JP5140641B2 - 基板処理方法及び基板処理装置 - Google Patents

基板処理方法及び基板処理装置 Download PDF

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Publication number
JP5140641B2
JP5140641B2 JP2009153289A JP2009153289A JP5140641B2 JP 5140641 B2 JP5140641 B2 JP 5140641B2 JP 2009153289 A JP2009153289 A JP 2009153289A JP 2009153289 A JP2009153289 A JP 2009153289A JP 5140641 B2 JP5140641 B2 JP 5140641B2
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Japan
Prior art keywords
substrate
liquid
gas
nozzle
organic solvent
Prior art date
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Expired - Fee Related
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JP2009153289A
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English (en)
Japanese (ja)
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JP2011009599A5 (enExample
JP2011009599A (ja
Inventor
新明 王
和雄 山内
章 小寺
作 鈴木
康 當間
孝行 斉藤
浩國 檜山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
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Ebara Corp
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Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP2009153289A priority Critical patent/JP5140641B2/ja
Priority to US12/821,456 priority patent/US20100325913A1/en
Publication of JP2011009599A publication Critical patent/JP2011009599A/ja
Publication of JP2011009599A5 publication Critical patent/JP2011009599A5/ja
Application granted granted Critical
Publication of JP5140641B2 publication Critical patent/JP5140641B2/ja
Expired - Fee Related legal-status Critical Current
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B5/00—Drying solid materials or objects by processes not involving the application of heat
    • F26B5/12—Drying solid materials or objects by processes not involving the application of heat by suction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
    • F26B21/004—Nozzle assemblies; Air knives; Air distributors; Blow boxes
    • F26B21/50—
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H10P72/0406—

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Molecular Biology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning In General (AREA)
JP2009153289A 2009-06-29 2009-06-29 基板処理方法及び基板処理装置 Expired - Fee Related JP5140641B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2009153289A JP5140641B2 (ja) 2009-06-29 2009-06-29 基板処理方法及び基板処理装置
US12/821,456 US20100325913A1 (en) 2009-06-29 2010-06-23 Substrate processing method and substrate processing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009153289A JP5140641B2 (ja) 2009-06-29 2009-06-29 基板処理方法及び基板処理装置

Publications (3)

Publication Number Publication Date
JP2011009599A JP2011009599A (ja) 2011-01-13
JP2011009599A5 JP2011009599A5 (enExample) 2011-06-30
JP5140641B2 true JP5140641B2 (ja) 2013-02-06

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ID=43379175

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JP2009153289A Expired - Fee Related JP5140641B2 (ja) 2009-06-29 2009-06-29 基板処理方法及び基板処理装置

Country Status (2)

Country Link
US (1) US20100325913A1 (enExample)
JP (1) JP5140641B2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3119946B2 (ja) 1991-08-19 2000-12-25 アメリカン スタンダード インコーポレイテッド スクリュー・コンプレッサー用組み合わせリフト・ピストン／軸方向ポート・アンローダー装置

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101309055B1 (ko) * 2006-05-18 2013-09-16 후지필름 가부시키가이샤 피건조물의 건조 방법 및 장치
JP4884180B2 (ja) * 2006-11-21 2012-02-29 東京エレクトロン株式会社 基板処理装置および基板処理方法
JP5109376B2 (ja) * 2007-01-22 2012-12-26 東京エレクトロン株式会社 加熱装置、加熱方法及び記憶媒体
US20100307022A1 (en) * 2007-06-26 2010-12-09 Gisulfo Baccini Drying apparatus and method for silicon-based electronic circuits
JP5852898B2 (ja) * 2011-03-28 2016-02-03 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法
US8869422B2 (en) * 2012-04-27 2014-10-28 Applied Materials, Inc. Methods and apparatus for marangoni substrate drying using a vapor knife manifold
JP6133120B2 (ja) 2012-05-17 2017-05-24 株式会社荏原製作所 基板洗浄装置
JP6302700B2 (ja) * 2013-03-18 2018-03-28 芝浦メカトロニクス株式会社 基板処理装置及び基板処理方法
JP6351993B2 (ja) * 2013-03-18 2018-07-04 芝浦メカトロニクス株式会社 基板処理装置及び基板処理方法
JP6283911B2 (ja) * 2013-06-25 2018-02-28 パナソニックＩｐマネジメント株式会社 ワイプ装置、インクジェット装置、および、ワイプ方法
JP6444698B2 (ja) * 2014-11-17 2018-12-26 東芝メモリ株式会社 基板処理装置および基板処理方法
US9859135B2 (en) 2014-12-19 2018-01-02 Applied Materials, Inc. Substrate rinsing systems and methods
US20160178279A1 (en) * 2014-12-19 2016-06-23 Applied Materials, Inc. Substrate edge residue removal systems, apparatus, and methods
SG10201601095UA (en) * 2015-02-18 2016-09-29 Ebara Corp Substrate cleaning apparatus, substrate cleaning method, and substrate processing apparatus
JP6367763B2 (ja) * 2015-06-22 2018-08-01 株式会社荏原製作所 ウェーハ乾燥装置およびウェーハ乾燥方法
JP6811619B2 (ja) * 2017-01-12 2021-01-13 株式会社Ｓｃｒｅｅｎホールディングス 基板処理方法および基板処理装置
TWI789842B (zh) * 2020-09-11 2023-01-11 日商芝浦機械電子裝置股份有限公司 基板處理裝置
US11728185B2 (en) 2021-01-05 2023-08-15 Applied Materials, Inc. Steam-assisted single substrate cleaning process and apparatus
US20250353042A1 (en) * 2024-05-17 2025-11-20 Applied Materials, Inc. Atomization of cleaning liquid dispense in cleaner modules

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04114778A (ja) * 1990-09-05 1992-04-15 Murata Mfg Co Ltd 電子部品の乾燥方法
US6491764B2 (en) * 1997-09-24 2002-12-10 Interuniversitair Microelektronics Centrum (Imec) Method and apparatus for removing a liquid from a surface of a rotating substrate
US6328814B1 (en) * 1999-03-26 2001-12-11 Applied Materials, Inc. Apparatus for cleaning and drying substrates
JP3538353B2 (ja) * 1999-12-15 2004-06-14 シャープ株式会社 洗浄液吸引装置
US6709699B2 (en) * 2000-09-27 2004-03-23 Kabushiki Kaisha Toshiba Film-forming method, film-forming apparatus and liquid film drying apparatus
JP4114188B2 (ja) * 2001-06-12 2008-07-09 アクリオン テクノロジーズ， インコーポレイテッド メガソニック洗浄乾燥システム
KR20080095310A (ko) * 2001-11-02 2008-10-28 어플라이드 머티어리얼스, 인코포레이티드 미세 전자 소자의 세정 방법
US7389783B2 (en) * 2002-09-30 2008-06-24 Lam Research Corporation Proximity meniscus manifold
US7240679B2 (en) * 2002-09-30 2007-07-10 Lam Research Corporation System for substrate processing with meniscus, vacuum, IPA vapor, drying manifold
US6926590B1 (en) * 2004-06-25 2005-08-09 Taiwan Semiconductor Manufacturing Co., Ltd. Method of improving device performance
JPWO2006038472A1 (ja) * 2004-10-06 2008-05-15 株式会社荏原製作所 基板処理装置及び基板処理方法
JP4527660B2 (ja) * 2005-06-23 2010-08-18 東京エレクトロン株式会社 基板処理方法及び基板処理装置
JP2007059416A (ja) * 2005-08-22 2007-03-08 Dainippon Screen Mfg Co Ltd 基板処理装置
JP4734063B2 (ja) * 2005-08-30 2011-07-27 東京エレクトロン株式会社 基板洗浄装置及び基板洗浄方法。
JP4763563B2 (ja) * 2006-09-20 2011-08-31 大日本スクリーン製造株式会社 基板処理方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3119946B2 (ja) 1991-08-19 2000-12-25 アメリカン スタンダード インコーポレイテッド スクリュー・コンプレッサー用組み合わせリフト・ピストン／軸方向ポート・アンローダー装置

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US20100325913A1 (en) 2010-12-30
JP2011009599A (ja) 2011-01-13

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