JP2008008903A5 - - Google Patents

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Publication number
JP2008008903A5
JP2008008903A5 JP2007168327A JP2007168327A JP2008008903A5 JP 2008008903 A5 JP2008008903 A5 JP 2008008903A5 JP 2007168327 A JP2007168327 A JP 2007168327A JP 2007168327 A JP2007168327 A JP 2007168327A JP 2008008903 A5 JP2008008903 A5 JP 2008008903A5
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JP
Japan
Prior art keywords
signal
error signal
tilt
tilt error
unit
Prior art date
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JP2007168327A
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English (en)
Japanese (ja)
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JP5171128B2 (ja
JP2008008903A (ja
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Priority claimed from DE102006029650.8A external-priority patent/DE102006029650B4/de
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Publication of JP2008008903A publication Critical patent/JP2008008903A/ja
Publication of JP2008008903A5 publication Critical patent/JP2008008903A5/ja
Application granted granted Critical
Publication of JP5171128B2 publication Critical patent/JP5171128B2/ja
Expired - Fee Related legal-status Critical Current
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JP2007168327A 2006-06-28 2007-06-27 位置測定装置での傾斜誤差算出用の回路装置及び方法 Expired - Fee Related JP5171128B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102006029650.8 2006-06-28
DE102006029650.8A DE102006029650B4 (de) 2006-06-28 2006-06-28 Schaltungsanordung und Verfahren zur Kippfehlerermittlung an einer Positionsmesseinrichtung

Publications (3)

Publication Number Publication Date
JP2008008903A JP2008008903A (ja) 2008-01-17
JP2008008903A5 true JP2008008903A5 (https=) 2010-04-02
JP5171128B2 JP5171128B2 (ja) 2013-03-27

Family

ID=38776820

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007168327A Expired - Fee Related JP5171128B2 (ja) 2006-06-28 2007-06-27 位置測定装置での傾斜誤差算出用の回路装置及び方法

Country Status (3)

Country Link
US (1) US7748251B2 (https=)
JP (1) JP5171128B2 (https=)
DE (1) DE102006029650B4 (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8698892B2 (en) * 2009-04-03 2014-04-15 Csem Centre Suisse D'electronique Et De Microtechnique Sa - Recherche Et Developpement One-dimension position encoder
JP5968062B2 (ja) * 2012-05-02 2016-08-10 キヤノン株式会社 位置検出エンコーダおよびこれを用いた装置
JP6285633B2 (ja) * 2013-02-07 2018-02-28 株式会社ミツトヨ セパレート式エンコーダ
JP2016109634A (ja) * 2014-12-09 2016-06-20 株式会社安川電機 エンコーダ及びエンコーダ付きモータ
JP7085851B2 (ja) * 2018-02-07 2022-06-17 日本電産サンキョー株式会社 位置検出装置および位置検出方法
DE102021200417B3 (de) * 2021-01-18 2022-04-28 Dr. Johannes Heidenhain Gmbh Längenmesseinrichtung
EP4384778B1 (en) 2021-08-12 2026-04-29 Renishaw PLC Position encoder apparatus

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0424512A (ja) * 1990-05-18 1992-01-28 Ono Sokki Co Ltd エンコーダ
EP0555507B1 (de) * 1992-02-14 1995-01-11 Dr. Johannes Heidenhain GmbH Wegmesseinrichtung
DE10018298B4 (de) * 2000-04-13 2012-04-05 Dr. Johannes Heidenhain Gmbh Verfahren und Vorrichtung zur Schwingungsdetektion bei einer Positionsmeßeinrichtung
DE10130938A1 (de) * 2001-06-27 2003-01-23 Heidenhain Gmbh Dr Johannes Positionsmesseinrichtung und Verfahren zum Betrieb einer Positionsmesseinrichtung
JP2006194720A (ja) * 2005-01-13 2006-07-27 Mitsutoyo Corp セパレート型エンコーダ、及び、その取付方法

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