JP5171128B2 - 位置測定装置での傾斜誤差算出用の回路装置及び方法 - Google Patents

位置測定装置での傾斜誤差算出用の回路装置及び方法 Download PDF

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Publication number
JP5171128B2
JP5171128B2 JP2007168327A JP2007168327A JP5171128B2 JP 5171128 B2 JP5171128 B2 JP 5171128B2 JP 2007168327 A JP2007168327 A JP 2007168327A JP 2007168327 A JP2007168327 A JP 2007168327A JP 5171128 B2 JP5171128 B2 JP 5171128B2
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Japan
Prior art keywords
signal
error signal
tilt
unit
scanning
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Expired - Fee Related
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JP2007168327A
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Japanese (ja)
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JP2008008903A5 (https=
JP2008008903A (ja
Inventor
ロベルト・ベルンハルト
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Dr Johannes Heidenhain GmbH
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Dr Johannes Heidenhain GmbH
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/22—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring angles or tapers; for testing the alignment of axes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24471—Error correction
    • G01D5/24476—Signal processing

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2007168327A 2006-06-28 2007-06-27 位置測定装置での傾斜誤差算出用の回路装置及び方法 Expired - Fee Related JP5171128B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102006029650.8 2006-06-28
DE102006029650.8A DE102006029650B4 (de) 2006-06-28 2006-06-28 Schaltungsanordung und Verfahren zur Kippfehlerermittlung an einer Positionsmesseinrichtung

Publications (3)

Publication Number Publication Date
JP2008008903A JP2008008903A (ja) 2008-01-17
JP2008008903A5 JP2008008903A5 (https=) 2010-04-02
JP5171128B2 true JP5171128B2 (ja) 2013-03-27

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JP2007168327A Expired - Fee Related JP5171128B2 (ja) 2006-06-28 2007-06-27 位置測定装置での傾斜誤差算出用の回路装置及び方法

Country Status (3)

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US (1) US7748251B2 (https=)
JP (1) JP5171128B2 (https=)
DE (1) DE102006029650B4 (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8698892B2 (en) * 2009-04-03 2014-04-15 Csem Centre Suisse D'electronique Et De Microtechnique Sa - Recherche Et Developpement One-dimension position encoder
JP5968062B2 (ja) * 2012-05-02 2016-08-10 キヤノン株式会社 位置検出エンコーダおよびこれを用いた装置
JP6285633B2 (ja) * 2013-02-07 2018-02-28 株式会社ミツトヨ セパレート式エンコーダ
JP2016109634A (ja) * 2014-12-09 2016-06-20 株式会社安川電機 エンコーダ及びエンコーダ付きモータ
JP7085851B2 (ja) * 2018-02-07 2022-06-17 日本電産サンキョー株式会社 位置検出装置および位置検出方法
DE102021200417B3 (de) * 2021-01-18 2022-04-28 Dr. Johannes Heidenhain Gmbh Längenmesseinrichtung
EP4384778B1 (en) 2021-08-12 2026-04-29 Renishaw PLC Position encoder apparatus

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0424512A (ja) * 1990-05-18 1992-01-28 Ono Sokki Co Ltd エンコーダ
EP0555507B1 (de) * 1992-02-14 1995-01-11 Dr. Johannes Heidenhain GmbH Wegmesseinrichtung
DE10018298B4 (de) * 2000-04-13 2012-04-05 Dr. Johannes Heidenhain Gmbh Verfahren und Vorrichtung zur Schwingungsdetektion bei einer Positionsmeßeinrichtung
DE10130938A1 (de) * 2001-06-27 2003-01-23 Heidenhain Gmbh Dr Johannes Positionsmesseinrichtung und Verfahren zum Betrieb einer Positionsmesseinrichtung
JP2006194720A (ja) * 2005-01-13 2006-07-27 Mitsutoyo Corp セパレート型エンコーダ、及び、その取付方法

Also Published As

Publication number Publication date
DE102006029650B4 (de) 2020-02-20
DE102006029650A1 (de) 2008-01-03
US20080011043A1 (en) 2008-01-17
US7748251B2 (en) 2010-07-06
JP2008008903A (ja) 2008-01-17

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