JP5158066B2 - 塗布、現像装置 - Google Patents

塗布、現像装置 Download PDF

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Publication number
JP5158066B2
JP5158066B2 JP2009287783A JP2009287783A JP5158066B2 JP 5158066 B2 JP5158066 B2 JP 5158066B2 JP 2009287783 A JP2009287783 A JP 2009287783A JP 2009287783 A JP2009287783 A JP 2009287783A JP 5158066 B2 JP5158066 B2 JP 5158066B2
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Japan
Prior art keywords
wafer
substrate
unit
processing
cooling
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Expired - Fee Related
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JP2009287783A
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English (en)
Japanese (ja)
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JP2010074185A5 (https=
JP2010074185A (ja
Inventor
伸一 林
哲夫 福岡
哲也 小田
弘朗 稲富
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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Publication of JP5158066B2 publication Critical patent/JP5158066B2/ja
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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2009287783A 2009-12-18 2009-12-18 塗布、現像装置 Expired - Fee Related JP5158066B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009287783A JP5158066B2 (ja) 2009-12-18 2009-12-18 塗布、現像装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009287783A JP5158066B2 (ja) 2009-12-18 2009-12-18 塗布、現像装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2005121267A Division JP4535499B2 (ja) 2005-04-19 2005-04-19 加熱装置、塗布、現像装置及び加熱方法

Publications (3)

Publication Number Publication Date
JP2010074185A JP2010074185A (ja) 2010-04-02
JP2010074185A5 JP2010074185A5 (https=) 2011-02-24
JP5158066B2 true JP5158066B2 (ja) 2013-03-06

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ID=42205623

Family Applications (1)

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JP2009287783A Expired - Fee Related JP5158066B2 (ja) 2009-12-18 2009-12-18 塗布、現像装置

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JP (1) JP5158066B2 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6239813B2 (ja) 2012-07-18 2017-11-29 株式会社Ｓｃｒｅｅｎセミコンダクターソリューションズ 基板処理装置および基板処理方法
JP5630526B2 (ja) * 2013-04-08 2014-11-26 東京エレクトロン株式会社 熱処理装置
JP7200638B2 (ja) * 2018-12-05 2023-01-10 東京エレクトロン株式会社 熱処理装置及び熱処理方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3651286B2 (ja) * 1998-11-18 2005-05-25 松下電器産業株式会社 基板のプラズマクリーニング装置
JP2000312463A (ja) * 1999-04-27 2000-11-07 Shinko Electric Co Ltd リニアモータのレール接続構造
JP2004214696A (ja) * 1999-10-19 2004-07-29 Tokyo Electron Ltd 基板処理装置及び基板処理方法
JP2001117064A (ja) * 1999-10-19 2001-04-27 Tokyo Electron Ltd 搬送装置の位置合わせ機構および位置合わせ方法、ならびに基板処理装置
KR100348938B1 (ko) * 1999-12-06 2002-08-14 한국디엔에스 주식회사 포토리소그라피 공정을 위한 반도체 제조장치
JP3793004B2 (ja) * 2000-08-09 2006-07-05 東京エレクトロン株式会社 基板の搬送方法
JP2003285902A (ja) * 2002-03-29 2003-10-07 Murata Mach Ltd 搬送設備
JP2004128249A (ja) * 2002-10-03 2004-04-22 Sendai Nikon:Kk 基板保持搬送方法、基板ホルダ、基板搬送装置、基板保持搬送装置及び露光装置
JP4133208B2 (ja) * 2002-10-22 2008-08-13 東京エレクトロン株式会社 基板処理装置
JP4137711B2 (ja) * 2003-06-16 2008-08-20 東京エレクトロン株式会社 基板処理装置及び基板搬送手段の位置合わせ方法
JP4069035B2 (ja) * 2003-08-12 2008-03-26 東京エレクトロン株式会社 基板の処理システム及び基板の熱処理方法
JP2004235659A (ja) * 2004-03-15 2004-08-19 Tokyo Electron Ltd 基板処理装置用ブロック及び基板処理装置

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Publication number Publication date
JP2010074185A (ja) 2010-04-02

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