JP5187735B2 - Bga型半導体部品の実装方法及び部品実装機の吸着ノズル - Google Patents
Bga型半導体部品の実装方法及び部品実装機の吸着ノズル Download PDFInfo
- Publication number
- JP5187735B2 JP5187735B2 JP2008017409A JP2008017409A JP5187735B2 JP 5187735 B2 JP5187735 B2 JP 5187735B2 JP 2008017409 A JP2008017409 A JP 2008017409A JP 2008017409 A JP2008017409 A JP 2008017409A JP 5187735 B2 JP5187735 B2 JP 5187735B2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor component
- bumps
- suction nozzle
- component
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000004065 semiconductor Substances 0.000 title claims description 120
- 238000000034 method Methods 0.000 title claims description 16
- 238000001179 sorption measurement Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 description 13
- 238000005452 bending Methods 0.000 description 3
- 238000005336 cracking Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 229910000679 solder Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16135—Disposition the bump connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/16145—Disposition the bump connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
Landscapes
- Supply And Installment Of Electrical Components (AREA)
- Wire Bonding (AREA)
Description
このような問題は、BGA型の半導体部品を基板上に実装する場合でも同様に生じる問題である。
図1に示すように、基板20上に、下面にバンプ(半田ボール)21,22が配列された複数のBGA型の半導体部品23,24を上下に積み重ねてスタック実装する。各半導体部品23,24は、フリップチップ又はCSP等の半導体パッケージにより構成されている。
Claims (2)
- 下面にバンプが配列された複数の半導体部品を上下に積み重ねて実装するBGA型半導体部品の実装方法において、
部品実装機の吸着ノズルで上方から半導体部品を吸着する際に、当該吸着ノズルのうちの半導体部品上面に当接する部分(以下「ノズル当接部」という)が当該半導体部品下面のバンプのうちの最外周に配置されたバンプの真上のみに位置するように吸着し、吸着した半導体部品を下側の半導体部品上に積み重ねる際に、吸着した半導体部品のバンプのうちの少なくとも前記ノズル当接部の真下に位置するバンプが、下側の半導体部品のいずれかのバンプの真上に位置するように積み重ね、その状態で、前記吸着ノズルにより上方から押圧力を作用させて上下の半導体部品間を前記バンプで接合することを特徴とするBGA型半導体部品の実装方法。 - 請求項1に記載のBGA型半導体部品の実装方法に用いる部品実装機の吸着ノズルにおいて、
吸着ノズルは、前記ノズル当接部が当該半導体部品下面のバンプのうちの最外周に配置されたバンプの真上のみに位置するようなサイズに形成され、部品実装機に交換可能に取り付けられることを特徴とする部品実装機の吸着ノズル。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008017409A JP5187735B2 (ja) | 2008-01-29 | 2008-01-29 | Bga型半導体部品の実装方法及び部品実装機の吸着ノズル |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008017409A JP5187735B2 (ja) | 2008-01-29 | 2008-01-29 | Bga型半導体部品の実装方法及び部品実装機の吸着ノズル |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009182007A JP2009182007A (ja) | 2009-08-13 |
JP5187735B2 true JP5187735B2 (ja) | 2013-04-24 |
Family
ID=41035772
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008017409A Active JP5187735B2 (ja) | 2008-01-29 | 2008-01-29 | Bga型半導体部品の実装方法及び部品実装機の吸着ノズル |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5187735B2 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5574690B2 (ja) * | 2009-12-14 | 2014-08-20 | Juki株式会社 | 部品実装装置及び部品実装方法 |
JP2012138401A (ja) * | 2010-12-24 | 2012-07-19 | Elpida Memory Inc | 半導体装置の製造方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR970000214B1 (ko) * | 1993-11-18 | 1997-01-06 | 삼성전자 주식회사 | 반도체 장치 및 그 제조방법 |
TW459315B (en) * | 1999-04-06 | 2001-10-11 | Walsin Advanced Electronics | Stack-up chip packaging |
JP4521984B2 (ja) * | 2000-11-29 | 2010-08-11 | 京セラ株式会社 | 積層型半導体装置および実装基板 |
JP3687638B2 (ja) * | 2002-08-30 | 2005-08-24 | 松下電器産業株式会社 | 電子部品のボンディング装置およびボンディングツール |
-
2008
- 2008-01-29 JP JP2008017409A patent/JP5187735B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
JP2009182007A (ja) | 2009-08-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US9768137B2 (en) | Stud bump structure for semiconductor package assemblies | |
WO2009116517A1 (ja) | 電子装置及びその製造方法 | |
US20090014852A1 (en) | Flip-Chip Packaging with Stud Bumps | |
WO2014203807A1 (ja) | 半導体装置 | |
WO2014148485A1 (ja) | 半導体装置及びその製造方法 | |
KR101890711B1 (ko) | 범프 버퍼 스프링패드부를 포함하는 전자 소자의 패키지 및 제조 방법 | |
CN107507809B (zh) | 倒装芯片 | |
KR101712459B1 (ko) | 적층 패키지의 제조 방법, 및 이에 의하여 제조된 적층 패키지의 실장 방법 | |
JP5187735B2 (ja) | Bga型半導体部品の実装方法及び部品実装機の吸着ノズル | |
US20170077074A1 (en) | Method for manufacturing semiconductor package | |
TWI628773B (zh) | 半導體結構、半導體元件及其形成方法 | |
KR20090032845A (ko) | 반도체 패키지 및 그의 제조방법 | |
US20060220245A1 (en) | Flip chip package and the fabrication thereof | |
US8059422B2 (en) | Thermally enhanced package structure | |
WO2014142178A1 (ja) | 半導体チップ及び半導体チップを有する半導体装置 | |
KR100833187B1 (ko) | 반도체 패키지의 와이어 본딩방법 | |
JP2015053418A (ja) | 半導体製造装置 | |
JP4972968B2 (ja) | 半導体装置及びその製造方法 | |
TW201007917A (en) | Method for fabricating package structure of stacked chips | |
JP6212011B2 (ja) | 半導体製造装置 | |
KR101300573B1 (ko) | 반도체 패키지 제조용 칩 이송 장치 | |
KR101078742B1 (ko) | 스택 패키지 | |
US10177108B2 (en) | Method of manufacturing electronic component module and electronic component module | |
US20130181343A1 (en) | Multi-chip package and method of manufacturing the same | |
TWI756145B (zh) | 用於半導體封裝的金屬凸塊結構 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20101208 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20111026 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20121114 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20121221 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20130116 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20130116 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20160201 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5187735 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |