ同じ出力のレーザ光を前記光ファイバ増幅器に入射させるとともに、前記各レーザ発振部から発生するパルスレーザ光のタイミングの相対的な関係を、当該レーザ光源が通常使用されている場合の相対的な関係からずらせて深紫外光の発生を抑えることを特徴とするレーザ光源のスタンバイ方法。
- 前記レーザ発振部が半導体レーザと電気光学素子(EOM)を有し、前記各レーザ発振部から発生するパルスレーザ光のタイミングの相対的な関係は、前記半導体レーザから発生するパルスレーザ光の相対的な関係、又は前記EOMによってパルス切り出しされるパルスレーザ光のタイミングの相対的な関係であることを特徴とする請求項5に記載のレーザ光源のスタンバイ方法。
- 前記レーザ光源は、前記各レーザ光を、前記各レーザ発振器に対応して設けられた光ファイバ増幅器を用いて光増幅するものであることを特徴とする請求項5に記載のレーザ光源のスタンバイ方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007544093A JP5194795B2 (ja) | 2005-11-10 | 2006-10-27 | レーザ光源のスタンバイ方法 |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
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JP2005325862 | 2005-11-10 | ||
JP2005325862 | 2005-11-10 | ||
JP2007544093A JP5194795B2 (ja) | 2005-11-10 | 2006-10-27 | レーザ光源のスタンバイ方法 |
PCT/JP2006/321472 WO2007055110A1 (ja) | 2005-11-10 | 2006-10-27 | レーザ光源のスタンバイ方法 |
Publications (2)
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JPWO2007055110A1 JPWO2007055110A1 (ja) | 2009-04-30 |
JP5194795B2 true JP5194795B2 (ja) | 2013-05-08 |
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JP2007544093A Active JP5194795B2 (ja) | 2005-11-10 | 2006-10-27 | レーザ光源のスタンバイ方法 |
Country Status (8)
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US (2) | US7974320B2 (ja) |
EP (1) | EP1947506B1 (ja) |
JP (1) | JP5194795B2 (ja) |
KR (1) | KR101527224B1 (ja) |
CN (1) | CN101268416B (ja) |
HK (1) | HK1115199A1 (ja) |
IL (1) | IL190455A (ja) |
WO (1) | WO2007055110A1 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IL195050A (en) | 2008-11-02 | 2015-03-31 | Elbit Sys Electro Optics Elop | Modulation of frequency difference generator is pumped by fiber laser |
JP5455044B2 (ja) * | 2010-02-02 | 2014-03-26 | 株式会社ニコン | レーザ装置 |
KR20200030633A (ko) * | 2012-07-31 | 2020-03-20 | 가부시키가이샤 니콘 | 레이저 장치, 그 레이저 장치를 구비한 노광 장치 및 검사 장치 |
JP5709072B2 (ja) * | 2014-01-14 | 2015-04-30 | 株式会社ニコン | レーザ装置および光発生方法 |
US20170026292A1 (en) * | 2015-07-20 | 2017-01-26 | Schweitzer Engineering Laboratories, Inc. | Communication link failure detection in a software defined network |
JP2020053423A (ja) * | 2018-09-21 | 2020-04-02 | 浜松ホトニクス株式会社 | レーザ装置及びレーザ波形制御方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04109226A (ja) * | 1990-08-30 | 1992-04-10 | Hitachi Metals Ltd | 波長変換素子 |
JPH10153806A (ja) * | 1996-11-22 | 1998-06-09 | Ushio Inc | 高調波出力安定化方法および紫外線レーザ装置並びにマーキング装置 |
JP2001353176A (ja) * | 2000-04-13 | 2001-12-25 | Nikon Corp | レーザ治療装置 |
WO2004054050A1 (ja) * | 2002-12-10 | 2004-06-24 | Nikon Corporation | 紫外光源、紫外光源を用いた光治療装置、および紫外光源を用いた露光装置 |
Family Cites Families (10)
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US4660204A (en) * | 1984-08-02 | 1987-04-21 | Hughes Aircraft Company | CO2 TEA laser utilizing an intra-cavity prism Q-switch |
US5060233A (en) * | 1989-01-13 | 1991-10-22 | International Business Machines Corporation | Miniature blue-green laser source using second-harmonic generation |
US5867305A (en) * | 1996-01-19 | 1999-02-02 | Sdl, Inc. | Optical amplifier with high energy levels systems providing high peak powers |
JPH1126857A (ja) * | 1997-07-02 | 1999-01-29 | Fuji Photo Film Co Ltd | レーザーダイオード励起固体レーザー装置および放射線画像読取装置 |
JP3997450B2 (ja) * | 1998-03-13 | 2007-10-24 | ソニー株式会社 | 波長変換装置 |
JP3977529B2 (ja) * | 1998-11-18 | 2007-09-19 | 三菱電機株式会社 | 波長変換レーザ装置およびレーザ加工装置 |
US6490309B1 (en) * | 1999-07-21 | 2002-12-03 | Fuji Photo Film Co., Ltd. | Laser-diode-pumped laser apparatus in which Pr3+-doped laser medium is pumped with GaN-based compound laser diode |
US7110426B2 (en) * | 2001-08-06 | 2006-09-19 | Sony Corporation | Laser beam generating apparatus |
TWI232965B (en) * | 2003-12-23 | 2005-05-21 | Univ Tsinghua | A high-efficiency multiple-pass nonlinear optical frequency converter and amplitude modulator with a built-in electro-optic phase compensator |
JP4458839B2 (ja) * | 2003-12-25 | 2010-04-28 | 株式会社ニデック | レーザ治療装置 |
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2006
- 2006-10-27 US US11/992,321 patent/US7974320B2/en active Active
- 2006-10-27 KR KR1020087003686A patent/KR101527224B1/ko active IP Right Grant
- 2006-10-27 EP EP06832396A patent/EP1947506B1/en active Active
- 2006-10-27 JP JP2007544093A patent/JP5194795B2/ja active Active
- 2006-10-27 WO PCT/JP2006/321472 patent/WO2007055110A1/ja active Application Filing
- 2006-10-27 CN CN2006800342873A patent/CN101268416B/zh active Active
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2008
- 2008-03-26 IL IL190455A patent/IL190455A/en active IP Right Grant
- 2008-10-02 HK HK08110998.3A patent/HK1115199A1/xx not_active IP Right Cessation
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2011
- 2011-06-07 US US13/154,705 patent/US9083151B2/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04109226A (ja) * | 1990-08-30 | 1992-04-10 | Hitachi Metals Ltd | 波長変換素子 |
JPH10153806A (ja) * | 1996-11-22 | 1998-06-09 | Ushio Inc | 高調波出力安定化方法および紫外線レーザ装置並びにマーキング装置 |
JP2001353176A (ja) * | 2000-04-13 | 2001-12-25 | Nikon Corp | レーザ治療装置 |
WO2004054050A1 (ja) * | 2002-12-10 | 2004-06-24 | Nikon Corporation | 紫外光源、紫外光源を用いた光治療装置、および紫外光源を用いた露光装置 |
Also Published As
Publication number | Publication date |
---|---|
US20090110012A1 (en) | 2009-04-30 |
US7974320B2 (en) | 2011-07-05 |
WO2007055110A1 (ja) | 2007-05-18 |
US9083151B2 (en) | 2015-07-14 |
JPWO2007055110A1 (ja) | 2009-04-30 |
KR101527224B1 (ko) | 2015-06-08 |
IL190455A (en) | 2012-12-31 |
EP1947506B1 (en) | 2012-05-02 |
KR20080066912A (ko) | 2008-07-17 |
EP1947506A1 (en) | 2008-07-23 |
EP1947506A9 (en) | 2008-10-08 |
CN101268416A (zh) | 2008-09-17 |
IL190455A0 (en) | 2008-11-03 |
EP1947506A4 (en) | 2009-10-28 |
HK1115199A1 (en) | 2008-11-21 |
CN101268416B (zh) | 2011-03-30 |
US20110268142A1 (en) | 2011-11-03 |
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