DE102006029650B4 - Schaltungsanordung und Verfahren zur Kippfehlerermittlung an einer Positionsmesseinrichtung - Google Patents

Schaltungsanordung und Verfahren zur Kippfehlerermittlung an einer Positionsmesseinrichtung Download PDF

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Publication number
DE102006029650B4
DE102006029650B4 DE102006029650.8A DE102006029650A DE102006029650B4 DE 102006029650 B4 DE102006029650 B4 DE 102006029650B4 DE 102006029650 A DE102006029650 A DE 102006029650A DE 102006029650 B4 DE102006029650 B4 DE 102006029650B4
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DE
Germany
Prior art keywords
signal
tilting
error signal
tilt
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE102006029650.8A
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German (de)
English (en)
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DE102006029650A1 (de
Inventor
Dipl.-Ing. Bernhard Robert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
Original Assignee
Dr Johannes Heidenhain GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Priority to DE102006029650.8A priority Critical patent/DE102006029650B4/de
Priority to US11/821,292 priority patent/US7748251B2/en
Priority to JP2007168327A priority patent/JP5171128B2/ja
Publication of DE102006029650A1 publication Critical patent/DE102006029650A1/de
Application granted granted Critical
Publication of DE102006029650B4 publication Critical patent/DE102006029650B4/de
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/22—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring angles or tapers; for testing the alignment of axes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24471—Error correction
    • G01D5/24476—Signal processing

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE102006029650.8A 2006-06-28 2006-06-28 Schaltungsanordung und Verfahren zur Kippfehlerermittlung an einer Positionsmesseinrichtung Expired - Fee Related DE102006029650B4 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DE102006029650.8A DE102006029650B4 (de) 2006-06-28 2006-06-28 Schaltungsanordung und Verfahren zur Kippfehlerermittlung an einer Positionsmesseinrichtung
US11/821,292 US7748251B2 (en) 2006-06-28 2007-06-22 Circuit configuration and method for ascertaining tilt errors in connection with a position-measuring device
JP2007168327A JP5171128B2 (ja) 2006-06-28 2007-06-27 位置測定装置での傾斜誤差算出用の回路装置及び方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102006029650.8A DE102006029650B4 (de) 2006-06-28 2006-06-28 Schaltungsanordung und Verfahren zur Kippfehlerermittlung an einer Positionsmesseinrichtung

Publications (2)

Publication Number Publication Date
DE102006029650A1 DE102006029650A1 (de) 2008-01-03
DE102006029650B4 true DE102006029650B4 (de) 2020-02-20

Family

ID=38776820

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102006029650.8A Expired - Fee Related DE102006029650B4 (de) 2006-06-28 2006-06-28 Schaltungsanordung und Verfahren zur Kippfehlerermittlung an einer Positionsmesseinrichtung

Country Status (3)

Country Link
US (1) US7748251B2 (https=)
JP (1) JP5171128B2 (https=)
DE (1) DE102006029650B4 (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8698892B2 (en) * 2009-04-03 2014-04-15 Csem Centre Suisse D'electronique Et De Microtechnique Sa - Recherche Et Developpement One-dimension position encoder
JP5968062B2 (ja) * 2012-05-02 2016-08-10 キヤノン株式会社 位置検出エンコーダおよびこれを用いた装置
JP6285633B2 (ja) * 2013-02-07 2018-02-28 株式会社ミツトヨ セパレート式エンコーダ
JP2016109634A (ja) * 2014-12-09 2016-06-20 株式会社安川電機 エンコーダ及びエンコーダ付きモータ
JP7085851B2 (ja) * 2018-02-07 2022-06-17 日本電産サンキョー株式会社 位置検出装置および位置検出方法
DE102021200417B3 (de) * 2021-01-18 2022-04-28 Dr. Johannes Heidenhain Gmbh Längenmesseinrichtung
EP4384778B1 (en) 2021-08-12 2026-04-29 Renishaw PLC Position encoder apparatus

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0555507B1 (de) * 1992-02-14 1995-01-11 Dr. Johannes Heidenhain GmbH Wegmesseinrichtung
DE10018298A1 (de) * 2000-04-13 2001-10-25 Heidenhain Gmbh Dr Johannes Verfahren und Vorrichtung zur Schwingungsdetektion bei einer Positionsmeßeinrichtung

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0424512A (ja) * 1990-05-18 1992-01-28 Ono Sokki Co Ltd エンコーダ
DE10130938A1 (de) * 2001-06-27 2003-01-23 Heidenhain Gmbh Dr Johannes Positionsmesseinrichtung und Verfahren zum Betrieb einer Positionsmesseinrichtung
JP2006194720A (ja) * 2005-01-13 2006-07-27 Mitsutoyo Corp セパレート型エンコーダ、及び、その取付方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0555507B1 (de) * 1992-02-14 1995-01-11 Dr. Johannes Heidenhain GmbH Wegmesseinrichtung
DE10018298A1 (de) * 2000-04-13 2001-10-25 Heidenhain Gmbh Dr Johannes Verfahren und Vorrichtung zur Schwingungsdetektion bei einer Positionsmeßeinrichtung

Also Published As

Publication number Publication date
JP5171128B2 (ja) 2013-03-27
DE102006029650A1 (de) 2008-01-03
US20080011043A1 (en) 2008-01-17
US7748251B2 (en) 2010-07-06
JP2008008903A (ja) 2008-01-17

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