JP5133224B2 - 真空ポンプユニット - Google Patents

真空ポンプユニット Download PDF

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Publication number
JP5133224B2
JP5133224B2 JP2008301737A JP2008301737A JP5133224B2 JP 5133224 B2 JP5133224 B2 JP 5133224B2 JP 2008301737 A JP2008301737 A JP 2008301737A JP 2008301737 A JP2008301737 A JP 2008301737A JP 5133224 B2 JP5133224 B2 JP 5133224B2
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JP
Japan
Prior art keywords
pump
vacuum
main pump
vacuum pump
pump unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2008301737A
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English (en)
Japanese (ja)
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JP2010127157A (ja
JP2010127157A5 (enExample
Inventor
智 柏原
恵弘 新村
信一 関口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
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Ebara Corp
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Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP2008301737A priority Critical patent/JP5133224B2/ja
Priority to PCT/JP2009/070072 priority patent/WO2010061939A1/ja
Publication of JP2010127157A publication Critical patent/JP2010127157A/ja
Publication of JP2010127157A5 publication Critical patent/JP2010127157A5/ja
Application granted granted Critical
Publication of JP5133224B2 publication Critical patent/JP5133224B2/ja
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JP2008301737A 2008-11-25 2008-11-26 真空ポンプユニット Active JP5133224B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2008301737A JP5133224B2 (ja) 2008-11-26 2008-11-26 真空ポンプユニット
PCT/JP2009/070072 WO2010061939A1 (ja) 2008-11-25 2009-11-20 ドライ真空ポンプユニット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008301737A JP5133224B2 (ja) 2008-11-26 2008-11-26 真空ポンプユニット

Publications (3)

Publication Number Publication Date
JP2010127157A JP2010127157A (ja) 2010-06-10
JP2010127157A5 JP2010127157A5 (enExample) 2011-01-06
JP5133224B2 true JP5133224B2 (ja) 2013-01-30

Family

ID=42327726

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008301737A Active JP5133224B2 (ja) 2008-11-25 2008-11-26 真空ポンプユニット

Country Status (1)

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JP (1) JP5133224B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5823808B2 (ja) * 2011-10-11 2015-11-25 株式会社荏原製作所 真空ポンプ及び真空ポンプユニット
JP6240229B2 (ja) * 2015-02-25 2017-11-29 株式会社荏原製作所 真空ポンプ

Also Published As

Publication number Publication date
JP2010127157A (ja) 2010-06-10

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