JP5147368B2 - エンコーダ - Google Patents
エンコーダ Download PDFInfo
- Publication number
- JP5147368B2 JP5147368B2 JP2007299739A JP2007299739A JP5147368B2 JP 5147368 B2 JP5147368 B2 JP 5147368B2 JP 2007299739 A JP2007299739 A JP 2007299739A JP 2007299739 A JP2007299739 A JP 2007299739A JP 5147368 B2 JP5147368 B2 JP 5147368B2
- Authority
- JP
- Japan
- Prior art keywords
- scanning
- incremental
- scale
- signal
- generating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
- G01D5/2454—Encoders incorporating incremental and absolute signals
- G01D5/2455—Encoders incorporating incremental and absolute signals with incremental and absolute tracks on the same encoder
- G01D5/2457—Incremental encoders having reference marks
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34776—Absolute encoders with analogue or digital scales
- G01D5/34784—Absolute encoders with analogue or digital scales with only analogue scales or both analogue and incremental scales
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102006054780.2 | 2006-11-20 | ||
| DE102006054780 | 2006-11-20 | ||
| DE102007035345A DE102007035345A1 (de) | 2006-11-20 | 2007-07-27 | Positionsmesseinrichtung |
| DE102007035345.8 | 2007-07-27 | ||
| EP07019810.6 | 2007-10-10 | ||
| EP07019810.6A EP1923673B1 (de) | 2006-11-20 | 2007-10-10 | Positionsmesseinrichtung |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008129022A JP2008129022A (ja) | 2008-06-05 |
| JP2008129022A5 JP2008129022A5 (https=) | 2010-12-09 |
| JP5147368B2 true JP5147368B2 (ja) | 2013-02-20 |
Family
ID=39187566
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007299739A Active JP5147368B2 (ja) | 2006-11-20 | 2007-11-19 | エンコーダ |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US7858922B2 (https=) |
| JP (1) | JP5147368B2 (https=) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102005029917A1 (de) * | 2005-06-28 | 2007-01-04 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
| DE102007035345A1 (de) * | 2006-11-20 | 2008-05-21 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
| DE102008027641A1 (de) | 2008-06-06 | 2009-12-10 | Dr. Johannes Heidenhain Gmbh | Positionsmesssystem |
| DE102010029211A1 (de) * | 2010-05-21 | 2011-11-24 | Dr. Johannes Heidenhain Gmbh | Optische Positionsmesseinrichtung |
| DE102010043469A1 (de) * | 2010-11-05 | 2012-05-10 | Dr. Johannes Heidenhain Gmbh | Optische Positionsmesseinrichtung |
| DE102011075286A1 (de) * | 2011-05-05 | 2012-11-08 | Dr. Johannes Heidenhain Gmbh | Optische Positionsmesseinrichtung |
| DE102011076055A1 (de) * | 2011-05-18 | 2012-11-22 | Dr. Johannes Heidenhain Gmbh | Optische Positionsmesseinrichtung |
| JP5779012B2 (ja) | 2011-06-24 | 2015-09-16 | キヤノン株式会社 | 2次元アブソリュートエンコーダ及びそのスケール |
| EP2546612B1 (en) * | 2011-07-13 | 2018-11-14 | CSEM Centre Suisse d'Electronique et de Microtechnique SA - Recherche et Développement | Method for working out the angular position of a rotating element and device for carrying out such a method |
| DE102012204572A1 (de) * | 2012-03-22 | 2013-09-26 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung und Anordnung mit einer derartigen Positionsmesseinrichtung |
| ES2618855T3 (es) * | 2014-10-14 | 2017-06-22 | Dr. Johannes Heidenhain Gmbh | Dispositivo de medición de posición con dispositivo para la compensación de errores por dilatación térmica de una regla graduada |
| JP6437802B2 (ja) * | 2014-11-28 | 2018-12-12 | 株式会社ミツトヨ | 光学式エンコーダ |
| DE102015203188A1 (de) * | 2015-02-23 | 2016-08-25 | Dr. Johannes Heidenhain Gmbh | Optische Positionsmesseinrichtung |
| CN113124760B (zh) * | 2019-12-30 | 2022-08-02 | 广东万濠精密仪器股份有限公司 | 反射式光栅尺 |
| EP4502544B1 (de) * | 2023-07-31 | 2025-11-05 | Dr. Johannes Heidenhain GmbH | Optische positionsmesseinrichtung |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3509102C2 (de) | 1985-03-14 | 1987-01-15 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Meßeinrichtung |
| DE8717718U1 (de) | 1987-08-11 | 1989-09-28 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Inkrementale Längen- oder Winkelmeßeinrichtung |
| DD287774A5 (de) | 1989-09-06 | 1991-03-07 | �@�@�����@���k�� | Inkrementales laengenmesssystem |
| DE19748802B4 (de) * | 1996-11-20 | 2010-09-09 | Dr. Johannes Heidenhain Gmbh | Optische Positionsmeßeinrichtung |
| DE59806597D1 (de) * | 1997-08-07 | 2003-01-23 | Heidenhain Gmbh Dr Johannes | Abtasteinheit für eine optische Positionsmesseinrichtung |
| DE19921309A1 (de) | 1999-05-07 | 2000-11-09 | Heidenhain Gmbh Dr Johannes | Abtasteinheit für eine optische Positionsmeßeinrichtung |
| DE102006042743A1 (de) | 2006-09-12 | 2008-03-27 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
-
2007
- 2007-11-19 US US11/942,413 patent/US7858922B2/en active Active
- 2007-11-19 JP JP2007299739A patent/JP5147368B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US20080067333A1 (en) | 2008-03-20 |
| US7858922B2 (en) | 2010-12-28 |
| JP2008129022A (ja) | 2008-06-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5147368B2 (ja) | エンコーダ | |
| JP5147367B2 (ja) | エンコーダ | |
| JP5079874B2 (ja) | 位置測定装置 | |
| JP5100266B2 (ja) | エンコーダ | |
| JP6026084B2 (ja) | 光学位置測定装置 | |
| JP5710105B2 (ja) | 光学式位置測定装置 | |
| JP5717633B2 (ja) | 光学式位置測定装置 | |
| JP2008129021A5 (https=) | ||
| JP6329456B2 (ja) | 光学式位置測定装置 | |
| JP2008129022A5 (https=) | ||
| JP6908446B2 (ja) | 位置測定装置 | |
| US9068811B2 (en) | Device for determining distance interferometrically | |
| JP4503803B2 (ja) | 位置を測定しかつ案内誤差を算出する装置 | |
| US7404259B2 (en) | Optical position measuring instrument | |
| JP6875923B2 (ja) | スケール装置および二軸変位検出装置 | |
| JP7572834B2 (ja) | 光学的な位置測定装置 | |
| US7705289B2 (en) | Scanning unit for an optical position-measuring device | |
| JP2015087391A (ja) | 位置計測装置 | |
| JP6289609B2 (ja) | 干渉式間隔測定装置 | |
| JP2016130728A (ja) | 光学式位置測定装置 | |
| WO2007074752A1 (ja) | チルトセンサ及びエンコーダ | |
| JP2020159991A (ja) | 光電式エンコーダおよび光電式エンコーダにおける演算方法 | |
| CN119437048A (zh) | 光学位置测量器 | |
| JP2016166874A (ja) | 光学式角度測定装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20100517 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20101022 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20101022 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120529 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120828 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20121030 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20121127 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 5147368 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20151207 Year of fee payment: 3 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |